WO2003046510B1 - A shadow-creating apparatus - Google Patents

A shadow-creating apparatus

Info

Publication number
WO2003046510B1
WO2003046510B1 PCT/US2002/036619 US0236619W WO03046510B1 WO 2003046510 B1 WO2003046510 B1 WO 2003046510B1 US 0236619 W US0236619 W US 0236619W WO 03046510 B1 WO03046510 B1 WO 03046510B1
Authority
WO
WIPO (PCT)
Prior art keywords
chip
cavity
depression
grayness
shadow
Prior art date
Application number
PCT/US2002/036619
Other languages
French (fr)
Other versions
WO2003046510A9 (en
WO2003046510A2 (en
WO2003046510A3 (en
Inventor
Malcolm V Hawkes
Jon Stuart Wright
Robert S Burgoyne
Jeffrey L Fish
Original Assignee
Electro Scient Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electro Scient Ind Inc filed Critical Electro Scient Ind Inc
Priority to DE10297486T priority Critical patent/DE10297486T5/en
Priority to AU2002346400A priority patent/AU2002346400A1/en
Priority to KR10-2004-7005779A priority patent/KR20040062572A/en
Priority to GB0407477A priority patent/GB2397172B/en
Priority to JP2003547902A priority patent/JP2005523424A/en
Publication of WO2003046510A2 publication Critical patent/WO2003046510A2/en
Publication of WO2003046510A3 publication Critical patent/WO2003046510A3/en
Publication of WO2003046510A9 publication Critical patent/WO2003046510A9/en
Publication of WO2003046510B1 publication Critical patent/WO2003046510B1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G01N21/95684—Patterns showing highly reflecting parts, e.g. metallic elements

Abstract

An apparatus (12) for accurately locating a micro-electronic chip (9) in a chip-holding cavity (28) for visual testing, the chip (9) having at least a front wall and a pair of opposed, spaced-apart side walls, wherein the front wall meets with each of the side walls to form opposed, spaced-apart first and second front edges, comprising a cavity side wall formed to juxtapositionally about at least one of the side walls of the chip, the cavity side wall having formed therein a depression creating a shadow projecting forward from the depression, wherein the first front edge of the chip (9) forms a border of the shadow to form an objectively measurable contrast in grayness between the shadow and the chip (9).

