KR20000062311A - 여과 및 흡착에 의해 극저온 유체를 정제시키는 방법 - Google Patents

여과 및 흡착에 의해 극저온 유체를 정제시키는 방법 Download PDF

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Publication number
KR20000062311A
KR20000062311A KR1019997005741A KR19997005741A KR20000062311A KR 20000062311 A KR20000062311 A KR 20000062311A KR 1019997005741 A KR1019997005741 A KR 1019997005741A KR 19997005741 A KR19997005741 A KR 19997005741A KR 20000062311 A KR20000062311 A KR 20000062311A
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South Korea
Prior art keywords
helium
impurities
liquid
purified
filter
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KR1019997005741A
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English (en)
Korean (ko)
Inventor
가뤼다니엘
라르도르네
프라이스필리프
카스텔라네프레데리
Original Assignee
쉬에르 피에르
레르 리뀌드, 소시에떼 아노님 뿌르 레뛰드 에 렉스쁠로와따시옹 데 프로세데 죠르쥬 끌로드
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Application filed by 쉬에르 피에르, 레르 리뀌드, 소시에떼 아노님 뿌르 레뛰드 에 렉스쁠로와따시옹 데 프로세데 죠르쥬 끌로드 filed Critical 쉬에르 피에르
Publication of KR20000062311A publication Critical patent/KR20000062311A/ko

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    • C01B23/00—Noble gases; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
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    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
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    • F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/40083—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption
    • B01D2259/40086—Regeneration of adsorbents in processes other than pressure or temperature swing adsorption by using a purge gas
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    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
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    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/401—Further details for adsorption processes and devices using a single bed
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2205/00—Processes or apparatus using other separation and/or other processing means
    • F25J2205/84—Processes or apparatus using other separation and/or other processing means using filter
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/10—Hydrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/30—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/32—Neon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/34—Krypton
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/36—Xenon
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
    • F25J2215/00—Processes characterised by the type or other details of the product stream
    • F25J2215/58—Argon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
    • Y02C20/00—Capture or disposal of greenhouse gases
    • Y02C20/40—Capture or disposal of greenhouse gases of CO2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/32—Hydrogen storage
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/151—Reduction of greenhouse gas [GHG] emissions, e.g. CO2
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/902—Apparatus
    • Y10S62/908—Filter or absorber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S62/00—Refrigeration
    • Y10S62/923—Inert gas
    • Y10S62/924—Argon

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • General Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Separation Of Gases By Adsorption (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Treatment Of Liquids With Adsorbents In General (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
KR1019997005741A 1996-12-24 1997-12-18 여과 및 흡착에 의해 극저온 유체를 정제시키는 방법 KR20000062311A (ko)

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FR96/15972 1996-12-24
FR9615972A FR2757421B1 (fr) 1996-12-24 1996-12-24 Procede d'epuration d'un fluide cryogenique par filtration et/ou adsorption

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US (3) US5857356A (fr)
EP (1) EP0948458B1 (fr)
JP (1) JP2001506960A (fr)
KR (1) KR20000062311A (fr)
AU (1) AU5564498A (fr)
CA (1) CA2275962A1 (fr)
DE (1) DE69705241T2 (fr)
FR (1) FR2757421B1 (fr)
TW (1) TW334505B (fr)
WO (1) WO1998028226A1 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328801B1 (en) * 1997-07-25 2001-12-11 L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude Method and system for recovering and recirculating a deuterium-containing gas
FR2784600B1 (fr) * 1998-10-20 2000-12-08 Air Liquide PROCEDE DE PURIFICATION D'UN FLUIDE CRYOGENIQUE COMPORTANT DES IMPURETES N2O, CnHm ET/OU NOx
FR2860988B1 (fr) * 2003-10-20 2006-11-24 Air Liquide Installation et procede de purification d'un liquide cryogenique
US20080271466A1 (en) * 2007-05-01 2008-11-06 Giacobbe Frederick W Method and System for Purifying Liquified Gases
DE102008037300A1 (de) * 2008-08-11 2010-02-25 Robert Brockmann Herstellung eines Reingases, insbesondere für die Dichtheitsprüfung an einem druckbeaufschlagten Bauteil
ES2375390B1 (es) * 2009-10-26 2013-02-11 Consejo Superior De Investigaciones Científicas (Csic) Planta de recuperación de helio.
RU2482903C1 (ru) * 2011-09-15 2013-05-27 Виталий Леонидович Бондаренко Способ получения криптоноксеноновой смеси и устройство для его осуществления
RU2486943C1 (ru) * 2011-12-30 2013-07-10 Виталий Леонидович Бондаренко Способ обогащения неоногелиевой смеси и установка для его реализации
FR2986061B1 (fr) * 2012-01-19 2019-12-06 L'air Liquide, Societe Anonyme Pour L'etude Et L’Exploitation Des Procedes Georges Claude Installation et procede pour fournir du xenon liquide
US10113793B2 (en) * 2012-02-08 2018-10-30 Quantum Design International, Inc. Cryocooler-based gas scrubber
GB201210927D0 (en) 2012-06-20 2012-08-01 Oxford Instr Nanotechnology Tools Ltd Reduction of blockages in a cryogenic refrigerator system
WO2017062196A1 (fr) * 2015-10-05 2017-04-13 Coopersurgical, Inc. Purification de fluides cryogéniques
US20210213220A1 (en) * 2018-05-29 2021-07-15 Sagetech Medical Equipment Limited Capture of xenon from anaesthetic gas and re-administration thereof to the patient
CN110410662B (zh) * 2019-08-08 2023-07-11 广东华特气体股份有限公司 一种超高纯气体的钢瓶处理系统及方法
CN112374460A (zh) * 2020-11-11 2021-02-19 苏州市兴鲁空分设备科技发展有限公司 获取超纯氢气的方法和装置
US20230249970A1 (en) * 2022-02-08 2023-08-10 Air Products And Chemicals, Inc. Method for producing high purity hydrogen
US11945721B2 (en) 2022-02-08 2024-04-02 Air Products And Chemicals, Inc. Method for producing high purity hydrogen

