DE60212853T2 - Vorrichtung und verfahren zum abscheiden von produkten in einem abgas - Google Patents
Vorrichtung und verfahren zum abscheiden von produkten in einem abgas Download PDFInfo
- Publication number
- DE60212853T2 DE60212853T2 DE60212853T DE60212853T DE60212853T2 DE 60212853 T2 DE60212853 T2 DE 60212853T2 DE 60212853 T DE60212853 T DE 60212853T DE 60212853 T DE60212853 T DE 60212853T DE 60212853 T2 DE60212853 T2 DE 60212853T2
- Authority
- DE
- Germany
- Prior art keywords
- capture
- exhaust gases
- exhaust
- trapping
- housing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims description 28
- 239000007789 gas Substances 0.000 claims description 173
- 239000002184 metal Substances 0.000 claims description 41
- 239000007795 chemical reaction product Substances 0.000 claims description 33
- 230000008569 process Effects 0.000 claims description 14
- 239000000498 cooling water Substances 0.000 claims description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 230000003247 decreasing effect Effects 0.000 claims description 2
- 239000007787 solid Substances 0.000 description 41
- 239000000126 substance Substances 0.000 description 41
- 239000000047 product Substances 0.000 description 10
- 239000004065 semiconductor Substances 0.000 description 10
- 239000003517 fume Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 238000004140 cleaning Methods 0.000 description 7
- 238000005192 partition Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 238000011045 prefiltration Methods 0.000 description 3
- 238000010926 purge Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 230000001276 controlling effect Effects 0.000 description 2
- 238000009499 grossing Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005554 pickling Methods 0.000 description 2
- 238000000746 purification Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000004907 gland Anatomy 0.000 description 1
- 238000011044 inertial separation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000010791 quenching Methods 0.000 description 1
- 230000000171 quenching effect Effects 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/52—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material
- B01D46/521—Particle separators, e.g. dust precipitators, using filters embodying folded corrugated or wound sheet material using folded, pleated material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D39/00—Filtering material for liquid or gaseous fluids
- B01D39/10—Filter screens essentially made of metal
- B01D39/12—Filter screens essentially made of metal of wire gauze; of knitted wire; of expanded metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D45/00—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces
- B01D45/04—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia
- B01D45/06—Separating dispersed particles from gases or vapours by gravity, inertia, or centrifugal forces by utilising inertia by reversal of direction of flow
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0039—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices
- B01D46/0041—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding
- B01D46/0043—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with flow guiding by feed or discharge devices for feeding containing fixed gas displacement elements or cores
