AU2002346400A8 - A shadow-creating apparatus - Google Patents

A shadow-creating apparatus

Info

Publication number
AU2002346400A8
AU2002346400A8 AU2002346400A AU2002346400A AU2002346400A8 AU 2002346400 A8 AU2002346400 A8 AU 2002346400A8 AU 2002346400 A AU2002346400 A AU 2002346400A AU 2002346400 A AU2002346400 A AU 2002346400A AU 2002346400 A8 AU2002346400 A8 AU 2002346400A8
Authority
AU
Australia
Prior art keywords
shadow
creating apparatus
creating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002346400A
Other versions
AU2002346400A1 (en
Inventor
Robert S Burgoyne
Jeffrey L Fish
Malcolm V Hawkes
Jon Stuart Wright
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electro Scientific Industries Inc
Original Assignee
Electro Scientific Industries Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scientific Industries Inc filed Critical Electro Scientific Industries Inc
Publication of AU2002346400A8 publication Critical patent/AU2002346400A8/en
Publication of AU2002346400A1 publication Critical patent/AU2002346400A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects
    • G01N21/95684Patterns showing highly reflecting parts, e.g. metallic elements
AU2002346400A 2001-11-27 2002-11-14 A shadow-creating apparatus Abandoned AU2002346400A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US33369001P 2001-11-27 2001-11-27
US60/333,690 2001-11-27
PCT/US2002/036619 WO2003046510A2 (en) 2001-11-27 2002-11-14 A shadow-creating apparatus

Publications (2)

Publication Number Publication Date
AU2002346400A8 true AU2002346400A8 (en) 2003-06-10
AU2002346400A1 AU2002346400A1 (en) 2003-06-10

Family

ID=23303855

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002346400A Abandoned AU2002346400A1 (en) 2001-11-27 2002-11-14 A shadow-creating apparatus

Country Status (8)

Country Link
JP (1) JP2005523424A (en)
KR (1) KR20040062572A (en)
CN (1) CN1328775C (en)
AU (1) AU2002346400A1 (en)
DE (1) DE10297486T5 (en)
GB (1) GB2397172B (en)
TW (1) TW577163B (en)
WO (1) WO2003046510A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180016339A (en) * 2015-05-26 2018-02-14 스미또모 가가꾸 가부시키가이샤 Clean room for polarizer manufacturing
CN110379784B (en) * 2019-07-23 2021-05-07 深圳市优一达电子有限公司 Semiconductor packaging structure

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4312117A (en) * 1977-09-01 1982-01-26 Raytheon Company Integrated test and assembly device
JPH0680602B2 (en) * 1987-11-28 1994-10-12 株式会社村田製作所 Electronic component chip holding jig and electronic component chip handling method
US5123850A (en) * 1990-04-06 1992-06-23 Texas Instruments Incorporated Non-destructive burn-in test socket for integrated circuit die
US5088190A (en) * 1990-08-30 1992-02-18 Texas Instruments Incorporated Method of forming an apparatus for burn in testing of integrated circuit chip
US5543725A (en) * 1993-08-25 1996-08-06 Sunright Limited Reusable carrier for burn-in/testing on non packaged die
US5673799A (en) * 1995-06-05 1997-10-07 Chip Star Inc. Machine for testing and sorting capacitor chips and method of operating same
WO1998057361A1 (en) * 1997-06-12 1998-12-17 Nikon Corporation Substrate for device manufacturing, process for manufacturing the substrate, and method of exposure using the substrate
GB2349205B (en) * 1999-04-19 2003-12-31 Applied Materials Inc Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another
US6294747B1 (en) * 1999-06-02 2001-09-25 Electro Scientific Industries, Inc. Inspection machine for surface mount passive component

Also Published As

Publication number Publication date
CN1575513A (en) 2005-02-02
KR20040062572A (en) 2004-07-07
WO2003046510A9 (en) 2004-03-25
GB2397172B (en) 2005-05-11
CN1328775C (en) 2007-07-25
WO2003046510A2 (en) 2003-06-05
GB0407477D0 (en) 2004-05-05
TW577163B (en) 2004-02-21
WO2003046510A3 (en) 2003-11-27
GB2397172A (en) 2004-07-14
TW200301008A (en) 2003-06-16
WO2003046510B1 (en) 2004-04-29
JP2005523424A (en) 2005-08-04
DE10297486T5 (en) 2004-12-02
AU2002346400A1 (en) 2003-06-10

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase