KR100609632B1 - Ceramic container of reactive materials and method for manufacturing of it - Google Patents

Abstract

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic carrier used for storing and transporting a reactive organic material used in a process such as a vacuum deposition process or a surface treatment process, and a method of manufacturing the same.

The ceramic carrier according to the present invention is characterized in that the upper and lower circumferentially formed annular edges protruding in the upper and lower circumference of the cylindrical body, the manufacturing method is alumina (Al ₂ O ₃ ), titania (TiO ₂ ), A main material mixing step of adding and mixing 1 to 10 Wt% of a sintering aid to 90 to 99 Wt% of a ceramic material selected from zirconia (ZnO ₂ ) and crystalline carbon; 70 to 90 parts by weight of distilled water, 1 to 3 parts by weight of dispersant, 1 to 3 parts by weight of lubricating lubricant and 2 to 5 parts by weight of binder are added to 100 parts by weight of the main material made in the main material mixing step. Granulating step of forming; Forming the pressure-molded granulated powder; And a sintering step of sintering the molded body formed in the forming step at a temperature of 900 to 1400 ° C. to form a ceramic carrier. According to such a manufacturing method, it is possible to prepare a ceramic carrier which can contain the reactive organic material through rapid impregnation without loss and does not cause the loss of the reactive organic material during the process, and the ceramic carrier thus prepared is subjected to vacuum deposition process or surface treatment. In the case of using a reactive organic material transport means in the process, it is possible to form a coating having the desired physical properties without contamination of the reactants on the surface of the deposition target, and minimize the loss of reactants generated during the process.

Ceramic, carrier, reactive, organic, impregnated, porous, vacuum evaporation, surface treatment

Description

CERAMIC CONTAINER OF REACTIVE MATERIALS AND METHOD FOR MANUFACTURING OF IT             

1 is a front cross-sectional view of a conventional ceramic carrier.

Figure 2 is a front sectional view of the ceramic carrier according to an embodiment of the present invention.

3 is a perspective view of a ceramic carrier according to an embodiment of the present invention.

<Description of Symbols for Major Parts of Drawings>

1: ceramic carrier 10: body

11: border 3: support

M: Reactive Organics

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic carrier used for storing and transporting reactive organic materials used in processes such as vacuum deposition or surface treatment, and to a method of manufacturing the same. The present invention relates to a ceramic carrier and a method for producing the same, which can contain the impregnated solution and do not drain out of the carrier again.

Carriers used for storing and transporting reactive organic materials used in processes such as vacuum deposition or surface treatment are very important in terms of efficiency of mass transfer and efficiency of treatment. For example, when the reactive organic matter contained in the carrier participates in the chemical reaction and proceeds with the chemical reaction, the reaction efficiency is maximized when the reactive organic material is dispersed on the surface of the solid carrier rather than in the bulk. In addition, the carrier should be chemically inert when the activity of reactive organics is high.

Suitable for this use are ceramic sintered bodies. Ceramic sinters can contain impregnated reactive organics in the pores present in them (WH Kohl, Ceramics, Chapter 2, Handbook of Materials and Techniques for Vacuum Devices, Reinhold, 1967), especially high cost coatings. It is widely used in vacuum deposition process for forming thin films by depositing on optical instruments such as wafers or lenses [NBBrennan, T.Pilkington, NMSamin, and A.Matthews, A Pellet Feeder for Pulsed Evapolation, Vacuum, vol. 34 , p805, 1983, [KA Taylor and EGFerrari, Design of Materiallization Equipment for Web Coating, Thin Solid Films, Vol. 109, p295, 1983], F. Casey, Recent Advances in Source Design in Resistive Evaporation for Web Coaters, in Society of Vacuum Coaters, 34th Ann.Tech. Conf. Proc., P 124, 1991].

However, conventional ceramic carriers are made by simply sintering ceramics, which makes it difficult to control the porosity. When sintering at a high temperature for a long time increases the mechanical strength of the carrier itself, but it is not easy to charge by impregnating reactive organic materials. There is a problem that productivity is not high because it is necessary. In addition, when the charging time is long, the reactive organic material is exposed to moisture and oxygen in the air for a long time, so in order to prevent deformation of the material due to oxidation of the reactive organic material, a separate facility for controlling the inert atmosphere during the impregnation may be required. .

