TWI846885B - 真空閥及真空閥所使用的致動器 - Google Patents

真空閥及真空閥所使用的致動器 Download PDF

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Publication number
TWI846885B
TWI846885B TW109119451A TW109119451A TWI846885B TW I846885 B TWI846885 B TW I846885B TW 109119451 A TW109119451 A TW 109119451A TW 109119451 A TW109119451 A TW 109119451A TW I846885 B TWI846885 B TW I846885B
Authority
TW
Taiwan
Prior art keywords
ball screw
main shaft
aforementioned
bellows
vacuum
Prior art date
Application number
TW109119451A
Other languages
English (en)
Chinese (zh)
Other versions
TW202104787A (zh
Inventor
艾曼紐 拜爾斯
Original Assignee
日商住友重機械工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
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Application filed by 日商住友重機械工業股份有限公司 filed Critical 日商住友重機械工業股份有限公司
Publication of TW202104787A publication Critical patent/TW202104787A/zh
Application granted granted Critical
Publication of TWI846885B publication Critical patent/TWI846885B/zh

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
    • F16K31/043—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F16K31/508—Mechanical actuating means with screw-spindle or internally threaded actuating means the actuating element being rotatable, non-rising, and driving a non-rotatable axially-sliding element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/528—Mechanical actuating means with crank, eccentric, or cam with pin and slot
    • F16K31/5286—Mechanical actuating means with crank, eccentric, or cam with pin and slot comprising a sliding valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
TW109119451A 2019-06-12 2020-06-10 真空閥及真空閥所使用的致動器 TWI846885B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019-109400 2019-06-12
JP2019109400A JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ

Publications (2)

Publication Number Publication Date
TW202104787A TW202104787A (zh) 2021-02-01
TWI846885B true TWI846885B (zh) 2024-07-01

Family

ID=73743939

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109119451A TWI846885B (zh) 2019-06-12 2020-06-10 真空閥及真空閥所使用的致動器

Country Status (7)

Country Link
US (1) US11629796B2 (https=)
EP (1) EP3985289B1 (https=)
JP (1) JP7164491B2 (https=)
KR (1) KR102741162B1 (https=)
CN (1) CN114072603B (https=)
TW (1) TWI846885B (https=)
WO (1) WO2020250841A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113187956B (zh) * 2021-05-31 2024-12-31 北京电子科技职业学院 波纹管伸缩支撑装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0842734A (ja) * 1994-05-25 1996-02-16 Anelva Corp メインバルブ
US6227236B1 (en) * 1999-11-22 2001-05-08 Megatorr Corporation Widely variable conductance valve
JP2005061437A (ja) * 2003-08-12 2005-03-10 Smc Corp メンテナンス容易なゲートバルブ
JP2011158096A (ja) * 2008-08-06 2011-08-18 Kitz Sct:Kk バタフライ式圧力制御バルブ
JP2018509570A (ja) * 2015-03-27 2018-04-05 バット ホールディング アーゲー 真空バルブ
WO2019078727A1 (en) * 2017-10-17 2019-04-25 Electrical Subsea & Drilling As ELECTROMECHANICAL POWER ACTUATOR

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2590867Y2 (ja) * 1993-05-28 1999-02-24 株式会社プラズマシステム 半導体処理装置の電極支持構造
US5560586A (en) * 1994-05-25 1996-10-01 Anelva Corporation Main valve
KR200144439Y1 (ko) * 1994-05-25 1999-06-15 니시히라 순지 메인밸브
US6056262A (en) * 1998-11-24 2000-05-02 Applied Mateials, Inc. Universal coupler for a self aligning linear actuator
US6994311B2 (en) * 2003-06-27 2006-02-07 Vat Holding Ag Regulating vacuum valve
JP4002906B2 (ja) * 2004-04-21 2007-11-07 株式会社アグリー 開閉バルブ
JP4196293B2 (ja) * 2004-08-02 2008-12-17 Ｓｍｃ株式会社 真空調圧用バルブ
US20110041632A1 (en) * 2006-10-18 2011-02-24 Baker Michael C Jam-tolerant dual-redundant differential-type actuators
JP5664846B2 (ja) * 2010-05-25 2015-02-04 Smc株式会社 真空用バルブ
US9091371B2 (en) * 2010-12-27 2015-07-28 Kenneth K L Lee Single axis gate valve for vacuum applications
JP6016584B2 (ja) * 2012-11-08 2016-10-26 東京エレクトロン株式会社 ロードロック装置
JP5397525B1 (ja) * 2012-11-13 2014-01-22 Ｓｍｃ株式会社 真空調圧システム
EP3258149A1 (de) 2016-06-14 2017-12-20 VAT Holding AG Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges
WO2020033378A1 (en) * 2018-08-07 2020-02-13 Persimmon Technologies Corp. Direct-drive flexure-mechanism vacuum control valve
JP7155999B2 (ja) * 2018-12-20 2022-10-19 株式会社島津製作所 真空バルブおよびバルブ制御装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0842734A (ja) * 1994-05-25 1996-02-16 Anelva Corp メインバルブ
US6227236B1 (en) * 1999-11-22 2001-05-08 Megatorr Corporation Widely variable conductance valve
JP2005061437A (ja) * 2003-08-12 2005-03-10 Smc Corp メンテナンス容易なゲートバルブ
JP2011158096A (ja) * 2008-08-06 2011-08-18 Kitz Sct:Kk バタフライ式圧力制御バルブ
JP2018509570A (ja) * 2015-03-27 2018-04-05 バット ホールディング アーゲー 真空バルブ
WO2019078727A1 (en) * 2017-10-17 2019-04-25 Electrical Subsea & Drilling As ELECTROMECHANICAL POWER ACTUATOR

Also Published As

Publication number Publication date
EP3985289A1 (en) 2022-04-20
JP7164491B2 (ja) 2022-11-01
WO2020250841A1 (ja) 2020-12-17
EP3985289B1 (en) 2025-10-29
CN114072603B (zh) 2024-10-29
EP3985289A4 (en) 2022-08-31
KR102741162B1 (ko) 2024-12-10
JP2020200905A (ja) 2020-12-17
US11629796B2 (en) 2023-04-18
CN114072603A (zh) 2022-02-18
TW202104787A (zh) 2021-02-01
KR20220019677A (ko) 2022-02-17
US20220099218A1 (en) 2022-03-31

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