KR20070026251A - 유사 다이아몬드 카본 경질 다층 필름 형성 본체 및 이를제조하는 방법 - Google Patents
유사 다이아몬드 카본 경질 다층 필름 형성 본체 및 이를제조하는 방법 Download PDFInfo
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Abstract
Description
Claims (10)
- 기재와, 주로 유사 다이아몬드 카본으로 구성된 유사 다이아몬드 카본 필름과, 상기 기재와 유사 다이아몬드 카본 필름 사이의 중간층을 포함하며,상기 유사 다이아몬드 카본 필름은 기재측으로부터 순서대로, 제1 유사 다이아몬드 카본 필름과 제2 유사 다이아몬드 카본 필름으로 구성되고,상기 제1 유사 다이아몬드 카본 필름의 표면 경도는 나노 인덴테이션 테스트(nano indentation test)를 기초로 10 ㎬ 이상 40 ㎬ 이하의 범위 내에 있고,상기 제2 유사 다이아몬드 카본 필름의 표면 경도는 나노 인덴테이션 테스트를 기초로 40 ㎬ 초과 90 ㎬ 이하의 범위 내에 있는 유사 다이아몬드 카본 경질 다층 필름 형성 본체.
- 제1항에 있어서, 상기 제2 유사 다이아몬드 카본 필름의 표면 경도는 제1 유사 다이아몬드 카본 필름과 제2 유사 다이아몬드 카본 필름 사이에 경계측으로부터 제2 유사 다이아몬드 카본 필름의 최외부층쪽으로 계단식으로 또는 연속적으로 증가하는 유사 다이아몬드 카본 경질 다층 필름 형성 본체.
- 제1항에 있어서, 상기 기재는 초경합금 물질로 구성되고,상기 중간층은 기재측으로부터 순서대로, W, Ta, Mo 및 Nb로 구성된 그룹으로부터 선택된 하나 이상의 금속으로 구성된 제1 금속층과, W, Ta, Mo 및 Nb로 구 성된 그룹으로부터 선택된 하나 이상의 금속 및 C를 포함하는 비결정층으로 구성되는 유사 다이아몬드 카본 경질 다층 필름 형성 본체.
- 제1항에 있어서, 상기 기재는 철 계열 기재로 구성되고,상기 중간층은 기재측으로부터 순서대로, Cr 및 Al 중 하나 이상의 금속으로 구성된 제2 금속층과, Cr 및 Al 중 하나 이상의 금속과 W, Ta, Mo 및 Nb로 구성된 그룹으로부터 선택된 하나 이상의 금속으로 구성된 혼합 금속층과, W, Ta, Mo 및 Nb로 구성된 그룹으로부터 선택된 하나 이상의 금속으로 구성된 제1 금속층과, W, Ta, Mo 및 Nb로 구성된 그룹으로부터 선택된 하나 이상의 금속 및 C를 포함하는 비결정층으로 구성되는 유사 다이아몬드 카본 경질 다층 필름 형성 본체.
- 제1항에 있어서, 상기 중간층의 두께는 상기 유사 다이아몬드 카본 경질 다층 필름 형성 본체의 전체 두께에 대해 10 % 이상 50 % 이하의 범위 내에 있고,상기 제2 유사 다이아몬드 카본 필름의 두께는 중간층을 제외한 유사 다이아몬드 카본 경질 다층 필름 형성 본체의 전체 두께에 대해 50 % 이상 90 % 이하의 범위 내에 있는 유사 다이아몬드 카본 경질 다층 필름 형성 본체.
- 제1항에 따른 유사 다이아몬드 카본 경질 다층 필름 형성 본체를 제조하는 방법이며,기재를 준비하는 단계와, 스퍼터링에 의해 상기 기재 상에 중간층을 형성하 는 단계와, 스퍼터링에 의해 상기 중간층 상에 제1 유사 다이아몬드 카본 필름을 형성하는 단계와, 캐소드 방전형 아크 이온 도금에 의해 제1 유사 다이아몬드 카본 필름 상에 제2 유사 다이아몬드 카본 필름을 형성하는 단계를 포함하는 방법.
