WO2004090332A1 - Pompe a vide seche et son procede de demarrage - Google Patents

Pompe a vide seche et son procede de demarrage Download PDF

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Publication number
WO2004090332A1
WO2004090332A1 PCT/JP2004/005010 JP2004005010W WO2004090332A1 WO 2004090332 A1 WO2004090332 A1 WO 2004090332A1 JP 2004005010 W JP2004005010 W JP 2004005010W WO 2004090332 A1 WO2004090332 A1 WO 2004090332A1
Authority
WO
WIPO (PCT)
Prior art keywords
pump
rotational speed
measuring
downstream
dry vacuum
Prior art date
Application number
PCT/JP2004/005010
Other languages
English (en)
Inventor
Naoki Iijima
Kiyoshi Yanagisawa
Jiro Watanabe
Yoshinori Ojima
Original Assignee
Ebara Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corporation filed Critical Ebara Corporation
Publication of WO2004090332A1 publication Critical patent/WO2004090332A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0207—Torque
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00—Motor parameters
    • F04B2203/02—Motor parameters of rotating electric motors
    • F04B2203/0209—Rotational speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/30—Use in a chemical vapor deposition [CVD] process or in a similar process

Definitions

  • the present invention relates to a dry vacuum pump for use in discharging gases in a vacuum chamber of, for example, a semiconductor manufacturing apparatus or gases in other spaces and, more specifically, to a dry vacuum pump having an upstream pump and a downstream pump connected in series and to a method of starting same.
  • a dry vacuum pump is widely used for discharging a process gas introduced into a vacuum chamber.
  • a process gas introduced into a vacuum chamber For example, in a CVD device, it is necessary to rapidly discharge gases in a vacuum chamber and to maintain the vacuum chamber in a vacuum state for a long period of time.
  • a plurality of dry vacuum pumps which are connected in series are used to achieve a high evacuation speed and a desired ultimate pressure.
  • Such a vacuum pump is generally constituted of an upstream booster pump connected to a vacuum chamber and a downstream main pump disposed downstream of the booster pump.
  • the booster pump is required to have a greater evacuation speed than that of the main pump.
  • the ratio in evacuation speed of the booster pump to that of the main pump is for example about 10:1.
  • the main pump is first started to create a certain degree of vacuum in a portion upstream of the main pump to which the booster pump is connected and to reduce the torque required to start the booster pump.
  • the booster pump is started when the torque is detected to have been reduced to a value less than that the motor can generate.
  • the process gas occasionally contains reaction by-products.
  • a process gas is suctioned, solids of the by-products deposit on an inside walls of a casing of the main pump and, therefore, a sliding resistance is exerted on the rotation of the pump rotor.
  • Such a sliding resistance also occurs when foreign matters are suctioned in the casing of the pump.
  • the predetermined rotational speed is not always reached in the main pump after the lapse of the delayed period of time.
  • the upstream of the main pump has not yet been reduced to the desired pressure or less .
  • the present invention has been made in view of the foregoing problems of the conventional methods and has as its object the provision of a dry vacuum pump and a method of starting same in which an upstream pump can be surely started in a simple manner without using a vacuum sensor or a fluid coupling.
  • one embodiment of a method of starting a dry vacuum pump according to the present invention is a method of starting a dry vacuum pump including, as shown in, for example, FIGS. 1 and 4, an upstream pump 1 having an inlet side IIA in fluid communication with a vacuum chamber 3, and a downstream pump 2 having an inlet side 12A connected to an outlet side 11B of the upstream pump 1, wherein the upstream pump 1 is started upon detection of the fact that the rotational speed of the downstream pump 2 arrives at a predetermined rotational speed.
  • the upstream pump may be started upon detection of the fact that the rotational speed arrives at the predetermined rotational speed within a predetermined period of time, while the starting of the downstream pump is stopped when the rotational speed does not arrive at the predetermined rotational speed within the predetermined period of time.
  • the fact that the rotational speed arrives at the predetermined rotational speed may be detected by measuring the rotational speed of the downstream pump. The measurement of the rotational speed of the downstream pump shall be interpreted to include measurement of the rotational speed of a motor used to drive the downstream pump.
  • the downstream pump is driven by a motor to which a variable electric voltage is applied, wherein the fact that the rotational speed arrives at the predetermined rotational speed may be detected by measuring the voltage.
  • one embodiment of a dry vacuum pump according to the present invention comprises, as shown in, for example, FIG.
  • an upstream pump 1 having an inlet side IIA in fluid communication with a vacuum chamber 3
  • a downstream pump 2 having an inlet side 12A connected to an outlet side 11B of the upstream pump 1
  • measuring means 4 for measuring data related to the rotational speed of the downstream pump 2
  • control means 5 that receives the measured data and starts the upstream pump 1 upon detection of the fact that the rotational speed of the downstream pump 2 arrives at a predetermined rotational speed.
  • the data related to the rotational speed of the downstream pump 2 is measured by the measuring means 4.
  • the control means 5 receives the measured data.
  • control means 5 starts the upstream pump 1 upon detection of the fact that the rotational speed arrives at the predetermined rotational speed within a predetermined period of time and stops the starting of the downstream pump 2 when the rotational speed does not arrive at the predetermined rotational speed within the predetermined period of time.
  • the upstream pump 1, etc. can be protected.
  • the data is the rotational speed of the downstream pump 2 and the measuring means 4 is a rotational speed measuring device 4 for measuring the rotational speed of the downstream pump 2.
  • the concept of "the rotational speed measuring device 4 for measuring the rotational speed of the downstream pump 2" includes a rotational speed measuring device (not shown in FIG. 1) for measuring the rotational speed of a motor 2A for driving the downstream pump 2.
  • a further embodiment of a dry vacuum pump according to the present invention further comprises, as shown in, for example, FIG. 5, a motor 2A applied with a variable electric voltage for driving the downstream pump 2 , and the data is the voltage and the measuring means 7 is a voltage measuring device 7 for measuring the voltage.
  • a further embodiment of a dry vacuum pump according to the present invention further comprises, as shown in, for example, FIG. 6, a motor 2A applied with an alternate current voltage having variable frequency for driving the downstream pump 2 , and the data is the frequency and the measuring means 8 is a frequency measuring device 8 for measuring the frequency.
  • the upstream pump is started after the fact that the rotational speed of the downstream pump arrives at a predetermined rotational speed has been detected.
  • FIG. 1 is a schematic illustration of a whole vacuum evacuation system including a dry vacuum pump according to a first embodiment of the present invention.
  • FIG. 2 is a sectional view of a single stage roots-type positive displacement dry vacuum pump as the booster pump of the dry vacuum pump of FIG. 1.
  • FIG. 3 is a sectional view taken along the line III-III in FIG. 2.
  • FIG. 4 is a flow chart showing a procedure from the start of a main pump until the start of a booster pump of the vacuum evacuation system of FIG. 1.
  • FIG. 5 is a schematic illustration of a whole vacuum evacuation system including a dry vacuum pump according to a second embodiment of the present invention.
  • FIG. 6 is a schematic illustration of a whole vacuum evacuation system including a dry vacuum pump according to a third embodiment of the present invention.
  • FIG. 1 is a schematic illustration of a whole vacuum evacuation system 101 according to a first embodiment of the present invention.
  • the system includes a dry vacuum pump constituted such that no oil components are present in portions to which gases are brought into contact and comprised of a booster pump (BP) 1 as an upstream pump and a main pump (MP) 2 as a downstream pump, a booster pump motor (BPM) IA for driving the booster pump 1, and a main pump motor (MPM) 2A of a variable speed type for driving the main pump 2.
  • BP booster pump
  • MP main pump
  • BPM booster pump motor
  • MPM main pump motor
  • a single stage roots-type positive displacement dry vacuum pump having a high evacuation speed is used as the booster pump 1, while a multi-stage roots-type positive displacement dry vacuum pump capable of being started in the atmospheric pressure is used as the main pump 2.
  • Designated as 3 is a vacuum chamber which may be, for example, a process chamber used for a CVD device in a semiconductor manufacturing process.
  • the ratio in evacuation speed of the booster pump 1 to that of the main pump 2 is, for example, about 10:1.
  • An inlet side IIA of the booster pump 1 is connected to the vacuum chamber 3.
  • the inlet side IIA of the booster pump 1 is in fluid communication with the vacuum chamber 3.
  • An outlet side 11B of the booster pump 1 is connected to an inlet side 12A of the main pump 2.