Thus, a method of preparing a ceramic carrier having a relatively high porosity by lowering the sintering temperature so that the impregnation is easily and quickly has been attempted. In this case, however, it is easy to impregnate the reactive organic matter, but the solution impregnated with the solution oozes out and is buried in a support such as a dish in which the carrier was contained (see symbol 3 in FIG. 1). A problem occurred. Due to this problem, in the case of using a ceramic carrier having a high porosity, the impregnation of the liquid by placing the ceramic carrier in a metal crucible has been attempted, but in this case, the loss of the reactive organic solution can be suppressed, but the metal crucible is caused by the reactive organic material emanated from the carrier. There was a problem in that the surface is corroded to lose the inertness to the container of the reactive organic matter, and the material generated on the surface of the crucible due to corrosion is vaporized with the reactive organic material of the ceramic carrier during vacuum deposition to contaminate the vacuum deposition film.

The present invention has been made in order to solve the problems of the conventional ceramic carrier as described above, it is possible to contain the reactive organic materials used in the vacuum deposition process or the surface treatment process through a quick impregnation without loss, as well as to store for a long time stable It is an object of the present invention to provide a porous ceramic carrier and a method of manufacturing the same, by which the impregnated solution oozed out of the carrier does not adhere to any part other than the carrier so as not to cause a loss of reactive organic matter.

In the method of preparing a ceramic carrier according to the present invention, a sintering aid is added to 90 to 99 Wt% of a ceramic material selected from alumina (Al ₂ O ₃ ), titania (TiO ₂ ), zirconia (ZnO ₂ ), and crystalline carbon. Main material mixing step of mixing by mixing; 70 to 90 parts by weight of distilled water, 1 to 3 parts by weight of dispersant, 1 to 3 parts by weight of lubricating lubricant and 2 to 5 parts by weight of binder are added to 100 parts by weight of the main material made in the main material mixing step. Granulating step of forming; Forming the pressure-molded granulated powder; And a sintering step of sintering the molded body formed in the forming step at a temperature of 900 to 1400 ° C. to form a ceramic carrier.

In the above manufacturing method, the sintering aid is preferably made of a mixture of two or more materials selected from titania (TiO ₂ ), silicon dioxide (SiO ₂ ), calcium oxide (CaO), magnesium oxide (MgO).

In the granulation step, 0.1 to 7 parts by weight of the foaming agent may be further added.

The foaming agent may be selected from 2 to 7 parts by weight of calcium carbonate (CaCO ₃ ), 0.01 to 0.3 parts by weight of crystalline carbon, or 2 to 7 parts by weight of calcium carbonate (CaCO ₃ ) and 0.01 to 0.3 parts by weight of crystalline carbon. Can be used as

And as said binder, PVA 1-10 weight part is preferable.

On the other hand, the ceramic carrier according to the present invention is manufactured according to the manufacturing method as described above, it is preferable that the upper and lower circumferential annular edge protruding in the upper and lower circumference of the cylindrical body, respectively.

Hereinafter, a ceramic carrier according to the present invention and a manufacturing method thereof will be described in more detail.

In general, vacuum deposition is a process for forming a gaseous substance (precursor or precursor) into a solid film on a substrate through a chemical reaction. Such a vacuum deposition process is usually performed by a reaction supply system, a deposition reaction system, ③ Three types of system are used, including emission control system. The ceramic carrier according to the present invention is used as a reactant vehicle in the reactant supply system.

A preferred reactant supply system should (1) be able to precisely control the amount of each reactant to achieve the desired coating, (2) minimize contamination of the gaseous reactants supplied, and (3) reactants are toxic or mostly Due to the high cost, it is necessary to minimize the loss of reactants in the process. In the case of a reactant supply system, a reactant is usually carried by carrier gas. Depending on the state of the reactant carried by the carrier gas, a method of directly supplying a gaseous reactant or a solid reactant into powder and a liquid reactant It is classified into the method of supplying by foaming, and the method of supplying by vaporizing a solid phase reactant first.

The ceramic carrier according to the present invention is used as a container containing a solid reactant to be vaporized in a reactant supply system in which a solid reactant is vaporized and then supplied as a carrier gas, and in this manner, the solid reactant is added to a suitable volatile solvent. It can be dissolved in a solution phase, impregnated in the ceramic carrier, and volatile solvent to remove it so as to be contained in the ceramic carrier.

