KR102541744B1 - 3차원 소성체의 제법 - Google Patents
3차원 소성체의 제법 Download PDFInfo
- Publication number
- KR102541744B1 KR102541744B1 KR1020217033574A KR20217033574A KR102541744B1 KR 102541744 B1 KR102541744 B1 KR 102541744B1 KR 1020217033574 A KR1020217033574 A KR 1020217033574A KR 20217033574 A KR20217033574 A KR 20217033574A KR 102541744 B1 KR102541744 B1 KR 102541744B1
- Authority
- KR
- South Korea
- Prior art keywords
- molded body
- mold
- molding
- drying
- molding die
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B7/00—Moulds; Cores; Mandrels
- B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
- B28B7/342—Moulds, cores, or mandrels of special material, e.g. destructible materials which are at least partially destroyed, e.g. broken, molten, before demoulding; Moulding surfaces or spaces shaped by, or in, the ground, or sand or soil, whether bound or not; Cores consisting at least mainly of sand or soil, whether bound or not
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/14—Producing shaped prefabricated articles from the material by simple casting, the material being neither forcibly fed nor positively compacted
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B1/00—Producing shaped prefabricated articles from the material
- B28B1/48—Producing shaped prefabricated articles from the material by removing material from solid section preforms for forming hollow articles, e.g. by punching or boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
- B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
- B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B7/00—Moulds; Cores; Mandrels
- B28B7/16—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes
- B28B7/18—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes the holes passing completely through the article
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B7/00—Moulds; Cores; Mandrels
- B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
- B28B7/346—Manufacture of moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
- B28B7/00—Moulds; Cores; Mandrels
- B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
- B28B7/348—Moulds, cores, or mandrels of special material, e.g. destructible materials of plastic material or rubber
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
- B29C64/10—Processes of additive manufacturing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/624—Sol-gel processing
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
- C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
- C04B35/638—Removal thereof
-
- H01L21/6833—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
- H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
- H10P72/722—Details of electrostatic chucks
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
- C04B2235/602—Making the green bodies or pre-forms by moulding
- C04B2235/6028—Shaping around a core which is removed later
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Dispersion Chemistry (AREA)
- Moulds, Cores, Or Mandrels (AREA)
- Producing Shaped Articles From Materials (AREA)
- Filtering Materials (AREA)
- Materials For Medical Uses (AREA)
- Ceramic Products (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2019/017718 WO2020217406A1 (ja) | 2019-04-25 | 2019-04-25 | 3次元焼成体の製法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20210138086A KR20210138086A (ko) | 2021-11-18 |
| KR102541744B1 true KR102541744B1 (ko) | 2023-06-13 |
Family
ID=72941142
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020217033574A Active KR102541744B1 (ko) | 2019-04-25 | 2019-04-25 | 3차원 소성체의 제법 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20220032501A1 (https=) |
| JP (1) | JP7144603B2 (https=) |
| KR (1) | KR102541744B1 (https=) |
| CN (1) | CN113710444B (https=) |
| TW (1) | TWI807182B (https=) |
| WO (1) | WO2020217406A1 (https=) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7642419B2 (ja) * | 2021-03-30 | 2025-03-10 | 第一セラモ株式会社 | サポート材用樹脂組成物および焼結体の製造方法 |
| JP7650697B2 (ja) * | 2021-03-30 | 2025-03-25 | 第一セラモ株式会社 | 中子用樹脂組成物および焼結体の製造方法 |
