200528640 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種真空泵。 【先前技術】 真空處理為共同地用於半導體裝置之製造，用以沉積一 薄膜層於基板上。一般而言，採用真空泵將處理室抽空至 非常低的壓力，其壓力端視製程之型式可能低至ι〇-ό mbar ’且導入進給氣體至已抽空氣室以將所希望材料沉積 在位於氣室中的一或多個基板上。在完成沉積時，基板被 移出氣室且另一基板被插入以重複沉積製程。 需要有相當長的真空抽氣時間以抽空處理室至所需要之 壓力。因此，當更換基板時為了保持在室中的壓力為位於 或大約在所需要強度附近，一般採用傳輸室與加載互鎖真 空至方式。加載互鎖真空室之容量可能由僅些許公升至針 對某些較大平面顯示器之數千公升的範圍。 加載互鎖真空室一般具有一第一窗口，可被選擇性地被 =啟以允許在加載互鎖真空室與傳輪室之間傳送基板，及 -：二窗口’其可選擇性地對大氣開啟以允許由加載互鎖 真空室插人與移出基板。在使㈣，以處理室真空泵將處 理室保持在所希望之真空度。將第―窗口關閉、第二窗口 ^啟通向大氣，以允許在加載互鎖真空室插人基板。第二 窗口接著被關閉’且使用加載互鎖真空室真空果，將加載 互鎖真空室被抽空直到加載互鎖真空室為大體上同傳輸室 之相同㈣力’―般在大狀War。第-窗口接著被開啟 98670.doc 200528640 以允許基板被轉換至傳輸室。傳輸室接著被抽空至大體上 如同處理室之壓力，於是基板被傳送至處理室。 當已完成真空處理’已處理基板被後送至加載互鎖真空 室。將第一窗口關閉以保持在傳輸室之真空度，在加載互 鎖真空室中的麼力被向上提昇至大氣壓力，以令諸如空氣 或亂氣之非反應式氣體流進加載互鎖真空室。當在加載互 鎖真空室中的壓力為位於或接近大氣壓力，第二窗口被開 啟以將已處理之基板移出。因此對於加載互鎖真空室而 言，需要由大氣塵至中度真空（大約01mbar)之重複抽空循 環。 片加載互鎖冑空室冑空泵一般而言在真空室中未帶有油 質，因為在真空室中存在有潤滑油質時，可能造成在執行 真，處理之潔淨環境中產生污物。例如，在BOC Edwards %乾式真空泵之”iH”系列包含一結合在安裝於乾式泵上之 早一級魯式機構加壓或鼓風泵的乾式預抽泵或低真空泵。 預抽泵-般為使用交纏轉子之多級正位移果。料可在每 一級具有才目同型<之外％ ’或可能隨著每一級變化外形。 一對於大型平面顯示器，加載互鎖真空室真空泵需要有較 门之泵取速度，例如高達2〇〇〇 m3/h〇ur。而與魯式加壓泵成 串接之由魯式與Northey機構構成之乾式預抽泵可提供此 等泵取速度，該等泵件組合之相對地大尺寸加上在使用期 間所產生的噪音與振動程度，一般導致需要將加載互鎖真 空室真空泵設置在遠離處理工具之處，例如在地下室中。 此對於使用者將是不便於使用，且相對上需要分佈較長之 98670.doc 200528640 較大直控的操作管件以連接加載互鎖真空室真空泵至加载 互鎖真空室，明顯的將增加安裝成本。 本么明之較佳具體實例中的至少一項目標為用以解決此 等與其他問題。 【發明内容】 摘要而言’依據本發明可將傳統抽氣機配置之加屡果與 預㈣=至少—個更換為包含有一多級離心式廢縮機系統 之—真空i°在一具體實例中’加屢果與預抽果二者被排 ^大氣之-單—真空泵所取代。在—第二具體實例中，所 提供加堡栗為相似於第一具體實例的一真空系，其具有減 少壓縮機機構之級數’以預抽菜所備持。此預㈣可以是 傳統的預抽栗，或依據第三具體實例可能是包含排至大氣 之一多級離心式I缩機系統的真空栗。此等預抽系可以傳 統魯式加❹所提供。因此在一方面中，本發明提供包含 多級離心式壓縮機機構之-真空栗，用於承接將被栗取流 體且大體上在大氣壓力下排出所泵取流體。 以包含有多級離心式壓縮機機構之—果取代傳統預抽系 與加愚栗之-或二者，相較於傳統乾式果可降低相關聯離 心式壓縮機系統之大小、噪音、與振動程度，可有助於將 至少部分抽氣機配置被安震在處理工具上，因此潛在性的 避免過長分佈之大直徑運作管件的昂貴費用。 其希望執行諸如加載互鎖真空室之真空室的抽空，可盡 快的由大氣壓力至低壓力。可愈快完成抽空，可更快速完 成基板之處理速度。無論如何，採用具有多級式栗取機構 98670.doc 200528640 之泵在將氣室由大氣壓力抽空之初始階段中，由抽氣機對 於流體的壓縮可造成增加流體壓力高於大氣壓力。此可造 成抽氣機之排出階段的非預期之過度負荷。如果此等泵在 此情形中操作超過一明顯時間，可能對於密封部分發生傷 害及/或軸承失效或在易碎的旋轉葉輪與泵的外殼之間發 生撞擊。 知觀此點’在本發明之另一方面中提供一多級離心式壓 細機機構，其包含一外殼、可旋轉地被安裝在外殼内之一 驅動軸、複數個被配置在外殼内之固定構件且界定出複數 個互連流體室、複數個被安裝在驅動軸上之葉輪且相對於 固疋構件所配置，使得每一葉輪遞送壓縮流體至相對應流 體室、一旁通槽在二個流體室之間延伸以有助於流體在不 需要加壓下流過此等氣室之間、及用於控制流體流過旁通 槽之控制器。壓縮流體可因此在不需要加壓下在流體室之 間被輸送，其有助於一較大的上游泵取級可在全速下操 作’不會造成所泵取流體被加壓高於大氣壓力。 因此較佳的配置控制裝置以在該等二個流體室之間的壓 力差影響之下開啟旁通槽，且特別是在當該等二個流體室 之位於上游之一的壓力為大於在該等二個流體室之位於下 游之一的壓力時。 在一較佳的具體實例中，該等二個流體室為壓縮機機構 之鄰接流體室，雖然一或多個其他流體室可替代的分隔此 等二個流體室。例如，流體室之一可能是第一（泵取機構之 最低壓力流體室），及另一流體室為最後（泵取機構之最高壓 98670.doc -10- 200528640 個流體室為鄰接者，無論如何旁通 槽可適當的通過被設置在流體室之間的 控制裝置較佳的包含閥門裴 加壓流體可在一關閉位置與二:一閥門構件可經由 門構件可適當的"閥所提:啟位移:此等: 流體室之内以控制流體由旁通槽流動進入二“置在 較佳的，該機構包含針對每一流體室之相對：旁通槽， 其在流體室與相鄰接下游流體室之間延伸，及用於控制流 體流過每一旁通槽之裝置。 當所果取流體流過壓縮機機構之某—級的特定流動速率 為相對的低時，離心式壓縮機機構易發生所泵取流體之汤 浪的影響。湧浪其本身顯現為流體 瓶肘延/爪進入壓縮機葉 被配置在外殼内之固定構件且界定出複數個互連流體室、 複數個被安裝在驅動軸上之葉輪且相對於固定構件所配 置，使得每一葉輪遞送壓縮流體至相對應流體室、及湧浪 控制裝置用於控制在多級離心式壓縮機機構内之湧浪。 湧浪控制裝置較佳的包含用於輸送流體串流至每一流體 輪，且負面影響真空泵之操作效率，在極端情況中可能確 實傷害泵。综觀此點，該機構較佳的包含诱浪控制裝置， 用於控制在壓縮機機構内之渴浪。因此，在本發明^進一 步方面中’本發明提供一種多級離心式壓縮機機構，其包 含一外殼、可旋轉地被安裝在外殼内之—驅動軸、複數個 至之裝置，及用於控制流體串流流進每一流體室之速率的 裝置。在一具體實例中，該輸送裝置被配置用以輪送諸如 98670.doc 200528640 被保持在高於將發生湧浪之速率 工f li H 4惰氣之氣體串流至每一流體室。在另一具 例中’忒輪廷裝置被配置用以輪送壓縮流體串流至每 •體至二在任—方式中，流過I缩機機構之流動速率可 輸送裝置被配置在可由下游流體室輸送I 縮流體串流至 每Γ流體室，輸送裳置較佳的包含用於每一流體室之-流 體k路（不同於别述之旁通槽），在流體室與鄰接下游流體室 之間延伸。此等流體通路為較佳的同軸型式。 八用於控制流體串流流進每-流體室之控制裝置較佳的包 含閥門裝置。閥Η奘番了 4人+ χ可匕s串列閥門用於控制流體流過 相對應流體通路，或一短管間用於控制流體流過每一流體 通路。該_裝置騎“至少局部地被設置在氣室之 免去需要提供外部管件連接。閥門裝置可以個別 以：’：所控制。為了控制閥門裝置，可提供壓力感測器 ，、“ 之机體屋力’-來自於入口感測器之信 號被&供至控制系 外或可替代的，糊二裝置之開啟與關閉。此 .4丨益可被設置在泵機構之内以監視 在料構内之屋力變動，且因此偵測汤浪之突發。 每—葉輪較佳的在其一侧邊 週㈣具有在其内側週邊與其外側 ―::間延伸的複數個葉片或刀片。每一刀片較佳的順著 曲形路！。為有助於製诰 合相對應外殼組件之碑片:：:一厂固定構件較佳的包含結 票片-體以壓縮機機構壓縮之後一 ，熱。為了冷卻以I縮機機構所泵取之 “出階段），該機構較佳的包含用於冷卻每一固定組件之 98670.doc 200528640 衣。列如，可在其一側邊設置之複數個冷卻鰭片。可替 代為或另增的，冷卻裝置可包含供應冷媒流至每一固定構 件之波置。此可提供冷卻鰭片（所設置之處）與固定板片二者 之直接冷部。此冷卻鰭片可被設置在固定板片與擴散板片 ]用於導引壓縮流體串流由一葉輪至流體室，以致該 鰭片亦可提供擴散板片之冷卻。 本發明亦可提供包含如前所述之壓縮機機構的一真空 果0 如果泵在一相對高壓之下操作超過一相對較長的時間， I縮機機構可能產生過度熱量，例如如果泵用以抽空加載 互鎖真空室之門被意外的保持開啟。為了防止泵發生過 …可Μ視泵之溫度，且壓縮機機構之旋轉速度將反應於 斤揽視Λ度而變。此可有助於在過熱情形下降低泵之速 度，因此降低在泵内之溫度，且避免在高速度下之不當的 操作超過一相對過長時間。 因此’泵較佳地包含用於監視栗溫度之裝置，及包含依 據所監視溫度控制軸旋轉速度之裝置。該監視裝置可適當 的以適當的溫度感測器所提供，諸如被設置在外殼之内或 f近外殼之熱電麵。用於控制馬達以驅動驅動軸之一控制 器，可提供此控制裝置。 β為了冷卻外殼（可能由所粟取流體傳送熱量至此），亦可 提供-外部冷卻系、统’例如在壓縮機機構延伸大約至少一 部分之冷卻外套的樣式。 當泵被使用如同一預抽粟日卑，：¾¾ 4丄：cr 承吋預抽泵可由此等多級離心 98670.doc 200528640 式壓縮機機構結合任何適當的加壓泵所組成。此等加壓泵 可能以一包含諸如在分子拖髮機構下游之多級離心式壓縮 機機構之泵所提供，在加壓泵之壓縮機機構的級數（例如2 級）係小於預抽泵之級數（例如6或7級）。可替代為，加壓泵 與預抽泵之傳統組合可以單一泵所取代，此泵包含在多級 (例如4級）分子拖矣機構下游之多級（例如6或7級）離心式壓 縮機機構。分子拖良機構較佳的包含一多級哈威克 (Hoiweek)機構’其具有複數個經配置如同複數個螺旋繞圈 之槽拖髮級可能成串列或平行或二種之組合的配置以具 有最大的泵取容積。為了最小化泵之長度，分子拖良機構 較佳的至少局部地環繞用於旋轉驅動軸之一馬達。例如， ▲刀子拖曳抽氣機構為哈威克機構時，一分子拖曳抽氣機 構之轉子元件一般包含一被安裝為隨著壓縮機機構之轉子 凡件旋轉移動之汽缸，該汽缸可能至少局部地環繞馬達。 在本發明之進一步方面中，此所提供的真空泵包含一多級 離心式壓縮機機構，其包含被安裝在可旋轉安裝驅動轴上 之複數個轉子元件，及由此上游處之一分子拖良機構，其 包含被安裝在驅動軸上之至少一轉子元件，其中分子拖曳 機構之至少一轉子元件至少局部地環繞用於旋轉驅動轴之 馬達。 •如刖所述為了快速向下泵取室，泵可能設置有用於協助 壓縮流體旁通多級離心式壓縮機機構之葉輪的一或多個閥 門裝置200528640 IX. Description of the invention: [Technical field to which the invention belongs] The present invention relates to a vacuum pump. [Prior Art] Vacuum processing is commonly used in the manufacture of semiconductor devices to deposit a thin film layer on a substrate. Generally speaking, the vacuum pump is used to evacuate the processing chamber to a very low pressure. The pressure end may be as low as ι0-ό mbar depending on the type of process and the feed gas is introduced into the evacuated chamber to deposit the desired material in the On one or more substrates in the air chamber. When the deposition is completed, the substrate is removed from the gas chamber and another substrate is inserted to repeat the deposition process. A considerable vacuum evacuation time is required to evacuate the processing chamber to the required pressure. Therefore, in order to keep the pressure in the chamber at or near the required strength when replacing the substrate, the vacuum interlocking method of the transfer chamber and the load is generally used. The capacity of the load-locking vacuum chamber can range from just a few liters to thousands of liters for some larger flat-panel displays. The loading interlocking vacuum chamber generally has a first window that can be selectively activated to allow substrates to be transferred between the loading interlocking vacuum chamber and the transfer chamber, and-: two windows' which can selectively Open to allow insertion and removal of the substrate by the loading interlocking vacuum chamber. Now, the processing chamber vacuum pump is used to maintain the processing chamber at the desired vacuum level. Close the first window and open the second window to the atmosphere to allow the substrate to be inserted in the loading interlocking vacuum chamber. The second window is then closed ' and the loading interlocking vacuum chamber is used to evacuate the loading interlocking vacuum chamber until the loading interlocking vacuum chamber is substantially the same force as the transfer chamber ', generally in a large war. The first window is then opened 98670.doc 200528640 to allow the substrate to be transferred to the transfer chamber. The transfer chamber is then evacuated to a pressure substantially similar to the processing chamber, and the substrate is transferred to the processing chamber. When the vacuum processing has been completed, the processed substrate is sent to the loading interlocking vacuum chamber. The first window is closed to maintain the degree of vacuum in the transfer chamber, and the force in the loading interlocking vacuum chamber is raised up to atmospheric pressure, so that non-reactive gas such as air or turbulent gas flows into the loading interlocking vacuum chamber. . When the pressure in the load-locking vacuum chamber is at or near atmospheric pressure, a second window is opened to remove the processed substrate. Therefore, for loading interlocking vacuum chambers, repeated evacuation cycles from atmospheric dust to moderate vacuum (about 01 mbar) are required. The chip-loaded interlocking air chamber and air pump generally do not carry oil in the vacuum chamber, because when there is lubricating oil in the vacuum chamber, it may cause dirt to be generated in the clean environment of the implementation and treatment. For example, the "iH" series of BOC Edwards% dry vacuum pumps includes a dry pre-pump or low vacuum pump that is combined with an earlier stage Lube mechanism pressurized or blast pump mounted on the dry pump. Pre-pump-generally a multi-stage positive displacement result using an entangled rotor. The material may have the same type < outside% ' at each stage or may change shape with each stage. For large flat-panel displays, the load-locking vacuum chamber vacuum pump needs a relatively fast pumping speed, such as up to 2000 m3 / h. Dry pre-pumps composed of Lu-type and Northey mechanisms in series with Lu-type booster pumps can provide these pumping speeds. The relatively large size of these pump components combined with noise generated during use And the degree of vibration generally leads to the need to place the load-locking vacuum chamber vacuum pump away from the processing tool, such as in a basement. This will be inconvenient for users, and relatively long distribution of 98670.doc 200528640 relatively large direct-controlled operating pipe to connect the vacuum pump of the loading interlock vacuum chamber to the loading interlock vacuum chamber will obviously increase the installation cost . At least one of the objectives in this preferred embodiment of Benmemin is to address these and other issues. [Summary of the Invention] In summary, according to the present invention, the traditional air extractor configuration can be combined with repeated fruit and pre-preparation = at least-one replaced with a multi-stage centrifugal waste shrink system-vacuum i ° In the example, 'Jia repeated fruit and pre-pumped fruit are replaced by the single-vacuum pump of the atmosphere. In the second specific example, the provided Gabor is a vacuum system similar to the first specific example, which has a reduced number of stages of the compressor mechanism, and is prepared for pre-pumping. This pre-pumping can be a conventional pre-pumping pump, or according to a third specific example, a vacuum pump containing a multi-stage centrifugal I-shrinker system vented to the atmosphere. These pre-drawing systems can be provided by traditional Lujiajiao. Therefore, in one aspect, the present invention provides a vacuum pump comprising a multi-stage centrifugal compressor mechanism for receiving a pumped fluid and discharging the pumped fluid substantially at atmospheric pressure. Replacing the traditional pre-pumping system with the one containing multi-stage centrifugal compressor mechanism, or adding both, or the two, can reduce the size, noise, and vibration of the associated centrifugal compressor system compared to traditional dry fruits. The degree can help at least part of the air extractor configuration be shocked on the processing tool, thus potentially avoiding the expensive cost of long-distance running large-diameter operating fittings. It is desired to perform evacuation of a vacuum chamber such as a loading interlocking vacuum chamber, and it can go from atmospheric pressure to low pressure as quickly as possible. The faster the evacuation can be completed, the faster the substrate processing speed can be completed. In any case, in the initial stage of evacuating the air chamber from atmospheric pressure using a pump with a multi-stage pumping mechanism 98670.doc 200528640, the compression of the fluid by the air extractor may cause the fluid pressure to increase above the atmospheric pressure. This can cause unexpected overloading of the exhaust phase of the air extractor. If these pumps are operated for more than a significant period of time in this situation, damage to the seals and / or bearing failures or impact between the fragile rotating impeller and the pump housing may occur. Knowing this point ', in another aspect of the present invention, a multi-stage centrifugal compactor mechanism is provided, which includes a casing, a drive shaft rotatably installed in the casing, and a plurality of casings arranged in the casing. The fixed member defines a plurality of interconnected fluid chambers, a plurality of impellers mounted on the drive shaft and is arranged relative to the solid member, so that each impeller delivers compressed fluid to the corresponding fluid