KR102741162B1 - 진공밸브 및 진공밸브에 이용되는 액추에이터 - Google Patents

진공밸브 및 진공밸브에 이용되는 액추에이터 Download PDF

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Publication number
KR102741162B1
KR102741162B1 KR1020217038486A KR20217038486A KR102741162B1 KR 102741162 B1 KR102741162 B1 KR 102741162B1 KR 1020217038486 A KR1020217038486 A KR 1020217038486A KR 20217038486 A KR20217038486 A KR 20217038486A KR 102741162 B1 KR102741162 B1 KR 102741162B1
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KR
South Korea
Prior art keywords
shaft
ball screw
vacuum
valve
bellows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
KR1020217038486A
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English (en)
Korean (ko)
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KR20220019677A (ko
Inventor
엠마누엘 바이어스
Original Assignee
스미도모쥬기가이고교 가부시키가이샤
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Publication of KR20220019677A publication Critical patent/KR20220019677A/ko
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
    • F16K31/043—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F16K31/508—Mechanical actuating means with screw-spindle or internally threaded actuating means the actuating element being rotatable, non-rising, and driving a non-rotatable axially-sliding element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/528—Mechanical actuating means with crank, eccentric, or cam with pin and slot
    • F16K31/5286—Mechanical actuating means with crank, eccentric, or cam with pin and slot comprising a sliding valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
KR1020217038486A 2019-06-12 2020-06-05 진공밸브 및 진공밸브에 이용되는 액추에이터 Active KR102741162B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019109400A JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ
JPJP-P-2019-109400 2019-06-12
PCT/JP2020/022412 WO2020250841A1 (ja) 2019-06-12 2020-06-05 真空バルブ及び真空バルブに用いられるアクチュエータ

Publications (2)

Publication Number Publication Date
KR20220019677A KR20220019677A (ko) 2022-02-17
KR102741162B1 true KR102741162B1 (ko) 2024-12-10

Family

ID=73743939

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020217038486A Active KR102741162B1 (ko) 2019-06-12 2020-06-05 진공밸브 및 진공밸브에 이용되는 액추에이터

Country Status (7)

Country Link
US (1) US11629796B2 (https=)
EP (1) EP3985289B1 (https=)
JP (1) JP7164491B2 (https=)
KR (1) KR102741162B1 (https=)
CN (1) CN114072603B (https=)
TW (1) TWI846885B (https=)
WO (1) WO2020250841A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113187956B (zh) * 2021-05-31 2024-12-31 北京电子科技职业学院 波纹管伸缩支撑装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011247324A (ja) * 2010-05-25 2011-12-08 Smc Corp 真空用バルブ
WO2019078727A1 (en) * 2017-10-17 2019-04-25 Electrical Subsea & Drilling As ELECTROMECHANICAL POWER ACTUATOR

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2590867Y2 (ja) * 1993-05-28 1999-02-24 株式会社プラズマシステム 半導体処理装置の電極支持構造
JPH0842734A (ja) * 1994-05-25 1996-02-16 Anelva Corp メインバルブ
US5560586A (en) * 1994-05-25 1996-10-01 Anelva Corporation Main valve
KR200144439Y1 (ko) * 1994-05-25 1999-06-15 니시히라 순지 메인밸브
US6056262A (en) * 1998-11-24 2000-05-02 Applied Mateials, Inc. Universal coupler for a self aligning linear actuator
JP3390708B2 (ja) * 1999-11-22 2003-03-31 メガトール株式会社 広帯域可変コンダクタンスバルブ
US6994311B2 (en) * 2003-06-27 2006-02-07 Vat Holding Ag Regulating vacuum valve
JP4099766B2 (ja) 2003-08-12 2008-06-11 Ｓｍｃ株式会社 メンテナンス容易なゲートバルブ
JP4002906B2 (ja) * 2004-04-21 2007-11-07 株式会社アグリー 開閉バルブ
JP4196293B2 (ja) * 2004-08-02 2008-12-17 Ｓｍｃ株式会社 真空調圧用バルブ
US20110041632A1 (en) * 2006-10-18 2011-02-24 Baker Michael C Jam-tolerant dual-redundant differential-type actuators
TWI431213B (zh) 2008-08-06 2014-03-21 開滋Ｓｃｔ股份有限公司 蝶形壓力控制閥
US9091371B2 (en) * 2010-12-27 2015-07-28 Kenneth K L Lee Single axis gate valve for vacuum applications
JP6016584B2 (ja) * 2012-11-08 2016-10-26 東京エレクトロン株式会社 ロードロック装置
JP5397525B1 (ja) * 2012-11-13 2014-01-22 Ｓｍｃ株式会社 真空調圧システム
US10184570B2 (en) 2015-03-27 2019-01-22 Vat Holding Ag Vacuum valve
EP3258149A1 (de) 2016-06-14 2017-12-20 VAT Holding AG Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges
WO2020033378A1 (en) * 2018-08-07 2020-02-13 Persimmon Technologies Corp. Direct-drive flexure-mechanism vacuum control valve
JP7155999B2 (ja) * 2018-12-20 2022-10-19 株式会社島津製作所 真空バルブおよびバルブ制御装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011247324A (ja) * 2010-05-25 2011-12-08 Smc Corp 真空用バルブ
WO2019078727A1 (en) * 2017-10-17 2019-04-25 Electrical Subsea & Drilling As ELECTROMECHANICAL POWER ACTUATOR

Also Published As

Publication number Publication date
EP3985289A1 (en) 2022-04-20
JP7164491B2 (ja) 2022-11-01
WO2020250841A1 (ja) 2020-12-17
EP3985289B1 (en) 2025-10-29
CN114072603B (zh) 2024-10-29
TWI846885B (zh) 2024-07-01
EP3985289A4 (en) 2022-08-31
JP2020200905A (ja) 2020-12-17
US11629796B2 (en) 2023-04-18
CN114072603A (zh) 2022-02-18
TW202104787A (zh) 2021-02-01
KR20220019677A (ko) 2022-02-17
US20220099218A1 (en) 2022-03-31

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