WO2006097679A1 - Agencement de pompage sous vide - Google Patents

Agencement de pompage sous vide Download PDF

Info

Publication number
WO2006097679A1
WO2006097679A1 PCT/GB2006/000724 GB2006000724W WO2006097679A1 WO 2006097679 A1 WO2006097679 A1 WO 2006097679A1 GB 2006000724 W GB2006000724 W GB 2006000724W WO 2006097679 A1 WO2006097679 A1 WO 2006097679A1
Authority
WO
WIPO (PCT)
Prior art keywords
vacuum pumps
chamber
pumps
vacuum
evacuation
Prior art date
Application number
PCT/GB2006/000724
Other languages
English (en)
Inventor
Gregory Duncan Shuttleworth
Michael Andrew Galtry
Patrick Brian Clayton
David Alan Turrell
Original Assignee
Edwards Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Limited filed Critical Edwards Limited
Publication of WO2006097679A1 publication Critical patent/WO2006097679A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers

Definitions

  • the isolating means comprises a first valve located within the inlet conduit, and a second valve located within the exhaust conduit.
  • the pumping arrangement may comprise a by-pass conduit having an inlet for receiving gas from the chamber, a first outlet for exhausting gas to the inlet conduit and a second outlet for exhausting gas to the exhaust conduit, and a third valve located in the by-pass conduit between the first and second outlets.
  • the control means may configured to control the third valve such that the third valve is open during the initial stage of the evacuation of the chamber, and closed during the subsequent stage of the evacuation of the chamber.
  • the present invention provides a vacuum pumping arrangement for evacuating a chamber, the pumping arrangement comprising a plurality of first vacuum pumps connected in parallel to an inlet conduit for receiving gas from the chamber, a plurality of second vacuum pumps connected in parallel to an exhaust conduit for receiving gas exhaust from the first vacuum pumps, means for selectively isolating each of the second vacuum pumps from the exhaust conduit, and control means for controlling the isolating means such that gas flow through at least one of the second vacuum pumps is permitted in the event of failure of one of the other second vacuum pumps.
  • Figure 1 illustrates schematically a first embodiment of a vacuum pumping arrangement
  • Figure 6 illustrates schematically a control system for controlling the valves of the pumping arrangement of Figure 5;
  • the drive unit is thus able to vary the speed of the booster pump 12 during the evacuation of the chamber to optimise the performance of the booster pump 12.
  • the booster pumps 12 and the backing pumps 28 are operated to evacuate the chamber.
  • the gas entering the pumping arrangement 10 from the chamber flows through the inlet conduit 16, booster pump 12a, exhaust conduit 22 and the parallel arrangement of backing pumps 28 before being exhaust to the atmosphere.
  • the controller 38 opens the valves 34, 36.
  • the gas entering the pumping arrangement 10 from the chamber flows through the inlet conduit 16, the parallel arrangement of booster pumps 12, exhaust conduit 22 and the parallel arrangement of backing pumps 28 before being exhausted to the atmosphere.
  • pumping arrangement D can provide a similar pumping performance to known pumping arrangement A employing no booster pump isolation, but with a reduced number of booster pumps 12 (three, instead of five), whereas pumping arrangements B and C offer a superior pumping performance.
  • the first, second and third valves 140, 142, 144 may be any suitable control valves which can be selectively opened and closed by a signal received from a controller 146, as shown in Figure 6, for controlling each of the valves 140, 142, 144 of the pumping arrangement 100.
  • the controller 146 controls the valves 140, 142, 144 in dependence on a gas pressure within the pumping arrangement 100.
  • the controller 146 may receive a signal indicative of the pressure in the by-pass conduit 102 from a pressure sensor 148.
  • the controller 146 may control the valves 140, 142, 144 at a predetermined time during the evacuation of the chamber.
  • the booster pumps 112 and the backing pumps 132 are operated to evacuate the chamber.
  • the gas entering the pumping arrangement 10 from the chamber flows through the by-pass conduit 102 into the backing pump exhaust conduit 110, through the parallel arrangement of backing pumps 132 before being exhaust to the atmosphere.
  • the controller 146 opens the valves 140, 142 and closes the third valve 144.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