chamber, and a bypass groove is provided in two The fluid chambers extend to help fluid flow between these air chambers without the need for pressure, and a controller for controlling fluid flow through the bypass tank. Compressed fluid can thus be transported between fluid chambers without the need for pressurization, which helps a larger upstream pumping stage to operate at full speed 'does not cause the pumped fluid to be pressurized above atmospheric pressure . Therefore, it is better to configure the control device to open the bypass groove under the influence of the pressure difference between the two fluid chambers, and especially when the pressure of one of the two fluid chambers located upstream is greater than that in the Wait for the pressure of one of the two fluid chambers located downstream. In a preferred embodiment, the two fluid chambers are adjacent fluid chambers of the compressor mechanism, although one or more other fluid chambers may alternatively separate the two fluid chambers. For example, one of the fluid chambers may be the first (the lowest pressure fluid chamber of the pumping mechanism), and the other fluid chamber is the last (the highest pressure of the pumping mechanism 98670.doc -10- 200528640). How the bypass groove can be properly passed through the control device provided between the fluid chambers. It preferably includes a valve. The pressurized fluid can be in a closed position and two: a valve member can be appropriately passed through the door member. : Displacement: Here: The fluid chamber is controlled to flow the fluid from the bypass groove into the two. It is better that the mechanism includes the opposite for each fluid chamber: the bypass groove, which is adjacent to the fluid chamber The device is connected between the downstream fluid chamber and a device for controlling the flow of fluid through each bypass tank. When the specific flow rate of a certain stage of the fluid flowing through the compressor mechanism is relatively low, the centrifugal compressor The mechanism is prone to the influence of the pumped fluid. The surge itself appears as a fluid bottle elbow extension / claw entering the compressor blade, which is a fixed member arranged in the casing and defines a plurality of interconnected fluid chambers, a plurality of Installed in the drive The impeller on the moving shaft is arranged relative to the fixed member, so that each impeller delivers compressed fluid to the corresponding fluid chamber, and the surge control device is used to control the surge in the multi-stage centrifugal compressor mechanism. The device preferably includes a stream for conveying fluid to each fluid wheel, which negatively affects the operating efficiency of the vacuum pump and may indeed damage the pump in extreme cases. In summary, the mechanism preferably includes a wave induction control device. It is used to control the thirsty waves in the compressor mechanism. Therefore, in a further aspect of the present invention, the present invention provides a multi-stage centrifugal compressor mechanism, which includes a casing rotatably mounted in the casing-drive A shaft, a plurality of devices, and a device for controlling the rate of fluid flow into each fluid chamber. In a specific example, the conveying device is configured to rotate such as 98670.doc 200528640 is maintained at a high Fli H 4 inert gas is streamed to each fluid chamber at the rate at which the surge occurs. In another example, the 'round wheel device is configured to rotate a stream of compressed fluid to each fluid chamber. • Body-to-two in any mode—the flow rate transportable device that flows through the I-reduction mechanism is configured to transport the I-condensate fluid to the Γ-fluid chamber from the downstream fluid chamber. The fluid k-path of a fluid chamber (different from other bypass grooves) extends between the fluid chamber and the adjacent downstream fluid chamber. These fluid passages are better coaxial types. Eight are used to control fluid flow The control device of the inlet-fluid chamber preferably includes a valve device. The valve has 4 people + a χ cascade valve is used to control the fluid flow through the corresponding fluid path, or a short tube is used to control the fluid Flow through each fluid path. The device “is installed at least partially in the air chamber, eliminating the need to provide external pipe connections. Valve devices can be individually controlled by: ': In order to control the valve device, pressure sensing can be provided Device, "the body's roof force '-the signal from the entrance sensor is & supplied outside the control system or alternatively, the opening and closing of the second device. This .4 benefit can be set inside the pump mechanism to monitor the changes in room force in the material structure, and therefore to detect bursts of soup waves. Each of the impellers preferably has a plurality of blades or blades extending from one side to the other side of the inner ring and the outer side of the impeller. Each blade follows a curved path better! . In order to help make the corresponding tablets of the corresponding shell components :: a factory fixed component preferably contains a coupon-body compressed by the compressor mechanism, and then heated. In order to cool the "out stage" pumped by the I shrink mechanism, the mechanism preferably includes 98670.doc 200528640 clothing for cooling each fixed component. For example, a plurality of cooling can be provided on one side of the cooling component. Fins. Alternatively or in addition, the cooling device may include a wave supply for supplying a refrigerant flow to each fixed member. This may provide a direct cold portion of both the cooling fins (where provided) and the fixed plates. This cooling fin can be provided on the fixed plate and the diffusion plate] for guiding a stream of compressed fluid from an impeller to the fluid chamber, so that the fin can also provide cooling for the diffusion plate. A vacuum effect of the compressor mechanism as described above. If the pump is operated at a relatively high pressure for more than a relatively