The present invention provides a ceramic carrier and a ceramic carrier which are required to meet the above three requirements: (1) precise control of the amount of each reactant, (2) minimization of gaseous reactant contamination, and (3) minimization of reactant losses. It is to propose a manufacturing method.

In the case of the reactant supply system used in the vacuum deposition process, first, in order to obtain a coating of desired physical properties such as the thickness of the coating film, the process of impregnating the reactant with the carrier must be precisely controlled.

To this end, the ceramic carrier must be quantitatively impregnated with each reactant. The general ceramic carrier used as a container for the reactants to be deposited in the vacuum deposition process has a very small and limited space having a cylindrical shape of about 1 cm in diameter and less than 1 cm in height. In order to contain the desired amount of the reactant in the ceramic carrier under such limited conditions, pores must be present in the ceramic carrier and porosity must be controlled for this purpose. The pores in the ceramic carrier formed through the sintering process cannot artificially increase only the porosity of a specific local portion, and moreover, the porosity of a specific portion can be uniformly increased by a simple method such as a mechanical method such as pressing during the molding of the carrier. There is no number. Accordingly, in the present invention, the porosity of the ceramic carrier is controlled by sintering by adding an appropriate bubble-forming agent and a binder when preparing the ceramic carrier. In this case, the pores must be open pores, and for this purpose, a bubble aid that can generate bubbles even at a temperature close to the sintering temperature should be added. In addition, the binder may also be removed during the sintering process to form pores, so the amount should be controlled together. In the present invention, the foaming aid is calcium carbonate (CaCO ₃ ) or carbon (C) is used, but the type is not limited as a binder, but PVA is usually suitable. The temperature of the sintering process of the ceramic carrier must also be controlled.

Calcium carbonate (CaCO ₃ ) and crystalline carbon used as the foaming agent may be used respectively or may be used simultaneously. When only calcium carbonate is used separately, 2% to 7% of the total sintered weight is added. In this case, the sintering temperature is determined in the range of 900 ~ 1400 ℃. When the amount of calcium carbonate is less than 2%, calcium carbonate merely functions as a sintering aid and has a weak bubble formation role, so that pore formation is not easy. Since the mechanical strength is low and must be sintered at a high temperature of 1400 ° C. or higher, energy consumption is disadvantageous.

When only carbon is used as the bubble former, amorphous carbon has no effect on bubble formation since bubbles are first formed by oxidation before reaching sintering temperature. Therefore, it is preferable to use crystalline carbon which can be oxidized at a portion near the sintering temperature, and the content thereof is appropriately 0.05 to 0.3% based on the total weight when only crystalline carbon is used. When the crystalline carbon of 0.05% or less is used, the pore formation efficiency is low, and when 0.3% or more is added, excessive bubbles are formed and the sintering temperature is too high.

The binder also functions as a foaming agent when a certain amount is used, but all of the usual binders can be used, but PVA is most suitable. In the case of PVA, 3 to 10% of the total weight of the sintered body can be obtained to increase the pore. If the addition is less than 3%, since the function of the binder is limited, the efficiency of pore formation is lowered. If the addition is more than 10%, pore formation is easy, but the mechanical strength of the sintered ceramic carrier is lowered.

In the case of ceramic carriers prepared by sintering ceramics under the above-mentioned conditions, a sufficient capacity of the reactants can be impregnated even in a limited volume, and sufficient pores can be easily and quickly impregnated with the reactants in solution.

Secondly, the reactant supply system should be able to deposit vapor phase reactants onto the substrate without contamination.

For this purpose, the carrier should not be chemically reactive with the reactants and should not contain any substances such as moisture and oxygen that can affect the reactants during impregnation. Therefore, the basic material of the carrier is important, and for this purpose, it must be ceramic which is chemically stable and stable under high energy. The ceramic may be selected according to the kind of reactants. In the present invention, chemically or thermally stable alumina (Al ₂ O ₃ ), titania (TiO ₂ ), zirconia (ZrO ₂ ) or crystalline carbon and the like have been found to be suitable. Ceramic carriers made from these materials are chemically and thermally stable to block contamination that may be caused by reactants and chemical reactivity.