La présente invention a trait à un agencement de pompage sous vide pour l'évacuation d'une enceinte, l'agencement de pompage comportant une pluralité de pompes de gavage (12) connectées en parallèle à un conduit d'admission (16) pour la réception de gaz en provenance de l'enceinte (20), une pluralité de pompes auxiliaires (28) connectées en parallèle à un conduit d'évacuation (22) pour la réception de gaz évacué en provenance des premières pompes à vide (12), et un agencement de soupape (34, 36) pour l'isolation sélective d'au moins une des pompes de gavage (12) du conduit d'admission (16) du conduit d'évacuation (18). En vue d'améliorer le débit d'évacuation de l'enceinte, l'agencement de soupape (34, 36) est contrôlé de sorte que l'écoulement de gaz à travers ladite une au moins parmi les pompes de gavage (12) est interdit pendant une étape initiale de l'évacuation de l'enceinte (20), et est autorisé pendant une étape ultérieure.
PCT/GB2006/000724 2005-03-17 2006-03-01 Agencement de pompage sous vide WO2006097679A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0505500A GB0505500D0 (en) 2005-03-17 2005-03-17 Vacuum pumping arrangement
GB0505500.9 2005-03-17

Publications (1)

Publication Number Publication Date
WO2006097679A1 true WO2006097679A1 (fr) 2006-09-21

Family

ID=34531428

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2006/000724 WO2006097679A1 (fr) 2005-03-17 2006-03-01 Agencement de pompage sous vide

Country Status (3)

Country Link
GB (1) GB0505500D0 (fr)
TW (1) TW200637973A (fr)
WO (1) WO2006097679A1 (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2497957A (en) * 2011-12-23 2013-07-03 Edwards Ltd A method and apparatus for evacuating a vacuum process chamber
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
WO2014125249A1 (fr) * 2013-02-13 2014-08-21 Edwards Limited Système de pompage
CN104024645A (zh) * 2011-12-26 2014-09-03 普发真空有限公司 用于真空泵的适配器和相关的泵送装置
WO2016110694A1 (fr) * 2015-01-06 2016-07-14 Edwards Limited Améliorations apportées à ou associées à des agencements de pompage à vide
WO2016207106A1 (fr) * 2015-06-26 2016-12-29 Leybold Gmbh Système de pompes à vide
CN106482904A (zh) * 2015-08-25 2017-03-08 北京卫星环境工程研究所 分时复用的检漏加压回收系统
JP2020517432A (ja) * 2017-04-28 2020-06-18 エドワーズ リミテッド 真空ポンプシステム
CN115769038A (zh) * 2021-03-03 2023-03-07 株式会社Lg新能源 用于卷对卷状态的电极的真空干燥设备以及真空干燥方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8715400B2 (en) * 2009-12-24 2014-05-06 Sumitomo Seiko Chemicals Co., Ltd. Double vacuum pump apparatus, gas purification system provided with double vacuum pump apparatus, and exhaust gas vibration suppressing device in double vacuum pump apparatus
CN105649986B (zh) * 2014-11-10 2018-07-20 中国科学院沈阳科学仪器股份有限公司 用于多级真空泵的防冲击结构和具有该结构的多级真空泵
CN111458082A (zh) * 2019-01-22 2020-07-28 西安高压电器研究院有限责任公司 用于氦质谱检漏试验的工件抽充气装置及其使用方法
KR102060305B1 (ko) * 2019-10-18 2019-12-30 주식회사 대영파워펌프 자동밸브를 이용한 인버터 부스터 펌프 시스템 및 이의 운전방법

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
US20040146410A1 (en) * 2003-01-24 2004-07-29 Armin Conrad Vacuum pump system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5228838A (en) * 1992-04-27 1993-07-20 Leybold Aktiengesellschaft Method for the evacuation of a low-vacuum chamber and of a HGH-vacuum chamber, as well as a high-vacuum apparatus for the practice thereof
US20040146410A1 (en) * 2003-01-24 2004-07-29 Armin Conrad Vacuum pump system