long time, the compressor mechanism may generate excessive heat, such as if the pump is used to evacuate the loading interlocking vacuum chamber. The door was accidentally kept open. In order to prevent the pump from ever going ... it depends on the temperature of the pump, and the rotation speed of the compressor mechanism will change depending on the degree of lambda. This can help reduce the pump in the case of overheating Speed, Therefore, the temperature in the pump is reduced, and improper operation at high speeds is avoided for more than a relatively long time. Therefore, the 'pump preferably includes a device for monitoring the temperature of the pump, and includes controlling the rotation speed of the shaft according to the monitored temperature The monitoring device may be suitably provided with a suitable temperature sensor, such as a pyroelectric surface provided inside or near the housing. A controller for controlling the motor to drive the drive shaft may provide this Control device. Β In order to cool the housing (to which heat may be transferred by the fluid taken), an external cooling system, such as a cooling jacket that extends at least a part of the compressor mechanism, is also available. When the pump is used as the same Pre-pumping pumps: ¾¾ 4 丄: cr The pre-pumping pump can be composed of such a multi-stage centrifugal 98670.doc 200528640 compressor mechanism combined with any appropriate pressure pump. These pressure pumps may be Pumps such as the multi-stage centrifugal compressor mechanism downstream of the molecular towing mechanism provide that the number of stages (eg, 2 stages) in the compressor mechanism of the booster pump is less than the pre-pumping The number of stages (for example, 6 or 7). Instead, the traditional combination of pressure pump and pre-pump can be replaced by a single pump. This pump contains multiple stages downstream of the multi-stage (for example, 4) molecular dragging mechanism. (Eg 6 or 7 stages) centrifugal compressor mechanism. The molecular drag mechanism preferably includes a multi-stage Hoiweek mechanism 'which has multiple trough trough stages configured like multiple spiral windings. Arranged in series or parallel or a combination of the two to have the maximum pumping volume. In order to minimize the length of the pump, the molecular drag mechanism preferably surrounds at least one of the motors used to rotate the drive shaft. For example, ▲ When the knife drag extraction mechanism is a Hawick mechanism, the rotor element of a molecular drag extraction mechanism generally includes a cylinder installed to rotate with the rotor of the compressor mechanism, and the cylinder may at least partially surround the motor. In a further aspect of the present invention, the vacuum pump provided herein includes a multi-stage centrifugal compressor mechanism, which includes a plurality of rotor elements mounted on a rotatable mounting drive shaft, and a molecular drag on the upstream side thereof. A mechanism comprising at least one rotor element mounted on a drive shaft, wherein the at least one rotor element of the molecular drag mechanism at least partially surrounds a motor for rotating the drive shaft. To quickly pump down the chamber, as described in 刖, the pump may be provided with one or more valve devices to assist the bypass of the impeller of the multistage centrifugal compressor mechanism by the compressed fluid
98670.doc 卜泵取，即使當壓 藉由此等設計，預 200528640 抽泵可成為限制流體流過泵配置。因此，在一較佳的配置 中，一流體旁通導管被連接在來自於加壓泵之出口與來自 於預抽泵之出口之間，附加用於控制流體流過旁通之裝 置。此等配置可提供用於任何加壓泵與預抽泵之組合。 【實施方式】 圖1顯示一適用於抽空一加載互鎖真空室之真空泵1〇，包 含一具有三個組件14、16、及18之外殼12。一泵1〇之入口 20位於外殼12之第一組件14處、及一泵1〇之出口 21位於外 殼12之第三組件is處。 外殼12之第一組件i 4安裝有一多級分子拖矣抽氣機構 22。如Η 1舉例’在此具體實例中分子拖曳抽氣機構為四級 哈威克機構22所提供，然可提供任一適當的系級數。哈威 克機構22之轉子包含二個同中心安裝在盤狀葉輪^上之碳 、戴、隹Α*缸24、26 ’如圖所不的成一體被安裝在可旋轉軸％ 上。軸3〇以無潤滑劑軸承（未於圖中示出）被支撐在每一端， 較佳的為磁性軸承，且為外殼12之第三組件18所安裝之馬 達3 1驅動。 哈威克機構22之每一汽缸24、26具有平滑的内表或外 表。哈威克機構之靜子包含複數個同轉子汽缸24、％中心 ^配置且環繞之汽叙32、34、與36，最外側汽缸％係以外 双1—2之第一組件14所提供。螺旋形凹縫被形成在最内側靜 子汽缸32之外表上，中間靜子汽缸34之内表與外表以及最 外側靜子汽缸36之内表界^出同軸螺旋形流體通道3卜 40、42、44’其承接來自於泵入口 2〇之流體且排出所泵取 98670.doc 200528640 壓縮流體經由形成在盤狀葉輪28中的開口 5〇流至出口埠 48 ° 外殼12之第二組件16可能以複數個同軸環圈心、⑽、 16c、16d、16e、及16f所適當的提供，且安裳一多級離心 式壓縮機機構52。在圖1顯示之具體實例中，壓縮機機構52 包含7個泵級。每一前6個泵級包含一相對應流體室58，每 -室界定在同軸地安裝在外殼12之第二組件16的内側壁面 上之相對應碟片60。在碟片60中的開縫62互連流體室58， 以有助於流體由哈威克機構22之出口埠48經由依次之每一 流體室5 8被輸送至泵的出口 21。 每一流體室58包括被安裝在軸3〇上之葉輪“樣式的轉 子。每一葉輪54具有複數個在葉輪54之上層表面（如圖 不）上的曲形刀片或葉片56。葉輪54為相對於碟片的所配 置，使得在使用期間可由每一葉輪54遞送壓縮流體至相對 應流體室5 8。 ^ 每一流體室58亦包括一似碟片擴散板片64，每一板片結 合有相對應環圈16a、16b、16c、16d、16e、及16f用於導引 壓縮流體由每一葉輪54徑向地向外流出。結果，壓縮流體 在流體室58之内以彎道樣式流動；在每一流體室58之内， 壓縮流體在界定出流體室之擴散板片64的上層表面與上層 碟片60之覆面較低表面之間所徑向地向外開始流動，且^ 著在位於擴散板片64之較低表面（如圖式）與較低碟片之覆 面上層表面之間所界定的流體室所徑向地向内流動。 每一擴散板片64包含被設置在其較低表面上之複數個冷 98670.doc 200528640 卻縛片66，用於冷卻壓縮流體。為了冷卻外殼12(將由壓縮 機機構52所泵取之流體傳送熱量至此），將提供一外部泵冷 卻系統（未於圖中示出），例如位於外殼12之大約至少第二 組件16處所延伸之一冷卻外套的樣式。 在使用中，馬達被致動以在高速中旋轉軸30，一般而言 在範圍由15,000至80,000 rpm之間。流體經由入口 20進入泵 10 ’且接著流過哈威克機構22與壓縮機機構52，在由泵10 之出口被排出前之壓力位於或大約在大氣壓力之下。藉由 圖1顯示之配置，一小於1 mbar之壓力（一般而言位於或大約 在0·1 mbar)，可在被連接至泵1〇的入口 2〇之加載互鎖真空 室所產生。 為了限制在壓縮機機構5 2之内在相對的低流動速率之下 產生湧浪，泵10附加有湧浪控制機構用於選擇性地增加流 體流過壓縮機機構52之一或多個泵級之速率。在圖丨顯示之 第一具體實例中，一流體埠68被設置在每一環圈i6a、16b、 16c、16d、I0e、及16f中，每一埠68徑向地延伸穿過環圈 可令流體串流被注入流體室58。流體串流可以適當的源所 提供。在第一範例中，鄰接泵級之流體埠68可經由一被設 置在泵10之一側邊的導管之配置所連接，導管包含一或多 個用於選擇性地開啟導管之閥門，可令由一泵級所泵取流 體由該級之流體埠68流至鄰接上游泵級之流體埠68，由是 增加流體流過入口至泵級之流動速率。在第二範例中，一 諸如氮氣或空氣之淨化用氣體流，可被選擇性地由適當的 源供應至一或多個流體埠68以增加流體流過一或多個泵級 98670.doc -17- 200528640 之速率。 圖2顯示之第三範例中’用於壓縮流體之通路啊被設置 在貫穿壓縮機機構52之驗，此外另加或替代的另提供流 體埠68通路70以形成在碟片6〇中的串列同袖開縫所界 定，碟片60同軸地被安裝在外殼12之第二組件⑽内側壁 面。設置短管閥74以選擇性地開啟與關閉開縫加控制廢 縮流體流過通路7〇。如圖所示，短管閥74可被造形以致閱 門74之移動，將造成全部開縫72被同時開啟以令壓縮流體 流過開縫72至鄰接上游杲級。另—實施例，短管㈣可被 造形，以致閥門74之移動將造成每一開縫74被開啟，接著 開始諸如連接壓縮機機構52之流出泵級的開縫74。 為了控制在此等三個範例中任一者的閥門，可設置一壓 力感測器以監視流體通過泵入口 2 〇之壓力。一來自於入口 感測器之信號可被供應至控制系統，其控制每一閥門之開 啟與關閉以限制湧浪之發生。此外或可替代為，壓力感測 器可被設置在泵10之内以監視在泵内之壓力變動。亦可使 用馬達電流以指示轴之扭力與電力，及由此預估入口壓力。 如圖1與圖2顯示之泵在大氣壓力或附近排出流體，每一 泵10應该是要適當的用於取代用以抽空一加載互鎖真空室 之傳統加壓泵及/或預抽泵。由於相對於傳統組合之加壓泵 與預抽泵的大小被降低，及由於降低相關於泵1 〇之噪音與 振動’泵10可能適當的被安裝在處理工具之側邊處。 藉由降低壓縮機機構52之級數，泵10可適當的如同加壓 泵被使用。圖3與4提出此等加壓泵1 〇〇之一具體實例。加壓 98670.doc -18- 200528640 泵包含一具有三個組件102、104、及106之外殼。一用於泵 100之入口 110被設置在外殼之第一組件102中，及一用於泵 100之出口 II2被設置在外殼之第三組件1〇6中。 