CN111458082A - 用于氦质谱检漏试验的工件抽充气装置及其使用方法 - Google Patents
用于氦质谱检漏试验的工件抽充气装置及其使用方法 Download PDFInfo
- Publication number
- CN111458082A CN111458082A CN201910056714.7A CN201910056714A CN111458082A CN 111458082 A CN111458082 A CN 111458082A CN 201910056714 A CN201910056714 A CN 201910056714A CN 111458082 A CN111458082 A CN 111458082A
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- China
- Prior art keywords
- workpiece
- pumping
- leak detection
- gas path
- pump
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/221—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for cables
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910056714.7A CN111458082A (zh) | 2019-01-22 | 2019-01-22 | 用于氦质谱检漏试验的工件抽充气装置及其使用方法 |
Applications Claiming Priority (1)
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CN201910056714.7A CN111458082A (zh) | 2019-01-22 | 2019-01-22 | 用于氦质谱检漏试验的工件抽充气装置及其使用方法 |
Publications (1)
Publication Number | Publication Date |
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CN111458082A true CN111458082A (zh) | 2020-07-28 |
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CN201910056714.7A Pending CN111458082A (zh) | 2019-01-22 | 2019-01-22 | 用于氦质谱检漏试验的工件抽充气装置及其使用方法 |
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CN (1) | CN111458082A (zh) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200637973A (en) * | 2005-03-17 | 2006-11-01 | Boc Group Plc | Vacuum pumping arrangement |
JP2007198865A (ja) * | 2006-01-25 | 2007-08-09 | Shimadzu Corp | ヘリウムリークデテクタ |
CN201859039U (zh) * | 2010-09-28 | 2011-06-08 | 中国西电电气股份有限公司 | 一种氦检漏矩阵工装 |
CN102539081A (zh) * | 2011-12-16 | 2012-07-04 | 杭州中泰深冷技术股份有限公司 | 用氦气检测多腔容器密封性的方法 |
CN104458151A (zh) * | 2014-12-25 | 2015-03-25 | 中国西电电气股份有限公司 | 一种避雷器密封试验装置及试验方法 |
CN204358433U (zh) * | 2014-12-17 | 2015-05-27 | 安徽安凯汽车股份有限公司 | 一种用于客车的双加气口cng燃气管路系统 |
CN106197878A (zh) * | 2016-07-01 | 2016-12-07 | 广州新龙浩工业设备有限公司 | 一种换热器内漏外漏检测装置及检测方法 |
CN106525354A (zh) * | 2016-11-21 | 2017-03-22 | 江苏安靠智能输电工程科技股份有限公司 | 一种用于气体管道母线壳体的检漏系统及方法 |
CN107142464A (zh) * | 2017-05-02 | 2017-09-08 | 惠科股份有限公司 | 一种化学气相沉膜装置 |
-
2019
- 2019-01-22 CN CN201910056714.7A patent/CN111458082A/zh active Pending
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW200637973A (en) * | 2005-03-17 | 2006-11-01 | Boc Group Plc | Vacuum pumping arrangement |
JP2007198865A (ja) * | 2006-01-25 | 2007-08-09 | Shimadzu Corp | ヘリウムリークデテクタ |
CN201859039U (zh) * | 2010-09-28 | 2011-06-08 | 中国西电电气股份有限公司 | 一种氦检漏矩阵工装 |
CN102539081A (zh) * | 2011-12-16 | 2012-07-04 | 杭州中泰深冷技术股份有限公司 | 用氦气检测多腔容器密封性的方法 |
CN204358433U (zh) * | 2014-12-17 | 2015-05-27 | 安徽安凯汽车股份有限公司 | 一种用于客车的双加气口cng燃气管路系统 |
CN104458151A (zh) * | 2014-12-25 | 2015-03-25 | 中国西电电气股份有限公司 | 一种避雷器密封试验装置及试验方法 |
CN106197878A (zh) * | 2016-07-01 | 2016-12-07 | 广州新龙浩工业设备有限公司 | 一种换热器内漏外漏检测装置及检测方法 |
CN106525354A (zh) * | 2016-11-21 | 2017-03-22 | 江苏安靠智能输电工程科技股份有限公司 | 一种用于气体管道母线壳体的检漏系统及方法 |
CN107142464A (zh) * | 2017-05-02 | 2017-09-08 | 惠科股份有限公司 | 一种化学气相沉膜装置 |
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Address after: 710000 No. 18, north section of West 2nd Ring Road, Lianhu District, Xi'an City, Shaanxi Province Applicant after: Xi'an High Voltage Electrical Apparatus Research Institute Co.,Ltd. Applicant after: CHINA XD ELECTRIC Co.,Ltd. Applicant after: STATE GRID SHANGHAI MUNICIPAL ELECTRIC POWER Co. Address before: No.18, north section of West 2nd Ring Road, Lianhu District, Xi'an City, Shaanxi Province, 710077 Applicant before: XI'AN HIGH VOLTAGE APPARATUS RESEARCH INSTITUTE Co.,Ltd. Applicant before: CHINA XD ELECTRIC Co.,Ltd. Applicant before: STATE GRID SHANGHAI MUNICIPAL ELECTRIC POWER Co. |
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RJ01 | Rejection of invention patent application after publication |
Application publication date: 20200728 |
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RJ01 | Rejection of invention patent application after publication |