CN105649986B - Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure - Google Patents
Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure Download PDFInfo
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- CN105649986B CN105649986B CN201410629537.4A CN201410629537A CN105649986B CN 105649986 B CN105649986 B CN 105649986B CN 201410629537 A CN201410629537 A CN 201410629537A CN 105649986 B CN105649986 B CN 105649986B
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Abstract
The present invention relates to vacuum pump technology field, specifically a kind of impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure.A kind of impact-proof structure for multistage vacuum pump, including vacuum pump cavity, pressure control valve, exhaust switchover valve door and impact pipeline, wherein vacuum pump cavity is equipped with cavity exhaust outlet, one end of the impact pipeline is connected to the cavity exhaust outlet, the other end is connected to the gas exhaust piping of multistage vacuum pump, and the impact tube road is equipped with pressure control valve and/or exhaust switchover valve door.It is equipped with the impact-proof structure on the level-one vacuum pump cavity and secondary vacuum pump housing of the multistage vacuum pump.The working media for having reached pressure at expulsion allowable through overcompression is directly discharged to exhaust ports by the present invention, since compression process is reduced, it is possible to reduce due to the reflux that cavity rank pressure difference generates, can improve pumping speed in the low vacuum stage.
Description
Technical field
The present invention relates to vacuum pump technology field, specifically a kind of impact-proof structures and tool for multistage vacuum pump
There is the multistage vacuum pump of the structure.
Background technology
Vacuum pump can form larger compression ratio when drawing working media by pump chamber and rotor compression working media, press
The numerical value of contracting ratio is often between 3~100, between the compression ratio of universal mechanical vacuum pump is 2~15, practical measuring pump
The method of compression ratio is to measure the pressure of pump steam inlet and exhaust outlet, for example the inlet pressure of lobe pump is 1Pa, and prime provides
Back pressure be 15Pa, the compression ratio of the pump ascends the throne 15.Under conditions of fixed compression ratio, multistage vacuum pump draws 1 air
The working media of pressure can form the theoretical value of 15 atmospheric pressures in exhaust port pressure, and rule of thumb, which also can be
Between 2~3 atmospheric pressure, multistage vacuum pump pressure at expulsion is about 2 atmospheric pressure, the pump first order exhaust outlet after overcompression
Through reaching exhaust conditions, because of pipeline reason, continue to be passed to subsequent rank, then compressed.
The Calculation of Pumping of vacuum pump is S=Q/t, wherein S：Vacuum pumping speed；Q：The gas flow of extraction；T：Pumpdown time.
The gas flow Q=Q that vacuum pump extracts at work1-Q2, wherein Q1：Theoretical pumping speed；Q2：Regurgitation volume, and regurgitation volume Q2
Depending on Q2=Δ P/L, wherein Δ P：The pressure difference of air-inlet of vacuum pump and exhaust outlet；L：The flow resistance of backflowing of vacuum pump, vacuum pump
The flow resistance L that backflows be a definite value；I.e. the pressure difference of air-inlet of vacuum pump and exhaust outlet can cause decisive influence to pumping speed.
Working medium pressure is higher in compression process as described above, and opposite each inter-step pressure difference can also increase,
Backflowing for cavity will increase；It can influence to pump the pumping speed in low pressure stage.
Invention content
In view of the above-mentioned problems, the purpose of the present invention is to provide a kind of impact-proof structure for multistage vacuum pump and having
The multistage vacuum pump of the structure.
To achieve the goals above, the present invention uses following technical scheme：
A kind of impact-proof structure for multistage vacuum pump, including vacuum pump cavity, pressure control valve, exhaust switchover valve
Door and impact pipeline, wherein vacuum pump cavity are equipped with cavity exhaust outlet, and one end of the impact pipeline is vented with the cavity
Mouthful connection, the other end be connected to the pump gas exhaust piping of multistage vacuum pump, the impact tube road equipped with pressure control valve and/or
Exhaust switchover valve door.
Cavity exhaust ports on the vacuum pump cavity are equipped with to be sensed for the pressure at expulsion of control pressure control valve
Device.The cavity exhaust outlet is set to the bottom of vacuum pump cavity.
It is equipped with the impact-proof structure on the level-one cavity and secondary cavity of the multistage vacuum pump.The multi-stage vacuum
Pump is at least three-level vacuum pump.
Advantages of the present invention and advantageous effect are：The present invention is by the work for having reached pressure at expulsion allowable through overcompression
Medium is directly discharged to exhaust ports, due to compression process reduce, it is possible to reduce due to cavity rank pressure difference generate reflux,
Pumping speed in the low vacuum stage can be improved.
Figure of description
Fig. 1 is the structural schematic diagram of impact-proof structure in the present invention；
Fig. 2 is the structural schematic diagram of the multistage vacuum pump with impact-proof structure in the present invention.