- 제6항에 있어서, 하나의 진공 챔버 내에 제공된 캐소드 방전형 아크 이온 도금 증착원과 스퍼터링 증착원을 갖는 혼합형 도금 장치가,스퍼터링에 의해 중간층을 형성하는 단계와, 스퍼터링에 의해 상기 제1 유사 다이아몬드 카본 필름을 형성하는 단계와, 캐소드 방전형 아크 이온 도금에 의해 제2 유사 다이아몬드 카본 필름을 형성하는 단계에 사용되는 방법.
- 제6항에 있어서, 상기 스퍼터링에 의해 중간층을 형성하는 단계는 언발란스 마그네트론 스퍼터링에 의한 형성 프로세스를 포함하는 방법.
- 제6항에 있어서, 상기 스퍼터링에 의해 제1 유사 다이아몬드 카본 필름을 형성하는 단계는 언발란스 마그네트론 스퍼터링에 의한 형성 프로세스를 포함하는 방법.
- 제7항에 있어서, 상기 혼합형 도금 장치는 언발란스 마그네트론형 스퍼터링 증착원을 포함하는 방법.
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JP2005257083A JP2007070667A (ja) | 2005-09-05 | 2005-09-05 | ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法 |
JPJP-P-2005-00257083 | 2005-09-05 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8728621B2 (en) | 2008-10-29 | 2014-05-20 | Ntn Corporation | Hard multilayer film formed body and method for manufacturing same |
Families Citing this family (40)
Publication number | Priority date | Publication date | Assignee | Title |
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US7384693B2 (en) * | 2004-04-28 | 2008-06-10 | Intel Corporation | Diamond-like carbon films with low dielectric constant and high mechanical strength |
WO2009002270A1 (en) * | 2007-06-26 | 2008-12-31 | Nanofilm Technologies International Pte Ltd | Cutting tools having plasma deposited carbon coatings |
EP2056004A1 (en) * | 2007-10-29 | 2009-05-06 | General Electric Company | Mechanical seals and methods of making |
WO2009119269A1 (ja) * | 2008-03-28 | 2009-10-01 | 日立金属株式会社 | 皮膜密着性に優れた表面被覆部品の製造方法 |
JP5393108B2 (ja) * | 2008-10-29 | 2014-01-22 | Ntn株式会社 | 硬質多層膜成形体の製造方法 |
JP4755262B2 (ja) * | 2009-01-28 | 2011-08-24 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン膜の製造方法 |
DE102009028504C5 (de) * | 2009-08-13 | 2014-10-30 | Federal-Mogul Burscheid Gmbh | Kolbenring mit einer Beschichtung |
CN101818330B (zh) * | 2010-05-27 | 2012-01-11 | 中国船舶重工集团公司第十二研究所 | 一种非平衡磁控溅射C/Ta类石墨碳膜及其制备方法 |
CN101880876B (zh) * | 2010-07-06 | 2012-01-25 | 星弧涂层科技(苏州工业园区)有限公司 | 压缩机滑片及其表面涂层处理方法 |
DE102010062114B4 (de) * | 2010-11-29 | 2014-12-11 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere Kolbenring, mit einer Beschichtung |
JP2012202522A (ja) | 2011-03-28 | 2012-10-22 | Tpr Co Ltd | ピストンリング |
FR2975404B1 (fr) * | 2011-05-19 | 2014-01-24 | Hydromecanique & Frottement | Piece avec revetement dlc et procede d'application du revetement dlc |
EP2754730B1 (en) | 2011-09-07 | 2017-12-13 | Nanotec Co. | Carbon film forming apparatus |
JP5938321B2 (ja) * | 2011-09-22 | 2016-06-22 | Ntn株式会社 | 硬質膜およびその成膜方法、硬質膜形成体およびその製造方法 |
EP2759620B1 (en) * | 2011-09-22 | 2016-07-20 | NTN Corporation | Hard film, hard film formed body, and rolling bearing |
AT511605B1 (de) * | 2011-12-12 | 2013-01-15 | High Tech Coatings Gmbh | Kohlenstoffbasierende beschichtung |
JP6063698B2 (ja) * | 2011-12-19 | 2017-01-18 | ミネベア株式会社 | 摺動部材及び流体動圧軸受装置 |
