KR20040029401A - 배기가스내의 생성물을 트래핑하기 위한 장치 및 방법 - Google Patents

배기가스내의 생성물을 트래핑하기 위한 장치 및 방법 Download PDF

Info

Publication number
KR20040029401A
KR20040029401A KR10-2004-7001836A KR20047001836A KR20040029401A KR 20040029401 A KR20040029401 A KR 20040029401A KR 20047001836 A KR20047001836 A KR 20047001836A KR 20040029401 A KR20040029401 A KR 20040029401A
Authority
KR
South Korea
Prior art keywords
exhaust gas
trap
mesh
trap member
housing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR10-2004-7001836A
Other languages
English (en)
Korean (ko)
Inventor
다나카게이지
야나기사와기요시
아카사카요시타카
구로다도시히로
미츠도메가즈야
Original Assignee
가부시키 가이샤 에바라 세이사꾸쇼
샤프 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키 가이샤 에바라 세이사꾸쇼, 샤프 가부시키가이샤 filed Critical 가부시키 가이샤 에바라 세이사꾸쇼
Publication of KR20040029401A publication Critical patent/KR20040029401A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
    • B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D39/00—Filtering material for liquid or gaseous fluids
    • B01D39/10—Filter screens essentially made of metal
    • B01D39/12—Filter screens essentially made of metal of wire gauze; of knitted wire; of expanded metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
    • B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
    • B01D45/06—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by reversal of direction of flow
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0039—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices
    • B01D46/0041—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding
    • B01D46/0043—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding containing fixed gas displacement elements or cores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/42—Auxiliary equipment or operation thereof
    • B01D46/4263—Means for active heating or cooling
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/66—Regeneration of the filtering material or filter elements inside the filter
    • B01D46/79—Regeneration of the filtering material or filter elements inside the filter by liquid process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2275/10—Multiple layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2275/30—Porosity of filtering material
    • B01D2275/305—Porosity decreasing in flow direction

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
KR10-2004-7001836A 2001-08-10 2002-08-01 배기가스내의 생성물을 트래핑하기 위한 장치 및 방법 Withdrawn KR20040029401A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2001-00243189 2001-08-10
JP2001243189A JP4166005B2 (ja) 2001-08-10 2001-08-10 トラップ装置および方法
PCT/JP2002/007852 WO2003015896A2 (en) 2001-08-10 2002-08-01 Apparatus for and method of trapping products in exhaust gas

Publications (1)

Publication Number Publication Date
KR20040029401A true KR20040029401A (ko) 2004-04-06

Family

ID=19073326

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7001836A Withdrawn KR20040029401A (ko) 2001-08-10 2002-08-01 배기가스내의 생성물을 트래핑하기 위한 장치 및 방법

Country Status (7)

Country Link
US (1) US20050000201A1 (https=)
EP (1) EP1414545B1 (https=)
JP (1) JP4166005B2 (https=)
KR (1) KR20040029401A (https=)
DE (1) DE60212853T2 (https=)
TW (1) TW542748B (https=)
WO (1) WO2003015896A2 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200453421Y1 (ko) * 2008-05-20 2011-05-02 전병덕 과일보호용 봉지

