KR20080091187A - 굴절률 분포를 갖는 중간세공성 코팅을 포함하는 물품 및이의 제조방법 - Google Patents
굴절률 분포를 갖는 중간세공성 코팅을 포함하는 물품 및이의 제조방법 Download PDFInfo
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- KR20080091187A KR20080091187A KR1020087018916A KR20087018916A KR20080091187A KR 20080091187 A KR20080091187 A KR 20080091187A KR 1020087018916 A KR1020087018916 A KR 1020087018916A KR 20087018916 A KR20087018916 A KR 20087018916A KR 20080091187 A KR20080091187 A KR 20080091187A
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Images
Classifications
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- G02B3/0087—Simple or compound lenses with index gradient
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- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02033—Core or cladding made from organic material, e.g. polymeric material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
- G02B6/4401—Optical cables
- G02B6/4429—Means specially adapted for strengthening or protecting the cables
- G02B6/443—Protective covering
- G02B6/4432—Protective covering with fibre reinforcements
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/249921—Web or sheet containing structurally defined element or component
- Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Surface Treatment Of Optical Elements (AREA)
- Laminated Bodies (AREA)
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| CN (1) | CN101379416A (enExample) |
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| KR20180004213A (ko) * | 2015-05-01 | 2018-01-10 | 에이제트 일렉트로닉 머티어리얼스 (룩셈부르크) 에스.에이.알.엘. | 광기능성 막 및 이의 제조방법 |
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| FR2933420B1 (fr) | 2008-07-01 | 2012-03-30 | Essilor Int | Utilisation d'un revetement poreux non photocatalytique en tant que revetement antisalissure |
| US8419955B2 (en) * | 2009-01-07 | 2013-04-16 | Panasonic Corporation | Antireflection structure, lens barrel including antireflection structure, method for manufacturing antireflection structure |
| JP5710500B2 (ja) * | 2009-01-23 | 2015-04-30 | ローデンストック.ゲゼルシャフト.ミット.ベシュレンクテル.ハフツング | 多角形デザインを使用するデザイン制御 |
| FR2949111B1 (fr) | 2009-08-13 | 2013-03-22 | Essilor Int | Procede de fabrication d'un substrat revetu d'un film antistatique mesoporeux et son application en optique ophtalmique |
| JP5640504B2 (ja) * | 2010-07-08 | 2014-12-17 | リコーイメージング株式会社 | 3層構成の反射防止膜を有する光学部材 |
| FR2965820B1 (fr) | 2010-10-12 | 2012-11-16 | Essilor Int | Article comprenant une couche mesoporeuse protegee par un revetement faisant barriere au sebum et procede de fabrication |
| EP2693982B1 (en) * | 2011-04-07 | 2017-08-23 | Novartis AG | Optical structures with nanostructre features and methods of manufacture |
| JP5804788B2 (ja) * | 2011-06-13 | 2015-11-04 | 三井化学株式会社 | 多層反射防止膜の製造方法 |
| US20130194668A1 (en) * | 2012-01-30 | 2013-08-01 | Guardian Industries Corp. | Method of making coated article including anti-reflection coating with double coating layers including mesoporous materials, and products containing the same |
| US20130215513A1 (en) * | 2012-01-30 | 2013-08-22 | Guardian Industries Corp. | Method of making coated article including anti-reflection coating with porosity differences in two layers, and products containing the same |
| US20130194670A1 (en) * | 2012-01-30 | 2013-08-01 | Guardian Industries Corp. | Method of making coated article including anti-reflection coating and products containing the same |
| US10059622B2 (en) | 2012-05-07 | 2018-08-28 | Guardian Glass, LLC | Anti-reflection glass with tin oxide nanoparticles |
