KR20050029226A - 하프늄 시리사이드 타겟트 및 그 제조방법 - Google Patents
하프늄 시리사이드 타겟트 및 그 제조방법 Download PDFInfo
- Publication number
- KR20050029226A KR20050029226A KR1020057000917A KR20057000917A KR20050029226A KR 20050029226 A KR20050029226 A KR 20050029226A KR 1020057000917 A KR1020057000917 A KR 1020057000917A KR 20057000917 A KR20057000917 A KR 20057000917A KR 20050029226 A KR20050029226 A KR 20050029226A
- Authority
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- South Korea
- Prior art keywords
- ppm
- powder
- less
- target
- hafnium silicide
- Prior art date
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- TWRSDLOICOIGRH-UHFFFAOYSA-N [Si].[Si].[Hf] Chemical compound [Si].[Si].[Hf] TWRSDLOICOIGRH-UHFFFAOYSA-N 0.000 title claims abstract description 54
- 238000000034 method Methods 0.000 title abstract description 15
- 239000000843 powder Substances 0.000 claims abstract description 84
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 40
- 239000001301 oxygen Substances 0.000 claims abstract description 40
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 39
- 239000000203 mixture Substances 0.000 claims abstract description 22
- 230000002706 hydrostatic effect Effects 0.000 claims abstract description 8
- 238000010298 pulverizing process Methods 0.000 claims abstract description 5
- 238000004519 manufacturing process Methods 0.000 claims description 29
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 4
- 229910052726 zirconium Inorganic materials 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 3
- 239000002245 particle Substances 0.000 abstract description 45
- 238000004880 explosion Methods 0.000 abstract description 17
- 230000015572 biosynthetic process Effects 0.000 abstract description 12
- 229910004129 HfSiO Inorganic materials 0.000 abstract description 7
- 238000007731 hot pressing Methods 0.000 abstract description 5
- 230000002194 synthesizing effect Effects 0.000 abstract description 3
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000003825 pressing Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910021332 silicide Inorganic materials 0.000 description 26
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 26
- 235000012431 wafers Nutrition 0.000 description 19
- 238000004544 sputter deposition Methods 0.000 description 17
- 229910004298 SiO 2 Inorganic materials 0.000 description 16
- 239000011863 silicon-based powder Substances 0.000 description 15
- 230000000052 comparative effect Effects 0.000 description 14
- 238000006356 dehydrogenation reaction Methods 0.000 description 14
- 238000010438 heat treatment Methods 0.000 description 14
- 238000003786 synthesis reaction Methods 0.000 description 13
- 238000005245 sintering Methods 0.000 description 12
- 238000003754 machining Methods 0.000 description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 10
- 238000000227 grinding Methods 0.000 description 7
- 229910052735 hafnium Inorganic materials 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 5
- 239000012071 phase Substances 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000007791 liquid phase Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- -1 C: 300 ppm or less Substances 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910000765 intermetallic Inorganic materials 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 150000002362 hafnium Chemical class 0.000 description 1
- 230000000977 initiatory effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000007873 sieving Methods 0.000 description 1
- 238000005477 sputtering target Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
- H01L21/28194—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation by deposition, e.g. evaporation, ALD, CVD, sputtering, laser deposition
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28158—Making the insulator
- H01L21/28167—Making the insulator on single crystalline silicon, e.g. using a liquid, i.e. chemical oxidation
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Ceramic Products (AREA)
- Formation Of Insulating Films (AREA)
Abstract
Description
Claims (7)
- HfSi0.82-0.98로 이루어지며, 산소 함유량이 500∼10000 ppm인 것을 특징으로 하는 게이트 산화막 형성용 하프늄 시리사이드 타겟트
- 제1항에 있어서, 상대 밀도가 95% 이상인 것을 특징으로 하는 게이트 산화막 형성용 하프늄 시리사이드 타겟트
- 제1항 또는 제2항에 있어서, 지르코늄의 함유량이 2.5 wt% 이하인 것을 특징으로 하는 게이트 산화막 형성용 하프늄 시리사이드 타겟트
- 제1항 내지 제3항 중 어느 한 항에 있어서, 불순물로서 C : 300ppm 이하, Ti : 100ppm 이하, Mo : l00ppm 이하, W : 10ppm 이하, Nb : l0ppm 이하, Fe : 10ppm 이하, Ni : 10ppm 이하, Cr : 10ppm 이하, Na : 0.1ppm 이하, K : 0.1ppm 이하, U : 0.01ppm 이하, Th : 0.01ppm 이하인 것을 특징으로 하는 게이트 산화막 형성용 하프늄 시리사이드 타겟트
- 제1항 내지 제4항 중 어느 한 항에 있어서, 평균 결정 입경이 5∼200㎛인 것을 특징으로 하는 게이트 산화막 형성용 하프늄 시리사이드 타겟트
- HfSi0.82-0.98로 이루어지는 조성의 분말을 합성하여, 이것을 100 메쉬 이하(언더)로 분쇄한 것을 1700℃∼2120℃, 150∼2000 kgf/㎠에서 핫 프레스 또는 열간 정수압 프레스(HIP) 하는 것을 특징으로 하는 게이트 산화막 형성용 하프늄 시리사이드 타겟트의 제조방법
- 제1항 내지 제6항 중 어느 한 항에 있어서, HfSi0.82-0.98로 이루어지는 조성의 분말을 합성하여, 이것을 100 메쉬 이하로 분쇄한 것을 1700℃∼2120℃, 150∼2000 kgf/㎠에서 핫 프레스 또는 열간 정수압 프레스(HIP) 하는 것을 특징으로 하는 게이트 산화막 형성용 하프늄 시리사이드 타겟트의 제조방법
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002228143 | 2002-08-06 | ||
JPJP-P-2002-00228143 | 2002-08-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20050029226A true KR20050029226A (ko) | 2005-03-24 |
KR100611904B1 KR100611904B1 (ko) | 2006-08-11 |
Family
ID=31884315
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020057000917A KR100611904B1 (ko) | 2002-08-06 | 2003-07-03 | 하프늄 시리사이드 타겟트 및 그 제조방법 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6986834B2 (ko) |
EP (1) | EP1528120B1 (ko) |
JP (2) | JP4160557B2 (ko) |
KR (1) | KR100611904B1 (ko) |
CN (1) | CN100335676C (ko) |
DE (1) | DE60336726D1 (ko) |
TW (1) | TWI255297B (ko) |
WO (1) | WO2004016825A1 (ko) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3995082B2 (ja) * | 2001-07-18 | 2007-10-24 | 日鉱金属株式会社 | ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法 |
JP4526758B2 (ja) * | 2002-09-11 | 2010-08-18 | 日鉱金属株式会社 | 珪化鉄粉末及びその製造方法 |
JP4388263B2 (ja) * | 2002-09-11 | 2009-12-24 | 日鉱金属株式会社 | 珪化鉄スパッタリングターゲット及びその製造方法 |
JP4203070B2 (ja) * | 2003-03-07 | 2008-12-24 | 日鉱金属株式会社 | ハフニウム合金ターゲット及びその製造方法 |
US7964070B2 (en) * | 2003-07-25 | 2011-06-21 | Jx Nippon Mining & Metals Corporation | Highly pure hafnium material, target thin film comprising the same and method for producing highly pure hafnium |
US20060266158A1 (en) * | 2003-11-19 | 2006-11-30 | Nikko Materials Co., Ltd. | High purity hafnium, target and thin film comprising said high purity hafnium, and method for producing high purity hafnium |
KR100623177B1 (ko) * | 2005-01-25 | 2006-09-13 | 삼성전자주식회사 | 높은 유전율을 갖는 유전체 구조물, 이의 제조 방법, 이를포함하는 불휘발성 반도체 메모리 장치 및 그 제조 방법 |
KR100968396B1 (ko) * | 2005-07-07 | 2010-07-07 | 닛코 킨조쿠 가부시키가이샤 | 고순도 하프늄, 고순도 하프늄으로 이루어지는 타겟 및박막 그리고 고순도 하프늄의 제조 방법 |
US7871942B2 (en) * | 2008-03-27 | 2011-01-18 | Applied Materials, Inc. | Methods for manufacturing high dielectric constant film |
JP2009167530A (ja) * | 2009-02-10 | 2009-07-30 | Nippon Mining & Metals Co Ltd | ニッケル合金スパッタリングターゲット及びニッケルシリサイド膜 |
CN111777072B (zh) * | 2020-07-23 | 2022-05-20 | 辽宁中色新材科技有限公司 | 一种二硅化铪的生产工艺 |
CN112144024B (zh) * | 2020-09-14 | 2022-12-02 | 浙江最成半导体科技有限公司 | 一种铬硅化物靶材及其制备方法 |
CN116789451A (zh) * | 2023-06-06 | 2023-09-22 | 先导薄膜材料(广东)有限公司 | 一种掺硅锗锑碲靶材及其制备方法 |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4619697A (en) | 1984-08-30 | 1986-10-28 | Mitsubishi Kinzoku Kabushiki Kaisha | Sputtering target material and process for producing the same |
JPS6272122A (ja) * | 1985-09-25 | 1987-04-02 | Nec Corp | 高融点金属シリサイドの形成方法 |
US5209835A (en) * | 1988-03-03 | 1993-05-11 | Asahi Glass Company Ltd. | Method for producing a specified zirconium-silicon amorphous oxide film composition by sputtering |
JP2907907B2 (ja) * | 1988-12-21 | 1999-06-21 | 株式会社東芝 | スパッタリング用ターゲットおよびその製造方法 |
US5294321A (en) * | 1988-12-21 | 1994-03-15 | Kabushiki Kaisha Toshiba | Sputtering target |
KR940008936B1 (ko) | 1990-02-15 | 1994-09-28 | 가부시끼가이샤 도시바 | 고순도 금속재와 그 성질을 이용한 반도체 장치 및 그 제조방법 |
EP0483375B1 (en) | 1990-05-15 | 1996-03-13 | Kabushiki Kaisha Toshiba | Sputtering target and production thereof |
JPH05230644A (ja) * | 1991-12-24 | 1993-09-07 | Asahi Glass Co Ltd | セラミックス回転カソードターゲットおよびその製造法 |
JPH05214523A (ja) | 1992-02-05 | 1993-08-24 | Toshiba Corp | スパッタリングターゲットおよびその製造方法 |
JP3792007B2 (ja) * | 1997-06-12 | 2006-06-28 | 株式会社日鉱マテリアルズ | スパッタリングターゲットの製造方法 |
DE69808664T2 (de) | 1997-07-15 | 2003-07-24 | Tosoh Smd, Inc. | Feuerfeste metall-silizid-legierung sputter-targets, dessen verwendung und herstellung |
JP2000188400A (ja) | 1998-11-09 | 2000-07-04 | Texas Instr Inc <Ti> | 半導体デバイスを形成する方法 |
US6165413A (en) * | 1999-07-08 | 2000-12-26 | Praxair S.T. Technology, Inc. | Method of making high density sputtering targets |
JP4501250B2 (ja) | 2000-06-19 | 2010-07-14 | 日鉱金属株式会社 | 耐脆化性に優れたゲート酸化膜形成用シリサイドターゲット |
JP4642813B2 (ja) * | 2000-06-19 | 2011-03-02 | Jx日鉱日石金属株式会社 | 耐脆化性に優れたゲート酸化膜形成用シリサイドターゲット及び同シリサイドターゲット製造方法 |
JP4813425B2 (ja) * | 2000-06-19 | 2011-11-09 | Jx日鉱日石金属株式会社 | 耐脆化性に優れたゲート酸化膜形成用シリサイドターゲットの製造方法 |
JP5036936B2 (ja) * | 2001-03-12 | 2012-09-26 | Jx日鉱日石金属株式会社 | ゲート酸化膜形成用シリサイドターゲット及びその製造方法 |
JP4596379B2 (ja) | 2001-07-09 | 2010-12-08 | Jx日鉱日石金属株式会社 | ゲート酸化膜形成用ハフニウムシリサイドターゲット |
JP3995082B2 (ja) * | 2001-07-18 | 2007-10-24 | 日鉱金属株式会社 | ゲート酸化膜形成用ハフニウムシリサイドターゲット及びその製造方法 |
US6759005B2 (en) * | 2002-07-23 | 2004-07-06 | Heraeus, Inc. | Fabrication of B/C/N/O/Si doped sputtering targets |
-
2003
- 2003-07-03 EP EP03788008A patent/EP1528120B1/en not_active Expired - Lifetime
- 2003-07-03 DE DE60336726T patent/DE60336726D1/de not_active Expired - Lifetime
- 2003-07-03 KR KR1020057000917A patent/KR100611904B1/ko active IP Right Grant
- 2003-07-03 JP JP2004528832A patent/JP4160557B2/ja not_active Expired - Fee Related
- 2003-07-03 CN CNB038012499A patent/CN100335676C/zh not_active Expired - Fee Related
- 2003-07-03 WO PCT/JP2003/008461 patent/WO2004016825A1/ja active Application Filing
- 2003-07-03 US US10/487,400 patent/US6986834B2/en not_active Expired - Lifetime
- 2003-07-04 TW TW092118302A patent/TWI255297B/zh not_active IP Right Cessation
-
2008
- 2008-06-13 JP JP2008155302A patent/JP4777390B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
CN100335676C (zh) | 2007-09-05 |
WO2004016825A1 (ja) | 2004-02-26 |
CN1568378A (zh) | 2005-01-19 |
EP1528120A4 (en) | 2008-04-02 |
JPWO2004016825A1 (ja) | 2005-12-02 |
EP1528120A1 (en) | 2005-05-04 |
EP1528120B1 (en) | 2011-04-13 |
JP4160557B2 (ja) | 2008-10-01 |
JP2008291366A (ja) | 2008-12-04 |
JP4777390B2 (ja) | 2011-09-21 |
US20040195094A1 (en) | 2004-10-07 |
TW200402477A (en) | 2004-02-16 |
DE60336726D1 (de) | 2011-05-26 |
KR100611904B1 (ko) | 2006-08-11 |
US6986834B2 (en) | 2006-01-17 |
TWI255297B (en) | 2006-05-21 |
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