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9726176B2 (en) 2011-12-23 2017-08-08 Edwards Limited Vacuum pumping
GB2497957A (en) * 2011-12-23 2013-07-03 Edwards Ltd A method and apparatus for evacuating a vacuum process chamber
GB2497957B (en) * 2011-12-23 2018-06-27 Edwards Ltd Vacuum pumping
CN104024645A (zh) * 2011-12-26 2014-09-03 普发真空有限公司 用于真空泵的适配器和相关的泵送装置
DE202012012359U1 (de) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumpstand zum Pumpen leichter Gase
WO2014095432A1 (fr) * 2012-12-22 2014-06-26 Oerlikon Leybold Vacuum Gmbh Groupe de pompage permettant de pomper des gaz légers et utilisation du groupe de pompage
CN104870815A (zh) * 2012-12-22 2015-08-26 厄利孔莱博尔德真空技术有限责任公司 用于泵吸轻气体的泵站以及泵站的使用
WO2014125249A1 (fr) * 2013-02-13 2014-08-21 Edwards Limited Système de pompage
US10082134B2 (en) 2013-02-13 2018-09-25 Edwards Limited Pumping system
WO2016110694A1 (fr) * 2015-01-06 2016-07-14 Edwards Limited Améliorations apportées à ou associées à des agencements de pompage à vide
WO2016110695A1 (fr) * 2015-01-06 2016-07-14 Edwards Limited Système d'évacuation à vide et soupape de commutation de canal utilisée dans ledit système d'évacuation à vide
CN107110162A (zh) * 2015-01-06 2017-08-29 爱德华兹有限公司 真空排出系统以及在该真空排出系统中使用的通道切换阀
CN107110161A (zh) * 2015-01-06 2017-08-29 爱德华兹有限公司 真空泵送布置中或与其相关的改善
KR20170102257A (ko) * 2015-01-06 2017-09-08 에드워즈 리미티드 진공 배기 시스템 및 이 진공 배기 시스템에 사용되는 채널 전환 밸브
US20170350395A1 (en) * 2015-01-06 2017-12-07 Edwards Limited Improvements in or relating to vacuum pumping arrangement
JP2018501437A (ja) * 2015-01-06 2018-01-18 エドワーズ リミテッド 真空排気システム及びこの真空排気システムに使用されるチャネル切換弁
JP2018503027A (ja) * 2015-01-06 2018-02-01 エドワーズ リミテッド 真空ポンプ装置における又はそれに関連する改善
KR102504078B1 (ko) * 2015-01-06 2023-02-24 에드워즈 리미티드 진공 배기 시스템 및 이 진공 배기 시스템에 사용되는 채널 전환 밸브
CN107110162B (zh) * 2015-01-06 2019-07-16 爱德华兹有限公司 真空排出系统以及在该真空排出系统中使用的通道切换阀
US10309401B2 (en) 2015-01-06 2019-06-04 Edwards Limited Vacuum exhaust system and channel-switching valve used in this vacuum exhaust system
WO2016207106A1 (fr) * 2015-06-26 2016-12-29 Leybold Gmbh Système de pompes à vide
CN106482904A (zh) * 2015-08-25 2017-03-08 北京卫星环境工程研究所 分时复用的检漏加压回收系统
CN106482904B (zh) * 2015-08-25 2019-10-25 北京卫星环境工程研究所 分时复用的检漏加压回收系统
JP2020517432A (ja) * 2017-04-28 2020-06-18 エドワーズ リミテッド 真空ポンプシステム
JP7181220B2 (ja) 2017-04-28 2022-11-30 エドワーズ リミテッド 真空ポンプシステム
US11839903B2 (en) 2017-04-28 2023-12-12 Edwards Limited Vacuum pumping system
CN115769038A (zh) * 2021-03-03 2023-03-07 株式会社Lg新能源 用于卷对卷状态的电极的真空干燥设备以及真空干燥方法

Also Published As

Publication number Publication date
TW200637973A (en) 2006-11-01
GB0505500D0 (en) 2005-04-27

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