| US20140161989A1 (en) * | 2012-12-12 | 2014-06-12 | Intermolecular, Inc. | Anti-Glare Using a Two-Step Texturing Process |
| EP2752388A1 (en) * | 2012-12-13 | 2014-07-09 | Guardian Industries Corp. | Method of making coated article including anti-reflection coating and products containing the same |
| EP2752387B1 (en) * | 2012-12-13 | 2018-06-27 | Guardian Glass, LLC | Method of making coated article including anti-reflection coating with double coating layers including mesoporous materials, and products containing the same |
| US20140182670A1 (en) * | 2012-12-27 | 2014-07-03 | Intermolecular Inc. | Light trapping and antireflective coatings |
| JP6609093B2 (ja) * | 2013-05-13 | 2019-11-20 | 日東電工株式会社 | ハードコートフィルム、偏光板及び画像表示装置 |
| US20150344698A1 (en) * | 2014-06-03 | 2015-12-03 | Corning Incorporated | Adhesion primer for glass and ceramics |
| JP6532228B2 (ja) * | 2014-12-10 | 2019-06-19 | キヤノン株式会社 | 光学部材及び光学部材の製造方法 |
| RU2684919C2 (ru) * | 2015-03-13 | 2019-04-16 | Рупп + Хубрах Оптик Гмбх | Оптическое изделие, содержащее просветляющее покрытие в видимой области, для условий низкой освещенности |
| FR3070388B1 (fr) * | 2017-08-24 | 2019-08-16 | Psa Automobiles Sa | Revetement protecteur transparent et son procede de depot pour vitrages automobiles |
| KR102646970B1 (ko) * | 2018-08-01 | 2024-03-12 | 오토 카가쿠 코교 가부시키가이샤 | 코어재 및 이것을 사용한 광 전송체, 그 광 전송체의 제조 방법, 그 광 전송체를 사용한 조명 장치 |
| EP3715917A1 (en) * | 2019-03-25 | 2020-09-30 | Thorlabs, Inc. | Technique for optimizing the coupling to optical fibers |
| US11529230B2 (en) | 2019-04-05 | 2022-12-20 | Amo Groningen B.V. | Systems and methods for correcting power of an intraocular lens using refractive index writing |
| US12377622B2 (en) | 2019-04-05 | 2025-08-05 | Amo Groningen B.V. | Systems and methods for vergence matching with an optical profile and using refractive index writing |
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| US11564839B2 (en) | 2019-04-05 | 2023-01-31 | Amo Groningen B.V. | Systems and methods for vergence matching of an intraocular lens with refractive index writing |
| US11944574B2 (en) | 2019-04-05 | 2024-04-02 | Amo Groningen B.V. | Systems and methods for multiple layer intraocular lens and using refractive index writing |
| US11678975B2 (en) | 2019-04-05 | 2023-06-20 | Amo Groningen B.V. | Systems and methods for treating ocular disease with an intraocular lens and refractive index writing |
| US11583388B2 (en) | 2019-04-05 | 2023-02-21 | Amo Groningen B.V. | Systems and methods for spectacle independence using refractive index writing with an intraocular lens |
| WO2021204988A1 (en) | 2020-04-09 | 2021-10-14 | Essilor International | Optical article with antibacterial function |
| CN119087612B (zh) * | 2024-11-08 | 2025-03-14 | 新菲光通信技术有限公司 | 用于浸没式液冷数据中心的光缆、抗腐蚀涂层的制备方法 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4273826A (en) * | 1979-12-03 | 1981-06-16 | Owens-Illinois, Inc. | Process of making glass articles having antireflective coatings and product |
| US4535026A (en) * | 1983-06-29 | 1985-08-13 | The United States Of America As Represented By The United States Department Of Energy | Antireflective graded index silica coating, method for making |
| JPS6193402A (ja) * | 1985-09-18 | 1986-05-12 | Toray Ind Inc | 反射防止性を有する染色光学物品 |
| US5494858A (en) * | 1994-06-07 | 1996-02-27 | Texas Instruments Incorporated | Method for forming porous composites as a low dielectric constant layer with varying porosity distribution electronics applications |
| FR2749087B1 (fr) * | 1996-05-21 | 1998-08-14 | Angenieux Sa | Procede de correction d'aberration optique d'une lentille |
| US5922299A (en) * | 1996-11-26 | 1999-07-13 | Battelle Memorial Institute | Mesoporous-silica films, fibers, and powders by evaporation |
| US6147709A (en) * | 1997-04-07 | 2000-11-14 | Interactive Pictures Corporation | Method and apparatus for inserting a high resolution image into a low resolution interactive image to produce a realistic immersive experience |
| JPH10332903A (ja) * | 1997-05-30 | 1998-12-18 | Hoya Corp | 撥水性光学部材およびその製造方法 |
| US5858457A (en) * | 1997-09-25 | 1999-01-12 | Sandia Corporation | Process to form mesostructured films |
| DE19829172A1 (de) * | 1998-06-30 | 2000-01-05 | Univ Konstanz | Verfahren zur Herstellung von Antireflexschichten |
| EP1119786B1 (en) * | 1998-08-12 | 2007-02-21 | Rofin Australia PTY Ltd | Fluid light guide |
| GB2356858A (en) * | 1999-07-21 | 2001-06-06 | Procter & Gamble | Combined photocatalytic and ultrasonic degradation of orgainc contaminants |
| US6592980B1 (en) * | 1999-12-07 | 2003-07-15 | Air Products And Chemicals, Inc. | Mesoporous films having reduced dielectric constants |
| AU2002220077A1 (en) * | 2000-11-14 | 2002-05-27 | The Regents Of The University Of California | Inorganic/block copolymer-dye composites and dye doped mesoporous materials for optical and sensing applications |
| US7026634B2 (en) * | 2001-06-28 | 2006-04-11 | E-Beam & Light, Inc. | Method and apparatus for forming optical materials and devices |
| WO2003024869A1 (en) * | 2001-09-17 | 2003-03-27 | Koninklijke Philips Electronics N.V. | Electronic device comprising a mesoporous silica layer and composition for preparing the mesoporous silica layer |
| US20040096586A1 (en) * | 2002-11-15 | 2004-05-20 | Schulberg Michelle T. | System for deposition of mesoporous materials |
| EP1424570A1 (en) * | 2002-11-28 | 2004-06-02 | Avanex Corporation | Focusing device |
| US7345000B2 (en) * | 2003-10-10 | 2008-03-18 | Tokyo Electron Limited | Method and system for treating a dielectric film |
| GB0323806D0 (en) * | 2003-10-10 | 2003-11-12 | Univ Southampton | Fabrication of semiconductor metamaterials |
| JP4497460B2 (ja) * | 2004-06-11 | 2010-07-07 | Hoya株式会社 | 反射防止膜の製造方法 |
| US7824043B2 (en) * | 2004-06-11 | 2010-11-02 | Zeon Corporation | Reflection preventing layered product and optical member |
| JP4443318B2 (ja) * | 2004-06-16 | 2010-03-31 | Hoya株式会社 | 反射防止膜及び反射防止膜を有する光学素子 |
-
2006
- 2006-02-02 FR FR0650381A patent/FR2896887B1/fr not_active Expired - Fee Related
-
2007
- 2007-02-02 US US12/278,133 patent/US20090169859A1/en not_active Abandoned
- 2007-02-02 CN CNA2007800043382A patent/CN101379416A/zh active Pending
- 2007-02-02 EP EP07731570A patent/EP1979770A2/fr not_active Withdrawn
- 2007-02-02 JP JP2008552867A patent/JP2009525498A/ja active Pending
- 2007-02-02 WO PCT/FR2007/050743 patent/WO2007090983A2/fr not_active Ceased
- 2007-02-02 KR KR1020087018916A patent/KR20080091187A/ko not_active Ceased
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180004213A (ko) * | 2015-05-01 | 2018-01-10 | 에이제트 일렉트로닉 머티어리얼스 (룩셈부르크) 에스.에이.알.엘. | 광기능성 막 및 이의 제조방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1979770A2 (fr) | 2008-10-15 |
| WO2007090983A3 (fr) | 2007-11-15 |
| JP2009525498A (ja) | 2009-07-09 |
| US20090169859A1 (en) | 2009-07-02 |
| FR2896887A1 (fr) | 2007-08-03 |
| FR2896887B1 (fr) | 2008-05-30 |
| CN101379416A (zh) | 2009-03-04 |
| WO2007090983A2 (fr) | 2007-08-16 |
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