On the other hand, contamination of the reactants may occur during the impregnation of the liquid reactants even when the ceramic carrier is an inert material, especially when the activity of the reactants is high. For example, when there are not enough pores in the ceramic carrier during impregnating the reactant, the impregnation rate is low and takes a long time to impregnate the reactant. Thus, the ceramic carrier can prevent reactant contamination by inhibiting contact of moisture, oxygen or other impurities in the air with rapid impregnation of the liquid reactant when it has sufficient pores. Ensuring sufficient pores in the ceramic carrier in the present invention is possible by adding a foaming aid, a binder and the like in an appropriate ratio in the ceramic carrier manufacturing process as described above.

Third, the reactant supply system used in the vacuum deposition process should be able to minimize the suppression and loss of reactants.

 Since the release and loss of the reactant after the carrier containing the reactant is charged into the vacuum deposition apparatus is a problem of the vacuum deposition apparatus itself, the present invention is a loss due to the release or loss of the reactant during the impregnation of the reactant into the ceramic carrier. To minimize this. Ceramic carriers have high chemical stability due to the properties of the materials themselves, but they do not have many pores because they are sintered bodies. Accordingly, in the present invention, the ceramic carrier is solved by controlling the porosity in the ceramic carrier by adding an appropriate foaming aid and a binder, followed by sintering. However, when preparing a ceramic carrier, adding bubble aids and binders and sintering at an appropriate sintering temperature can secure sufficient pores so that the loading of the reactants and the impregnation of the solution phase can be made easily and quickly. This easy leaking out was inevitable. That is, when the ceramic carrier is in the usual simple cylindrical shape, such as the conventional ceramic carrier 2 shown in Fig. 1, the entire bottom thereof comes into contact with another object or material on which the ceramic carrier is placed to impregnate the liquid reactant. There was a problem that a considerable amount of the reactant oozed out by the tension and was lost. Although this may lead to a loss of the reactants, it is difficult to maintain the quantitative amount of the reactants charged on the ceramic carrier, and as a result, the reproducibility of the characteristics such as the thickness of the film formed on the substrate during the vacuum deposition process is reduced.

In the present invention, in order to solve the above problems, grooves are formed on the lower part of the body of the cylindrical ceramic carrier as shown in FIGS. 2 and 3.

The upper groove of the ceramic carrier is provided with an excess of solution that is faster than the impregnation rate by suppressing the flow of a certain amount of liquid reactant from the dispense to the outside of the ceramic carrier during the impregnation of the liquid reactant using the dispense. In this case, it is possible to secure the time necessary for impregnating the reactants.

The lower groove is configured for the following purposes. As shown in FIG. 1, when the ceramic carrier is a simple cylindrical body, the reactant in the solution phase impregnated by contacting the surface of the support 3 placed thereon for the impregnation has a surface tension of the contact surface of the ceramic carrier with the support 3. Easily oozed out through space. Thus, as shown in Figures 2 and 3 to form a groove in the lower portion to minimize the contact area to the support (3) can eliminate the micro-space between the ceramic carrier and the support (3) that the reactant can bleed out In addition, since droplets are formed on the lower portion of the ceramic carrier by surface tension, even if the impregnating solution bleeds out, it is possible to minimize the loss of the reactants due to wet the support (3). The solid reactants contained in the droplets remain in the ceramic carrier when the solvent is volatilized away. In addition, in the ceramic carrier of such a shape, the annular portions formed above and below are thinner than other portions, so that the thermal conductivity during sintering is easier, so that the sinterability is higher than the body, and the porosity is relatively low, so that the reactive solution is soaked through the annular edge of the bottom. By more suppressing the emergence phenomenon, droplets can be easily formed on the bottom surface of the annular edge.

The following are examples of the ceramic carrier and its manufacturing method according to the present invention as described above.

<Example 1>

Alumina (Al ₂ O ₃ ) with a purity of 99.9% or more and a particle size of -325 mesh or less is used as a ceramic raw material, and as a sintering aid, titania (TiO ₂ ), silicon dioxide (SiO ₂ ), and calcium oxide (CaO) are used. ), Magnesium oxide (MgO) was added, and the composition of the whole mixture was 95 Wt% of alumina (Al ₂ O ₃ ), 1 Wt% of titania (TiO ₂ ), ₂ Wt% of silicon dioxide (SiO ₂ ), 1 Wt% of calcium oxide (CaO), Magnesium oxide (MgO) is mixed to 1 Wt% (main material mixing step).