外殼之第二組件104安裝有一多級分子拖曳抽氣機構 120。圖3顯示相似於圖1之泵1〇，分子拖曳抽氣機構係以一 四級哈威克機構120所提供，然可採用任一適當的泵級數。 哈威克機構120之轉子包含三個碳纖維汽缸122、124、126， 同中心的被安裝在盤狀葉輪128上，如圖所示的成一體被安 裝在可旋轉驅動軸130上。軸130以滾珠轴承132被支撐在每 一端’且為哈威克機構120之汽缸122、124、126所局部地 環繞之馬達134所驅動。 哈威克機構120之每一汽缸具有平滑的内表或外表。哈威 克機構120之靜子包含複數個同轉子汽紅I)]、124、126中 心所配置且環繞之汽紅136、138、與140，最外側汽缸36 係以安裝在外殼之第二組件104所提供（或舉例用）。螺旋形 凹縫被形成在最内側靜子汽缸136之外表上，中間靜子汽缸 138之内表與外表以及最外側靜子汽缸14〇之内表界定出同 軸螺旋形流體通道，其經由形成在盤狀葉輪128中的一或多 個開口 142承接來自於泵入口 11〇之流體，且排出所泵取壓 縮流體至出口蜂14 4。 外λ又之第一組件1〇6可能以複數個同軸環圈、 106c及lG6d所適當的提供，且安裝_多級離心式壓縮機 機構150在圖3、4顯不之具體實例中，壓縮機機構15〇包 各4個泵、級。每一前3個栗級包含一相對應流體室⑸，每一 98670.doc -19- 200528640 室界定在同軸地安裝在第二組件106之内側壁面上的相對 應碟片160之間。在碟片16〇中的開縫162互連流體室158， 以有助於流體由哈威克機構之出口埠144經由依次之每一 流體室158被輸送至果的出口 I〗〕。 每一流體室158包括被安裝在軸13〇上之葉輪154樣式的 轉子。每一葉輪54具有複數個在葉輪154之上層表面（如圖J 所示）上的曲形刀片或葉片156。葉輪154為相對於碟片16〇 所配置，使得在使用期間可由每一葉輪i 54遞送壓縮流體至 相對應流體室158。 每一流體室158亦包括一似碟片擴散板片164，每一板片 結合有相對應環圈l〇6a、l〇6b、l〇6c、106d用於導引壓縮 流體由每一葉輪154徑向地向外流出。結果，壓縮流體在流 體室158之内以彎道樣式流動；在每一流體室158之内，壓 縮流體在界定出流體室之擴散板片164的上層表面（如圖式） 與上層碟片160之覆面較低表面之間所徑向地向外開始流 動’且接著在位於擴散板片丨64之較低表面（如圖式）與較低 碟片160之覆面上層表面之間所界定的流體室所徑向地向 内流動。 每一擴散板片164可包含被設置在其較低表面上之複數 個冷卻鰭片（未於圖中示出），用於冷卻壓縮流體。為了冷卻 *、、、曰片’可經由界定在擴散板片1 64之較低表面（如圖式）與較 低碟片160之覆面上層表面之間的冷卻槽輸送冷媒。 在使用中，馬達被致動以在高速中旋轉軸13〇，一般而言 在範圍由15,000至80,000 rpm之間。流體經由入口 11〇進入 98670.doc -20- 200528640 泵100，且接著流過哈威克機構120與壓縮機機構15〇，在由 泵100之出口 112被排出前之壓力位於次大氣壓力。 相似於圖1所述之泵，可提供一湧浪控制機構以限制在壓 縮機機構内之湧浪。例如，圖4顯示可在每一環圈1〇以、 106b、及l〇6c中設置有一流體埠168，每一埠168徑向地延 伸穿過環圈可令一流體串流被注入一相對應流體室158 中。流體串流可以任何適當的源所提供。較佳的，此等機 構應該是要僅在一相對地低入口壓力下操作以在相對高入 口壓力下最大化流通量。 除了此等湧浪控制機構，亦可提供一添加的機構以有助 於快速向下泵取被附接於加壓泵1〇〇之入口 11〇的室，不會 造成壓縮機機構排出級之過度負荷。如圖4所示，一或多個 碟片160設置有旁通槽170，以有助於壓縮流體通過一鄰接 下游之流體室，不需要藉由葉輪154之壓縮。通道170為閥 門機構172所正常地關閉，在此具體實例之閥門機構為一對 在下游流體室158内安裝之具有共用托架的瓣閥。閥門機構 1 72可選擇性地被在相鄰接流體室15 §内之流體壓力差所開 啟’以致當在上游流體室的流體壓力為大於在下游流體室 的壓力時’開啟閥門以有助於流體在不需要加壓下可由上 游流體室流至下游流體室。 此有助於泵100在不需要加壓下可泵取氣體穿過壓縮機 機構150之一或多個較小的排出級，因此可避免以此等排出 級壓縮氣體達到高於大氣壓力，且因此防止避免此等級處 變成過高的負荷。 98670.doc -21 · 200528640 加壓泵100可結合任何適當的預抽泵所使用。圖5顯示使 用一多級離心式壓縮機機構之預抽泵200，其應該是適於結 合此等加壓泵或任何傳統加壓泵所使用。預抽泵2〇〇為相似 於圖1顯示之泵10，除了當流體進入預抽泵200時預抽泵2〇〇 不需要一拖曳機構，將較進入泵10時位於較高之壓力。換 句話說，預抽泵200包含用於承接來自於泵入口 220之多級 壓縮機機構252，且由泵出口 221在大氣壓力或附近排出所 泵取之流體。預抽泵200之壓縮機機構252為相似於栗1〇之 壓縮機機構52，因此在此文中不再詳細敘述。 在將附接於串列組合之加壓泵100與預抽泵2〇〇的室向下 泵取期間，隨著預抽泵200之泵機構，預抽泵2〇〇可限制室 之快速抽空’預抽粟200可能無法由加壓泵1 〇〇快速地泵取 '"IL體出。為了有助於至少將某些氣體由室被栗取以旁通 預抽泵200，圖6顯示可在流體相通於加壓系1〇〇之出口 J12 中以及在預抽果200之出口 221中設置有一外部旁通導管 250。旁通導管250較佳的包括一用於在高流出壓力下由加 壓泵100開啟導管250，以有助於”過量，，流體由加壓泵1〇〇流 出以旁通預抽泵200之旁通閥252。 接著參考圖7為防止將附裝加壓泵入口之室在系取向下 期間造成加壓泵100過熱，一泵1〇〇可附加有位於諸如在系 100之外殼内的溫度感測器300，用於輸出一信號至控制器 302以指示泵1〇〇外殼内之目前溫度。控制器3〇2反應於所接 收信號可發出一指令至泵100之馬達134以調整軸13〇之旋 轉速度。藉由降低泵之速度，可降低泵1〇〇外殼内之溫度。 98670.doc -22- 200528640 另一實施例，除了泵之速度控制隨泵溫度有關，泵之速度 控制亦隨輸送至泵之入口 110的氣體壓力所控制，其採用位 於靠近泵的入口之壓力感測器304。98670.doc Pumping, even when pressured by such designs, pre-200528640 pumps can be used to restrict fluid flow through the pump configuration. Therefore, in a preferred configuration, a fluid bypass conduit is connected between the outlet from the booster pump and the outlet from the pre-pump pump, and additional means for controlling the flow of fluid through the bypass. These configurations are available for any combination of booster and pre-pump pumps. [Embodiment] FIG. 1 shows a vacuum pump 10 suitable for evacuating a load-locking vacuum chamber, and includes a housing 12 having three components 14, 16, and 18. An inlet 20 of a pump 10 is located at the first component 14 of the casing 12, and an outlet 21 of a pump 10 is located at the third component is of the casing 12. The first component i 4 of the casing 12 is provided with a multi-stage molecular tow extraction mechanism 22. For example, "1", in this specific example, the molecular drag extraction mechanism is provided by the four-stage Harwick mechanism 22, but any appropriate number of systems can be provided. The rotor of the Hawick mechanism 22 includes two carbon, Dai, 隹 A * cylinders 24, 26 which are concentrically mounted on the disc-shaped impeller ^, and are mounted on the rotatable shaft% as shown in the figure. The shaft 30 is supported at each end by a lubricant-free bearing (not shown), preferably a magnetic bearing, and is driven by a motor 31 mounted on the third component 18 of the housing 12. Each of the cylinders 24, 26 of the Harwick mechanism 22 has a smooth inner or outer surface. The stator of the Harwick mechanism includes a plurality of cylinders with the same rotor 24, the center of the cylinder, and the surrounding cylinders 32, 34, and 36 are provided, and the outermost cylinder% is provided by the first component 14 of the double 1-2. Spiral grooves are formed on the outer surface of the innermost stator cylinder 32, the inner and outer surfaces of the middle stator cylinder 34 and the inner surface of the outermost stator cylinder 36. ^ Coaxial spiral fluid channels 3, 40, 42, 44 ' It receives the fluid from the pump inlet 20 and discharges the pumped 98670.doc 200528640. The compressed fluid flows through the opening 50 formed in the disc impeller 28 to the outlet port 48 °. The second component 16 of the casing 12 may be in multiples. Coaxial ring cores, ⑽, 16c, 16d, 16e, and 16f are provided as appropriate, and Anshang multi-stage centrifugal compressor mechanism 52 is provided. In the specific example shown in FIG. 1, the compressor mechanism 52 includes seven pump stages. Each of the first six pump stages includes a corresponding fluid chamber 58, each chamber defining a corresponding disc 60 coaxially mounted on the inner side wall surface of the second component 16 of the housing 12. Slots 62 in the disc 60 interconnect the fluid chambers 58 to facilitate fluid flow from the outlet port 48 of the Harwick mechanism 22 to each of the fluid chambers 58 in sequence to the pump outlet 21. Each fluid chamber 58 includes an impeller-style rotor mounted on a shaft 30. Each impeller 54 has a plurality of curved blades or blades 56 on the surface above the impeller 54 (not shown). The impeller 54 is Relative to the arrangement of the discs, during use the compressed fluid can be delivered by each impeller 54 to the corresponding fluid chamber 58. ^ Each fluid chamber 58 also includes a disc-like diffusion plate 64, and each plate is