KR20030022263A - 세라믹히터 및 발열체용 도전 페이스트 - Google Patents
세라믹히터 및 발열체용 도전 페이스트 Download PDFInfo
- Publication number
- KR20030022263A KR20030022263A KR10-2003-7000070A KR20037000070A KR20030022263A KR 20030022263 A KR20030022263 A KR 20030022263A KR 20037000070 A KR20037000070 A KR 20037000070A KR 20030022263 A KR20030022263 A KR 20030022263A
- Authority
- KR
- South Korea
- Prior art keywords
- heating element
- ceramic
- metal
- conductive paste
- heating
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
- H05B3/143—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds applied to semiconductors, e.g. wafers heating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heater elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
Abstract
Description
응답시간 (초) | 온도차 (℃) | 풀강도 (kg/2mm□) | |
실시예 1 | 0.5 | 8 | 12.4 |
실시예 2 | 2.0 | 9 | |
실시예 4 | 1.0 | 8 | |
실시예 5 | 1.6 | 15 | |
실시예 6 | 0.8 | 18 | |
실시예 7 | 0.7 | 18 | |
실시예 8 | 0.7 | 18 | 6.0 |
실시예 9 | 0.8 | 9 | 24.0 |
비교예 1 | 24 | 15 | |
비교예 2 | 40 | 22 | |
비교예 3 | 0.8 | 15 |
Claims (5)
- 질화물 세라믹 또는 탄화물 세라믹으로 이루어진 기판의 표면에, 발열체를 형성하고, 이 발열체 형성면과는 반대측의 면을 가열면으로 하고,상기 세라믹기판 표면에는 산화막이 형성됨과 동시에,상기 발열체는, 금속입자와 금속산화물과의 혼합물로 이루어진 도전 페이스트에 의해 형성되는 것을 특징으로 하는 세라믹 히터.
- 제 1 항에 있어서, 상기 혼합물은, 금속입자에 대해 금속산화물을 0.1 내지 10wt% 미만의 비율로 함유하는 것을 특징으로 하는 세라믹 히터.
- 제 1 항에 있어서, 상기 금속입자는, 비늘편상, 또는 구형상과 비늘편상의 혼합물인 것을 특징으로 하는 세라믹 히터.
- 제 1 항에 있어서, 상기 금속입자 표면에 산화막이 형성되어 있는 것을 특징으로 하는 세라믹 히터.
- 표면에 산화막이 형성된 금속입자와 금속산화물의 혼합물로 이루어진 도전 페이스트로서, 세라믹 기판의 표면에 형성된 발열체에 사용되는 것을 특징으로 하는 도전 페이스트.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP1999/003086 WO2000076273A1 (fr) | 1999-06-09 | 1999-06-09 | Corps de chauffe en ceramique et procede de fabrication, et pate conductrice pour element chauffant |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020007001061A Division KR20010022476A (ko) | 1999-06-09 | 1999-06-09 | 세라믹히터 및 그 제조방법 및 발열체용 도전 페이스트 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030022263A true KR20030022263A (ko) | 2003-03-15 |
KR100544865B1 KR100544865B1 (ko) | 2006-01-24 |
Family
ID=14235934
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020027008606A KR20020073158A (ko) | 1999-06-09 | 1999-06-09 | 세라믹히터 및 그 제조방법 |
KR1020007001061A KR20010022476A (ko) | 1999-06-09 | 1999-06-09 | 세라믹히터 및 그 제조방법 및 발열체용 도전 페이스트 |
KR1020037000070A KR100544865B1 (ko) | 1999-06-09 | 1999-06-09 | 세라믹히터 및 발열체용 도전 페이스트 |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020027008606A KR20020073158A (ko) | 1999-06-09 | 1999-06-09 | 세라믹히터 및 그 제조방법 |
KR1020007001061A KR20010022476A (ko) | 1999-06-09 | 1999-06-09 | 세라믹히터 및 그 제조방법 및 발열체용 도전 페이스트 |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1109423A1 (ko) |