Subsequently, 80 parts by weight of distilled water, 2 parts by weight of a dispersant (Sanloop Co., Ltd. 5468), and a release lubricant (acid loop) were used as a solvent for forming the particles with respect to 100 parts by weight of the main material using a spray dryer. 1.2 parts by weight was added, and 3 parts by weight of PVA as a binder and 1 part by weight, 3 parts by weight, 5 parts by weight, and 8 parts by weight of calcium carbonate (CaCO ₃ ) as the bubble-forming agent were added to each other, followed by granulation. (Assembly stage).

The granulated raw mixed powder is molded into the shapes shown in FIGS. 2 and 3 for each amount of calcium carbonate (CaCO ₃ ) added (molding step).

The molded bodies were equally press-molded at a pressure of 1 kg / cm ² and then sintered at 1200 ° C. to complete the ceramic carriers (sintering step).

These sintered ceramic carriers were used to impregnate 250 μl of a solution in which 20% of siloxane fluoride, one of the abrasion resistance and water repellent coatings of the spectacle lens, was impregnated, and then impregnated with a carrier that has been impregnated. The lens was subjected to vacuum deposition (deposition time using an e-beam under a pressure of 10 ^-4 to 10 ^-5 torr, deposition time 4 minutes). In addition, by measuring the contact angle, which is one of the methods for confirming the performance of the thin film according to the amount of impregnation with the deposited lens, the functional state of the reactant carrier used was investigated, and the results indicate the impregnation phenomenon and vacuum deposition result of the ceramic carrier according to each example. Table 1 shows.

<Example 2>

Alumina (Al ₂ O ₃ ) with a purity of 99.9% or more and a particle size of -325 mesh or less is used as a ceramic raw material, and as a sintering aid, titania (TiO ₂ ), silicon dioxide (SiO ₂ ), and calcium oxide (CaO) are used. ), Magnesium oxide (MgO) was added, and the composition of the whole mixture was 95 Wt% of alumina (Al ₂ O ₃ ), 1 Wt% of titania (TiO ₂ ), ₂ Wt% of silicon dioxide (SiO ₂ ), 1 Wt% of calcium oxide (CaO), Magnesium oxide (MgO) is mixed to 1 Wt% (main material mixing step).

Subsequently, 80 parts by weight of distilled water, 2 parts by weight of a dispersant (Sanloop Co., Ltd. 5468), and a release lubricant (acid loop) were used as a solvent for forming the particles with respect to 100 parts by weight of the main material using a spray dryer. 1.2 parts by weight were added, and graphite (PVA) 3 parts by weight and crystalline carbon (foaming agent) were added to 0.02 parts by weight, 0.05 parts by weight, 0.05 parts by weight, and 0.35 parts by weight, respectively, followed by granulation. (Assembly stage).

Next, the granulated raw material mixed powder is molded into the shapes shown in FIGS. 2 and 3 for each crystalline carbon addition amount (molding step).

Finally, the molded bodies are equally pressurized to a pressure of 1 kg / cm ² and then sintered at 1200 ° C. to complete the ceramic carriers (sintering step).

Using these sintered ceramic carriers, impregnated with 250 µl of a solution in which 20% of siloxane fluoride, which is one of the abrasion resistance and water repellent coatings for the spectacle lens, was impregnated, and then, in a vacuum evaporator, using a carrier which was impregnated. The lens was subjected to vacuum deposition (deposition time using an e-beam under a pressure of 10 ^-4 to 10 ^-5 torr, deposition time 4 minutes). In addition, by measuring the contact angle, which is one of the methods for confirming the performance of the thin film according to the amount of impregnation with the deposited lens, the functional state of the reactant carrier used was investigated, and the results indicate the impregnation phenomenon and vacuum deposition result of the ceramic carrier according to each embodiment. Table 1 shows.

