JP7164491B2 - 真空バルブ及び真空バルブに用いられるアクチュエータ - Google Patents

真空バルブ及び真空バルブに用いられるアクチュエータ Download PDF

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Publication number
JP7164491B2
JP7164491B2 JP2019109400A JP2019109400A JP7164491B2 JP 7164491 B2 JP7164491 B2 JP 7164491B2 JP 2019109400 A JP2019109400 A JP 2019109400A JP 2019109400 A JP2019109400 A JP 2019109400A JP 7164491 B2 JP7164491 B2 JP 7164491B2
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JP
Japan
Prior art keywords
shaft
ball screw
vacuum
vacuum chamber
connecting portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019109400A
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English (en)
Japanese (ja)
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JP2020200905A (ja
JP2020200905A5 (https=
Inventor
エマニュエル バイヤーズ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2019109400A priority Critical patent/JP7164491B2/ja
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Priority to EP20821597.0A priority patent/EP3985289B1/en
Priority to PCT/JP2020/022412 priority patent/WO2020250841A1/ja
Priority to CN202080040088.3A priority patent/CN114072603B/zh
Priority to KR1020217038486A priority patent/KR102741162B1/ko
Priority to TW109119451A priority patent/TWI846885B/zh
Publication of JP2020200905A publication Critical patent/JP2020200905A/ja
Priority to US17/545,685 priority patent/US11629796B2/en
Publication of JP2020200905A5 publication Critical patent/JP2020200905A5/ja
Application granted granted Critical
Publication of JP7164491B2 publication Critical patent/JP7164491B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0218—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with only one sealing face
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/184—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of cams
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/041—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves
    • F16K31/043—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor for rotating valves characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/50—Mechanical actuating means with screw-spindle or internally threaded actuating means
    • F16K31/508—Mechanical actuating means with screw-spindle or internally threaded actuating means the actuating element being rotatable, non-rising, and driving a non-rotatable axially-sliding element
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/44—Mechanical actuating means
    • F16K31/52—Mechanical actuating means with crank, eccentric, or cam
    • F16K31/528—Mechanical actuating means with crank, eccentric, or cam with pin and slot
    • F16K31/5286—Mechanical actuating means with crank, eccentric, or cam with pin and slot comprising a sliding valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K49/00—Means in or on valves for heating or cooling
    • F16K49/002—Electric heating means

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
JP2019109400A 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ Active JP7164491B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2019109400A JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ
PCT/JP2020/022412 WO2020250841A1 (ja) 2019-06-12 2020-06-05 真空バルブ及び真空バルブに用いられるアクチュエータ
CN202080040088.3A CN114072603B (zh) 2019-06-12 2020-06-05 真空阀及使用于真空阀的致动器
KR1020217038486A KR102741162B1 (ko) 2019-06-12 2020-06-05 진공밸브 및 진공밸브에 이용되는 액추에이터
EP20821597.0A EP3985289B1 (en) 2019-06-12 2020-06-05 Vacuum valve and actuator used in vacuum valve
TW109119451A TWI846885B (zh) 2019-06-12 2020-06-10 真空閥及真空閥所使用的致動器
US17/545,685 US11629796B2 (en) 2019-06-12 2021-12-08 Vacuum valve and actuator used in vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019109400A JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ

Publications (3)

Publication Number Publication Date
JP2020200905A JP2020200905A (ja) 2020-12-17
JP2020200905A5 JP2020200905A5 (https=) 2022-02-22
JP7164491B2 true JP7164491B2 (ja) 2022-11-01

Family

ID=73743939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019109400A Active JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ

Country Status (7)

Country Link
US (1) US11629796B2 (https=)
EP (1) EP3985289B1 (https=)
JP (1) JP7164491B2 (https=)
KR (1) KR102741162B1 (https=)
CN (1) CN114072603B (https=)
TW (1) TWI846885B (https=)
WO (1) WO2020250841A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113187956B (zh) * 2021-05-31 2024-12-31 北京电子科技职业学院 波纹管伸缩支撑装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005061437A (ja) 2003-08-12 2005-03-10 Smc Corp メンテナンス容易なゲートバルブ
JP2011158096A (ja) 2008-08-06 2011-08-18 Kitz Sct:Kk バタフライ式圧力制御バルブ
JP2017227325A (ja) 2016-06-14 2017-12-28 バット ホールディング アーゲー 流量を制御するためのおよび流路を遮断するための真空バルブ
JP2018509570A (ja) 2015-03-27 2018-04-05 バット ホールディング アーゲー 真空バルブ

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2590867Y2 (ja) * 1993-05-28 1999-02-24 株式会社プラズマシステム 半導体処理装置の電極支持構造
JPH0842734A (ja) * 1994-05-25 1996-02-16 Anelva Corp メインバルブ
US5560586A (en) * 1994-05-25 1996-10-01 Anelva Corporation Main valve
KR200144439Y1 (ko) * 1994-05-25 1999-06-15 니시히라 순지 메인밸브
US6056262A (en) * 1998-11-24 2000-05-02 Applied Mateials, Inc. Universal coupler for a self aligning linear actuator
JP3390708B2 (ja) * 1999-11-22 2003-03-31 メガトール株式会社 広帯域可変コンダクタンスバルブ
US6994311B2 (en) * 2003-06-27 2006-02-07 Vat Holding Ag Regulating vacuum valve
JP4002906B2 (ja) * 2004-04-21 2007-11-07 株式会社アグリー 開閉バルブ
JP4196293B2 (ja) * 2004-08-02 2008-12-17 Ｓｍｃ株式会社 真空調圧用バルブ
US20110041632A1 (en) * 2006-10-18 2011-02-24 Baker Michael C Jam-tolerant dual-redundant differential-type actuators
JP5664846B2 (ja) * 2010-05-25 2015-02-04 Smc株式会社 真空用バルブ
US9091371B2 (en) * 2010-12-27 2015-07-28 Kenneth K L Lee Single axis gate valve for vacuum applications
JP6016584B2 (ja) * 2012-11-08 2016-10-26 東京エレクトロン株式会社 ロードロック装置
JP5397525B1 (ja) * 2012-11-13 2014-01-22 Ｓｍｃ株式会社 真空調圧システム
NO344201B1 (en) * 2017-10-17 2019-10-14 Electrical Subsea & Drilling As Electro mechanical power actuator
WO2020033378A1 (en) * 2018-08-07 2020-02-13 Persimmon Technologies Corp. Direct-drive flexure-mechanism vacuum control valve
JP7155999B2 (ja) * 2018-12-20 2022-10-19 株式会社島津製作所 真空バルブおよびバルブ制御装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005061437A (ja) 2003-08-12 2005-03-10 Smc Corp メンテナンス容易なゲートバルブ
JP2011158096A (ja) 2008-08-06 2011-08-18 Kitz Sct:Kk バタフライ式圧力制御バルブ
JP2018509570A (ja) 2015-03-27 2018-04-05 バット ホールディング アーゲー 真空バルブ
JP2017227325A (ja) 2016-06-14 2017-12-28 バット ホールディング アーゲー 流量を制御するためのおよび流路を遮断するための真空バルブ

Also Published As

Publication number Publication date
EP3985289A1 (en) 2022-04-20
WO2020250841A1 (ja) 2020-12-17
EP3985289B1 (en) 2025-10-29
CN114072603B (zh) 2024-10-29
TWI846885B (zh) 2024-07-01
EP3985289A4 (en) 2022-08-31
KR102741162B1 (ko) 2024-12-10
JP2020200905A (ja) 2020-12-17
US11629796B2 (en) 2023-04-18
CN114072603A (zh) 2022-02-18
TW202104787A (zh) 2021-02-01
KR20220019677A (ko) 2022-02-17
US20220099218A1 (en) 2022-03-31

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