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/42—Auxiliary equipment or operation thereof
- B01D46/4263—Means for active heating or cooling
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/66—Regeneration of the filtering material or filter elements inside the filter
- B01D46/79—Regeneration of the filtering material or filter elements inside the filter by liquid process
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2275/10—Multiple layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2275/00—Filter media structures for filters specially adapted for separating dispersed particles from gases or vapours
- B01D2275/30—Porosity of filtering material
- B01D2275/305—Porosity decreasing in flow direction
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001243189A JP4166005B2 (ja) | 2001-08-10 | 2001-08-10 | トラップ装置および方法 |
| JP2001243189 | 2001-08-10 | ||
| PCT/JP2002/007852 WO2003015896A2 (en) | 2001-08-10 | 2002-08-01 | Apparatus for and method of trapping products in exhaust gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60212853D1 DE60212853D1 (de) | 2006-08-10 |
| DE60212853T2 true DE60212853T2 (de) | 2007-01-18 |
Family
ID=19073326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60212853T Expired - Fee Related DE60212853T2 (de) | 2001-08-10 | 2002-08-01 | Vorrichtung und verfahren zum abscheiden von produkten in einem abgas |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US20050000201A1 (https=) |
| EP (1) | EP1414545B1 (https=) |
| JP (1) | JP4166005B2 (https=) |
| KR (1) | KR20040029401A (https=) |
| DE (1) | DE60212853T2 (https=) |
| TW (1) | TW542748B (https=) |
| WO (1) | WO2003015896A2 (https=) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8172946B2 (en) | 2005-03-02 | 2012-05-08 | Hitachi Kokusai Electric Inc. | Semiconductor device manufacturing apparatus and manufacturing method of semiconductor device |
| JP2006314864A (ja) * | 2005-05-10 | 2006-11-24 | Mitsubishi Electric Corp | 排気トラップ装置 |
| DE102005054816A1 (de) * | 2005-11-15 | 2007-05-16 | Haver & Boecker Ohg | Poröser Körper |
| JP4891178B2 (ja) * | 2007-08-13 | 2012-03-07 | ルネサスエレクトロニクス株式会社 | 真空装置 |
| KR200453421Y1 (ko) * | 2008-05-20 | 2011-05-02 | 전병덕 | 과일보호용 봉지 |
| RU2468852C1 (ru) * | 2011-08-10 | 2012-12-10 | Лев Ефимович Герцман | Устройство для обработки газа |
| DE102012018005B4 (de) * | 2012-09-12 | 2015-08-06 | Borgwaldt Kc Gmbh | Rauchfalle für eine Abrauchmaschine und Abrauchverfahren |
| FR2996463B1 (fr) * | 2012-10-10 | 2015-12-18 | Inst Nat De Recherche En Sciences Et Technologies Pour L'environnement Et L'agriculture Irstea | Ensemble de piegeage de particules en suspension dans un fluide |
| CN104480468A (zh) * | 2014-12-31 | 2015-04-01 | 深圳市华星光电技术有限公司 | 干式蚀刻机及用于捕集气体中磁性颗粒的捕集装置 |
| US10927457B2 (en) | 2015-03-04 | 2021-02-23 | Toshiba Memory Corporation | Semiconductor manufacturing apparatus |
| IT201700030191A1 (it) * | 2017-03-20 | 2018-09-20 | Airgam Srl | Filtro aria metallico |
| JP7277896B2 (ja) * | 2018-11-06 | 2023-05-19 | 株式会社ナード研究所 | フィルタ付き容器、フィルタ部材、精製装置、および、精製物質の製造方法 |
| KR102209205B1 (ko) * | 2019-08-21 | 2021-02-01 | 주식회사 미래보 | 반도체 공정용 유로방향 전환식 반응부산물 포집장치 |
| US12062535B2 (en) | 2021-07-16 | 2024-08-13 | Taiwan Semiconductor Manufacturing Company Ltd. | Particle removal method in semiconductor fabrication process |
| KR102631554B1 (ko) * | 2022-07-29 | 2024-01-31 | 주식회사 에이치피에스피 | 고압 열처리 장치 |