Wherein：1 is vacuum pump cavity, and 2 be back pressure transducer, and 3 be pressure-control valve, and 4 be exhaust switchover valve, and 5 are
Pipeline is impacted, 10 be level-one cavity, and 11 be secondary cavity, and 12 be Pyatyi cavity, and 13 be level-one protecting against shock exhaust structure, and 14 be two
Grade protecting against shock exhaust structure, 15 be pump gas exhaust piping.
Specific implementation mode
The invention will be further described below in conjunction with the accompanying drawings.
As shown in Figure 1, impact-proof structure of the present invention for multistage vacuum pump includes vacuum pump cavity 1, pressure-control valve
Door 3, exhaust switchover valve door 4 and impact pipeline 5, wherein vacuum pump cavity 1 are equipped with cavity exhaust outlet, the impact pipeline 5
One end is connected to the cavity exhaust outlet, and the other end is connected to the gas exhaust piping of multistage vacuum pump, and the impact pipeline 5 is equipped with
Pressure control valve 3 and/or exhaust switchover valve door 4.Cavity exhaust ports on the vacuum pump cavity 1 are equipped with for controlling pressure
The back pressure transducer 2 of force control valve door 3, the cavity exhaust outlet are set to the bottom of vacuum pump cavity 1.
As shown in Fig. 2, a kind of multistage vacuum pump with impact-proof structure, 10 He of level-one cavity of the multistage vacuum pump
The impact-proof structure is equipped on secondary cavity 11.The multistage vacuum pump is at least three-level vacuum pump, and the present embodiment uses
Pyatyi vacuum pump.
The multistage vacuum pump can be completed in the higher process gas of extraction pressure, in the row for reaching level-one or two level
In the case of atmospheric pressure, the process gas of the rank vacuum pump discharge head control valve 3 control, via impact pipeline 5 to row
The process of air pipe discharge.
Embodiment one
A kind of impact-proof structure for multistage vacuum pump includes vacuum pump cavity 1, pressure control valve 3, exhaust switching
Valve 4 and impact pipeline 5, the wherein bottom of vacuum pump cavity 1 are equipped with cavity exhaust outlet, one end of the impact pipeline 5 and institute
The connection of cavity exhaust outlet is stated, the other end is connected to the gas exhaust piping of multistage vacuum pump, and the impact pipeline 5 is controlled equipped with pressure
Valve 3 and exhaust switchover valve door 4.The cavity exhaust ports are equipped with to be sensed for the pressure at expulsion of control pressure control valve 3
Device 2.The impact-proof structure can complete this grade of vacuum pump in the higher process gas of extraction pressure, and reach the rank
When the pressure at expulsion of vacuum pump setting, the process that is exhausted to gas exhaust piping.
Embodiment two
A kind of impact-proof structure for multistage vacuum pump includes vacuum pump cavity 1, pressure control valve 3 and impact pipeline
5, the wherein bottom of vacuum pump cavity 1 is equipped with cavity exhaust outlet, and one end of the impact pipeline 5 connects with the cavity exhaust outlet
Logical, the other end is connected to the gas exhaust piping of multistage vacuum pump, and the impact pipeline 5 is equipped with pressure control valve 3, the cavity
Exhaust ports are equipped with the back pressure transducer 2 for control pressure control valve 3.The impact-proof structure can complete the grade
Vacuum pump is when extracting the higher process gas of pressure, and when reaching the pressure at expulsion of rank vacuum pump setting, to exhaust
The process that pipeline is exhausted.
Embodiment three
A kind of impact-proof structure for multistage vacuum pump includes vacuum pump cavity 1, exhaust switchover valve door 4 and impact pipeline
5, the wherein bottom of vacuum pump cavity 1 is equipped with cavity exhaust outlet, and one end of the impact pipeline 5 connects with the cavity exhaust outlet
Logical, the other end is connected to the gas exhaust piping of multistage vacuum pump, and the impact pipeline 5 is equipped with exhaust switchover valve door 4.The erosion control
This grade of vacuum pump can be completed in the higher process gas of extraction pressure by hitting structure, and reach rank vacuum pump setting
When pressure at expulsion, the process that is exhausted to gas exhaust piping.
The impact-proof structure may be implemented in multistage vacuum pump for frequent operations such as loading chamaer, unloading chambers in atmospheric pressure
The surge protection of pump under power state.In real technique, when extracting air, in exhaust switchover valve door 4 and pressure-control valve
Under the action of door 3, process gas is directly discharged to pump exhaust inlet or the other pump chamber of later stages via gas exhaust piping, then arranges again
Go out to gas outlet.Therefore, the process gas that level-one cavity compresses has been directly discharged to exhaust outlet by the present invention, reduce by two,
Three, four, Pyatyi cavity carries out vacuumizing generated load, is reduced additionally, due to compression process, it is possible to reduce due to cavity grade
The reflux that other pressure difference generates, can improve pumping speed in the low vacuum stage.