  • the booster pump 1 and the main pump 2 are connected in series.
  • an ultra-high vacuum pump (not shown) such as a turbo molecular pump is additionally disposed in series in a portion upstream of the booster pump 1.
  • the inlet side IIA of the booster pump 1 is connected to an outlet side
  • the ultra-high vacuum pump is started when the degree of vacuum in the inlet side (not shown) of the ultra-high vacuum pump arrives at a predetermined vacuum (for example 3 Torr)
  • the rotational speed of the main pump 2 represents data related to the rotational speed of the downstream pump 2 of the present invention, while the rotational speed measuring device 4 is the measuring means of the present invention.
  • the rotational speed of the main pump 2 is equal to the rotational speed of the main pump motor 2A for driving the main pump 2.
  • the rotational speed measuring device 4 may be attached to the main pump motor 2A for driving the main pump 2 for measuring the rotational speed of the main pump motor 2A.
  • the rotational speed measuring device 4 is electrically connected to a control section 5 serving as the control means, so that a rotational speed signal 33 indicative of the measured rotational speed is transmitted to the control section 5.
  • the control section 5 is electrically connected to a power source supply control device 14 adapted to feed a driving power source 32 to the main pump motor 2A for driving the main pump 2.
  • the control section 5 is also adapted to transmit a control signal 34 to the power source supply control device 14.
  • the power source supply control device 14 feed the driving power source 32 to main pump motor 2A, so that a variable voltage is applied to a stator windings (not shown) of the main pump motor 2A. Further, when the applied voltage is increased by the control signal 34, the rotational speed of the main pump motor 2A increases in proportion to the applied voltage.
  • the control section 5 is adapted to judge whether or not the rotational speed of the main pump 2 sent from the rotational speed measuring device 4 arrives at a predetermined rotational speed.
  • the control section 5 transmits a control signal 35 to a power source supply control device 13 which in turn feeds a driving power source 31 to the booster pump motor IA for driving the booster pump 1, so that the booster pump motor IA is started.
  • FIG. 2 is a sectional view of a single stage roots-type positive displacement dry vacuum pump as the booster pump 1 in the present embodiment.
  • the booster pump 1 has a casing 21 in which a pair of opposing 3-lobe rotors 22 and 22 is supported by bearings 23 and 23.
  • a minute gap is defined between outer peripheries of the rotors 22 and 22 and an inside wall of the casing 21.
  • the pair of rotors 22 and 22 is constituted to rotate in opposite directions in synchronous with each other via timing gear 24 such that the minute gap is maintained.
  • a shaft 25 to which the rotors 22 and 22 are fixedly secured has one end to which the booster pump motor IA is connected. The shaft 25 and the rotors 22 and 22 are rotated by the booster pump motor IA.
  • Gases suctioned from an inlet side are confined in a space defined between the casing 21 and the pair of rotors 22 and 22 and are transferred by rotation of the rotors 22 and 22 to outlet side (discharge side) .
  • the gases in the upstream side of the booster pump 1, namely in the vacuum chamber 3 (FIG. 1) connected to the inlet side of the booster pump 1 can be discharged.
  • explanation of the multi-stage roots-type positive displacement dry vacuum pump used as the main pump 2 (FIG. 1) is omitted here, since they differ only in the stage numbers of the rotors and in evacuation speed from each other and the other constitutions are the same.
  • the rotational speed of the main pump 2 at a time when the degree of vacuum in the upstream side of the main pump 2, namely in the inlet side 12A of the main pump 2 has arrived at a value sufficient to start the booster pump 1 is measured.
  • the degree of vacuum in the inlet side 12A of the main pump 2 and the degrees of vacuum in the outlet side 11B and the inlet side IIA of the booster pump 1 are each nearly equal to the degree of vacuum in the vacuum chamber 3.
  • the thus measured value is then set in the control section 5 as the rotational speed of the main pump 2 for starting the booster pump 1.
  • the booster pump 1 and the booster pump motor IA used in the present embodiment are designed to be able to start operating at a degree of vacuum of about 1000 Pa.
  • a rotational speed of the main pump 2 is 7000 rnin "1 . Therefore, 7000 min -1 is set in the control section 5 as a rotational speed of the main pump for starting the booster pump 1.
  • the main pump 2 is first started.
  • the rotational speed of the main pump 2 is always measured by the rotational speed measuring device 4 (Step 1) .
