KR20040062572A - 음영 생성 장치 - Google Patents

음영 생성 장치 Download PDF

Info

Publication number
KR20040062572A
KR20040062572A KR10-2004-7005779A KR20047005779A KR20040062572A KR 20040062572 A KR20040062572 A KR 20040062572A KR 20047005779 A KR20047005779 A KR 20047005779A KR 20040062572 A KR20040062572 A KR 20040062572A
Authority
KR
South Korea
Prior art keywords
chip
cavity
depression
gray scale
shadow
Prior art date
Application number
KR10-2004-7005779A
Other languages
English (en)
Korean (ko)
Inventor
말콤 브이. 호크스
존 스튜어트 라이트
로버트 에스. 부르고인
제프리 엘. 피쉬
Original Assignee
일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드 filed Critical 일렉트로 싸이언티픽 인더스트리이즈 인코포레이티드
Publication of KR20040062572A publication Critical patent/KR20040062572A/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Landscapes

  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Automatic Analysis And Handling Materials Therefor (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
KR10-2004-7005779A 2001-11-27 2002-11-14 음영 생성 장치 KR20040062572A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US33369001P 2001-11-27 2001-11-27
US60/333,690 2001-11-27
PCT/US2002/036619 WO2003046510A2 (en) 2001-11-27 2002-11-14 A shadow-creating apparatus

Publications (1)

Publication Number Publication Date
KR20040062572A true KR20040062572A (ko) 2004-07-07

Family

ID=23303855

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7005779A KR20040062572A (ko) 2001-11-27 2002-11-14 음영 생성 장치

Country Status (8)

Country Link
JP (1) JP2005523424A (de)
KR (1) KR20040062572A (de)
CN (1) CN1328775C (de)
AU (1) AU2002346400A1 (de)
DE (1) DE10297486T5 (de)
GB (1) GB2397172B (de)
TW (1) TW577163B (de)
WO (1) WO2003046510A2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180016339A (ko) * 2015-05-26 2018-02-14 스미또모 가가꾸 가부시키가이샤 편광판 제조용 클린룸
CN110379784B (zh) * 2019-07-23 2021-05-07 深圳市优一达电子有限公司 一种半导体封装结构

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4312117A (en) * 1977-09-01 1982-01-26 Raytheon Company Integrated test and assembly device
JPH0680602B2 (ja) * 1987-11-28 1994-10-12 株式会社村田製作所 電子部品チップ保持治具および電子部品チップ取扱い方法
US5123850A (en) * 1990-04-06 1992-06-23 Texas Instruments Incorporated Non-destructive burn-in test socket for integrated circuit die
US5088190A (en) * 1990-08-30 1992-02-18 Texas Instruments Incorporated Method of forming an apparatus for burn in testing of integrated circuit chip
US5543725A (en) * 1993-08-25 1996-08-06 Sunright Limited Reusable carrier for burn-in/testing on non packaged die
US5673799A (en) * 1995-06-05 1997-10-07 Chip Star Inc. Machine for testing and sorting capacitor chips and method of operating same
AU7673598A (en) * 1997-06-12 1998-12-30 Nikon Corporation Substrate for device manufacturing, process for manufacturing the substrate, andmethod of exposure using the substrate
GB2349205B (en) * 1999-04-19 2003-12-31 Applied Materials Inc Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another
ATE361792T1 (de) * 2000-05-23 2007-06-15 Electro Scient Ind Inc Inspektionsmachine für passives oberflächenmontiertes bauelement

Also Published As

Publication number Publication date
WO2003046510A9 (en) 2004-03-25
AU2002346400A8 (en) 2003-06-10
GB2397172B (en) 2005-05-11
DE10297486T5 (de) 2004-12-02
JP2005523424A (ja) 2005-08-04
GB2397172A (en) 2004-07-14
WO2003046510A2 (en) 2003-06-05
WO2003046510A3 (en) 2003-11-27
GB0407477D0 (en) 2004-05-05
TW577163B (en) 2004-02-21
CN1575513A (zh) 2005-02-02
WO2003046510B1 (en) 2004-04-29
CN1328775C (zh) 2007-07-25
TW200301008A (en) 2003-06-16
AU2002346400A1 (en) 2003-06-10

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application