KR20080037702A - 계조를 갖는 포토마스크 및 그 제조 방법 - Google Patents

계조를 갖는 포토마스크 및 그 제조 방법 Download PDF

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Publication number
KR20080037702A
KR20080037702A KR1020087005601A KR20087005601A KR20080037702A KR 20080037702 A KR20080037702 A KR 20080037702A KR 1020087005601 A KR1020087005601 A KR 1020087005601A KR 20087005601 A KR20087005601 A KR 20087005601A KR 20080037702 A KR20080037702 A KR 20080037702A
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KR
South Korea
Prior art keywords
film
light shielding
shielding film
photomask
pattern
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020087005601A
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English (en)
Korean (ko)
Inventor
쥰지 후지까와
슈우 시마다
유우이찌 요시다
시호 사사끼
쯔요시 아마노
기미오 이또오
노부히또 도야마
히로시 모오리
Original Assignee
다이니폰 인사츠 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이니폰 인사츠 가부시키가이샤 filed Critical 다이니폰 인사츠 가부시키가이샤
Publication of KR20080037702A publication Critical patent/KR20080037702A/ko
Ceased legal-status Critical Current

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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/46—Antireflective coatings
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/36—Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/20—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials
    • H10P76/204—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising organic materials of organic photoresist masks
    • H10P76/2041—Photolithographic processes
    • H10P76/2043—Photolithographic processes using an anti-reflective coating

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
KR1020087005601A 2005-09-21 2006-09-19 계조를 갖는 포토마스크 및 그 제조 방법 Ceased KR20080037702A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005273601 2005-09-21
JPJP-P-2005-00273601 2005-09-21

Publications (1)

Publication Number Publication Date
KR20080037702A true KR20080037702A (ko) 2008-04-30

Family

ID=37888972

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087005601A Ceased KR20080037702A (ko) 2005-09-21 2006-09-19 계조를 갖는 포토마스크 및 그 제조 방법

Country Status (5)

Country Link
US (1) US8124301B2 (https=)
KR (1) KR20080037702A (https=)
CN (1) CN101268417A (https=)
TW (1) TW200717176A (https=)
WO (1) WO2007034930A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8784672B2 (en) 2010-12-13 2014-07-22 Samsung Electronics Co., Ltd. Photomasks and methods of manufacturing the same
TWI502623B (zh) * 2010-01-07 2015-10-01 Ｈｏｙａ股份有限公司 光罩之製造方法、光罩、及顯示裝置之製造方法