JP6172799B2 (ja) * | 2012-06-29 | 2017-08-02 | 株式会社神戸製鋼所 | Dlc膜成形体 |
DE102012214284B4 (de) * | 2012-08-10 | 2014-03-13 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere Kolbenring, mit einer widerstandsfähigen Beschichtung |
JP2014098184A (ja) * | 2012-11-14 | 2014-05-29 | Minebea Co Ltd | 多層dlc皮膜を有する摺動部材 |
DE102013200846A1 (de) * | 2013-01-21 | 2014-07-24 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere Kolbenring, mit einer Beschichtung |
DE102013002911A1 (de) * | 2013-02-21 | 2014-08-21 | Oerlikon Trading Ag, Trübbach | Dekorative, tiefschwarze Beschichtung |
MX2016005907A (es) * | 2013-11-06 | 2016-07-13 | Dowa Thermotech Co Ltd | Metodo de formacion de la capa intermedia formada entre el material base y la pelicula dlc, metodo de formacion de la pelicula dlc, y capa intermedia formada entre el material base y la pelicula dlc. |
BR102013031497A2 (pt) * | 2013-12-06 | 2015-11-10 | Mahle Int Gmbh | processo de revestimento de um cilindro de um motor a combustão interna e cilindro/camisa de motor |
CN105765274B (zh) * | 2014-01-31 | 2018-04-10 | 日本活塞环株式会社 | 活塞环及其制造方法 |
DE102014217040A1 (de) | 2014-08-27 | 2016-03-03 | Bayerische Motoren Werke Aktiengesellschaft | Beschichtung für Metallbauteile, Verfahren zum Beschichten eines Metallbauteils, Kolben für Verbrennungskraftmaschinen und Kfz |
EP3196330B1 (en) * | 2014-09-17 | 2023-07-05 | Nippon Piston Ring Co., Ltd. | Coating film and manufacturing method thereof |
JP6343767B2 (ja) * | 2014-09-17 | 2018-06-20 | 日本アイ・ティ・エフ株式会社 | 被覆膜とその製造方法およびpvd装置 |
KR101616862B1 (ko) * | 2014-09-22 | 2016-04-29 | 한국기계연구원 | 다아이몬드상 카본층을 포함하는 모재 및 이의 제조방법 |
CN107022740A (zh) * | 2016-01-29 | 2017-08-08 | 广东耐信镀膜科技有限公司 | 一种超硬多层复合类金刚石涂层及其制备方法 |
JP2018006573A (ja) * | 2016-07-01 | 2018-01-11 | 松田産業株式会社 | 静電チャック及びその製造方法並びに静電チャックの再生方法 |
CN106756828B (zh) * | 2016-12-14 | 2019-04-16 | 文晓斌 | 一种含钨自润滑刀具镀层制备方法 |
BR112020002358B1 (pt) * | 2017-08-04 | 2023-12-26 | Oerlikon Surface Solutions Ag, Pfäffikon | Componentes de válvula revestidos com superfícies deslizantes resistentes à corrosão |
KR20210031908A (ko) * | 2018-07-10 | 2021-03-23 | 넥스트 바이오메트릭스 그룹 에이에스에이 | 전자 장치용 열전도성 및 보호성 코팅 |
CN109898064B (zh) * | 2019-03-29 | 2020-02-04 | 中南大学 | 一种DLC/Me-C复合薄膜及其制备方法 |
CN111816808B (zh) * | 2020-07-10 | 2022-08-05 | RealMe重庆移动通信有限公司 | 电池盖、壳体组件及电子设备 |
RU2759163C1 (ru) * | 2020-08-21 | 2021-11-09 | Федеральное государственное бюджетное учреждение науки Институт физики металлов имени М.Н. Михеева Уральского отделения Российской академии наук (ИФМ УрО РАН) | Многослойное износостойкое покрытие на стальной подложке |
CN113314408A (zh) * | 2021-04-23 | 2021-08-27 | 长江先进存储产业创新中心有限责任公司 | 一种硬掩膜叠层结构及半导体器件的形成方法 |
CN113278915B (zh) * | 2021-07-22 | 2022-01-18 | 艾瑞森表面技术(苏州)股份有限公司 | 一种具有多孔结构磨合层的dlc复合薄膜及其制备工艺 |