JP (2) | JP2003109730A (ko) |
KR (3) | KR20020073158A (ko) |
CN (1) | CN1296724A (ko) |
WO (1) | WO2000076273A1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101013884B1 (ko) * | 2010-07-08 | 2011-02-10 | (주)이에스푸드 | 꼬치 제조 시스템 및 그 방법 |
US20200396802A1 (en) * | 2019-06-12 | 2020-12-17 | Lg Electronics Inc. | Surface type heating element having controlled oxide layer and manufacturing method thereof |
Families Citing this family (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001118662A (ja) | 1999-08-09 | 2001-04-27 | Ibiden Co Ltd | セラミックヒータ |
US6835916B2 (en) | 1999-08-09 | 2004-12-28 | Ibiden, Co., Ltd | Ceramic heater |
JP2001118664A (ja) | 1999-08-09 | 2001-04-27 | Ibiden Co Ltd | セラミックヒータ |
JP2001196152A (ja) * | 2000-01-13 | 2001-07-19 | Sumitomo Electric Ind Ltd | セラミックスヒータ |
WO2001059833A1 (fr) | 2000-02-08 | 2001-08-16 | Ibiden Co., Ltd. | Carte en ceramique destinee a la production de semi-conducteurs et a des dispositifs de controle |
WO2001078456A1 (fr) | 2000-04-07 | 2001-10-18 | Ibiden Co., Ltd. | Element ceramique chauffant |
JP3729785B2 (ja) | 2000-04-14 | 2005-12-21 | イビデン株式会社 | セラミックヒータ |
EP1304729A1 (en) | 2000-07-19 | 2003-04-23 | Ibiden Co., Ltd. | Semiconductor manufacturing/testing ceramic heater, production method for the ceramic heater and production system for the ceramic heater |
US20050045618A1 (en) * | 2001-07-09 | 2005-03-03 | Ibiden Co., Ltd. | Ceramic heater and ceramic joined article |
KR20040031691A (ko) | 2001-08-10 | 2004-04-13 | 이비덴 가부시키가이샤 | 세라믹 접합체 |
KR100459868B1 (ko) * | 2002-09-25 | 2004-12-03 | 한국과학기술연구원 | 저온 소성 세라믹 히터용 조성물 및 세라믹 히터 제조방법 |
US7372001B2 (en) | 2002-12-17 | 2008-05-13 | Nhk Spring Co., Ltd. | Ceramics heater |
GB2404128B (en) | 2003-07-16 | 2005-08-24 | Kanthal Ltd | Silicon carbide furnace heating elements |
KR20050089384A (ko) * | 2004-03-04 | 2005-09-08 | (주) 래트론 | 세라믹 히터 및 이의 제조 방법 |
TWI281833B (en) | 2004-10-28 | 2007-05-21 | Kyocera Corp | Heater, wafer heating apparatus and method for manufacturing heater |
KR100794987B1 (ko) * | 2004-12-14 | 2008-01-16 | 김형우 | 진공 증착기에서 순간 가열 방식의 기판 가열 장치 |
KR100692039B1 (ko) * | 2006-02-23 | 2007-03-12 | 엘지전자 주식회사 | 영상 표시 장치 |
US7777160B2 (en) * | 2007-12-17 | 2010-08-17 | Momentive Performance Materials Inc. | Electrode tuning method and apparatus for a layered heater structure |
KR20120118870A (ko) * | 2011-04-20 | 2012-10-30 | (주)피엔유에코에너지 | 고온용 면상발열체 조성물 및 이를 이용한 면상발열체 |
KR20120121035A (ko) * | 2011-04-26 | 2012-11-05 | (주)피엔유에코에너지 | 저온용 면상발열체 조성물 및 이를 이용한 면상발열체 |