Family Cites Families (30)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1383384A (en) * | 1972-04-26 | 1974-02-12 | Alliger H | Gas filtration apparatus |
| US3856487A (en) * | 1972-08-11 | 1974-12-24 | Aerosols Control Corp | Gas scrubber |
| DE2246474A1 (de) * | 1972-09-22 | 1974-04-04 | Regehr Ulrich | Vorrichtung zum waschen von gasen |
| GB1455382A (en) * | 1974-01-15 | 1976-11-10 | Expanded Metal | Filter elements |
| DE2412995A1 (de) * | 1974-03-18 | 1975-10-02 | Buderus Eisenwerk | Luftfilter |
| US4301012A (en) * | 1979-04-25 | 1981-11-17 | Purolator Technologies, Inc. | Welded stainless steel mesh cleanable filter |
| DE3330020A1 (de) * | 1983-08-19 | 1985-02-28 | Interatom Internationale Atomreaktorbau Gmbh, 5060 Bergisch Gladbach | Dieselabgasfilter aus drahtgewebe |
| JPH084720B2 (ja) * | 1986-06-30 | 1996-01-24 | 株式会社キッツ | 平板状多孔性薄膜積層型フイルタ−及びその製造方法 |
| US4869738A (en) * | 1987-08-26 | 1989-09-26 | W. R. Grace & Co.-Conn. | Particulate trap |
| US4942020A (en) * | 1988-06-27 | 1990-07-17 | W.R. Grace & Co.-Conn. | Converter for removing pollutants from a gas stream |
| US4904288A (en) * | 1989-06-21 | 1990-02-27 | Mike D. Shoffiett | Filter element for circulating air systems |
| FR2677268A1 (fr) * | 1991-06-07 | 1992-12-11 | Sofrance Sa | Nappe filtrante en tissu metallique, procede pour la fabriquer et son application dans un element filtrant. |
| US5211729A (en) * | 1991-08-30 | 1993-05-18 | Sematech, Inc. | Baffle/settling chamber for a chemical vapor deposition equipment |
| EP0587900A4 (en) * | 1992-02-10 | 1995-09-27 | Daicel Chem | Linear gas generating agent and filter construction for gas generator |
| DE4210358C2 (de) * | 1992-03-30 | 1994-03-03 | Thyssen Edelstahlwerke Ag | Vorrichtung zur Vergrößerung von kleinen klebrigen Partikeln |
| CA2105636C (en) * | 1993-09-07 | 1996-08-20 | 701149 Alberta Inc. | Reusable Filter |
| US6156107A (en) * | 1996-11-13 | 2000-12-05 | Tokyo Electron Limited | Trap apparatus |
| AU1949299A (en) * | 1997-07-18 | 2000-07-31 | Rypos, Inc. | Self-cleaning and self-sealing particle filter |
| EP1050681A4 (en) * | 1998-01-22 | 2006-10-11 | Ebara Corp | TRAP AND CASE SYSTEM |
| FR2784324B1 (fr) * | 1998-10-13 | 2000-12-01 | Gantois Ets | Structure metallique de type sandwich |
| US6383300B1 (en) * | 1998-11-27 | 2002-05-07 | Tokyo Electron Ltd. | Heat treatment apparatus and cleaning method of the same |
| JP2000256856A (ja) * | 1999-03-11 | 2000-09-19 | Tokyo Electron Ltd | 処理装置及び処理装置用真空排気システム及び減圧ｃｖｄ装置及び減圧ｃｖｄ装置用真空排気システム及びトラップ装置 |
| AT408418B (de) * | 1999-04-23 | 2001-11-26 | Kappa Arbeitsschutz & Umweltte | Vorrichtung zum abscheiden von fein verteilten flüssigkeits- und/oder festkörperteilchen aus einem gasstrom |
| KR100688900B1 (ko) * | 1999-12-15 | 2007-03-08 | 캐논 아네르바 가부시키가이샤 | 배출가스 여과장치, 보조여과장치 및 트랩장치 |
| US6319299B1 (en) * | 2000-03-30 | 2001-11-20 | Vanguard International Semiconductor Corporation | Adjustable cold trap with different stages |
| US6998097B1 (en) * | 2000-06-07 | 2006-02-14 | Tegal Corporation | High pressure chemical vapor trapping system |
| US6800254B1 (en) * | 2000-06-07 | 2004-10-05 | Tegal Corporation | Visual indicator cold trapping system |
| DE10031200A1 (de) * | 2000-06-27 | 2002-01-17 | Emitec Emissionstechnologie | Partikelfalle zum Abscheiden von Partikeln aus dem Strom eines Fluids, Verfahren zum Abscheiden von Partikeln aus dem Strom eines Fluids und Verwendung einer Partikelfalle |
