TW200632311A - Visual inspection apparatus and visual inspection method - Google Patents
Visual inspection apparatus and visual inspection methodInfo
- Publication number
- TW200632311A TW200632311A TW095104369A TW95104369A TW200632311A TW 200632311 A TW200632311 A TW 200632311A TW 095104369 A TW095104369 A TW 095104369A TW 95104369 A TW95104369 A TW 95104369A TW 200632311 A TW200632311 A TW 200632311A
- Authority
- TW
- Taiwan
- Prior art keywords
- visual inspection
- substrate
- light
- light source
- defect
- Prior art date
Links
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Nonlinear Science (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005052799A JP4633499B2 (ja) | 2005-02-28 | 2005-02-28 | 外観検査装置及び外観検査方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200632311A true TW200632311A (en) | 2006-09-16 |
Family
ID=36946776
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095104369A TW200632311A (en) | 2005-02-28 | 2006-02-09 | Visual inspection apparatus and visual inspection method |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP4633499B2 (zh) |
KR (1) | KR20060095479A (zh) |
CN (1) | CN1828280B (zh) |
TW (1) | TW200632311A (zh) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100831629B1 (ko) * | 2006-08-31 | 2008-05-22 | 동일파텍주식회사 | 병렬지지 방식 매크로 검사장치 |
JP5006024B2 (ja) * | 2006-12-27 | 2012-08-22 | オリンパス株式会社 | 外観検査用投光装置 |
KR101373129B1 (ko) * | 2011-12-30 | 2014-03-13 | 엘아이지에이디피 주식회사 | 기판 검사장비 |
KR101593020B1 (ko) * | 2014-07-09 | 2016-02-11 | 세광테크 주식회사 | 조명 반사판을 구비한 패널 얼라인장치 |
JP6587822B2 (ja) * | 2015-04-22 | 2019-10-09 | 株式会社ブイ・テクノロジー | 外観検査装置 |
CN105115978A (zh) * | 2015-09-09 | 2015-12-02 | 山东华芯富创电子科技有限公司 | 触摸屏检验治具 |
CN107589072A (zh) * | 2017-08-30 | 2018-01-16 | 东莞新友智能科技有限公司 | 一种用于表面检测的光源装置 |
CN108627516A (zh) * | 2018-03-21 | 2018-10-09 | 郑州轻工业学院 | 一种用于空调产品的检修方法以及检修系统 |
CN109030495A (zh) * | 2018-06-26 | 2018-12-18 | 大连鉴影光学科技有限公司 | 一种基于机器视觉技术的光学元件缺陷检测方法 |
JP7111659B2 (ja) * | 2019-06-28 | 2022-08-02 | 矢崎総業株式会社 | 端子の外観検査装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4576006B2 (ja) * | 1998-09-21 | 2010-11-04 | オリンパス株式会社 | 外観検査用投光装置 |
JP4383047B2 (ja) * | 2000-08-24 | 2009-12-16 | オリンパス株式会社 | 外観検査用投光装置及び外観検査装置 |
JP2002374445A (ja) * | 2001-06-12 | 2002-12-26 | Nikon Corp | 電子カメラ |
WO2003102562A1 (fr) * | 2002-05-31 | 2003-12-11 | Olympus Corporation | Dispositif de macro-illumination |
JP4107020B2 (ja) * | 2002-09-06 | 2008-06-25 | セイコーエプソン株式会社 | 液晶パネルの検査装置 |
JP2004153422A (ja) * | 2002-10-29 | 2004-05-27 | Toshiba Corp | 撮影装置、顔照合装置、撮影装置の汚れ検知方法、及び顔照合方法 |
JP4245452B2 (ja) * | 2003-10-06 | 2009-03-25 | 富士通株式会社 | レンズの汚れ判定方法及び装置 |
-
2005
- 2005-02-28 JP JP2005052799A patent/JP4633499B2/ja not_active Expired - Fee Related
-
2006
- 2006-02-09 TW TW095104369A patent/TW200632311A/zh unknown
- 2006-02-24 CN CN2006100576897A patent/CN1828280B/zh not_active Expired - Fee Related
- 2006-02-24 KR KR1020060018372A patent/KR20060095479A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP2006234721A (ja) | 2006-09-07 |
JP4633499B2 (ja) | 2011-02-16 |
KR20060095479A (ko) | 2006-08-31 |
CN1828280B (zh) | 2011-07-13 |
CN1828280A (zh) | 2006-09-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TW200632311A (en) | Visual inspection apparatus and visual inspection method | |
JP4132046B2 (ja) | シート状透明体の欠点を検査する装置 | |
NO20014562D0 (no) | Inspeksjon av materie | |
JP5339707B2 (ja) | 線状集光器 | |
WO2000045196A3 (de) | Verfahren und vorrichtung zur optischen untersuchung von strukturierten oberflächen von objekten | |
EP2256487A3 (en) | Methods for inspection of a specimen using different inspection parameters | |
WO2003023483A3 (de) | Mikroskop | |
GB2126712A (en) | Surface flaw inspection apparatus for a convex body | |
EP2090918A3 (de) | Kalibriervorrichtung und Laser-Scanning-Mikroskop mit einer derartigen Kalibriervorrichtung | |
KR20090113885A (ko) | 자동화 검사를 위해 재료를 조명하는 방법 및 장치 | |
TW200730876A (en) | Optical integrator, illuminating system, exposure system, and manufacturing method of the device | |
DE50114274D1 (de) | Anordnung zum Untersuchen mikroskopischer Präparate mit einem Scanmikroskop und Beleuchtungseinrichtung für ein Scanmikroskop | |
EP1353213A3 (en) | Light source unit and scanning optical apparatus using the same | |
JP2009244037A (ja) | 照明用光源およびそれを用いたパターン検査装置 | |
JP2016024195A5 (zh) | ||
DK0974049T3 (da) | Indretning til identificering af urenheder med diffus spredning i transparente beholdere | |
US20180003936A1 (en) | Measurement apparatus configured to control the on/off state of illumination source | |
KR101969232B1 (ko) | 측면 비전 장치 | |
TW200514136A (en) | Illumination optical system and exposure apparatus having the same | |
EP1542459A3 (en) | Illumination optical system and image projector including the same | |
KR100965409B1 (ko) | 기판 검사 장치 | |
EP1139140A3 (en) | Optical microscope apparatus using convergent beam as illumination light | |
ATE450808T1 (de) | Mikroskopobjektivsystem | |
Harding | Machine vision—lighting | |
KR20020083292A (ko) | 검사기판 조명장치 |