KR20120121037A (ko) * | 2011-04-26 | 2012-11-05 | (주)피엔유에코에너지 | 특정한 저항온도계수를 갖는 면상발열체 조성물 및 이를 이용한 면상발열체 |
KR20120121039A (ko) * | 2011-04-26 | 2012-11-05 | (주)피엔유에코에너지 | 면저항이 특정값을 갖는 면상발열체 조성물 및 이를 이용한 면상발열체 |
KR20120121041A (ko) * | 2011-04-26 | 2012-11-05 | (주)피엔유에코에너지 | 비표면적이 특정한 저항성분을 포함하는 면상발열체 조성물 및 이를 이용한 면상발열체 |
CN103108421A (zh) * | 2012-12-05 | 2013-05-15 | 贵州铝城铝业原材料研究发展有限公司 | 一种电加热结构 |
CN103044038B (zh) * | 2012-12-05 | 2015-08-26 | 邹建明 | 一种电加热体及制作方法 |
JP6618159B2 (ja) | 2016-06-17 | 2019-12-11 | トーカロ株式会社 | 発熱部材 |
CN110139406A (zh) * | 2019-06-10 | 2019-08-16 | 上海中孚特种油品有限公司 | 一种用于制备电热膜的饱和溶液及其制备方法 |
Family Cites Families (5)
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JPS57870A (en) * | 1980-06-04 | 1982-01-05 | Matsushita Electric Ind Co Ltd | Ceramic heater |
JPS5861591A (ja) * | 1981-10-08 | 1983-04-12 | 株式会社デンソー | セラミツクヒ−タ |
JPH0651658A (ja) * | 1992-07-31 | 1994-02-25 | Toshiba Lighting & Technol Corp | 定着用ヒータ、定着用ヒータの製造方法および定着方法ならびに定着装置 |
JPH08273814A (ja) * | 1995-03-29 | 1996-10-18 | Ngk Spark Plug Co Ltd | セラミックヒーター |
JPH08273815A (ja) * | 1995-03-31 | 1996-10-18 | Ngk Spark Plug Co Ltd | 自己制御型セラミックヒーター |
-
1999
- 1999-06-09 KR KR1020027008606A patent/KR20020073158A/ko active IP Right Grant
- 1999-06-09 CN CN99800862A patent/CN1296724A/zh active Pending
- 1999-06-09 WO PCT/JP1999/003086 patent/WO2000076273A1/ja not_active Application Discontinuation
- 1999-06-09 EP EP99923983A patent/EP1109423A1/en not_active Withdrawn
- 1999-06-09 KR KR1020007001061A patent/KR20010022476A/ko active Search and Examination
- 1999-06-09 KR KR1020037000070A patent/KR100544865B1/ko not_active IP Right Cessation
-
2002
- 2002-06-24 JP JP2002183564A patent/JP2003109730A/ja active Pending
- 2002-06-24 JP JP2002183565A patent/JP2003109731A/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101013884B1 (ko) * | 2010-07-08 | 2011-02-10 | (주)이에스푸드 | 꼬치 제조 시스템 및 그 방법 |
US20200396802A1 (en) * | 2019-06-12 | 2020-12-17 | Lg Electronics Inc. | Surface type heating element having controlled oxide layer and manufacturing method thereof |
US11832358B2 (en) * | 2019-06-12 | 2023-11-28 | Lg Electronics Inc. | Surface type heating element having controlled oxide layer and manufacturing method thereof |
Also Published As
Publication number | Publication date |
---|---|
KR100544865B1 (ko) | 2006-01-24 |
KR20010022476A (ko) | 2001-03-15 |
EP1109423A1 (en) | 2001-06-20 |
WO2000076273A1 (fr) | 2000-12-14 |
JP2003109730A (ja) | 2003-04-11 |
CN1296724A (zh) | 2001-05-23 |
JP2003109731A (ja) | 2003-04-11 |
KR20020073158A (ko) | 2002-09-19 |
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