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8172946B2 (en) 2005-03-02 2012-05-08 Hitachi Kokusai Electric Inc. Semiconductor device manufacturing apparatus and manufacturing method of semiconductor device
JP2006314864A (ja) * 2005-05-10 2006-11-24 Mitsubishi Electric Corp 排気トラップ装置
DE102005054816A1 (de) * 2005-11-15 2007-05-16 Haver & Boecker Ohg Poröser Körper
JP4891178B2 (ja) * 2007-08-13 2012-03-07 ルネサスエレクトロニクス株式会社 真空装置
RU2468852C1 (ru) * 2011-08-10 2012-12-10 Лев Ефимович Герцман Устройство для обработки газа
DE102012018005B4 (de) * 2012-09-12 2015-08-06 Borgwaldt Kc Gmbh Rauchfalle für eine Abrauchmaschine und Abrauchverfahren
FR2996463B1 (fr) * 2012-10-10 2015-12-18 Inst Nat De Recherche En Sciences Et Technologies Pour L'environnement Et L'agriculture Irstea Ensemble de piegeage de particules en suspension dans un fluide
CN104480468A (zh) * 2014-12-31 2015-04-01 深圳市华星光电技术有限公司 干式蚀刻机及用于捕集气体中磁性颗粒的捕集装置
US10927457B2 (en) 2015-03-04 2021-02-23 Toshiba Memory Corporation Semiconductor manufacturing apparatus
IT201700030191A1 (it) * 2017-03-20 2018-09-20 Airgam Srl Filtro aria metallico
JP7277896B2 (ja) * 2018-11-06 2023-05-19 株式会社ナード研究所 フィルタ付き容器、フィルタ部材、精製装置、および、精製物質の製造方法
KR102209205B1 (ko) * 2019-08-21 2021-02-01 주식회사 미래보 반도체 공정용 유로방향 전환식 반응부산물 포집장치
US12062535B2 (en) 2021-07-16 2024-08-13 Taiwan Semiconductor Manufacturing Company Ltd. Particle removal method in semiconductor fabrication process
KR102631554B1 (ko) * 2022-07-29 2024-01-31 주식회사 에이치피에스피 고압 열처리 장치

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1383384A (en) * 1972-04-26 1974-02-12 Alliger H Gas filtration apparatus
US3856487A (en) * 1972-08-11 1974-12-24 Aerosols Control Corp Gas scrubber
DE2246474A1 (de) * 1972-09-22 1974-04-04 Regehr Ulrich Vorrichtung zum waschen von gasen
GB1455382A (en) * 1974-01-15 1976-11-10 Expanded Metal Filter elements
DE2412995A1 (de) * 1974-03-18 1975-10-02 Buderus Eisenwerk Luftfilter
US4301012A (en) * 1979-04-25 1981-11-17 Purolator Technologies, Inc. Welded stainless steel mesh cleanable filter
DE3330020A1 (de) * 1983-08-19 1985-02-28 Interatom Internationale Atomreaktorbau Gmbh, 5060 Bergisch Gladbach Dieselabgasfilter aus drahtgewebe
JPH084720B2 (ja) * 1986-06-30 1996-01-24 株式会社キッツ 平板状多孔性薄膜積層型フイルタ−及びその製造方法
US4869738A (en) * 1987-08-26 1989-09-26 W. R. Grace & Co.-Conn. Particulate trap
US4942020A (en) * 1988-06-27 1990-07-17 W.R. Grace & Co.-Conn. Converter for removing pollutants from a gas stream
US4904288A (en) * 1989-06-21 1990-02-27 Mike D. Shoffiett Filter element for circulating air systems
FR2677268A1 (fr) * 1991-06-07 1992-12-11 Sofrance Sa Nappe filtrante en tissu metallique, procede pour la fabriquer et son application dans un element filtrant.
US5211729A (en) * 1991-08-30 1993-05-18 Sematech, Inc. Baffle/settling chamber for a chemical vapor deposition equipment
EP0587900A4 (en) * 1992-02-10 1995-09-27 Daicel Chem Linear gas generating agent and filter construction for gas generator
DE4210358C2 (de) * 1992-03-30 1994-03-03 Thyssen Edelstahlwerke Ag Vorrichtung zur Vergrößerung von kleinen klebrigen Partikeln
CA2105636C (en) * 1993-09-07 1996-08-20 701149 Alberta Inc. Reusable Filter
US6156107A (en) * 1996-11-13 2000-12-05 Tokyo Electron Limited Trap apparatus
AU1949299A (en) * 1997-07-18 2000-07-31 Rypos, Inc. Self-cleaning and self-sealing particle filter
EP1050681A4 (en) * 1998-01-22 2006-10-11 Ebara Corp TRAP AND CASE SYSTEM
FR2784324B1 (fr) * 1998-10-13 2000-12-01 Gantois Ets Structure metallique de type sandwich
US6383300B1 (en) * 1998-11-27 2002-05-07 Tokyo Electron Ltd. Heat treatment apparatus and cleaning method of the same
JP2000256856A (ja) * 1999-03-11 2000-09-19 Tokyo Electron Ltd 処理装置及び処理装置用真空排気システム及び減圧ｃｖｄ装置及び減圧ｃｖｄ装置用真空排気システム及びトラップ装置
AT408418B (de) * 1999-04-23 2001-11-26 Kappa Arbeitsschutz & Umweltte Vorrichtung zum abscheiden von fein verteilten flüssigkeits- und/oder festkörperteilchen aus einem gasstrom
KR100688900B1 (ko) * 1999-12-15 2007-03-08 캐논 아네르바 가부시키가이샤 배출가스 여과장치, 보조여과장치 및 트랩장치
US6319299B1 (en) * 2000-03-30 2001-11-20 Vanguard International Semiconductor Corporation Adjustable cold trap with different stages
US6998097B1 (en) * 2000-06-07 2006-02-14 Tegal Corporation High pressure chemical vapor trapping system
US6800254B1 (en) * 2000-06-07 2004-10-05 Tegal Corporation Visual indicator cold trapping system
DE10031200A1 (de) * 2000-06-27 2002-01-17 Emitec Emissionstechnologie Partikelfalle zum Abscheiden von Partikeln aus dem Strom eines Fluids, Verfahren zum Abscheiden von Partikeln aus dem Strom eines Fluids und Verwendung einer Partikelfalle
CA2439706A1 (en) * 2001-03-13 2002-09-19 Applied Design And Engineering Limited Drawer storage
US6749670B2 (en) * 2001-03-26 2004-06-15 Shell Oil Company Process for trapping particulate matter in hot gas and trap therefor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200453421Y1 (ko) * 2008-05-20 2011-05-02 전병덕 과일보호용 봉지

