KR102404612B1 - 로딩 및 언로딩 록 내의 압력을 감소시키는 방법 및 관련 펌프 유닛 - Google Patents

로딩 및 언로딩 록 내의 압력을 감소시키는 방법 및 관련 펌프 유닛 Download PDF

Info

Publication number
KR102404612B1
KR102404612B1 KR1020197003693A KR20197003693A KR102404612B1 KR 102404612 B1 KR102404612 B1 KR 102404612B1 KR 1020197003693 A KR1020197003693 A KR 1020197003693A KR 20197003693 A KR20197003693 A KR 20197003693A KR 102404612 B1 KR102404612 B1 KR 102404612B1
Authority
KR
South Korea
Prior art keywords
vacuum pump
high vacuum
pressure
pump
primary
Prior art date
Application number
KR1020197003693A
Other languages
English (en)
Korean (ko)
Other versions
KR20190022880A (ko
Inventor
에릭 만달라즈
크리스토프 산티
Original Assignee
파이퍼 배큠
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 파이퍼 배큠 filed Critical 파이퍼 배큠
Publication of KR20190022880A publication Critical patent/KR20190022880A/ko
Application granted granted Critical
Publication of KR102404612B1 publication Critical patent/KR102404612B1/ko

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/20—Flow
    • F04C2270/205—Controlled or regulated
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/12—Kind or type gaseous, i.e. compressible

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
KR1020197003693A 2016-07-13 2017-06-29 로딩 및 언로딩 록 내의 압력을 감소시키는 방법 및 관련 펌프 유닛 KR102404612B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR1656782A FR3054005B1 (fr) 2016-07-13 2016-07-13 Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe
FR1656782 2016-07-13
PCT/EP2017/066178 WO2018010970A1 (fr) 2016-07-13 2017-06-29 Procédé de descente en pression dans un sas de chargement et de déchargement et groupe de pompage associé

Publications (2)

Publication Number Publication Date
KR20190022880A KR20190022880A (ko) 2019-03-06
KR102404612B1 true KR102404612B1 (ko) 2022-05-31

Family

ID=56943791

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197003693A KR102404612B1 (ko) 2016-07-13 2017-06-29 로딩 및 언로딩 록 내의 압력을 감소시키는 방법 및 관련 펌프 유닛

Country Status (6)

Country Link
EP (1) EP3485168B1 (fr)
KR (1) KR102404612B1 (fr)
CN (1) CN109477485B (fr)
FR (1) FR3054005B1 (fr)
TW (1) TWI723186B (fr)
WO (1) WO2018010970A1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT201800021148A1 (it) * 2018-12-27 2020-06-27 D V P Vacuum Tech S P A Pompa ausiliaria volumetrica per la generazione del vuoto.
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
BE1028087B1 (nl) * 2020-02-24 2021-09-21 Atlas Copco Airpower Nv Werkwijze voor het aansturen van een vacuümsysteem en vacuümsysteem
BE1028135B1 (nl) * 2020-03-10 2021-10-11 Atlas Copco Airpower Nv Werkwijze en inrichting voor het regelen van de pompsnelheid, computerprogramma en een door een computer leesbaar medium waarop het computerprogramma is opgeslagen daarbij toegepast en een pomp
FR3112171B1 (fr) * 2020-10-16 2022-07-08 Pfeiffer Vacuum Procédé de contrôle d’une puissance de fonctionnement d’une pompe à vide et pompe à vide
FR3129992B1 (fr) * 2021-12-08 2023-12-01 Pfeiffer Vacuum Groupe de pompage, dispositif et procédé de pompage et de traitement

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009501869A (ja) * 2005-07-20 2009-01-22 アルカテル−ルーセント 急速省エネルギーチャンバポンピング
WO2015121222A1 (fr) * 2014-02-12 2015-08-20 Adixen Vacuum Products Système de pompage et procédé de descente en pression dans un sas de chargement et de déchargement

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3639512A1 (de) * 1986-11-20 1988-06-01 Alcatel Hochvakuumtechnik Gmbh Vakuumpumpsystem mit einer waelzkolbenpumpe
JP4218756B2 (ja) * 2003-10-17 2009-02-04 株式会社荏原製作所 真空排気装置
JP2006342688A (ja) * 2005-06-07 2006-12-21 Ebara Corp 真空排気システム
FR2940322B1 (fr) * 2008-12-19 2011-02-11 Alcatel Lucent Procede de descente en pression dans un sas de chargement et de dechargement et equipement associe
FR2952683B1 (fr) * 2009-11-18 2011-11-04 Alcatel Lucent Procede et dispositif de pompage a consommation d'energie reduite
DE112012001192B4 (de) * 2011-03-11 2016-12-15 Ulvac Kiko, Inc. Vakuumpumpe, Vakuumauspumpvorrichtung und Verfahren, zum Betreiben einer Vakuumpumpe
CN104302922B (zh) * 2012-06-28 2017-08-08 斯特林工业咨询有限公司 用于排空腔室的泵装置和方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009501869A (ja) * 2005-07-20 2009-01-22 アルカテル−ルーセント 急速省エネルギーチャンバポンピング
WO2015121222A1 (fr) * 2014-02-12 2015-08-20 Adixen Vacuum Products Système de pompage et procédé de descente en pression dans un sas de chargement et de déchargement

Also Published As

Publication number Publication date
KR20190022880A (ko) 2019-03-06
TWI723186B (zh) 2021-04-01
TW201804083A (zh) 2018-02-01
EP3485168B1 (fr) 2020-04-22
FR3054005B1 (fr) 2018-08-24
FR3054005A1 (fr) 2018-01-19
EP3485168A1 (fr) 2019-05-22
CN109477485B (zh) 2020-07-10
WO2018010970A1 (fr) 2018-01-18
CN109477485A (zh) 2019-03-15

Similar Documents

Publication Publication Date Title
KR102404612B1 (ko) 로딩 및 언로딩 록 내의 압력을 감소시키는 방법 및 관련 펌프 유닛
US9903378B2 (en) Method of operating a pumping system
KR101778318B1 (ko) 전력 소비가 적은 펌핑 방법과 장치
TWI623685B (zh) 幫浦系統
KR101995358B1 (ko) 챔버를 배기시키기 위한 방법 및 펌프 장치
WO2006097679A1 (fr) Agencement de pompage sous vide
KR101253086B1 (ko) 흡입 공기 제어장치를 통한 에너지 절감형 스크류 공기압축기 장치
JP6615132B2 (ja) 真空ポンプシステム
US20180291902A1 (en) Method for controlling a rotary screw compressor
CN111502955B (zh) 用于抽空过程空间的系统和方法
EP1906023A1 (fr) Appareil d'évacuation
KR102229080B1 (ko) 로드 록 챔버 내의 압력을 낮추기 위한 펌핑 시스템 및 방법
JP2020183738A (ja) 真空排気装置及びその運転方法
US11286934B2 (en) Vacuum pump system and method for operating a vacuum pump system
JP4608289B2 (ja) スクリュ圧縮機の運転制御方法

Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant