KR20060095479A - 외관 검사 장치 및 외관 검사 방법 - Google Patents

외관 검사 장치 및 외관 검사 방법 Download PDF

Info

Publication number
KR20060095479A
KR20060095479A KR1020060018372A KR20060018372A KR20060095479A KR 20060095479 A KR20060095479 A KR 20060095479A KR 1020060018372 A KR1020060018372 A KR 1020060018372A KR 20060018372 A KR20060018372 A KR 20060018372A KR 20060095479 A KR20060095479 A KR 20060095479A
Authority
KR
South Korea
Prior art keywords
substrate
light source
illumination
light
board
Prior art date
Application number
KR1020060018372A
Other languages
English (en)
Korean (ko)
Inventor
히로유키 오카히라
Original Assignee
올림푸스 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 올림푸스 가부시키가이샤 filed Critical 올림푸스 가부시키가이샤
Publication of KR20060095479A publication Critical patent/KR20060095479A/ko

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/0002—Apparatus or processes for manufacturing printed circuits for manufacturing artworks for printed circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N2021/95638—Inspecting patterns on the surface of objects for PCB's
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30141—Printed circuit board [PCB]

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
KR1020060018372A 2005-02-28 2006-02-24 외관 검사 장치 및 외관 검사 방법 KR20060095479A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2005-00052799 2005-02-28
JP2005052799A JP4633499B2 (ja) 2005-02-28 2005-02-28 外観検査装置及び外観検査方法

Publications (1)

Publication Number Publication Date
KR20060095479A true KR20060095479A (ko) 2006-08-31

Family

ID=36946776

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020060018372A KR20060095479A (ko) 2005-02-28 2006-02-24 외관 검사 장치 및 외관 검사 방법

Country Status (4)

Country Link
JP (1) JP4633499B2 (zh)
KR (1) KR20060095479A (zh)
CN (1) CN1828280B (zh)
TW (1) TW200632311A (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100831629B1 (ko) * 2006-08-31 2008-05-22 동일파텍주식회사 병렬지지 방식 매크로 검사장치
KR101373129B1 (ko) * 2011-12-30 2014-03-13 엘아이지에이디피 주식회사 기판 검사장비
KR20160006400A (ko) * 2014-07-09 2016-01-19 세광테크 주식회사 조명 반사판을 구비한 패널 얼라인장치

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5006024B2 (ja) * 2006-12-27 2012-08-22 オリンパス株式会社 外観検査用投光装置
JP6587822B2 (ja) * 2015-04-22 2019-10-09 株式会社ブイ・テクノロジー 外観検査装置
CN105115978A (zh) * 2015-09-09 2015-12-02 山东华芯富创电子科技有限公司 触摸屏检验治具
CN107589072A (zh) * 2017-08-30 2018-01-16 东莞新友智能科技有限公司 一种用于表面检测的光源装置
CN108627516A (zh) * 2018-03-21 2018-10-09 郑州轻工业学院 一种用于空调产品的检修方法以及检修系统
CN109030495A (zh) * 2018-06-26 2018-12-18 大连鉴影光学科技有限公司 一种基于机器视觉技术的光学元件缺陷检测方法
JP7111659B2 (ja) * 2019-06-28 2022-08-02 矢崎総業株式会社 端子の外観検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4576006B2 (ja) * 1998-09-21 2010-11-04 オリンパス株式会社 外観検査用投光装置
KR20020065480A (ko) * 2000-08-24 2002-08-13 올림파스 고가꾸 고교 가부시키가이샤 외관검사용 투광장치
JP2002374445A (ja) * 2001-06-12 2002-12-26 Nikon Corp 電子カメラ
CN1537225B (zh) * 2002-05-31 2010-05-12 奥林巴斯株式会社 宏观照明装置
JP4107020B2 (ja) * 2002-09-06 2008-06-25 セイコーエプソン株式会社 液晶パネルの検査装置
JP2004153422A (ja) * 2002-10-29 2004-05-27 Toshiba Corp 撮影装置、顔照合装置、撮影装置の汚れ検知方法、及び顔照合方法
JP4245452B2 (ja) * 2003-10-06 2009-03-25 富士通株式会社 レンズの汚れ判定方法及び装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100831629B1 (ko) * 2006-08-31 2008-05-22 동일파텍주식회사 병렬지지 방식 매크로 검사장치
KR101373129B1 (ko) * 2011-12-30 2014-03-13 엘아이지에이디피 주식회사 기판 검사장비
KR20160006400A (ko) * 2014-07-09 2016-01-19 세광테크 주식회사 조명 반사판을 구비한 패널 얼라인장치

Also Published As

Publication number Publication date
JP2006234721A (ja) 2006-09-07
JP4633499B2 (ja) 2011-02-16
CN1828280A (zh) 2006-09-06
CN1828280B (zh) 2011-07-13
TW200632311A (en) 2006-09-16

Similar Documents

Publication Publication Date Title
KR20060095479A (ko) 외관 검사 장치 및 외관 검사 방법
JP4653500B2 (ja) 座標検出装置及び被検体検査装置
KR100885560B1 (ko) 기판검사장치
JP5166290B2 (ja) ステントの内径部を照明および撮像する方法
JP5137488B2 (ja) レーザ照射装置およびそれを用いたレーザ加工システム
JP4166340B2 (ja) 基板検査装置
JP5086687B2 (ja) レーザ加工装置
EP2725348A1 (en) Optical quality control device
CN102621658B (zh) 自动调焦装置
JP2007155448A (ja) 端面検査装置
JP5230240B2 (ja) レーザ加工装置
JP5063173B2 (ja) 異物検査装置
JP4755673B2 (ja) 基板検査装置
JP2013044578A (ja) 基板検査方法及び装置
JP4383047B2 (ja) 外観検査用投光装置及び外観検査装置
KR102035724B1 (ko) 레이저 포인터와 이동식 반사경을 이용한 좌표 검출장치
JP2008175548A (ja) 外観検査装置および外観検査方法
CN107796829B (zh) 检查装置
KR20020083291A (ko) 액정표시장치 글래스 검사장비
JP4576006B2 (ja) 外観検査用投光装置
KR20030042455A (ko) 좌표검출장치
JP2007113941A (ja) 欠陥検査装置及び欠陥検査方法
JP2000266638A (ja) 基板検査装置
CN106461382B (zh) 五轴光学检测系统
KR200238929Y1 (ko) 기판검사장치

Legal Events

Date Code Title Description
A201 Request for examination
E601 Decision to refuse application