TW200637973A - Vacuum pumping arrangement - Google Patents

Vacuum pumping arrangement

Info

Publication number
TW200637973A
TW200637973A TW095108826A TW95108826A TW200637973A TW 200637973 A TW200637973 A TW 200637973A TW 095108826 A TW095108826 A TW 095108826A TW 95108826 A TW95108826 A TW 95108826A TW 200637973 A TW200637973 A TW 200637973A
Authority
TW
Taiwan
Prior art keywords
chamber
evacuation
pumping arrangement
pumps
vacuum pumping
Prior art date
Application number
TW095108826A
Other languages
Chinese (zh)
Inventor
Gregory Shuttleworth
Michael Andrew Galtry
Patrick Brian Clayton
David Alan Turrell
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Publication of TW200637973A publication Critical patent/TW200637973A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A vacuum pumping arrangement for evacuating a chamber is described, in which the pumping arrangement comprises a plurality of booster pumps connected in parallel to an inlet conduit for receiving gas from the chamber, a plurality of backing pumps connected in parallel to an exhaust conduit for receiving gas exhaust from the first vacuum pumps, and a valve arrangement for selectively isolating at least one of the booster pumps from the inlet conduit and the exhaust conduit. In order to improve the rate of evacuation of the chamber, the valve arrangement is controlled so that gas flow through said at least one of the booster pumps is inhibited during an initial stage of the evacuation of the chamber, and is permitted during a subsequent stage of the evacuation of the chamber.
TW095108826A 2005-03-17 2006-03-15 Vacuum pumping arrangement TW200637973A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0505500A GB0505500D0 (en) 2005-03-17 2005-03-17 Vacuum pumping arrangement

Publications (1)

Publication Number Publication Date
TW200637973A true TW200637973A (en) 2006-11-01

Family

ID=34531428

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095108826A TW200637973A (en) 2005-03-17 2006-03-15 Vacuum pumping arrangement

Country Status (3)

Country Link
GB (1) GB0505500D0 (en)
TW (1) TW200637973A (en)
WO (1) WO2006097679A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490411B (en) * 2009-12-24 2015-07-01 Sumitomo Seika Chemicals A two-stage type vacuum pump apparatus, a gas refining system having the vacuum pump apparatus, and an exhaust damper apparatus in the double-type type vacuum pump apparatus
CN105649986A (en) * 2014-11-10 2016-06-08 中国科学院沈阳科学仪器股份有限公司 Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same
CN111458082A (en) * 2019-01-22 2020-07-28 西安高压电器研究院有限责任公司 Workpiece pumping and inflating device for helium mass spectrum leak detection test and using method thereof
CN113015854A (en) * 2019-10-18 2021-06-22 大荣动力泵株式会社 Variable frequency booster pump system using automatic valve and operation method thereof

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2497957B (en) * 2011-12-23 2018-06-27 Edwards Ltd Vacuum pumping
FR2984972A1 (en) * 2011-12-26 2013-06-28 Adixen Vacuum Products ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE
DE202012012359U1 (en) * 2012-12-22 2014-03-24 Oerlikon Leybold Vacuum Gmbh Pumping station for pumping light gases
GB2510829B (en) 2013-02-13 2015-09-02 Edwards Ltd Pumping system
GB2533933A (en) * 2015-01-06 2016-07-13 Edwards Ltd Improvements in or relating to vacuum pumping arrangements
DE202015004596U1 (en) * 2015-06-26 2015-09-21 Oerlikon Leybold Vacuum Gmbh vacuum pump system
CN106482904B (en) * 2015-08-25 2019-10-25 北京卫星环境工程研究所 The leak detection pressurization recovery system of time-sharing multiplex
GB2561899B (en) * 2017-04-28 2020-11-04 Edwards Ltd Vacuum pumping system
KR20220124343A (en) * 2021-03-03 2022-09-14 주식회사 엘지에너지솔루션 Vacuum drying apparatus for roll-to-roll electrode and vacuum drying method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4213763B4 (en) * 1992-04-27 2004-11-25 Unaxis Deutschland Holding Gmbh Process for evacuating a vacuum chamber and a high vacuum chamber, and high vacuum system for carrying it out
US7033142B2 (en) * 2003-01-24 2006-04-25 Pfeifer Vacuum Gmbh Vacuum pump system for light gases

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI490411B (en) * 2009-12-24 2015-07-01 Sumitomo Seika Chemicals A two-stage type vacuum pump apparatus, a gas refining system having the vacuum pump apparatus, and an exhaust damper apparatus in the double-type type vacuum pump apparatus
CN105649986A (en) * 2014-11-10 2016-06-08 中国科学院沈阳科学仪器股份有限公司 Anti-impact structure used for multi-level vacuum pump and multi-stage vacuum pump comprising same
CN105649986B (en) * 2014-11-10 2018-07-20 中国科学院沈阳科学仪器股份有限公司 Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure
CN111458082A (en) * 2019-01-22 2020-07-28 西安高压电器研究院有限责任公司 Workpiece pumping and inflating device for helium mass spectrum leak detection test and using method thereof
CN113015854A (en) * 2019-10-18 2021-06-22 大荣动力泵株式会社 Variable frequency booster pump system using automatic valve and operation method thereof

Also Published As

Publication number Publication date
GB0505500D0 (en) 2005-04-27
WO2006097679A1 (en) 2006-09-21

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