TWI807182B - 三維燒成體的製法 - Google Patents

三維燒成體的製法 Download PDF

Info

Publication number
TWI807182B
TWI807182B TW109112783A TW109112783A TWI807182B TW I807182 B TWI807182 B TW I807182B TW 109112783 A TW109112783 A TW 109112783A TW 109112783 A TW109112783 A TW 109112783A TW I807182 B TWI807182 B TW I807182B
Authority
TW
Taiwan
Prior art keywords
mentioned
molding
dimensional
molding die
valve plug
Prior art date
Application number
TW109112783A
Other languages
English (en)
Chinese (zh)
Other versions
TW202043174A (zh
Inventor
青木泰穂
大野正
Original Assignee
日商日本碍子股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日本碍子股份有限公司 filed Critical 日商日本碍子股份有限公司
Publication of TW202043174A publication Critical patent/TW202043174A/zh
Application granted granted Critical
Publication of TWI807182B publication Critical patent/TWI807182B/zh

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/346—Manufacture of moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/342—Moulds, cores, or mandrels of special material, e.g. destructible materials which are at least partially destroyed, e.g. broken, molten, before demoulding; Moulding surfaces or spaces shaped by, or in, the ground, or sand or soil, whether bound or not; Cores consisting at least mainly of sand or soil, whether bound or not
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/14—Producing shaped prefabricated articles from the material by simple casting, the material being neither forcibly fed nor positively compacted
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/48—Producing shaped prefabricated articles from the material by removing material from solid section preforms for forming hollow articles, e.g. by punching or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
    • B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
    • B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/16—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes
    • B28B7/18—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes the holes passing completely through the article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/348—Moulds, cores, or mandrels of special material, e.g. destructible materials of plastic material or rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/624—Sol-gel processing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6028—Shaping around a core which is removed later

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Dispersion Chemistry (AREA)
  • Moulds, Cores, Or Mandrels (AREA)
  • Producing Shaped Articles From Materials (AREA)
  • Filtering Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Ceramic Products (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
TW109112783A 2019-04-25 2020-04-16 三維燒成體的製法 TWI807182B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
WOPCT/JP2019/017718 2019-04-25
PCT/JP2019/017718 WO2020217406A1 (ja) 2019-04-25 2019-04-25 ３次元焼成体の製法

Publications (2)

Publication Number Publication Date
TW202043174A TW202043174A (zh) 2020-12-01
TWI807182B true TWI807182B (zh) 2023-07-01

Family

ID=72941142

Family Applications (1)

Application Number Title Priority Date Filing Date
TW109112783A TWI807182B (zh) 2019-04-25 2020-04-16 三維燒成體的製法

Country Status (6)

Country Link
US (1) US20220032501A1 (https=)
JP (1) JP7144603B2 (https=)
KR (1) KR102541744B1 (https=)
CN (1) CN113710444B (https=)
TW (1) TWI807182B (https=)
WO (1) WO2020217406A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7642419B2 (ja) * 2021-03-30 2025-03-10 第一セラモ株式会社 サポート材用樹脂組成物および焼結体の製造方法
JP7650697B2 (ja) * 2021-03-30 2025-03-25 第一セラモ株式会社 中子用樹脂組成物および焼結体の製造方法
JP7569772B2 (ja) 2021-10-07 2024-10-18 日本碍子株式会社 半導体製造装置用部材
CN119365971A (zh) 2022-06-30 2025-01-24 日本碍子株式会社 半导体制造装置用部件
JP7764356B2 (ja) * 2022-12-21 2025-11-05 日本碍子株式会社 プラグ、プラグ製造方法及び半導体製造装置用部材
JP7744328B2 (ja) * 2022-12-21 2025-09-25 日本碍子株式会社 半導体製造装置用部材、プラグ及びプラグ製造方法
CN117754687A (zh) * 2024-01-23 2024-03-26 长春长光精瓷复合材料有限公司 一种具有内部连通结构的陶瓷结构件成型方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07507508A (ja) * 1992-06-05 1995-08-24 マサチユーセツツ・インステイテユート・オブ・テクノロジー 三次元印刷技法
JP2017121806A (ja) * 2016-01-08 2017-07-13 ゼネラル・エレクトリック・カンパニイ ３ｄ印刷プロセスを使用することによって混成セラミック／金属、セラミック／セラミック体を製造するための方法
JP2018020441A (ja) * 2016-08-01 2018-02-08 株式会社オメガ 三次元形状造形物の製造方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3848040A (en) * 1969-04-17 1974-11-12 Corning Glass Works Apparatus and method for forming slii cast bodies with cavities
KR890003502B1 (ko) * 1985-02-08 1989-09-23 가부시기가이샤 히다찌세이사꾸쇼 슬립캐스팅 성형법 및 성형용 주형
JPH0813446B2 (ja) * 1990-05-30 1996-02-14 株式会社日立製作所 スリツプキヤステイング法
US6189483B1 (en) * 1997-05-29 2001-02-20 Applied Materials, Inc. Process kit
US6375880B1 (en) * 1997-09-30 2002-04-23 The Board Of Trustees Of The Leland Stanford Junior University Mold shape deposition manufacturing
JP4343421B2 (ja) 2000-12-13 2009-10-14 菊水化学工業株式会社 セラミック薄板の生成形体の成形方法及び成形装置
US7517490B2 (en) * 2002-10-16 2009-04-14 Ngk Insulators, Ltd. Method of manufacturing ceramic green body
KR100906346B1 (ko) * 2005-08-17 2009-07-06 주식회사 코미코 세라믹 성형체의 제조방법 및 이를 이용하여 제조된 세라믹성형체
US8336891B2 (en) * 2008-03-11 2012-12-25 Ngk Insulators, Ltd. Electrostatic chuck
JP5331519B2 (ja) * 2008-03-11 2013-10-30 日本碍子株式会社 静電チャック
JP2010132487A (ja) 2008-12-04 2010-06-17 Panasonic Corp セラミック多孔体の製造方法
EP2360291A1 (de) * 2010-02-24 2011-08-24 Singulus Technologies AG Verfahren und Vorrichtung zum schnellen Heizen und Kühlen eines Substrates und sofort anschließender Beschichtung desselben unter Vakuum
KR101167838B1 (ko) * 2010-05-07 2012-07-24 한국기계연구원 탄소몰드를 이용한 금속 함침 주조품의 제조방법
CN102487029B (zh) * 2010-12-02 2014-03-19 北京北方微电子基地设备工艺研究中心有限责任公司 静电卡盘和具有它的等离子体装置
JP5458050B2 (ja) 2011-03-30 2014-04-02 日本碍子株式会社 静電チャックの製法
JP5890795B2 (ja) * 2013-03-18 2016-03-22 日本碍子株式会社 半導体製造装置用部材
JP5633766B2 (ja) 2013-03-29 2014-12-03 Toto株式会社 静電チャック
KR101680334B1 (ko) * 2015-06-15 2016-11-29 주식회사 퓨쳐캐스트 3차원 프린팅 방식을 이용한 금형 제작방법
JP2019522105A (ja) * 2016-04-14 2019-08-08 デスクトップ メタル インコーポレイテッドＤｅｓｋｔｏｐ Ｍｅｔａｌ， Ｉｎｃ． 支持構造を有する付加製造
CN107500781B (zh) * 2017-09-28 2020-10-09 上海应用技术大学 一种多孔陶瓷的制备方法
CN108101519A (zh) * 2017-12-19 2018-06-01 西安交通大学 一种用于复杂结构零件定向凝固成形的陶瓷铸型制备方法
CN108649012B (zh) * 2018-05-11 2021-10-01 北京华卓精科科技股份有限公司 新型陶瓷塞及具有该新型陶瓷塞的静电卡盘装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07507508A (ja) * 1992-06-05 1995-08-24 マサチユーセツツ・インステイテユート・オブ・テクノロジー 三次元印刷技法
JP2017121806A (ja) * 2016-01-08 2017-07-13 ゼネラル・エレクトリック・カンパニイ ３ｄ印刷プロセスを使用することによって混成セラミック／金属、セラミック／セラミック体を製造するための方法
JP2018020441A (ja) * 2016-08-01 2018-02-08 株式会社オメガ 三次元形状造形物の製造方法

Also Published As

Publication number Publication date
JPWO2020217406A1 (https=) 2020-10-29
WO2020217406A1 (ja) 2020-10-29
US20220032501A1 (en) 2022-02-03
CN113710444A (zh) 2021-11-26
TW202043174A (zh) 2020-12-01
JP7144603B2 (ja) 2022-09-29
KR102541744B1 (ko) 2023-06-13
KR20210138086A (ko) 2021-11-18
CN113710444B (zh) 2023-06-23

Similar Documents

Publication Publication Date Title
TWI807182B (zh) 三維燒成體的製法
US5779833A (en) Method for constructing three dimensional bodies from laminations
US7955546B2 (en) Forming die and method for manufacturing formed body using forming die
US8703040B2 (en) Method for manufacturing a piezoelectric ceramic body
CN112789128B (zh) 从预制件开始通过加压烧结制造复杂形状的部件的方法
US20200269320A1 (en) Molding method and apparatus, particularly applicable to metal and/or ceramics
US20140339745A1 (en) Molds for ceramic casting
US20160023375A1 (en) Slip mixture for 3d printed molds and 3d printing ceramic material
US12198965B2 (en) Member for semiconductor manufacturing apparatus, method for manufacturing the same, and mold
KR0183997B1 (ko) 슬립 캐스팅 법
CN109128020B (zh) 用于制造多孔陶瓷立体光刻的树脂及其使用方法
US10737207B2 (en) Method and apparatus for producing ceramic honeycomb filter
CN1705545A (zh) 制备陶瓷生坯的方法
JPWO2020217406A5 (https=)
US10259036B2 (en) Variable diameter investment casting mold for casting of reticulated metal foams
US10870218B2 (en) Speciality ceramic components
JPWO2020066589A1 (ja) ウエハ載置台の製法
WO2022137933A1 (ja) セラミックス物品、セラミックス材料の成形方法、セラミックス物品の製造方法及び成形型
KR20240099024A (ko) 플러그, 플러그 제조 방법 및 반도체 제조 장치용 부재
JP4124113B2 (ja) インサート成形方法
JPH10278015A (ja) セラミックス粉末の成形方法
JPH06305821A (ja) セラミックス粉末射出成形部材の製造方法
Safari et al. Processing of novel piezoelectric transducers via SFF
JPH10130071A (ja) 流体透過性プラスチック製品の製造法
JP2004269336A (ja) セラミック体の製造方法