Also Published As

Publication number Publication date
WO2003015896A3 (en) 2003-09-04
DE60212853D1 (de) 2006-08-10
TW542748B (en) 2003-07-21
DE60212853T2 (de) 2007-01-18
EP1414545A2 (en) 2004-05-06
JP4166005B2 (ja) 2008-10-15
US20050000201A1 (en) 2005-01-06
EP1414545B1 (en) 2006-06-28
JP2003053101A (ja) 2003-02-25
WO2003015896A2 (en) 2003-02-27

Similar Documents

Publication Publication Date Title
KR20040029401A (ko) 배기가스내의 생성물을 트래핑하기 위한 장치 및 방법
KR100688900B1 (ko) 배출가스 여과장치, 보조여과장치 및 트랩장치
US7988755B2 (en) Byproduct collecting apparatus of semiconductor apparatus
KR100676927B1 (ko) 반도체 장치의 부산물 포집장치
KR20190078939A (ko) 반도체 공정 부산물 포집장치
EP0762923B1 (en) Eliminating ash bridging in ceramic filters
KR101865337B1 (ko) 반도체 공정 부산물 포집장치
US20220178617A1 (en) Heat exchanger with multistaged cooling
TW201743379A (zh) 用於排氣冷卻的設備
KR100964320B1 (ko) 입자 관성을 이용한 반도체 공정에서의 잔류 케미칼 및부산물 포집장치
KR101280541B1 (ko) 반도체 제조장치용 부산물 포집 장치
JP2005349246A (ja) バグフィルタ及びその運転方法
US6368371B1 (en) Trap device and trap system
US6821489B1 (en) System and method for abating the simultaneous flow of silane and arsine
JP4455719B2 (ja) 排ガス濾過装置
JP3719698B2 (ja) 粉体・水分捕集装置
US8679213B2 (en) Dust collector
JP3433998B2 (ja) 濾過装置及びそれによる真空ポンプ系保護方法
JPH03230001A (ja) 脱硝装置組み込み排熱回収ボイラ
JP2004050037A (ja) 排ガス処理装置
JPH10111396A (ja) ナトリウムエアロゾル除去用フィルタ
JP2001252518A (ja) ケミカルフィルタ

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20040206

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid