JP7144603B2 - ３次元焼成体の製法 - Google Patents

３次元焼成体の製法 Download PDF

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Publication number
JP7144603B2
JP7144603B2 JP2021515425A JP2021515425A JP7144603B2 JP 7144603 B2 JP7144603 B2 JP 7144603B2 JP 2021515425 A JP2021515425 A JP 2021515425A JP 2021515425 A JP2021515425 A JP 2021515425A JP 7144603 B2 JP7144603 B2 JP 7144603B2
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Japan
Prior art keywords
mold
drying
dimensional
molded body
plug
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English (en)
Japanese (ja)
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JPWO2020217406A1 (https=
JPWO2020217406A5 (https=
Inventor
泰穂 青木
正 大野
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NGK Insulators Ltd
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NGK Insulators Ltd
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Publication of JPWO2020217406A5 publication Critical patent/JPWO2020217406A5/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/342—Moulds, cores, or mandrels of special material, e.g. destructible materials which are at least partially destroyed, e.g. broken, molten, before demoulding; Moulding surfaces or spaces shaped by, or in, the ground, or sand or soil, whether bound or not; Cores consisting at least mainly of sand or soil, whether bound or not
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/14—Producing shaped prefabricated articles from the material by simple casting, the material being neither forcibly fed nor positively compacted
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/30—Producing shaped prefabricated articles from the material by applying the material on to a core or other moulding surface to form a layer thereon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B1/00—Producing shaped prefabricated articles from the material
    • B28B1/48—Producing shaped prefabricated articles from the material by removing material from solid section preforms for forming hollow articles, e.g. by punching or boring
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B11/00—Apparatus or processes for treating or working the shaped or preshaped articles
    • B28B11/24—Apparatus or processes for treating or working the shaped or preshaped articles for curing, setting or hardening
    • B28B11/243—Setting, e.g. drying, dehydrating or firing ceramic articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/16—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes
    • B28B7/18—Moulds for making shaped articles with cavities or holes open to the surface, e.g. with blind holes the holes passing completely through the article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/346—Manufacture of moulds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28B—SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS; SHAPING SLAG; SHAPING MIXTURES CONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER
    • B28B7/00—Moulds; Cores; Mandrels
    • B28B7/34—Moulds, cores, or mandrels of special material, e.g. destructible materials
    • B28B7/348—Moulds, cores, or mandrels of special material, e.g. destructible materials of plastic material or rubber
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C64/00—Additive manufacturing, i.e. manufacturing of three-dimensional [3D] objects by additive deposition, additive agglomeration or additive layering, e.g. by 3D printing, stereolithography or selective laser sintering
    • B29C64/10—Processes of additive manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B33—ADDITIVE MANUFACTURING TECHNOLOGY
    • B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
    • B33Y80/00—Products made by additive manufacturing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/624—Sol-gel processing
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/626—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B
    • C04B35/63—Preparing or treating the powders individually or as batches ; preparing or treating macroscopic reinforcing agents for ceramic products, e.g. fibres; mechanical aspects section B using additives specially adapted for forming the products, e.g.. binder binders
    • C04B35/638—Removal thereof
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/72—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using electrostatic chucks
    • H10P72/722—Details of electrostatic chucks
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/60—Aspects relating to the preparation, properties or mechanical treatment of green bodies or pre-forms
    • C04B2235/602—Making the green bodies or pre-forms by moulding
    • C04B2235/6028—Shaping around a core which is removed later

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Dispersion Chemistry (AREA)
  • Moulds, Cores, Or Mandrels (AREA)
  • Producing Shaped Articles From Materials (AREA)
  • Filtering Materials (AREA)
  • Materials For Medical Uses (AREA)
  • Ceramic Products (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
JP2021515425A 2019-04-25 2019-04-25 ３次元焼成体の製法 Active JP7144603B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/017718 WO2020217406A1 (ja) 2019-04-25 2019-04-25 ３次元焼成体の製法

Publications (3)

Publication Number Publication Date
JPWO2020217406A1 JPWO2020217406A1 (https=) 2020-10-29
JPWO2020217406A5 JPWO2020217406A5 (https=) 2022-01-19
JP7144603B2 true JP7144603B2 (ja) 2022-09-29

Family

ID=72941142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021515425A Active JP7144603B2 (ja) 2019-04-25 2019-04-25 ３次元焼成体の製法

Country Status (6)