<Example 3>

Alumina (Al ₂ O ₃ ) with a purity of 99.9% or more and a particle size of -325 mesh or less is used as a ceramic raw material, and as a sintering aid, titania (TiO ₂ ), silicon dioxide (SiO ₂ ), and calcium oxide (CaO) are used. ), Magnesium oxide (MgO), etc., and the total composition is 95 Wt% of alumina (Al ₂ O ₃ ), 1 Wt% of titania (TiO ₂ ), ₂ Wt% of silicon dioxide (SiO ₂ ), and 1 Wt% of calcium oxide (CaO) Magnesium oxide (MgO) is mixed to 1 Wt% (main material mixing step).

Subsequently, 80 parts by weight of distilled water, 2 parts by weight of a dispersant (Sanloop Co., Ltd. 5468), and a release lubricant (acid loop) were used as a solvent for forming the particles with respect to 100 parts by weight of the main material using a spray dryer. 1.2 parts by weight are added, and 3 parts by weight, 5 parts by weight, 7 parts by weight, and 10 parts by weight of PVA are respectively added and then granulated (assembling step).

Next, the granulated raw material mixed powder is molded into the shapes shown in FIGS. 2 and 3 for each addition amount of the binder PVA (molding step).

Finally, the molded bodies are equally press-molded at a pressure of 1 kg / cm ² and then sintered at 1200 ° C. to complete the ceramic carriers (sintering step).

Using these sintered ceramic carriers, impregnated with 250 µl of a solution in which 20% of siloxane fluoride, which is one of the abrasion resistance and water repellent coatings for the spectacle lens, was impregnated, and then, in a vacuum evaporator, using a carrier that has been impregnated. The lens was subjected to vacuum deposition (deposition time using an e-beam under a pressure of 10 ^-4 to 10 ^-5 torr, deposition time 4 minutes). In addition, by measuring the contact angle, which is one of the methods for confirming the performance of the thin film according to the amount of impregnation with the deposited lens, the functional state of the reactant carrier used was investigated, and the results indicate the impregnation phenomenon and vacuum deposition result of the ceramic carrier according to each embodiment. Table 1 shows.

<Example 4>

Alumina (Al ₂ O ₃ ) with a purity of 99.9% or more and a particle size of -325 mesh or less is used as a ceramic raw material, and as a sintering aid, titania (TiO ₂ ), silicon dioxide (SiO ₂ ), and calcium oxide (CaO) are used. ), Magnesium oxide (MgO) was added, and the composition of the whole mixture was 95 Wt% of alumina (Al ₂ O ₃ ), 1 Wt% of titania (TiO ₂ ), ₂ Wt% of silicon dioxide (SiO ₂ ), 1 Wt% of calcium oxide (CaO), Magnesium oxide (MgO) is mixed to 1 Wt% (main material mixing step).

Subsequently, 80 parts by weight of distilled water, 2 parts by weight of a dispersant (Sanloop Co., Ltd. 5468), and a release lubricant (acid loop) were used as a solvent for forming the particles with respect to 100 parts by weight of the main material using a spray dryer. 1.2 parts by weight is added, 3 parts by weight of PVA as a binder, 2 parts by weight of calcium carbonate (CaCO ₃ ) as a foaming agent and 0.05 parts by weight of crystalline carbon are added, followed by granulation (assembly step).

Next, the granulated raw material mixed powder is molded into the shapes shown in FIGS. 2 and 3 (molding step).

Finally, the molded body is press-molded at a pressure of 1 kg / cm ² and then sintered at 1200 ° C. to complete the ceramic carriers (sintering step).

Using these sintered ceramic carriers, impregnated with 250 µl of a solution in which 20% of siloxane fluoride, which is one of the abrasion resistance and water repellent coatings for the spectacle lens, was impregnated, and then, in a vacuum evaporator, using a carrier that has been impregnated. The lens was subjected to vacuum deposition (deposition time using an e-beam under a pressure of 10 ^-4 to 10 ^-5 torr, deposition time 4 minutes). In addition, by measuring the contact angle, which is one of the methods for confirming the performance of the thin film according to the amount of impregnation with the deposited lens, the functional state of the reactant carrier used was investigated, and the results indicate the impregnation phenomenon and vacuum deposition result of the ceramic carrier according to each embodiment. Table 1 shows.

 Calcium Carbonate (wt%) Crystalline carbon (% by weight) PVA (% by weight)        Phenomenon during impregnation  Contact angle (degree) Example 1 1.0 - 3.0 It takes more than 10 minutes to impregnate and the impregnation liquid overflows out of the carrier. 97.53 Example 1 3.0 - 3.0 Impregnation is completed within 50 seconds and impregnation liquid does not bleed off the floor 115.27 Example 1 5.0 - 3.0 Impregnation is completed within 50 seconds and impregnation liquid does not bleed off the floor 116.77 Example 1 8.0 - 3.0 Impregnation is completed within 50 seconds, but impregnation liquid leaks out from the bottom 110.08 Example 2 - 0.02 3.0 It takes about 5 minutes to impregnate, and no impregnation liquid comes out 105.23 Example 2 - 0.05 3.0 Impregnation is completed within 40 seconds and impregnation liquid does not bleed 117.34 Example 2 - 0.31 3.0 Impregnation is completed within 40 seconds but impregnation liquid is easily drained out and sintered poorly 96.57 Example 3 - - 3.0 It takes more than 20 minutes to impregnate and the impregnation liquid overflows out of the carrier. 84.98 Example 3 - - 5.0 Impregnation is completed within 50 seconds and impregnation liquid does not come off 116.23 Example 3 - - 7.0 Impregnation is completed within 40 seconds and impregnation liquid is drained from the bottom 115.38 Example 3 - - 10.0 Impregnation is completed within 40 seconds, considerable amount of impregnation liquid comes out at the bottom, and molding and sintering are not easy 97.15 Example 4 2.0 0.04 3.0 Impregnation is completed within 50 seconds and impregnation liquid does not drain 117.08

As described in detail above, according to the manufacturing method according to the present invention, it is possible to contain the reactive organic matter through rapid impregnation without loss, and to stably be stored for a long time, so that the impregnated solution oozed out of the carrier does not adhere to other parts than the carrier. Porous ceramic carriers can be prepared that do not cause loss of reactive organics.

In addition, when the ceramic carrier is used as a means of transporting and storing the reactive organic material in a vacuum deposition process or a surface treatment process, the amount of reactant can be precisely controlled so that the surface of the object to be deposited is free from contamination of the reactant and has a desired physical property. Can be formed, and the loss of reactants generated during the process can be minimized.

In addition, since the ceramic carrier has a vertical symmetrical structure, it is not necessary to arrange in a special direction when the reactive organics are impregnated, so that the reactant can be quickly impregnated into the carrier, thereby greatly increasing the process efficiency.

Claims (8)

A main material mixing step of adding and mixing 1-10 Wt% of a sintering aid to 90-99 Wt% of a ceramic material selected from alumina (Al ₂ O ₃ ), titania (TiO ₂ ), zirconia (ZnO ₂ ), and crystalline carbon; 70 to 90 parts by weight of distilled water, 1 to 3 parts by weight of dispersant, 1 to 3 parts by weight of lubricating lubricant and 2 to 5 parts by weight of binder are added to 100 parts by weight of the main material made in the main material mixing step. Granulating step of forming; Forming the pressure-molded granulated powder; And a sintering step of sintering the molded body formed in the forming step at a temperature of 900 to 1400 ° C. to form a ceramic carrier. The method of claim 1, The sintering aid is a ceramic carrier manufacturing method characterized in that two or more materials selected from titania (TiO ₂ ), silicon dioxide (SiO ₂ ), calcium oxide (CaO), magnesium oxide (MgO) is mixed. The method of claim 1, Method for producing a ceramic carrier, characterized in that 0.1 to 7 parts by weight of the foaming agent is further added in the granulation step. The method of claim 3, wherein The foaming agent is a method of producing a ceramic carrier, characterized in that 2 to 7 parts by weight of calcium carbonate (CaCO ₃ ). The method of claim 3, wherein The foam forming agent is a ceramic carrier manufacturing method, characterized in that 0.01 to 0.3 parts by weight of crystalline carbon. The method of claim 3, wherein The foaming agent is a ceramic carrier manufacturing method, characterized in that consisting of 2 to 7 parts by weight of calcium carbonate (CaCO ₃ ) and 0.01 to 0.3 parts by weight of crystalline carbon. The method according to any one of claims 1 to 6, The binder is a ceramic carrier manufacturing method, characterized in that 1 to 10 parts by weight of PVA. Ceramic carrier, characterized in that the upper and lower circumference of the cylindrical body (10) is formed with an annular edge (11) protruding in the upward and downward directions, respectively.

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