| JP7569772B2 (ja) | 2021-10-07 | 2024-10-18 | 日本碍子株式会社 | 半導体製造装置用部材 |
| CN119365971A (zh) | 2022-06-30 | 2025-01-24 | 日本碍子株式会社 | 半导体制造装置用部件 |
| JP7764356B2 (ja) * | 2022-12-21 | 2025-11-05 | 日本碍子株式会社 | プラグ、プラグ製造方法及び半導体製造装置用部材 |
| JP7744328B2 (ja) * | 2022-12-21 | 2025-09-25 | 日本碍子株式会社 | 半導体製造装置用部材、プラグ及びプラグ製造方法 |
| CN117754687A (zh) * | 2024-01-23 | 2024-03-26 | 长春长光精瓷复合材料有限公司 | 一种具有内部连通结构的陶瓷结构件成型方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101680334B1 (ko) * | 2015-06-15 | 2016-11-29 | 주식회사 퓨쳐캐스트 | 3차원 프린팅 방식을 이용한 금형 제작방법 |
Family Cites Families (24)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3848040A (en) * | 1969-04-17 | 1974-11-12 | Corning Glass Works | Apparatus and method for forming slii cast bodies with cavities |
| KR890003502B1 (ko) * | 1985-02-08 | 1989-09-23 | 가부시기가이샤 히다찌세이사꾸쇼 | 슬립캐스팅 성형법 및 성형용 주형 |
| US5387380A (en) * | 1989-12-08 | 1995-02-07 | Massachusetts Institute Of Technology | Three-dimensional printing techniques |
| JPH0813446B2 (ja) * | 1990-05-30 | 1996-02-14 | 株式会社日立製作所 | スリツプキヤステイング法 |
| US6189483B1 (en) * | 1997-05-29 | 2001-02-20 | Applied Materials, Inc. | Process kit |
| US6375880B1 (en) * | 1997-09-30 | 2002-04-23 | The Board Of Trustees Of The Leland Stanford Junior University | Mold shape deposition manufacturing |
| JP4343421B2 (ja) | 2000-12-13 | 2009-10-14 | 菊水化学工業株式会社 | セラミック薄板の生成形体の成形方法及び成形装置 |
| US7517490B2 (en) * | 2002-10-16 | 2009-04-14 | Ngk Insulators, Ltd. | Method of manufacturing ceramic green body |
| KR100906346B1 (ko) * | 2005-08-17 | 2009-07-06 | 주식회사 코미코 | 세라믹 성형체의 제조방법 및 이를 이용하여 제조된 세라믹성형체 |
| US8336891B2 (en) * | 2008-03-11 | 2012-12-25 | Ngk Insulators, Ltd. | Electrostatic chuck |
| JP5331519B2 (ja) * | 2008-03-11 | 2013-10-30 | 日本碍子株式会社 | 静電チャック |
| JP2010132487A (ja) | 2008-12-04 | 2010-06-17 | Panasonic Corp | セラミック多孔体の製造方法 |
| EP2360291A1 (de) * | 2010-02-24 | 2011-08-24 | Singulus Technologies AG | Verfahren und Vorrichtung zum schnellen Heizen und Kühlen eines Substrates und sofort anschließender Beschichtung desselben unter Vakuum |
| KR101167838B1 (ko) * | 2010-05-07 | 2012-07-24 | 한국기계연구원 | 탄소몰드를 이용한 금속 함침 주조품의 제조방법 |
| CN102487029B (zh) * | 2010-12-02 | 2014-03-19 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 静电卡盘和具有它的等离子体装置 |
| JP5458050B2 (ja) | 2011-03-30 | 2014-04-02 | 日本碍子株式会社 | 静電チャックの製法 |
| JP5890795B2 (ja) * | 2013-03-18 | 2016-03-22 | 日本碍子株式会社 | 半導体製造装置用部材 |
| JP5633766B2 (ja) | 2013-03-29 | 2014-12-03 | Toto株式会社 | 静電チャック |
| US10697305B2 (en) * | 2016-01-08 | 2020-06-30 | General Electric Company | Method for making hybrid ceramic/metal, ceramic/ceramic body by using 3D printing process |
| JP2019522105A (ja) * | 2016-04-14 | 2019-08-08 | デスクトップ メタル インコーポレイテッドDesktop Metal, Inc. | 支持構造を有する付加製造 |
| JP2018020441A (ja) * | 2016-08-01 | 2018-02-08 | 株式会社オメガ | 三次元形状造形物の製造方法 |
| CN107500781B (zh) * | 2017-09-28 | 2020-10-09 | 上海应用技术大学 | 一种多孔陶瓷的制备方法 |
| CN108101519A (zh) * | 2017-12-19 | 2018-06-01 | 西安交通大学 | 一种用于复杂结构零件定向凝固成形的陶瓷铸型制备方法 |
| CN108649012B (zh) * | 2018-05-11 | 2021-10-01 | 北京华卓精科科技股份有限公司 | 新型陶瓷塞及具有该新型陶瓷塞的静电卡盘装置 |
-
2019
- 2019-04-25 JP JP2021515425A patent/JP7144603B2/ja active Active
- 2019-04-25 CN CN201980095692.3A patent/CN113710444B/zh active Active
- 2019-04-25 WO PCT/JP2019/017718 patent/WO2020217406A1/ja not_active Ceased
- 2019-04-25 KR KR1020217033574A patent/KR102541744B1/ko active Active
-
2020
- 2020-04-16 TW TW109112783A patent/TWI807182B/zh active
-
2021
- 2021-10-18 US US17/451,204 patent/US20220032501A1/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101680334B1 (ko) * | 2015-06-15 | 2016-11-29 | 주식회사 퓨쳐캐스트 | 3차원 프린팅 방식을 이용한 금형 제작방법 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2020217406A1 (https=) | 2020-10-29 |
| WO2020217406A1 (ja) | 2020-10-29 |
| US20220032501A1 (en) | 2022-02-03 |
| CN113710444A (zh) | 2021-11-26 |
| TW202043174A (zh) | 2020-12-01 |
| JP7144603B2 (ja) | 2022-09-29 |
| TWI807182B (zh) | 2023-07-01 |
| KR20210138086A (ko) | 2021-11-18 |
| CN113710444B (zh) | 2023-06-23 |
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