Country Link
US (1) US20220032501A1 (https=)
JP (1) JP7144603B2 (https=)
KR (1) KR102541744B1 (https=)
CN (1) CN113710444B (https=)
TW (1) TWI807182B (https=)
WO (1) WO2020217406A1 (https=)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240099031A (ko) 2022-12-21 2024-06-28 엔지케이 인슐레이터 엘티디 반도체 제조 장치용 부재, 플러그 및 플러그 제조 방법
JP2024088883A (ja) * 2022-12-21 2024-07-03 日本碍子株式会社 プラグ、プラグ製造方法及び半導体製造装置用部材

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7642419B2 (ja) * 2021-03-30 2025-03-10 第一セラモ株式会社 サポート材用樹脂組成物および焼結体の製造方法
JP7650697B2 (ja) * 2021-03-30 2025-03-25 第一セラモ株式会社 中子用樹脂組成物および焼結体の製造方法
JP7569772B2 (ja) 2021-10-07 2024-10-18 日本碍子株式会社 半導体製造装置用部材
CN119365971A (zh) 2022-06-30 2025-01-24 日本碍子株式会社 半导体制造装置用部件
CN117754687A (zh) * 2024-01-23 2024-03-26 长春长光精瓷复合材料有限公司 一种具有内部连通结构的陶瓷结构件成型方法

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JP2002179468A (ja) 2000-12-13 2002-06-26 Kikusui Chemical Industries Co Ltd セラミック薄板、セラミック薄板の生成形体の成形方法及び成形装置
JP2010132487A (ja) 2008-12-04 2010-06-17 Panasonic Corp セラミック多孔体の製造方法
JP2012209499A (ja) 2011-03-30 2012-10-25 Ngk Insulators Ltd 静電チャックの製法及び静電チャック
WO2014157571A1 (ja) 2013-03-29 2014-10-02 Toto株式会社 静電チャック
JP2017121806A (ja) 2016-01-08 2017-07-13 ゼネラル・エレクトリック・カンパニイ ３ｄ印刷プロセスを使用することによって混成セラミック／金属、セラミック／セラミック体を製造するための方法
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JP2002179468A (ja) 2000-12-13 2002-06-26 Kikusui Chemical Industries Co Ltd セラミック薄板、セラミック薄板の生成形体の成形方法及び成形装置
JP2010132487A (ja) 2008-12-04 2010-06-17 Panasonic Corp セラミック多孔体の製造方法
JP2012209499A (ja) 2011-03-30 2012-10-25 Ngk Insulators Ltd 静電チャックの製法及び静電チャック
WO2014157571A1 (ja) 2013-03-29 2014-10-02 Toto株式会社 静電チャック
JP2017121806A (ja) 2016-01-08 2017-07-13 ゼネラル・エレクトリック・カンパニイ ３ｄ印刷プロセスを使用することによって混成セラミック／金属、セラミック／セラミック体を製造するための方法
JP2018020441A (ja) 2016-08-01 2018-02-08 株式会社オメガ 三次元形状造形物の製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240099031A (ko) 2022-12-21 2024-06-28 엔지케이 인슐레이터 엘티디 반도체 제조 장치용 부재, 플러그 및 플러그 제조 방법
JP2024088882A (ja) * 2022-12-21 2024-07-03 日本碍子株式会社 半導体製造装置用部材、プラグ及びプラグ製造方法
JP2024088883A (ja) * 2022-12-21 2024-07-03 日本碍子株式会社 プラグ、プラグ製造方法及び半導体製造装置用部材
TWI870134B (zh) * 2022-12-21 2025-01-11 日商日本碍子股份有限公司 插栓、插栓製造方法及半導體製造裝置用構件
JP7744328B2 (ja) 2022-12-21 2025-09-25 日本碍子株式会社 半導体製造装置用部材、プラグ及びプラグ製造方法
JP7764356B2 (ja) 2022-12-21 2025-11-05 日本碍子株式会社 プラグ、プラグ製造方法及び半導体製造装置用部材

Also Published As

Publication number Publication date
JPWO2020217406A1 (https=) 2020-10-29
WO2020217406A1 (ja) 2020-10-29
US20220032501A1 (en) 2022-02-03
CN113710444A (zh) 2021-11-26
TW202043174A (zh) 2020-12-01
TWI807182B (zh) 2023-07-01
KR102541744B1 (ko) 2023-06-13
KR20210138086A (ko) 2021-11-18
CN113710444B (zh) 2023-06-23

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