| CA2439706A1 (en) * | 2001-03-13 | 2002-09-19 | Applied Design And Engineering Limited | Drawer storage |
| US6749670B2 (en) * | 2001-03-26 | 2004-06-15 | Shell Oil Company | Process for trapping particulate matter in hot gas and trap therefor |
-
2001
- 2001-08-10 JP JP2001243189A patent/JP4166005B2/ja not_active Expired - Fee Related
-
2002
- 2002-08-01 WO PCT/JP2002/007852 patent/WO2003015896A2/en not_active Ceased
- 2002-08-01 KR KR10-2004-7001836A patent/KR20040029401A/ko not_active Withdrawn
- 2002-08-01 EP EP02755749A patent/EP1414545B1/en not_active Expired - Lifetime
- 2002-08-01 US US10/484,456 patent/US20050000201A1/en not_active Abandoned
- 2002-08-01 DE DE60212853T patent/DE60212853T2/de not_active Expired - Fee Related
- 2002-08-05 TW TW091117545A patent/TW542748B/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| WO2003015896A3 (en) | 2003-09-04 |
| DE60212853D1 (de) | 2006-08-10 |
| TW542748B (en) | 2003-07-21 |
| KR20040029401A (ko) | 2004-04-06 |
| EP1414545A2 (en) | 2004-05-06 |
| JP4166005B2 (ja) | 2008-10-15 |
| US20050000201A1 (en) | 2005-01-06 |
| EP1414545B1 (en) | 2006-06-28 |
| JP2003053101A (ja) | 2003-02-25 |
| WO2003015896A2 (en) | 2003-02-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| DE60212853T2 (de) | Vorrichtung und verfahren zum abscheiden von produkten in einem abgas | |
| DE3249102C2 (de) | Kompakstaubfilter | |
| DE69810486T2 (de) | Kombinierter filter und elektrostatischer abscheider | |
| DE69629538T2 (de) | Vorrichtung und Verfahren zur Trennung | |
| EP0573885A1 (de) | Durchström-Trockner zur Trocknung von Schlämmen mit Filteranordnung | |
| DE69706664T2 (de) | Vorrichtung zur abtrennung von feinstpartikeln aus luft | |
| DE69820805T2 (de) | Ausscheidungsvorrichtung | |
| EP0357653B1 (de) | Anströmboden für wanderbettreaktoren | |
| AT408843B (de) | Staubfilter | |
| DE3528222A1 (de) | Wanderbettreaktor | |
| DE69106565T2 (de) | Verfahren und Mittel zum Reinigen der Wände von einem Wärmetauscher. | |
| CH640748A5 (de) | Fuellkoerper zum einsatz in einem verfahrenstechnischen apparat und verwendung desselben. | |
| DE4103577A1 (de) | Reinigungsvorrichtung fuer einen gegenstand mit einer zu reinigenden oberflaeche | |
| DE2038871A1 (de) | Vorrichtung zum Filtrieren von gasfoermigen Medien | |
| AT396736B (de) | Vorrichtung zum abscheiden von dunst-, fett- und staubpartikeln aus einem luftstrom | |
| DE2951736A1 (de) | Vorrichtung und verfahren zum reinigen von natrium | |
| DE2503637A1 (de) | Verfahren und vorrichtung zur herstellung von prills | |
| DE3635085C2 (https=) | ||
| DE102008029052A1 (de) | Filtervorrichtung | |
| DE3780747T2 (de) | Vorrichtung zur gasabfuhr. | |
| DE2902461A1 (de) | Vorrichtung zum reinigen von gas | |
| DE69423624T2 (de) | Verfahren und vorrichtung zum filtern eines luftstroms | |
| EP2827968B1 (de) | Filterelement mit reinigungseinheit für grosse volumenströme | |
| DE4017229A1 (de) | Vorrichtung zum reinigen von fluessigkeiten durch abscheidung der verunreinigungen | |
| DE102019004526B4 (de) | Staubabscheidevorrichtung, modulare Staubabscheidevorrichtung sowie Verfahren zu deren Verwendung |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition | ||
| 8339 | Ceased/non-payment of the annual fee |