  • a signal 33 of the measured rotational speed is transmitted to the control section 5 (Step 2) .
  • the control section 5 judgment is made whether or not the present time is within a predetermined period of time (90 seconds, for example) after the start of the main pump 2 (Step 3) . If not within the predetermined period of time
  • Step 4 the start-up operation of the main pump 2 is stopped (Step 4) . If within the predetermined period of time (when the answer in Step 3 is YES) , the control section 5 judges whether or not the rotational speed of the main pump 2 which speed is informed by the rotational speed measuring device 4 has arrived at the set value (Step 5) . If not yet arrived (when the answer in Step 5 is NO) , the booster pump 1 is not started and the process is returned to Step 1. Thus, the rotational speed of the main pump 2 is continuously accelerated while the measurement of the rotational speed of the main pump 2 is continued.
  • the rotational speed of the main pump 2 increases with time and arrives at the preset value of, for example, 7000 min "1 (the answer of Step 5 is YES) .
  • the booster pump 1 is started up (Step 6) .
  • the torque required to start the booster pump 1 is lower than the torque generated in the booster pump motor IA throughout the rotational speed of the booster pump 1 (from 0 to rated rotational speed) , so that the booster pump motor IA can start the booster pump 1.
  • the ultimate degree of vacuum of the dry vacuum pump of the present embodiment is obtainable, so that the gases in the vacuum chamber 3 can be discharged by the high evacuation power of the booster pump 1.
  • the degree of vacuum, in the upstream side of the main pump 2 may vary with the volume and shape of the piping provided in the upstream side of the main pump 2, even when the rotational speed of the main pump 2 is the same. Even in such a case, the booster pump 1 can be started without fail by setting in the control section 5 such a rotational speed of the main pump 2 that the degree of vacuum of the upstream side of the main pump 2 has arrived at 1000 Pa.
  • the predetermined period of time mentioned above is the period of time, determined by the volume of the vacuum chamber 3 and the evacuating capacity of the dry vacuum pump, in which the upstream side of the main pump 2 come to have the pressure appropriate for starting the booster pump 1.
  • the predetermined period of time is, for example, 1 to 2 minutes approximately with the vacuum chamber 3 of 200 L volume and the dry vacuum pump of the 2000 L/min evacuating capacity.
  • the motor used for driving the booster pump 1 and main pump 2 constituting the dry vacuum pump there may be mentioned an induction motor or a DC brushless motor capable of increasing the rotational speed by increasing the applied voltage. Either type of the motor may be used for the purpose of the present invention.
  • the booster pump 1 is started after the fact that the rotational speed of the main pump 2 arrives at a predetermined rotational speed has been detected in the control section 5 by measuring the rotational speed of the main pump 2 with the rotational speed measuring device 4.
  • the degree of vacuum in the inlet side 12A of the main pump 2 namely in the outlet side 11B of the booster pump 1 has arrived at a value suitable for starting the booster pump 1, to start the booster pump 1 without fail.
  • the booster pump 1 by appropriately changing the set value of the rotational speed of the main pump 2 for starting the booster pump 1, it is possible to start the booster pump 1 within the predetermined period of time under the conditions in which the load of the booster pump 1 is always, from zero rotational speed to the rated rotational speed, less than the power the booster pump motor IA can generate. Therefore, even when a motor having a relatively small rated power is used as the booster pump motor IA for driving the booster pump 1, the booster pump 1 can be started without fail within a predetermined period of time. As a result, it is possible to reduce the power consumption of the booster pump motor IA. Additionally, it is possible to make the booster pump motor IA compact.
  • the rotational speed of the main pump 2 is controlled to increase to the rated rotational speed in a minimum period of time based on the load of the main pump 2.
  • a vacuum evacuation system 102 according to a second embodiment of the present invention will be described with reference to FIG. 5. At the outset, differences in constitution between the system 102 and the above-described vacuum evacuation system 101 (FIG. 1) according to the first embodiment of the present invention will be described.
  • the vacuum evacuation system 102 does not have the rotational speed measuring device 4 (FIG. 1) for measuring the rotational speed of the main pump 2. Instead, the system 102 is provided with a voltage measuring device 7 for measuring the voltage of the driving power source 32 of the main pump motor 2A.
