KR20040100485A - 질소 플라즈마 처리된 ito 필름 및 이를 양극으로사용한 유기 발광 소자 - Google Patents
질소 플라즈마 처리된 ito 필름 및 이를 양극으로사용한 유기 발광 소자 Download PDFInfo
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- KR20040100485A KR20040100485A KR1020030032864A KR20030032864A KR20040100485A KR 20040100485 A KR20040100485 A KR 20040100485A KR 1020030032864 A KR1020030032864 A KR 1020030032864A KR 20030032864 A KR20030032864 A KR 20030032864A KR 20040100485 A KR20040100485 A KR 20040100485A
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- Prior art keywords
- nitrogen
- ito
- light emitting
- plasma
- organic light
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 87
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 45
- 239000007789 gas Substances 0.000 claims abstract description 24
- 238000002347 injection Methods 0.000 claims abstract description 24
- 239000007924 injection Substances 0.000 claims abstract description 24
- 229910017464 nitrogen compound Inorganic materials 0.000 claims abstract description 20
- 150000002830 nitrogen compounds Chemical class 0.000 claims abstract description 20
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 12
- 125000004430 oxygen atom Chemical group O* 0.000 claims abstract description 9
- 125000004433 nitrogen atom Chemical group N* 0.000 claims abstract description 8
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052738 indium Inorganic materials 0.000 claims abstract description 5
- 229910052718 tin Inorganic materials 0.000 claims abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 30
- 239000001301 oxygen Substances 0.000 claims description 29
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 28
- 238000009832 plasma treatment Methods 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- 229910021529 ammonia Inorganic materials 0.000 claims description 5
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 229910044991 metal oxide Inorganic materials 0.000 claims description 3
- 150000004706 metal oxides Chemical class 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 230000008021 deposition Effects 0.000 claims description 2
- DKHNGUNXLDCATP-UHFFFAOYSA-N dipyrazino[2,3-f:2',3'-h]quinoxaline-2,3,6,7,10,11-hexacarbonitrile Chemical compound C12=NC(C#N)=C(C#N)N=C2C2=NC(C#N)=C(C#N)N=C2C2=C1N=C(C#N)C(C#N)=N2 DKHNGUNXLDCATP-UHFFFAOYSA-N 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 229910052739 hydrogen Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 59
- 239000000203 mixture Substances 0.000 abstract description 6
- 150000004767 nitrides Chemical class 0.000 abstract description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 abstract description 2
- -1 nitride compound Chemical class 0.000 abstract 3
- 238000005401 electroluminescence Methods 0.000 abstract 1
- 239000011229 interlayer Substances 0.000 abstract 1
- 230000000087 stabilizing effect Effects 0.000 abstract 1
- 230000000052 comparative effect Effects 0.000 description 17
- 239000010408 film Substances 0.000 description 11
- 239000011368 organic material Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 230000005525 hole transport Effects 0.000 description 8
- 229910001873 dinitrogen Inorganic materials 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 239000010409 thin film Substances 0.000 description 5
- VVTSZOCINPYFDP-UHFFFAOYSA-N [O].[Ar] Chemical compound [O].[Ar] VVTSZOCINPYFDP-UHFFFAOYSA-N 0.000 description 4
- 150000001875 compounds Chemical class 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 239000012153 distilled water Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 229910003437 indium oxide Inorganic materials 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229920000547 conjugated polymer Polymers 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- PDNNQADNLPRFPG-UHFFFAOYSA-N N.[O] Chemical compound N.[O] PDNNQADNLPRFPG-UHFFFAOYSA-N 0.000 description 1