Claims

AMENDED CLAIMS[Received by the International Bureau on 04 MAR 2004 (04.03.04) ; original claims 11, amended ; original claims 1-10 and 12-22, unchanged ; original claims 23-32, new]
1. An apparatus for accurately locating a microelectronic chip in a chip-holding cavity for visual testing, the chip having at least a front wall and a pair of opposed, spaced-apart side walls, wherein the front wall meets with each of the side walls to form opposed, spaced-apart first and second front edges, comprising: a cavity side wall formed to juxtapositionally abut at least one of the side walls of the chip; and, said cavity side wall having formed therein a depression creating a shadow projecting forward from said depression, wherein the first front edge of the chip forms a border of said shadow to form an objectively measurable contrast in grayness between said shadow and the chip.
2. The apparatus of Claim 1 wherein the first front edge of the chip forms a straight border of said shadow.
3. The apparatus of Claim 1 wherein the first front edge of the chip forms a vertical border of said shadow.
4. The apparatus of Claim 1 further including a vacuum retaining means for momentarily holding the chip within said cavity, said vacuum retaining means including a vacuum source and a vacuum transmission passage way leading from said vacuum source to said cavity for applying a vacuum against the chip to assist in holding the chip in said cavity.
5. The apparatus of Claim 1 wherein the grayness of said shadowed depression differs by up to fifteen gray units from the grayness of the front of the chip on the industrial, 255 unit, grayness scale.
6. The apparatus of Claim 1 wherein the grayness of said shadowed depression differs by at least sixteen gray units from the grayness of the front of the chip on the industrial, 255 unit, grayness scale.
7. The apparatus of Claim 1 wherein said depression is circular.
8. The apparatus of Claim 1 wherein said depression is oval-shaped.
9. The apparatus of Claim 1 wherein said depression is a horizontal slot.
10. The apparatus of Claim 1 wherein said cavity is bound by a cavity rear wall .
11. The apparatus of Claim 10 wherein said depression extends along said cavity side wall and along said cavity rear wall to create a shadow therein that is eclipsed by the second front edge of the chip, said shadow created in said depression in said cavity rear wall forming an objectively measurable contrast in grayness between said shadow and the chip.
12. An apparatus for accurately locating a microelectronic chip in a chip-holding cavity for visual testing, the chip having at least a front wall and a pair of opposed, spaced-apart side walls, wherein the front wall meets with each of the side walls to form opposed, spaced-apart first and second front edges, comprising a cavity side wall formed to juxtapositionally abut a portion of at least one of the side walls of the chip, said cavity side wall being partially formed into a first wall that extends away from said cavity and forms a recess located adjacent the side wall and the first front edge of the chip; and, said cavity side wall and said first wall having formed therein a depression creating a shadow projecting forward from said depression, wherein the first front edge of the chip forms a border of said shadow to form an objectively measurable contrast in grayness between said shadow and the chip.
13. The apparatus of Claim 12 wherein the first front edge of the chip forms a straight border of said shadow.
14. The apparatus of Claim 12 wherein the first edge of the chip forms a vertical, straight border of said shadow.
15. The apparatus of Claim 12 further including a vacuum retaining means for momentarily holding the chip within said cavity, wherein said retaining means includes a vacuum source and a vacuum transmission passage way leading from said vacuum source to said cavity for applying a vacuum against the chip to assist in holding the chip in said cavity.
16. The apparatus of Claim 12 wherein the grayness of said shadowed depression differs by up to fifteen gray units from the grayness of the front of the chip on the industrial, 255 unit, grayness scale.
17. The apparatus of Claim 12 wherein the grayness of said shadowed depression differs by at least sixteen units from the grayness of the front of the chip on the industrial, 255 unit, grayness scale.
18. The apparatus of Claim 12 wherein said depression is circular.
19. The apparatus of Claim 12 wherein said depression is oval-shaped.
20. The apparatus of Claim 12 wherein said depression is a horizontal slot.
21. The apparatus of Claim 12 wherein said cavity is bound by a cavity rear wall .
22. The apparatus of Claim 12 wherein said depression extends along said cavity side wall and along said cavity rear wall to create a shadow therein that is eclipsed by the second front edge of the chip, said shadow created in said depression in said cavity rear wall forming an objectively measurable contrast in grayness between said shadow and the chip .
23. A method for determining in a cavity having a cavity side wall a location of a micro-electronic chip having an adjoining chip front wall and chip side wall having grayness characteristics and forming a front edge, comprising: receiving the chip in the cavity such that the chip side wall abuts the cavity side wall, the cavity side wall having a depression for creating a depression grayness characteristic adjacent to a second portion of the chip side wall, the depression grayness characteristic being measurably different from the grayness characteristics of the chip front wall or the chip side wall; and employing differences in grayness characteristics between the depression and the chip front wall or the chip side wall to determine the location of the chip.
24. The method of claim 23 in which the front edge of the chip forms a straight border with the depression and provides a reference for optical inspection.
25. The method of claim 23 further comprising applying vacuum to retain the chip within the cavity.
26. The method of claim 23 in which the grayness characteristics of the depression and the chip front wall differ by at least sixteen gray units on an industrial 255 unit grayness scale.
27. The method of claim 23 in which the grayness characteristics of the depression and the chip front wall differ by up to fifteen gray units on an industrial 255 unit grayness scale.
28. The method of claim 23 in which the depression comprises a circular, oval, or slot-like shape.
29. The method of claim 23 in which the cavity includes a cavity rear wall that adjoins the cavity side wall and a cavity second side wall, and in which the cavity rear wall and/or cavity second side wall include another depression having a grayness characteristic that is measurably different from grayness characteristics of a chip second side wall, a chip rear wall, or the chip front wall.
30. The method of claim 23 further comprising inspecting the chip for visible flaws while the chip is retained in the cavity.
31. The method of claim 23 in which the depression reduces specularity around an area of the chip that undergoes optical inspection.
32. The method of claim 30 in which the depression increases throughput or reduces error rate of optical inspection.
PCT/US2002/036619 2001-11-27 2002-11-14 A shadow-creating apparatus WO2003046510A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DE10297486T DE10297486T5 (en) 2001-11-27 2002-11-14 Shadow generation device
AU2002346400A AU2002346400A1 (en) 2001-11-27 2002-11-14 A shadow-creating apparatus
KR10-2004-7005779A KR20040062572A (en) 2001-11-27 2002-11-14 A shadow-creating apparatus
GB0407477A GB2397172B (en) 2001-11-27 2002-11-14 A shadow-creating apparatus
JP2003547902A JP2005523424A (en) 2001-11-27 2002-11-14 Shadow forming device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33369001P 2001-11-27 2001-11-27
US60/333,690 2001-11-27