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI446105B (zh) * 2007-07-23 2014-07-21 Hoya Corp 光罩之製造方法、圖案轉印方法、光罩以及資料庫
CN101393385B (zh) * 2007-09-21 2013-09-11 北京京东方光电科技有限公司 可调节透射率的半色调掩模版及其制造方法
JP4934237B2 (ja) * 2007-09-29 2012-05-16 Ｈｏｙａ株式会社 グレートーンマスクの製造方法及びグレートーンマスク、並びにパターン転写方法
US8685596B2 (en) * 2007-12-04 2014-04-01 Sharp Laboratories Of America, Inc. Semi-transparent film grayscale mask
JP5108551B2 (ja) * 2008-02-15 2012-12-26 Ｈｏｙａ株式会社 多階調フォトマスク及びそれを用いたパターン転写方法
KR101079161B1 (ko) * 2008-12-22 2011-11-02 엘지이노텍 주식회사 하프톤 마스크 및 그 제조방법
EP2738791B1 (en) * 2009-02-16 2015-08-19 Dai Nippon Printing Co., Ltd. Method for correcting a photomask
CN101990058A (zh) * 2009-07-30 2011-03-23 鸿富锦精密工业（深圳）有限公司 晶圆级相机模组的镀膜方法及晶圆级相机模组
DE102009046878A1 (de) * 2009-07-31 2011-02-03 Advanced Mask Technology Center Gmbh & Co. Kg Verringerung der lonenwanderung von Absorbermaterialien von Lithographiemasken durch Chrompassivierung
CN102103323B (zh) * 2009-12-21 2012-10-10 北京京东方光电科技有限公司 半色调掩模板及其制作方法
WO2012005524A2 (en) 2010-07-08 2012-01-12 Lg Innotek Co., Ltd. The printed circuit board and the method for manufacturing the same
JP6021365B2 (ja) * 2012-03-12 2016-11-09 キヤノン株式会社 インプリント装置、それを用いた物品の製造方法
KR102046729B1 (ko) * 2013-09-24 2019-11-19 호야 가부시키가이샤 마스크 블랭크, 전사용 마스크, 및 반도체 디바이스의 제조방법
CN104155810B (zh) * 2014-07-22 2017-01-25 京东方科技集团股份有限公司 一种掩膜板
KR102157644B1 (ko) * 2014-08-13 2020-09-21 (주)에스앤에스텍 다계조 포토 마스크 및 그의 제조 방법
KR102286886B1 (ko) * 2014-11-18 2021-08-09 삼성디스플레이 주식회사 포토 마스크 및 이의 제조 방법
KR102502202B1 (ko) 2015-06-29 2023-02-21 삼성디스플레이 주식회사 발광 표시 장치 및 그 제조 방법
GB201517273D0 (en) * 2015-09-30 2015-11-11 Univ Manchester Resist composition
US20170147652A1 (en) * 2015-11-19 2017-05-25 Institute For Information Industry Search servers, end devices, and search methods for use in a distributed network
CN107145035A (zh) * 2017-03-30 2017-09-08 惠科股份有限公司 光罩及其主动开关阵列基板的制造方法
KR20200015775A (ko) * 2017-07-17 2020-02-12 에이에스엠엘 네델란즈 비.브이. 정보 결정 장치 및 방법
WO2019016224A1 (en) * 2017-07-21 2019-01-24 Carl Zeiss Smt Gmbh METHOD AND APPARATUS FOR REMOVING EXCESS MATERIALS FROM A PHOTOLITHOGRAPHIC MASK
US10811492B2 (en) 2018-10-31 2020-10-20 Texas Instruments Incorporated Method and device for patterning thick layers
CN111367142A (zh) * 2018-12-26 2020-07-03 聚灿光电科技（宿迁）有限公司 一种包含不同透光性的新型光学掩膜版
CN113296354B (zh) * 2020-02-22 2023-04-07 长鑫存储技术有限公司 应用于半导体光刻工艺中的掩膜版及光刻工艺方法
CN113311660B (zh) * 2021-06-03 2023-07-18 上海传芯半导体有限公司 掩模基版的制作方法及具有等离子体加热装置的涂胶设备

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW517286B (en) * 2000-12-19 2003-01-11 Hoya Corp Gray tone mask and method for producing the same
KR100599054B1 (ko) * 2001-04-11 2006-07-12 삼성전자주식회사 투과량 조절 마스크 및 그 제조방법
DE10310136B4 (de) * 2003-03-07 2007-05-03 Infineon Technologies Ag Maskensatz zur Projektion von jeweils auf den Masken des Satzes angeordneten und aufeinander abgestimmten Strukturmustern auf einen Halbleiterwafer
JP2005091855A (ja) * 2003-09-18 2005-04-07 Dainippon Printing Co Ltd 階調マスクの製造方法
JP4608882B2 (ja) 2003-12-22 2011-01-12 セイコーエプソン株式会社 露光用マスク及びその製造方法、並びに液晶装置の製造方法
JP2005241693A (ja) * 2004-02-24 2005-09-08 Shin Etsu Chem Co Ltd ハーフトーン型位相シフトマスクブランク及びその製造方法並びにハーフトーン型位相シフトマスク及びその製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI502623B (zh) * 2010-01-07 2015-10-01 Ｈｏｙａ股份有限公司 光罩之製造方法、光罩、及顯示裝置之製造方法
US8784672B2 (en) 2010-12-13 2014-07-22 Samsung Electronics Co., Ltd. Photomasks and methods of manufacturing the same

Also Published As

Publication number Publication date
TW200717176A (en) 2007-05-01
US20090220867A1 (en) 2009-09-03
CN101268417A (zh) 2008-09-17
TWI363247B (https=) 2012-05-01
US8124301B2 (en) 2012-02-28
WO2007034930A1 (ja) 2007-03-29

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