combined Corresponding rings 16a, 16b, 16c, 16d, 16e, and 16f are used to guide the compressed fluid to flow radially outward from each impeller 54. As a result, the compressed fluid flows in a curved pattern within the fluid chamber 58 ; Within each fluid chamber 58, the compressed fluid starts to flow radially outward between the upper surface of the diffusion plate 64 defining the fluid chamber and the lower surface of the upper surface of the upper plate 60, and ^ The fluid chamber defined between the lower surface (as shown in the figure) of the diffuser plate 64 and the upper surface of the upper surface of the lower plate flows radially inward. Each diffuser plate 64 includes Plural cold on low surface 98670.doc 200528640 but bound piece 66 For cooling compressed fluid. In order to cool the casing 12 (to which heat is transferred by the fluid pumped by the compressor mechanism 52), an external pump cooling system (not shown in the figure) will be provided, such as The second component 16 extends one of the cooling jacket styles. In use, the motor is actuated to rotate the shaft 30 at high speeds, generally in the range from 15,000 to 80,000 rpm. Fluid enters the pump 10 through inlet 20 ' And then flow through the Harwick mechanism 22 and the compressor mechanism 52, the pressure before being discharged from the outlet of the pump 10 is at or about atmospheric pressure. With the configuration shown in FIG. 1, a pressure of less than 1 mbar ( Generally located at or about 0.1 mbar) and can be generated in a load-locking vacuum chamber connected to the inlet 20 of the pump 10. To limit the relatively low flow rate within the compressor mechanism 5 2 When a surge is generated, a surge control mechanism is added to the pump 10 to selectively increase the rate of fluid flow through one or more pump stages of the compressor mechanism 52. In the first specific example shown in FIG. 丨, a fluid port 68 was Arranged in each ring i6a, 16b, 16c, 16d, 10e, and 16f, each port 68 extends radially through the ring to allow a fluid stream to be injected into the fluid chamber 58. The fluid stream can be sourced appropriately Provided. In a first example, the fluid port 68 adjacent to the pump stage may be connected via a configuration of a conduit disposed on one side of the pump 10, the conduit comprising one or more valves for selectively opening the conduit, The fluid pumped by a pump stage can be caused to flow from the fluid port 68 of the stage to the fluid port 68 adjacent to the upstream pump stage, thereby increasing the flow rate of the fluid through the inlet to the pump stage. In a second example, a fluid such as Nitrogen or air purification gas streams may be selectively supplied from one or more fluid ports 68 from an appropriate source to increase the rate of fluid flow through one or more pump stages 98670.doc -17- 200528640. In the third example shown in FIG. 2, the “path for compressing fluid” is provided to pass through the compressor mechanism 52, and a fluid port 68 path 70 is additionally or alternatively provided to form a string in the disc 60. The rows are defined by sleeve slits, and the disc 60 is coaxially mounted on the inner wall surface of the second component ⑽ of the casing 12. A spool valve 74 is provided to selectively open and close the slits to control the flow of the waste fluid through the passage 70. As shown in the figure, the short tube valve 74 can be shaped so that the movement of the reading door 74 will cause all the slits 72 to be opened at the same time so that the compressed fluid flows through the slits 72 to the adjacent upstream stage. Alternatively, in the embodiment, the short tube ㈣ may be shaped so that the movement of the valve 74 will cause each slit 74 to be opened, and then the slit 74 such as the outflow pump stage connected to the compressor mechanism 52 will start. To control the valve in any of these three examples, a pressure sensor may be provided to monitor the pressure of the fluid through the pump inlet 2o. A signal from the inlet sensor can be supplied to the control system, which controls the opening and closing of each valve to limit the occurrence of surges. Additionally or alternatively, a pressure sensor may be provided within the pump 10 to monitor pressure variations within the pump. The motor current can also be used to indicate the torque and power of the shaft, and the inlet pressure can be estimated from it. The pumps shown in Figures 1 and 2 discharge fluid at or near atmospheric pressure. Each pump 10 should be a suitable replacement for the conventional pressurized pump and / or pre-pump used to evacuate a load-locking vacuum chamber. . Due to the reduced size of the booster pump and the pre-pump compared to the conventional combination, and due to the reduction of the noise and vibration related to the pump 10 ', the pump 10 may be appropriately installed at the side of the processing tool. By reducing the number of stages of the compressor mechanism 52, the pump 10 can be appropriately used as a pressure pump. Figures 3 and 4 present a specific example of such a pressure pump 100. Pressurized 98670.doc -18- 200528640 The pump includes a housing with three components 102, 104, and 106. An inlet 110 for the pump 100 is provided in the first module 102 of the housing, and an outlet II2 for the pump 100 is provided in the third module 106 of the housing. The second component 104 of the housing is provided with a multi-stage molecular towing and suction mechanism 120. Fig. 3 shows a pump 10 similar to Fig. 1. The molecular drag pumping mechanism is provided by a four-stage Harwick mechanism 120, but any suitable number of pump stages may be used. The rotor of the Hawick mechanism 120 includes three carbon fiber cylinders 122, 124, and 126, which are concentrically mounted on the disk-shaped impeller 128, and are integrally mounted on the rotatable drive shaft 130 as shown in the figure. The shaft 130 is supported at each end by ball bearings 132 and is driven by a motor 134 which is partially surrounded by the cylinders 122, 124, 126 of the Harwick mechanism 120. Each cylinder of the Harwick mechanism 120 has a smooth inner or outer surface. The stator of the Harwick mechanism 120 includes a plurality of co-rotor steam red I)], 124, 126, and the steam red 136, 138, and 140 arranged around the center, and the outermost cylinder 36 is connected to the second component 104 of the casing Provided (or used for example). A spiral groove is formed on the outer surface of the innermost stator cylinder 136, the inner surface and outer surface of the middle stator cylinder 138, and the inner surface of the outermost stator cylinder 14o define a coaxial helical fluid channel, which is formed by a disc-shaped impeller One or more openings 142 in 128 receive the fluid from the pump inlet 110 and discharge the pumped compressed fluid to the outlet bee 14 4. Outer lambda and the first component 106 may be provided as appropriate by a plurality of coaxial rings, 106c and 1G6d, and the installation_multi-stage centrifugal compressor mechanism 150 is compressed in the specific example shown in Figs. 3 and 4. Machine mechanism 150 packs of 4 pumps and stages each. Each of the first three pump stages includes a corresponding fluid chamber 每一. Each 98670.doc -19-200528640 chamber is defined between corresponding disks 160 mounted coaxially on the inner side wall surface of the second module 106. Slots 162 in the disk 160 interconnect the fluid chambers 158 to help fluid be delivered from the outlet port 144 of the Harwick mechanism to each of the fluid chambers 158 through the successive fluid chambers 158]. Each fluid chamber 158 includes a rotor in the form of an impeller 154 mounted on a shaft 130. Each impeller 54 has a plurality of curved blades or blades 156 on the surface above the impeller 154 (as shown in FIG. J). The impeller 154 is configured relative to the disk 16 so that a compressed fluid can be delivered by each impeller i 54 to a corresponding fluid chamber 158 during use. Each fluid chamber 158 also includes a disk-like diffusion plate 164, and each plate is combined with a corresponding ring 106a, 106b, 106c, 106d for guiding compressed fluid from each impeller 154 Outflow radially. As a result, the compressed fluid flows in a curved pattern within the fluid chambers 158; within each fluid chamber 158, the compressed fluid is on the upper surface (as shown in the figure) and the upper disc 160 of the diffusion plate 164 defining the fluid chamber The fluid begins to flow radially outward between the lower surfaces of the covering surface, and then the fluid defined between the lower surface of the diffuser plate 64 (as shown in the figure) and the upper surface of the covering surface of the lower plate 160 The chamber flows radially inward. Each diffuser plate 164 may include a plurality of cooling fins (not shown in the figure) disposed on its lower surface for cooling the compressed fluid. For cooling, the cooling medium can be conveyed through a cooling groove defined between the lower surface (as shown in the figure) of the diffusion plate 1 64 and the upper surface of the upper surface of the lower plate 160. In use, the motor is actuated to rotate the shaft 13 at high speed, typically in the range from 15,000 to 80,000 rpm. The fluid enters the 98670.doc -20-200528640 pump 100 through the inlet 11 and then flows through the Harwick mechanism 120 and the compressor mechanism 15. The pressure before being discharged from the outlet 112 of the pump 100 is at a subatmospheric pressure. Similar to the pump described in Figure 1, a surge control mechanism can be provided to limit the surge in the compressor mechanism. For example, FIG. 4 shows that a fluid port 168 may be provided in each of the rings 10, 106b, and 106c. Each port 168 extends radially through the ring to allow a fluid stream to be injected into a corresponding one. Fluid chamber 158. The fluid stream can be provided by any suitable source. Preferably, such mechanisms should be operated only at a relatively low inlet pressure to maximize throughput at a relatively high inlet pressure. In addition to these surge control mechanisms, an additional mechanism can be provided to help quickly pump down the chamber attached to the inlet 110 of the booster pump 100 without causing the compressor mechanism to discharge Overloaded. As shown in FIG. 4, one or more discs 160 are provided with bypass grooves 170 to help the compressed fluid pass through a fluid chamber adjacent to the downstream without the need for compression by the impeller 154. The passage 170 is normally closed by the valve mechanism 172. The valve mechanism in this specific example is a pair of flap valves having a common bracket installed in the downstream fluid chamber 158. The valve mechanism 1 72 may be selectively opened by the fluid pressure difference within the adjacent fluid chamber 15 § so that when the fluid pressure in the upstream fluid chamber is greater than the pressure in the downstream fluid chamber, 'the valve is opened to help Fluid can flow from the upstream fluid chamber to the downstream fluid chamber without the need for pressurization. This helps the pump 100 to pump gas through one or more of the smaller discharge stages of the compressor mechanism 150 without the need for pressurization, so that the compressed gas at such discharge stages can be prevented from reaching higher than atmospheric pressure, and It is therefore prevented from becoming too high a load at this level. 98670.doc -21 · 200528640 The booster pump 100 can be used in conjunction with any suitable pre-pump. Fig. 5 shows a pre-pump 200 using a multi-stage centrifugal compressor mechanism, which should be suitable for use with such pressure pumps or any conventional pressure pump. The pre-pump 200 is similar to the pump 10 shown in FIG. 1, except that when the fluid enters the pre-pump 200, the pre-pump 200 does not need a towing mechanism and will be at a higher pressure than when it enters the pump 10. In other words, the pre-pump 200 includes a multi-stage compressor mechanism 252 for receiving from the pump inlet 220, and the pumped fluid is discharged from the pump outlet 221 at or near atmospheric pressure. The compressor mechanism 252 of the pre-pump 200 is similar to the compressor mechanism 52 of the pump 10, and therefore will not be described in detail herein. During the downward pumping of the chambers of the booster pump 100 and the pre-pump 200 attached to the tandem combination, with the pump mechanism of the pre-pump 200, the pre-pump 200 can limit the rapid evacuation of the chamber 'Pre-pumping millet 200 may not be pumped quickly by the booster pump 100' " IL. In order to help at least some gases be pumped from the chamber to bypass the pre-pump pump 200, FIG. 6 shows that the fluid can be communicated in the outlet J12 of the pressurized system 100 and in the outlet 221 of the pre-pump 200 An external bypass conduit 250 is provided. The bypass conduit 250 preferably includes a conduit 250 for opening the pressure pump 100 at a high outflow pressure to help "overflow." The fluid flows from the pressure pump 100 to bypass the pre-pump 200. Bypass valve 252. Next, referring to FIG. 7, in order to prevent the pressure pump 100 from overheating during the orientation of the chamber to which the pressure pump inlet is attached, a pump 100 may be additionally provided with a temperature such as in the housing of the system 100. The sensor 300 is used to output a signal to the controller 302 to indicate the current temperature in the casing of the pump 100. In response to the received signal, the controller 300 can send a command to the motor 134 of the pump 100 to adjust the shaft 13 〇 Rotational speed. By reducing the speed of the pump, the temperature in the casing of the pump 100 can be reduced. 98670.doc -22- 200528640 Another embodiment, in addition to the speed control of the pump is related to the temperature of the pump, the speed control of the pump is also Controlled by the pressure of the gas delivered to the inlet 110 of the pump, it employs a pressure sensor 304 located near the inlet of the pump.
摘要而言’本發明揭示二種用於抽空一加載互鎖真空室 之真空抽氣配置。在第一具體實例中，一單一泵包含有一 多級分子拖良級及一多級離心式壓縮機機構，可在大氣壓 力下排出所泵取流體。在第二具體實例中，一加壓泵與一 預抽泵成串列設置。該加壓泵係相似於第一種配置之泵， 但減少壓縮機機構之級數。該預抽泵亦包含一多級離1式 1%機機構，可在大氣壓力下排出所絲流體。此等配置 可降低相關於傳統加載互鎖真空室真μ之噪音、大小、 與振動程度。 【圖式簡單說明】 本务月之U特性將參考提供範例之伴隨圖式說明，其 圖1為貫穿一真空$ +始In summary, the present invention discloses two vacuum evacuation configurations for evacuating a loading interlocking vacuum chamber. In a first specific example, a single pump includes a multi-stage molecular drag stage and a multi-stage centrifugal compressor mechanism, which can discharge the pumped fluid under atmospheric pressure. In a second specific example, a booster pump and a pre-pump are arranged in series. The booster pump is similar to the pump of the first configuration, but reduces the number of stages of the compressor mechanism. The pre-suction pump also includes a multi-stage 1 type 1% machine mechanism, which can discharge the silk fluid at atmospheric pressure. These configurations reduce the noise, size, and vibration associated with the true μ of a conventional load-locked vacuum chamber. [Schematic description] U-characteristics of this month will be referred to the accompanying diagram description of the provided example, which is shown in Figure 1.
"7之第一具體實例的橫切面圖； 圖2為貫穿一直处 卜 一二7之第二具體實例的橫切面圖，其相 具有不同的湯浪控制機構； 、 二為=加壓果之具體實例的橫切面圖，其相似於 丄1一錢夕壓縮機級數； 圖4為圖3之部分樺 ”刀面的放大視圖； 圖5為貫穿一預抽泵 1但無拖曳機構· 具體實例的橫切面圖，其相似於 圖6為在一抽氣機配 <閥門配置的概要圖，其包含與 98670.doc -23- 200528640 預抽泵串接之加壓泵；及 圖7為一示意圖顯示用於控制加壓泵之速度的概要圖。 【主要元件符號說明】 10 泵 12 外殼 14 組件 16 組件 16, 16a〜f 環圈 18 組件 20 入口 21 出口 22 多級分子拖曳抽氣機構 24 汽缸 26 汽缸 28 盤狀葉輪 30 軸 31 馬達 32 汽缸 34 汽缸 36 汽缸 38 流體通道 40 流體通道 42 流體通道 44 流體通道 98670.doc - 24 - 200528640 48 出口埠 50 開口 52 多級離心式壓縮機機構 54 葉輪 56 曲形刀片或葉片 58 流體室 60 碟片 62 開縫 64 擴散板片 66 冷卻鰭片 68 流體埠 68 埠 70 通路 72 開縫 74 短管閥 74 開縫 74 閥門 100 泵 102 組件 104 組件 106 組件 106a，106b，106c，106d 環圈" A cross-sectional view of the first specific example of 7; FIG. 2 is a cross-sectional view of the second specific example running through 127, with phases having different soup wave control mechanisms; A cross-sectional view of a specific example, which is similar to the stage of the compressor of Fig. 1; Figure 4 is an enlarged view of a part of the birch "blade surface of Figure 3; Figure 5 is a pre-pump pump 1 without a drag mechanism. A cross-sectional view of a specific example, which is similar to FIG. 6 is a schematic diagram of a valve configuration of an air extractor, including a pressure pump connected in series with 98670.doc -23- 200528640 pre-pump pump; and FIG. 7 It is a schematic diagram showing the outline for controlling the speed of the booster pump. [Description of the symbols of the main components] 10 Pump 12 Housing 14 Module 16 Module 16, 16a ~ f Ring 18 Module 20 Inlet 21 Outlet 22 Multistage molecular drag pumping Mechanism 24 Cylinder 26 Cylinder 28 Disc-shaped impeller 30 Shaft 31 Motor 32 Cylinder 34 Cylinder 36 Cylinder 38 Fluid channel 40 Fluid channel 42 Fluid channel 44 Fluid channel 98670.doc-24-200528640 48 Outlet port 50 Opening 52 Multi-stage centrifugal compression Machine mechanism 54 Impeller 56 Curved blade or blade 58 Fluid chamber 60 Disc 62 Slot 64 Diffuser plate 66 Cooling fin 68 Fluid port 68 Port 70 Passage 72 Slot 74 Spool valve 74 Slot 74 Valve 100 Pump 102 Assembly 104 component 106 component 106a, 106b, 106c, 106d
110 入口 112 出口 98670.doc -25- 200528640 120 多級分子拖矣抽氣機構 122 汽缸 124 汽缸 126 汽缸 128 盤狀葉輪 130 軸 132 滾珠軸承 134 馬達 136 汽缸 138 汽缸 140 汽缸 140 汽缸 142 開口 144 出口埠 150 壓縮機 154 葉輪 156 曲形刀片或葉片 158 流體室 160 碟片 162 開縫 164 擴散板片 168 流體埠 170 通道 172 閥門機構110 Inlet 112 Outlet 98670.doc -25- 200528640 120 Multi-stage molecular tug-pumping mechanism 122 Cylinder 124 Cylinder 126 Cylinder 128 Disc impeller 130 Shaft 132 Ball bearing 134 Motor 136 Cylinder 138 Cylinder 140 Cylinder 140 Cylinder 142 Opening 144 Exit port 150 Compressor 154 Impeller 156 Curved blade or vane 158 Fluid chamber 160 Disc 162 Slot 164 Diffuser plate 168 Fluid port 170 Channel 172 Valve mechanism
98670.doc -26- 200528640 200 預抽泵 220 泵入口 221 出π 250 導管 252 壓縮機 300 溫度感測器 302 控制器 304 壓力感測器 98670.doc98670.doc -26- 200528640 200 pre-pump 220 pump inlet 221 outlet π 250 conduit 252 compressor 300 temperature sensor 302 controller 304 pressure sensor 98670.doc