Claims (4)
1. a kind of impact-proof structure for multistage vacuum pump, it is characterised in that：Including vacuum pump cavity (1), pressure-control valve
Door (3), exhaust switchover valve door (4) and impact pipeline (5), wherein vacuum pump cavity (1) are equipped with cavity exhaust outlet, the impact
One end of pipeline (5) is connected to the cavity exhaust outlet, and the other end is connected to the pump gas exhaust piping of multistage vacuum pump, the impact
Pipeline (5) is equipped with pressure control valve (3) and exhaust switchover valve door (4)；
Cavity exhaust ports on the vacuum pump cavity (1) are equipped with to be passed for the pressure at expulsion of control pressure control valve (3)
Sensor (2)；
The impact-proof structure can complete this grade of vacuum pump in the higher process gas of extraction pressure, and reach the rank
When the pressure at expulsion of vacuum pump setting, the process that is exhausted to gas exhaust piping.
2. the impact-proof structure as described in claim 1 for multistage vacuum pump, it is characterised in that：The cavity exhaust outlet is set
It is placed in the bottom of vacuum pump cavity (1).
3. a kind of multistage vacuum pump with any one of the claim 1-2 impact-proof structures, it is characterised in that：The multistage
It is equipped with the impact-proof structure on the level-one cavity (10) and secondary cavity (11) of vacuum pump.
4. multistage vacuum pump as described in claim 3, it is characterised in that：The multistage vacuum pump is at least three-level vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410629537.4A CN105649986B (en) | 2014-11-10 | 2014-11-10 | Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410629537.4A CN105649986B (en) | 2014-11-10 | 2014-11-10 | Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105649986A CN105649986A (en) | 2016-06-08 |
| CN105649986B true CN105649986B (en) | 2018-07-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410629537.4A Active CN105649986B (en) | 2014-11-10 | 2014-11-10 | Impact-proof structure for multistage vacuum pump and the multistage vacuum pump with the structure |
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Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655688A (en) * | 1984-05-30 | 1987-04-07 | Itt Industries, Inc. | Control for liquid ring vacuum pumps |
| DE3639512A1 (en) * | 1986-11-20 | 1988-06-01 | Alcatel Hochvakuumtechnik Gmbh | Vacuum pump system with a Roots pump |
| JPS63208691A (en) * | 1987-02-26 | 1988-08-30 | Hitachi Ltd | Operation of inverter-driven oil-free screw vacuum pump |
| CN2268790Y (en) * | 1996-06-21 | 1997-11-26 | 荣道发 | Mechanical vacuum pump with two stage oil seals |
| JP2003139054A (en) * | 2001-10-31 | 2003-05-14 | Ulvac Japan Ltd | Evacuation device |
| TW200637973A (en) * | 2005-03-17 | 2006-11-01 | Boc Group Plc | Vacuum pumping arrangement |
| CN201306283Y (en) * | 2008-10-30 | 2009-09-09 | 山东华腾环保科技有限公司 | Cam-pump vacuum machine set |
| CN101725502A (en) * | 2009-12-11 | 2010-06-09 | 北京航空航天大学 | Vacuum pumping system design for vacuum container |
| CN102713287A (en) * | 2009-12-28 | 2012-10-03 | 株式会社爱发科 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
-
2014
- 2014-11-10 CN CN201410629537.4A patent/CN105649986B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4655688A (en) * | 1984-05-30 | 1987-04-07 | Itt Industries, Inc. | Control for liquid ring vacuum pumps |
| DE3639512A1 (en) * | 1986-11-20 | 1988-06-01 | Alcatel Hochvakuumtechnik Gmbh | Vacuum pump system with a Roots pump |
| JPS63208691A (en) * | 1987-02-26 | 1988-08-30 | Hitachi Ltd | Operation of inverter-driven oil-free screw vacuum pump |
| CN2268790Y (en) * | 1996-06-21 | 1997-11-26 | 荣道发 | Mechanical vacuum pump with two stage oil seals |
| JP2003139054A (en) * | 2001-10-31 | 2003-05-14 | Ulvac Japan Ltd | Evacuation device |
| TW200637973A (en) * | 2005-03-17 | 2006-11-01 | Boc Group Plc | Vacuum pumping arrangement |
| CN201306283Y (en) * | 2008-10-30 | 2009-09-09 | 山东华腾环保科技有限公司 | Cam-pump vacuum machine set |
| CN101725502A (en) * | 2009-12-11 | 2010-06-09 | 北京航空航天大学 | Vacuum pumping system design for vacuum container |
| CN102713287A (en) * | 2009-12-28 | 2012-10-03 | 株式会社爱发科 | Vacuum exhaust device and vacuum exhaust method, and substrate treatment device |
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| Publication number | Publication date |
|---|---|
| CN105649986A (en) | 2016-06-08 |
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