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000032900 absorption of visible light Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 239000003599 detergent Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052809 inorganic oxide Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 210000004180 plasmocyte Anatomy 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
- H05B33/28—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/12—Light sources with substantially two-dimensional radiating surfaces
- H05B33/26—Light sources with substantially two-dimensional radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/81—Electrodes
- H10K30/82—Transparent electrodes, e.g. indium tin oxide [ITO] electrodes
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- H—ELECTRICITY
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H10K50/81—Anodes
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
- H10K50/17—Carrier injection layers
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/30—Coordination compounds
- H10K85/321—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3]
- H10K85/324—Metal complexes comprising a group IIIA element, e.g. Tris (8-hydroxyquinoline) gallium [Gaq3] comprising aluminium, e.g. Alq3
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/626—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene containing more than one polycyclic condensed aromatic rings, e.g. bis-anthracene
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/631—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine
- H10K85/633—Amine compounds having at least two aryl rest on at least one amine-nitrogen atom, e.g. triphenylamine comprising polycyclic condensed aromatic hydrocarbons as substituents on the nitrogen atom
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- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
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- H10K85/649—Aromatic compounds comprising a hetero atom
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
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- H10K85/649—Aromatic compounds comprising a hetero atom
- H10K85/657—Polycyclic condensed heteroaromatic hydrocarbons
- H10K85/6572—Polycyclic condensed heteroaromatic hydrocarbons comprising only nitrogen in the heteroaromatic polycondensed ring system, e.g. phenanthroline or carbazole
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Physical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
Abstract
Description
광효율(cd/A)(100mA/㎠) | 구동 전압(V)(10mA/㎠) | 수명(12)(100mA/㎠) | |
비교예 2O2플라즈마 | 3.1 | 4.5 | 50시간 |
비교예 3Ar: O2플라즈마 | 3.5 | 4.3 | 200시간 |
비교예 4Ar 플라즈마 | 2.9 | 3.7 | 335시간 |
실시예 1N2플라즈마 | 3.9 | 3.9 | 500시간 이상 |
ITO처리조건 | 일함수(eV) | 원자 조성비 % | |||
In | Sn | O | N | ||
비교예 1무처리 | 4.94 | 37.0 | 7.0 | 56.0 | |
비교예 2O2플라즈마 | 5.85 | 39.9 | 3.0 | 57.1 | |
비교예 3Ar:O2플라즈마 | 5.87 | 40.0 | 3.0 | 57.0 | |
비교예 4Ar 플라즈마 | 5.15 | 40.5 | 2.5 | 56.0 | |
실시예 1N2플라즈마 | 4.89 | 35.8 | 2.4 | 48.7 | 13.3 |
Claims (9)
- 인듐 주석 산화물(Indium Tin Oxide, ITO)을 포함하는 필름의 표면에 상기 ITO의 구성원소인 In, Sn, O 원자들 중 1종 이상과 질소가 반응하여 생성된 질소 화합물, 또는 질소 원자를 함유하는 증착된 질소 화합물을 포함하는 ITO 필름.
- 제1항에 있어서, 상기 질소 화합물 표면은 ITO 필름을 질소 플라즈마 처리하여 형성시킨 것이 특징인 ITO 필름.
- 제2항에 있어서, 질소 플라즈마의 방전 가스로 질소 또는 암모니아 단독 또는 질소와 암모니아를 포함한 혼합가스를 사용하는 것이 특징인 ITO 필름.
- 제2항에 있어서, 질소 플라즈마의 방전 가스로 질소와 암모니아에서 선택된 1종 이상의 가스와; 산소, 아르곤, 및 수소로 구성된 군에서 선택된 1종 이상 가스의 혼합 가스를 사용하는 것이 특징인 ITO 필름.
- 인듐 주석 산화물(Indium Tin Oxide, ITO)을 포함하는 필름의 표면을 질소 플라즈마 처리하는 것이 특징인 ITO 필름의 제조 방법.
- 기판, 양극, 발광층, 음극을 포함하는 유기 발광 소자에 있어서, 양극으로제1항 내지 제4항 중 어느 한 항의 ITO 필름을 사용하는 것이 특징인 유기 발광 소자.
- 기판, 양극, 발광층, 음극을 포함하는 유기 발광 소자에 있어서, 양극으로 제5항의 제조방법에 의해 제조된 ITO 필름을 사용하는 것이 특징인 유기 발광 소자.
- 제6항 또는 제7항에 있어서, 유기 발광 소자는 정공 주입층을 포함하고, 정공 주입층이 Hexaazatriphenylenehexacabonitrile HAT-hexacarbonitrile을 포함하는 것이 특징인 유기발광소자.
- 질소 플라즈마 처리된 유기 발광 소자 양극용 금속 산화물 전도체.
Priority Applications (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030032864A KR100808790B1 (ko) | 2003-05-23 | 2003-05-23 | 질소 플라즈마 처리된 ito 필름 및 이를 양극으로사용한 유기 발광 소자 |
CN201310078245.1A CN103199201B (zh) | 2003-05-23 | 2004-05-19 | 由氮等离子体处理的ito膜及使用该ito膜的有机电致发光设备 |
US10/555,056 US7619356B2 (en) | 2003-05-23 | 2004-05-19 | ITO film treated by nitrogen plasma and the organic luminescent device using the same |
JP2006500696A JP4350745B2 (ja) | 2003-05-23 | 2004-05-19 | 窒素プラズマ処理されたitoフィルム及びこれを陽極として使用した有機発光素子 |
EP04733999.9A EP1629700B1 (en) | 2003-05-23 | 2004-05-19 | Ito film treated by nitrogen plasma and the organic luminescent device using the same |
CNA2004800113150A CN1781342A (zh) | 2003-05-23 | 2004-05-19 | 由氮等离子体处理的ito膜及使用该ito膜的有机电致发光设备 |
PCT/KR2004/001181 WO2004105447A1 (en) | 2003-05-23 | 2004-05-19 | Ito film treated by nitrogen plasma and the organic luminescent device using the same |
TW093114298A TWI324495B (en) | 2003-05-23 | 2004-05-20 | Ito film treated by nitrogen plasma and the organic luminescent device using the same |
US12/588,692 US8304983B2 (en) | 2003-05-23 | 2009-10-23 | ITO film treated by nitrogen plasma and the organic luminescent device using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020030032864A KR100808790B1 (ko) | 2003-05-23 | 2003-05-23 | 질소 플라즈마 처리된 ito 필름 및 이를 양극으로사용한 유기 발광 소자 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20040100485A true KR20040100485A (ko) | 2004-12-02 |
KR100808790B1 KR100808790B1 (ko) | 2008-03-03 |
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Application Number | Title | Priority Date | Filing Date |
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KR1020030032864A KR100808790B1 (ko) | 2003-05-23 | 2003-05-23 | 질소 플라즈마 처리된 ito 필름 및 이를 양극으로사용한 유기 발광 소자 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7619356B2 (ko) |
EP (1) | EP1629700B1 (ko) |
JP (1) | JP4350745B2 (ko) |
KR (1) | KR100808790B1 (ko) |
CN (2) | CN1781342A (ko) |
TW (1) | TWI324495B (ko) |
WO (1) | WO2004105447A1 (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100761112B1 (ko) * | 2006-01-13 | 2007-09-21 | 엘지전자 주식회사 | 전계발광소자의 제조방법 |
KR100903101B1 (ko) * | 2005-02-07 | 2009-06-16 | 삼성모바일디스플레이주식회사 | 유기전계 발광표시장치 및 그의 제조방법 |
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Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
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Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0617957B2 (ja) * | 1985-05-15 | 1994-03-09 | セイコー電子工業株式会社 | 液晶表示装置 |
EP0406762B1 (en) | 1989-07-04 | 1994-09-28 | Mitsubishi Chemical Corporation | Organic electroluminescent device |
JPH0337292A (ja) | 1989-07-04 | 1991-02-18 | Mitsubishi Kasei Corp | 有機電界発光素子 |
US5779802A (en) * | 1990-12-10 | 1998-07-14 | Imec V.Z.W. | Thin film deposition chamber with ECR-plasma source |
JPH04293767A (ja) | 1991-03-22 | 1992-10-19 | Ulvac Japan Ltd | 透明導電膜の製造方法およびその製造装置 |
JP2940477B2 (ja) | 1995-08-11 | 1999-08-25 | 株式会社デンソー | 誘電体薄膜と透明導電膜との積層膜および誘電体薄膜を用いた薄膜el素子 |
AU3715997A (en) | 1996-06-12 | 1998-01-07 | Trustees Of Princeton University, The | Plasma treatment of conductive layers |
US5714838A (en) | 1996-09-20 | 1998-02-03 | International Business Machines Corporation | Optically transparent diffusion barrier and top electrode in organic light emitting diode structures |
KR100232171B1 (ko) * | 1997-06-27 | 1999-12-01 | 구자홍 | 유기 전계 발광 소자 및 그 제조방법 |
KR100377321B1 (ko) * | 1999-12-31 | 2003-03-26 | 주식회사 엘지화학 | 피-형 반도체 성질을 갖는 유기 화합물을 포함하는 전기소자 |
KR100344777B1 (ko) | 2000-02-28 | 2002-07-20 | 엘지.필립스 엘시디 주식회사 | 박막트랜지스터를 포함하는 소자 제조방법 |
TW461124B (en) | 2000-11-14 | 2001-10-21 | Advanced Epitaxy Technology In | Light emitting diode device with high light transmittance |
US6998487B2 (en) | 2001-04-27 | 2006-02-14 | Lg Chem, Ltd. | Double-spiro organic compounds and organic electroluminescent devices using the same |
KR100398590B1 (ko) * | 2001-05-17 | 2003-09-19 | 비오이 하이디스 테크놀로지 주식회사 | 박막트랜지스터 액정표시장치의 제조방법 |
US6896981B2 (en) * | 2001-07-24 | 2005-05-24 | Bridgestone Corporation | Transparent conductive film and touch panel |
KR20090091831A (ko) * | 2001-10-02 | 2009-08-28 | 도꾸리쯔교세이호진상교기쥬쯔소고겡뀨죠 | 금속산화물 박막 및 그 제조방법 |
JP2003264075A (ja) * | 2002-03-08 | 2003-09-19 | Pioneer Electronic Corp | 有機エレクトロルミネッセンス素子の製造方法 |
JP2003282274A (ja) * | 2002-03-25 | 2003-10-03 | Dainippon Printing Co Ltd | El電極の製造方法 |
JP2004170724A (ja) * | 2002-11-20 | 2004-06-17 | Sharp Corp | 液晶表示装置の製造方法 |
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Cited By (5)
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KR100903101B1 (ko) * | 2005-02-07 | 2009-06-16 | 삼성모바일디스플레이주식회사 | 유기전계 발광표시장치 및 그의 제조방법 |
KR100761112B1 (ko) * | 2006-01-13 | 2007-09-21 | 엘지전자 주식회사 | 전계발광소자의 제조방법 |
KR20150080282A (ko) * | 2013-12-31 | 2015-07-09 | 엘지디스플레이 주식회사 | 유기전계발광표시장치 |
KR20160097600A (ko) * | 2015-02-09 | 2016-08-18 | 주식회사 엘지화학 | 유기 발광 소자 |
KR20180044118A (ko) * | 2016-10-21 | 2018-05-02 | 엘지이노텍 주식회사 | 반도체 소자 및 이를 포함하는 반도체 소자 패키지 |
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Publication number | Publication date |
---|---|
JP4350745B2 (ja) | 2009-10-21 |
US8304983B2 (en) | 2012-11-06 |
US20060209529A1 (en) | 2006-09-21 |
CN103199201B (zh) | 2016-06-22 |
CN103199201A (zh) | 2013-07-10 |
CN1781342A (zh) | 2006-05-31 |
US7619356B2 (en) | 2009-11-17 |
EP1629700A1 (en) | 2006-03-01 |
US20100044694A1 (en) | 2010-02-25 |
TW200427372A (en) | 2004-12-01 |
WO2004105447A1 (en) | 2004-12-02 |
KR100808790B1 (ko) | 2008-03-03 |
TWI324495B (en) | 2010-05-01 |
JP2006526872A (ja) | 2006-11-24 |
EP1629700A4 (en) | 2008-04-16 |
EP1629700B1 (en) | 2014-04-16 |
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