JP2020200905A5 - - Google Patents

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Publication number
JP2020200905A5
JP2020200905A5 JP2019109400A JP2019109400A JP2020200905A5 JP 2020200905 A5 JP2020200905 A5 JP 2020200905A5 JP 2019109400 A JP2019109400 A JP 2019109400A JP 2019109400 A JP2019109400 A JP 2019109400A JP 2020200905 A5 JP2020200905 A5 JP 2020200905A5
Authority
JP
Japan
Prior art keywords
shaft
ball screw
valve according
discharge port
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019109400A
Other languages
English (en)
Japanese (ja)
Other versions
JP7164491B2 (ja
JP2020200905A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2019109400A external-priority patent/JP7164491B2/ja
Priority to JP2019109400A priority Critical patent/JP7164491B2/ja
Priority to EP20821597.0A priority patent/EP3985289B1/en
Priority to CN202080040088.3A priority patent/CN114072603B/zh
Priority to KR1020217038486A priority patent/KR102741162B1/ko
Priority to PCT/JP2020/022412 priority patent/WO2020250841A1/ja
Priority to TW109119451A priority patent/TWI846885B/zh
Publication of JP2020200905A publication Critical patent/JP2020200905A/ja
Priority to US17/545,685 priority patent/US11629796B2/en
Publication of JP2020200905A5 publication Critical patent/JP2020200905A5/ja
Publication of JP7164491B2 publication Critical patent/JP7164491B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2019109400A 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ Active JP7164491B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2019109400A JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ
PCT/JP2020/022412 WO2020250841A1 (ja) 2019-06-12 2020-06-05 真空バルブ及び真空バルブに用いられるアクチュエータ
CN202080040088.3A CN114072603B (zh) 2019-06-12 2020-06-05 真空阀及使用于真空阀的致动器
KR1020217038486A KR102741162B1 (ko) 2019-06-12 2020-06-05 진공밸브 및 진공밸브에 이용되는 액추에이터
EP20821597.0A EP3985289B1 (en) 2019-06-12 2020-06-05 Vacuum valve and actuator used in vacuum valve
TW109119451A TWI846885B (zh) 2019-06-12 2020-06-10 真空閥及真空閥所使用的致動器
US17/545,685 US11629796B2 (en) 2019-06-12 2021-12-08 Vacuum valve and actuator used in vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019109400A JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ

Publications (3)

Publication Number Publication Date
JP2020200905A JP2020200905A (ja) 2020-12-17
JP2020200905A5 true JP2020200905A5 (https=) 2022-02-22
JP7164491B2 JP7164491B2 (ja) 2022-11-01

Family

ID=73743939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019109400A Active JP7164491B2 (ja) 2019-06-12 2019-06-12 真空バルブ及び真空バルブに用いられるアクチュエータ

Country Status (7)

Country Link
US (1) US11629796B2 (https=)
EP (1) EP3985289B1 (https=)
JP (1) JP7164491B2 (https=)
KR (1) KR102741162B1 (https=)
CN (1) CN114072603B (https=)
TW (1) TWI846885B (https=)
WO (1) WO2020250841A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113187956B (zh) * 2021-05-31 2024-12-31 北京电子科技职业学院 波纹管伸缩支撑装置

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2590867Y2 (ja) * 1993-05-28 1999-02-24 株式会社プラズマシステム 半導体処理装置の電極支持構造
JPH0842734A (ja) * 1994-05-25 1996-02-16 Anelva Corp メインバルブ
US5560586A (en) * 1994-05-25 1996-10-01 Anelva Corporation Main valve
KR200144439Y1 (ko) * 1994-05-25 1999-06-15 니시히라 순지 메인밸브
US6056262A (en) * 1998-11-24 2000-05-02 Applied Mateials, Inc. Universal coupler for a self aligning linear actuator
JP3390708B2 (ja) * 1999-11-22 2003-03-31 メガトール株式会社 広帯域可変コンダクタンスバルブ
US6994311B2 (en) * 2003-06-27 2006-02-07 Vat Holding Ag Regulating vacuum valve
JP4099766B2 (ja) 2003-08-12 2008-06-11 Ｓｍｃ株式会社 メンテナンス容易なゲートバルブ
JP4002906B2 (ja) * 2004-04-21 2007-11-07 株式会社アグリー 開閉バルブ
JP4196293B2 (ja) * 2004-08-02 2008-12-17 Ｓｍｃ株式会社 真空調圧用バルブ
US20110041632A1 (en) * 2006-10-18 2011-02-24 Baker Michael C Jam-tolerant dual-redundant differential-type actuators
TWI431213B (zh) 2008-08-06 2014-03-21 開滋Ｓｃｔ股份有限公司 蝶形壓力控制閥
JP5664846B2 (ja) * 2010-05-25 2015-02-04 Smc株式会社 真空用バルブ
US9091371B2 (en) * 2010-12-27 2015-07-28 Kenneth K L Lee Single axis gate valve for vacuum applications
JP6016584B2 (ja) * 2012-11-08 2016-10-26 東京エレクトロン株式会社 ロードロック装置
JP5397525B1 (ja) * 2012-11-13 2014-01-22 Ｓｍｃ株式会社 真空調圧システム
US10184570B2 (en) 2015-03-27 2019-01-22 Vat Holding Ag Vacuum valve
EP3258149A1 (de) 2016-06-14 2017-12-20 VAT Holding AG Vakuumventil zur regelung eines flusses und zur unterbrechung eines fliessweges
NO344201B1 (en) * 2017-10-17 2019-10-14 Electrical Subsea & Drilling As Electro mechanical power actuator
WO2020033378A1 (en) * 2018-08-07 2020-02-13 Persimmon Technologies Corp. Direct-drive flexure-mechanism vacuum control valve
JP7155999B2 (ja) * 2018-12-20 2022-10-19 株式会社島津製作所 真空バルブおよびバルブ制御装置

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