  • the voltage of the driving power source 32 of the main pump motor 2A represents data related to the rotational speed of the downstream pump of the present invention and, the voltage measuring device 7 represents the measuring means of the present invention.
  • the voltage measuring device 7 is adapted to transmit a voltage signal 36 indicative of the measured voltage to the control section 5.
  • the voltage of the driving power source 32 of the main pump motor 2A is a variable voltage applied to the main pump motor 2A.
  • the rotational speed of the main pump 2 increases in proportion to the voltage applied to the main pump motor 2A.
  • Differences in constitution between the second embodiment and the above-described first embodiment are (1) that a voltage (applied voltage) of the drive power source for the main pump motor 2A is measured in place of the rotational speed of the main pump 2 , and that a voltage signal 36 is transmitted to the control section 5; and (2) that the control section 5 receives, in place of the rotational speed signal 33, the voltage signal 36 indicative of the voltage of the drive power source of the main pump motor 2A which voltage is in proportion to the rotational speed of the main pump 2.
  • the rotational speed of the main pump 2 is computed. When the fact that the rotational speed of the main pump 2 has arrived at the predetermined rotational speed is detected, the booster pump 1 is started up.
  • the voltage applied to the main pump is measured by the voltage measuring device 7.
  • the control section 5 computes the rotational speed of the main pump 2.
  • the booster pump 1 is started.
  • a vacuum evacuation system 103 according to a third embodiment of the present invention will be described with reference to FIG. 6.
  • the vacuum evacuation system 103 does not have the rotational speed measuring device 4 (FIG. 1) for measuring the rotational speed of the main pump 2.
  • the system 103 is provided with a frequency measuring device 8 for measuring the frequency of the voltage of the driving power source 32 of the main pump motor 2A.
  • the frequency of the voltage of the driving power source 32 of the main pump motor 2A represents data related to the rotational speed of the downstream pump of the present invention and, the frequency measuring device 8 represents the measuring means of the present invention.
  • the frequency measuring device 8 is adapted to transmit a frequency signal 37 indicative of the measured frequency to the control section 5.
  • the frequency of the voltage of the driving power source 32 of the main pump motor 2A is a frequency of the voltage applied to the main pump motor 2A.
  • the rotational speed of the main pump 2 increases in proportion to the frequency of the voltage applied to the main pump motor 2A.
  • Differences in constitution between the third embodiment and the above-described first embodiment are (1) that a frequency of the voltage (applied voltage) of the drive power source for the main pump motor 2A is measured in place of the rotational speed of the main pump 2, and that a frequency signal 37 is transmitted to the control section 5; and (2) that the control section 5 receives, in place of the rotational speed signal 33, the frequency signal 37 indicative of the frequency of the voltage of the drive power source of the main pump motor 2A which voltage is in proportion to the rotational speed of the main pump 2. On the basis of the frequency signal 37, the rotational speed of the main pump 2 is computed. When the fact that the rotational speed of the main pump 2 has arrived at the predetermined rotational speed is detected, the booster pump 1 is started up .
  • the frequency of the voltage applied to the main pump 2 is measured by the frequency measuring device 8.
  • the control section 5 computes the rotational speed of the main pump 2.
  • the booster pump 1 is started.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Control Of Positive-Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L'invention concerne un procédé de démarrage d'une pompe à vide sèche comportant une pompe amont (1) dotée d'un côté admission (11A) en communication fluidique avec une chambre à vide (3), et une pompe aval (2) dotée d'un côté admission (12A) raccordé à un côté sortie (11B) de la pompe amont (1) ; la pompe amont démarre une fois détecté le fait que la vitesse de rotation de la pompe aval (2) a atteint une vitesse de rotation prédéterminée. On peut certainement et simplement démarrer la pompe amont (1) en utilisant un détecteur de vide ou un raccord fluidique.
PCT/JP2004/005010 2003-04-10 2004-04-07 Pompe a vide seche et son procede de demarrage WO2004090332A1 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2003107040 2003-04-10
JP2003-107040 2003-04-10
JP2004-109348 2004-04-01
JP2004109348A JP2004324644A (ja) 2003-04-10 2004-04-01 ドライ真空ポンプ及びその起動方法

Publications (1)

Publication Number Publication Date
WO2004090332A1 true WO2004090332A1 (fr) 2004-10-21

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PCT/JP2004/005010 WO2004090332A1 (fr) 2003-04-10 2004-04-07 Pompe a vide seche et son procede de demarrage

Country Status (3)

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JP (1) JP2004324644A (fr)
TW (1) TW200424441A (fr)
WO (1) WO2004090332A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1979619A1 (fr) * 2006-01-31 2008-10-15 Ebara Densan Ltd. Unité de pompe à vide
WO2013164571A2 (fr) * 2012-05-02 2013-11-07 Edwards Limited Procédé et appareil de préchauffage d'un agencement de pompe à vide
EP1807627B1 (fr) * 2004-11-01 2014-09-03 Edwards Limited Ensemble pompe
EP3248850A3 (fr) * 2016-05-27 2018-02-21 Aqseptence Group GmbH Procédé de fonctionnement d'une pompe à vide et système de pompe à vide
EP3388676A1 (fr) * 2017-04-12 2018-10-17 Ebara Corporation Dispositif de commande de fonctionnement et procédé de commande de fonctionnement pour ensemble de pompe à vide
WO2021008834A1 (fr) * 2019-07-17 2021-01-21 Pfeiffer Vacuum Groupe de pompage
US11391284B2 (en) * 2019-10-18 2022-07-19 Shimadzu Corporation Vacuum pumping device and vacuum pumping device starting method

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888894A1 (fr) * 2005-07-20 2007-01-26 Alcatel Sa Pompage rapide d'enceinte avec economie d'energie
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EP1807627B1 (fr) * 2004-11-01 2014-09-03 Edwards Limited Ensemble pompe
EP1979619A1 (fr) * 2006-01-31 2008-10-15 Ebara Densan Ltd. Unité de pompe à vide
EP1979619A4 (fr) * 2006-01-31 2013-07-24 Ebara Corp Unité de pompe à vide
WO2013164571A2 (fr) * 2012-05-02 2013-11-07 Edwards Limited Procédé et appareil de préchauffage d'un agencement de pompe à vide
WO2013164571A3 (fr) * 2012-05-02 2013-12-27 Edwards Limited Procédé et appareil de préchauffage d'un agencement de pompe à vide
CN104246230A (zh) * 2012-05-02 2014-12-24 爱德华兹有限公司 用于预热真空泵装置的方法和设备
EP3248850A3 (fr) * 2016-05-27 2018-02-21 Aqseptence Group GmbH Procédé de fonctionnement d'une pompe à vide et système de pompe à vide
EP3388676A1 (fr) * 2017-04-12 2018-10-17 Ebara Corporation Dispositif de commande de fonctionnement et procédé de commande de fonctionnement pour ensemble de pompe à vide
CN108691769A (zh) * 2017-04-12 2018-10-23 株式会社荏原制作所 真空泵装置及用于真空泵装置的运转控制方法
TWI775832B (zh) * 2017-04-12 2022-09-01 日商荏原製作所股份有限公司 真空幫浦裝置的運轉控制裝置、及運轉控制方法
WO2021008834A1 (fr) * 2019-07-17 2021-01-21 Pfeiffer Vacuum Groupe de pompage
FR3098869A1 (fr) * 2019-07-17 2021-01-22 Pfeiffer Vacuum Groupe de pompage
US11815096B2 (en) 2019-07-17 2023-11-14 Pfeiffer Vacuum Pump unit
US11391284B2 (en) * 2019-10-18 2022-07-19 Shimadzu Corporation Vacuum pumping device and vacuum pumping device starting method

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