CN113873738B (zh) * | 2021-09-26 | 2024-01-12 | 中国工程物理研究院激光聚变研究中心 | 一种自支撑碳基电容器靶及其制备方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5707717A (en) * | 1991-10-29 | 1998-01-13 | Tdk Corporation | Articles having diamond-like protective film |
JP3187487B2 (ja) * | 1991-10-29 | 2001-07-11 | ティーディーケイ株式会社 | ダイヤモンド様薄膜の保護膜付き物品 |
JPH05202477A (ja) * | 1992-01-27 | 1993-08-10 | Sumitomo Electric Ind Ltd | 硬質炭素膜とその製造方法 |
ES2262037T3 (es) † | 1994-04-25 | 2006-11-16 | The Gillette Company | Recubrimiento de cuchillas con diamante amorfo. |
JP2000087218A (ja) * | 1998-09-10 | 2000-03-28 | Kobe Steel Ltd | 高密着性炭素皮膜形成材及びその製法 |
JP3737291B2 (ja) * | 1998-10-12 | 2006-01-18 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン硬質多層膜成形体 |
JP2000246512A (ja) * | 1998-12-28 | 2000-09-12 | Ngk Spark Plug Co Ltd | ダイヤモンド類被覆切削工具 |
US6438661B1 (en) * | 1999-03-03 | 2002-08-20 | International Business Machines Corporation | Method, system, and program for managing meta data in a storage system and rebuilding lost meta data in cache |
JP4730753B2 (ja) * | 2000-03-23 | 2011-07-20 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン硬質多層膜および耐摩耗性、耐摺動性に優れた部材 |
US6565719B1 (en) † | 2000-06-27 | 2003-05-20 | Komag, Inc. | Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content |
JP4022048B2 (ja) † | 2001-03-06 | 2007-12-12 | 株式会社神戸製鋼所 | ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法 |
US6962751B2 (en) † | 2001-06-13 | 2005-11-08 | Sumitomo Electric Industries, Ltd. | Amorphous carbon coated tools and method of producing the same |
JP4139102B2 (ja) * | 2001-12-06 | 2008-08-27 | 株式会社デンソー | ダイヤモンドライクカーボン硬質多層膜成形体およびその製造方法 |
EP1589916A2 (en) † | 2003-02-07 | 2005-11-02 | Optobionics Corporation | Implantable device using diamond-like carbon coating |
EP1598441B1 (en) † | 2003-02-26 | 2018-09-26 | Sumitomo Electric Industries, Ltd. | Amorphous carbon film and process for producing the same |
JP4973971B2 (ja) † | 2003-08-08 | 2012-07-11 | 日産自動車株式会社 | 摺動部材 |
JP5117087B2 (ja) | 2007-03-27 | 2013-01-09 | 株式会社ユニバーサルエンターテインメント | 遊技機 |
JP5202477B2 (ja) | 2009-08-31 | 2013-06-05 | 本田技研工業株式会社 | 自動変速機のクラッチトルク伝達容量解析装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8728621B2 (en) | 2008-10-29 | 2014-05-20 | Ntn Corporation | Hard multilayer film formed body and method for manufacturing same |
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CN1927581A (zh) | 2007-03-14 |
US8808858B2 (en) | 2014-08-19 |
CN100564031C (zh) | 2009-12-02 |
EP1760172B2 (en) | 2018-10-31 |
KR100845372B1 (ko) | 2008-07-09 |
US20070054125A1 (en) | 2007-03-08 |
EP1760172A3 (en) | 2008-04-23 |
EP1760172B1 (en) | 2015-01-14 |
EP1760172A2 (en) | 2007-03-07 |
JP2007070667A (ja) | 2007-03-22 |
US20090250338A1 (en) | 2009-10-08 |
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