KR20050075140A - 반도체 제조장치의 기판홀더 - Google Patents
반도체 제조장치의 기판홀더 Download PDFInfo
- Publication number
- KR20050075140A KR20050075140A KR1020040003072A KR20040003072A KR20050075140A KR 20050075140 A KR20050075140 A KR 20050075140A KR 1020040003072 A KR1020040003072 A KR 1020040003072A KR 20040003072 A KR20040003072 A KR 20040003072A KR 20050075140 A KR20050075140 A KR 20050075140A
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- Prior art keywords
- substrate
- holder
- boat
- semiconductor
- holder body
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67303—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
- H01L21/67309—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterized by the substrate support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67346—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders characterized by being specially adapted for supporting a single substrate or by comprising a stack of such individual supports
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S414/00—Material or article handling
- Y10S414/135—Associated with semiconductor wafer handling
- Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber
Abstract
Description
Claims (9)
- 반도체 기판에 공정을 진행할 수 있도록 밀폐된 공간을 제공하는 반응튜브가 마련되고, 이 반응튜브가 제공하는 공정공간 내에 장착되어 적어도 하나의 반도체 기판이 로딩되며 상호 상하로 이동되는 제1기판 로딩용 보트와 제2기판 로딩용 보트에 의해 간격이 제공되는 듀얼보트가 마련됨과 더불어, 이 듀얼보트에 반도체 기판이 안착되는 기판홀더가 안착되어져 공정진행 중 반도체 기판의 후면이 은폐되는 반도체 제조장치의 기판홀더에 있어서:상기 기판홀더는 밀폐된 공정공간을 제공하는 반응튜브 내에서 공정진행 중 반도체 기판의 후면이 은폐되도록 홀더본체가 마련되고, 반도체 기판의 로딩/언로딩 시에는 홀더본체로부터 반도체 기판이 듀얼보트를 통해 저부가 지지되어 승강되게 상기 홀더본체에는 그 일부가 홀더본체에서 분리 결합되는 기판승강구가 형성됨과 더불어, 이 홀더본체와 기판승강구의 분리 경계부에는 여기로부터의 반응가스 유입이 방해되게 가스유입 차단면이 형성되어 맞물리게 분리결합되는 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 1 항에 있어서, 가스유입 차단면은 서로 대향되는 테이퍼면으로 형성된 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 1 항에 있어서, 가스유입 차단면은 연속되어 절곡된 절곡계단면으로 형성된 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 1 항에 있어서, 기판승강구는 홀더본체의 측부가드부 내측에 반도체 기판을 적어도 3점 지지하는 지지봉으로 마련되고 홀더본체에는 상기 지지봉이 삽탈되는 관통홀이 형성되며, 이 지지봉의 저부에는 듀얼보트의 제2기판로딩용보트에 의해 작동되는 승강로드가 배치된 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 4 항에 있어서, 승강로드는 그 저부에 삽착홈이 형성되고 이 삽착홈에 제2기판 로딩용보트의 기판지지부의 단부가 삽착되어 결합되는 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 4 항에 있어서, 제2기판로딩용보트에 대체되어 별도의 로봇아암이 배치되고 이 로봇아암에 승강로드가 포함되어 지지봉을 승강시키는 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 1 항에 있어서, 기판승강구는 홀더본체가 상하로 2분할되고 제2기판로딩용 보트에 의해 작동되는 상부 홀더본체는 최소한 반도체 기판을 승강시키면서 반도체 기판의 로딩/언로딩을 위한 로봇아암의 삽입면적을 제공하는 구역으로 절개부가 형성되고, 제1기판 로딩용 보트에 장착되는 하부홀더본체에는 상기 상기 절개부에 맞물리는 돌출턱부가 형성됨과 더불어 그 외주부에는 상기 제2기판 로딩용 보트를 통해 상기 상부홀더본체의 승강이 수행되게 열개부가 형성된 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 1 항에 있어서, 기판승강구는 듀얼보트가 결합되는 홀더본체 부위가 분리되어 제2기판 로딩용보트와 결합되는 기판승강지지대가 형성되며, 이 기판승강지지대는 홀더본체에서 분리되어 적어도 반도체 기판의 외주부를 거치하게 기판 측부 가드부 내측으로 연장되어 형성되는 한편, 제1기판 로딩용보트는 상기 기판승강지지대의 분리가 제공하는 열개부에 이웃하여 홀더본체를 거치시키는 것을 특징으로 하는 반도체 제조장치의 기판홀더.
- 제 8 항에 있어서, 기판승강구본체는 그 저부와 제2기판 로딩용보트의 지지부 중 어느 하나에 결합홀이 형성되고 다른 하나에 이 결합홀과 삽착되는 결합핀이 형성되어 기판승강구본체와 제2기판 로딩용보트가 결합되는 것을 특징으로 하는 반도체 제조장치의 기판홀더.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040003072A KR100549273B1 (ko) | 2004-01-15 | 2004-01-15 | 반도체 제조장치의 기판홀더 |
US10/839,711 US7207763B2 (en) | 2004-01-15 | 2004-05-06 | Semiconductor manufacturing system and wafer holder for semiconductor manufacturing system |
DE102004022933A DE102004022933A1 (de) | 2004-01-15 | 2004-05-10 | Waferhalter für ein Halbleiterherstellungssystem |
JP2004145449A JP3988948B2 (ja) | 2004-01-15 | 2004-05-14 | 半導体製造装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020040003072A KR100549273B1 (ko) | 2004-01-15 | 2004-01-15 | 반도체 제조장치의 기판홀더 |
Publications (2)
Publication Number | Publication Date |
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KR20050075140A true KR20050075140A (ko) | 2005-07-20 |
KR100549273B1 KR100549273B1 (ko) | 2006-02-03 |
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ID=34747831
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KR1020040003072A KR100549273B1 (ko) | 2004-01-15 | 2004-01-15 | 반도체 제조장치의 기판홀더 |
Country Status (4)
Country | Link |
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US (1) | US7207763B2 (ko) |
JP (1) | JP3988948B2 (ko) |
KR (1) | KR100549273B1 (ko) |
DE (1) | DE102004022933A1 (ko) |
Cited By (1)
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KR20210005983A (ko) * | 2014-06-09 | 2021-01-15 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 홀더용의 기판 착탈부, 이것을 구비한 습식 기판 처리 장치, 기판 처리 장치 및 기판 반송 방법 |
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KR20210005983A (ko) * | 2014-06-09 | 2021-01-15 | 가부시키가이샤 에바라 세이사꾸쇼 | 기판 홀더용의 기판 착탈부, 이것을 구비한 습식 기판 처리 장치, 기판 처리 장치 및 기판 반송 방법 |
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KR100549273B1 (ko) | 2006-02-03 |
US20050158164A1 (en) | 2005-07-21 |
US7207763B2 (en) | 2007-04-24 |
JP2005203727A (ja) | 2005-07-28 |
JP3988948B2 (ja) | 2007-10-10 |
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