Publications (4)

Publication Number Publication Date
WO2003046510A2 WO2003046510A2 (en) 2003-06-05
WO2003046510A3 WO2003046510A3 (en) 2003-11-27
WO2003046510A9 WO2003046510A9 (en) 2004-03-25
WO2003046510B1 true WO2003046510B1 (en) 2004-04-29

Family

ID=23303855

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/036619 WO2003046510A2 (en) 2001-11-27 2002-11-14 A shadow-creating apparatus

Country Status (8)

Country Link
JP (1) JP2005523424A (en)
KR (1) KR20040062572A (en)
CN (1) CN1328775C (en)
AU (1) AU2002346400A1 (en)
DE (1) DE10297486T5 (en)
GB (1) GB2397172B (en)
TW (1) TW577163B (en)
WO (1) WO2003046510A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107532431A (en) * 2015-05-26 2018-01-02 住友化学株式会社 Polarization plates manufacture Clean room
CN110379784B (en) * 2019-07-23 2021-05-07 深圳市优一达电子有限公司 Semiconductor packaging structure

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4312117A (en) * 1977-09-01 1982-01-26 Raytheon Company Integrated test and assembly device
JPH0680602B2 (en) * 1987-11-28 1994-10-12 株式会社村田製作所 Electronic component chip holding jig and electronic component chip handling method
US5123850A (en) * 1990-04-06 1992-06-23 Texas Instruments Incorporated Non-destructive burn-in test socket for integrated circuit die
US5088190A (en) * 1990-08-30 1992-02-18 Texas Instruments Incorporated Method of forming an apparatus for burn in testing of integrated circuit chip
US5543725A (en) * 1993-08-25 1996-08-06 Sunright Limited Reusable carrier for burn-in/testing on non packaged die
US5673799A (en) * 1995-06-05 1997-10-07 Chip Star Inc. Machine for testing and sorting capacitor chips and method of operating same
AU7673598A (en) * 1997-06-12 1998-12-30 Nikon Corporation Substrate for device manufacturing, process for manufacturing the substrate, andmethod of exposure using the substrate
GB2349205B (en) * 1999-04-19 2003-12-31 Applied Materials Inc Method and apparatus for detecting that two moveable members are correctly positioned relatively to one another
DE60034820T2 (en) * 2000-05-23 2008-01-17 Electro Scientific Industries, Inc., Portland INSPECTION MACHINE FOR PASSIVE SURFACE MOUNTED COMPONENT

Also Published As

Publication number Publication date
GB2397172B (en) 2005-05-11
AU2002346400A1 (en) 2003-06-10
GB2397172A (en) 2004-07-14
GB0407477D0 (en) 2004-05-05
KR20040062572A (en) 2004-07-07
WO2003046510A9 (en) 2004-03-25
DE10297486T5 (en) 2004-12-02
TW200301008A (en) 2003-06-16
WO2003046510A2 (en) 2003-06-05
CN1575513A (en) 2005-02-02
TW577163B (en) 2004-02-21
JP2005523424A (en) 2005-08-04
WO2003046510A3 (en) 2003-11-27
AU2002346400A8 (en) 2003-06-10
CN1328775C (en) 2007-07-25

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