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3415069A (en) * 1966-10-31 1968-12-10 Nasa High pressure helium purifier
US3616602A (en) * 1970-01-29 1971-11-02 Phillips Petroleum Co Low-temperature purification of fluids
US4192661A (en) * 1978-06-01 1980-03-11 Helix Technology Corporation Adsorbing impurities from cryogenic fluid make-up prior to admixing with feed
US4417909A (en) * 1978-12-04 1983-11-29 Airco, Inc. Gas separation process
US4717406A (en) * 1986-07-07 1988-01-05 Liquid Air Corporation Cryogenic liquified gas purification method and apparatus
DE3840506A1 (de) * 1988-12-01 1990-06-07 Linde Ag Verfahren und vorrichtung zur luftzerlegung
US5106399A (en) * 1991-02-25 1992-04-21 Union Carbide Industrial Gases Technology Corporation Argon purification system
US5551257A (en) * 1992-10-01 1996-09-03 The Boc Group, Inc. Production of ultrahigh purity nitrogen
US5425240A (en) * 1992-10-01 1995-06-20 The Boc Group, Inc. Purification of oxygen by cryogenic adsorption
US5377491A (en) * 1992-12-11 1995-01-03 Praxair Technology, Inc. Coolant recovery process
BR9400766A (pt) * 1993-03-02 1995-10-24 Praxair Technology Inc Processo e sistema para a purificação de argônio cru
US5601634A (en) * 1993-09-30 1997-02-11 The Boc Group, Inc. Purification of fluids by adsorption
FR2714618B1 (fr) * 1993-12-31 1996-05-24 Air Liquide Procédé et dispositif pour la préparation d'azote liquide de haute pureté.
DE4445183A1 (de) * 1994-03-02 1995-09-07 Daimler Benz Aerospace Ag Betankungsverfahren für kryogene Flüssigkeiten
FR2735990B1 (fr) * 1995-06-30 1997-08-14 Air Liquide Procede et dispositif pour la preparation d'un flux substantiellement epure en l'une au moins des impuretes oxygene et monoxyde de carbone
FR2749575B1 (fr) * 1996-06-07 1998-07-10 Air Liquide Procede et dispositif de preparation d'azote liquide de haute purete
US5737941A (en) * 1997-01-21 1998-04-14 Air Products And Chemicals, Inc. Method and apparatus for removing trace quantities of impurities from liquified bulk gases

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JP2001506960A (ja) 2001-05-29
US5857356A (en) 1999-01-12
AU5564498A (en) 1998-07-17
WO1998028226A1 (fr) 1998-07-02
TW334505B (en) 1998-06-21
US5937672A (en) 1999-08-17
FR2757421A1 (fr) 1998-06-26
FR2757421B1 (fr) 1999-01-15
EP0948458B1 (fr) 2001-06-13
US5836172A (en) 1998-11-17
DE69705241D1 (de) 2001-07-19
EP0948458A1 (fr) 1999-10-13
DE69705241T2 (de) 2002-05-02
CA2275962A1 (fr) 1998-07-02

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