KR102402862B1 - 나노구조화된 물품 - Google Patents

나노구조화된 물품 Download PDF

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Publication number
KR102402862B1
KR102402862B1 KR1020197012170A KR20197012170A KR102402862B1 KR 102402862 B1 KR102402862 B1 KR 102402862B1 KR 1020197012170 A KR1020197012170 A KR 1020197012170A KR 20197012170 A KR20197012170 A KR 20197012170A KR 102402862 B1 KR102402862 B1 KR 102402862B1
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South Korea
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layer
nanostructured
wavenumber
product
pillars
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Expired - Fee Related
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KR1020197012170A
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English (en)
Korean (ko)
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KR20190063470A (ko
Inventor
니콜라스 씨 에릭슨
모제스 엠 데이비드
샤오구앙 순
마노즈 니르말
헨 사이코라
후이 루오
사뮤엘 제이 카펜터
질리언 엠 넬슨
저스틴 피 메이어
버트 티 치엔
데이비드 제이 로웨
로버트 엘 브로트
데이비드 지 프레이어
히아신스 엘 레추가
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쓰리엠 이노베이티브 프로퍼티즈 컴파니
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Publication of KR20190063470A publication Critical patent/KR20190063470A/ko
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    • H01L51/5237
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/875Arrangements for extracting light from the devices
    • H10K59/879Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82BNANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B1/00Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B1/001Devices without movable or flexible elements
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • H01L27/32
    • H01L51/56
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/85Arrangements for extracting light from the devices
    • H10K50/858Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00Manufacture or treatment of microstructural devices or systems
    • B81C2201/01Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147Film patterning
    • B81C2201/0149Forming nanoscale microstructures using auto-arranging or self-assembling material
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80Constructional details
    • H10K59/87Passivation; Containers; Encapsulations
    • H10K59/873Encapsulations
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/233Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Laminated Bodies (AREA)
  • Electroluminescent Light Sources (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
KR1020197012170A 2016-10-28 2017-10-17 나노구조화된 물품 Expired - Fee Related KR102402862B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662414127P 2016-10-28 2016-10-28
US62/414,127 2016-10-28
PCT/US2017/056846 WO2018080830A1 (en) 2016-10-28 2017-10-17 Nanostructured article

Publications (2)

Publication Number Publication Date
KR20190063470A KR20190063470A (ko) 2019-06-07
KR102402862B1 true KR102402862B1 (ko) 2022-05-27

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KR1020197012170A Expired - Fee Related KR102402862B1 (ko) 2016-10-28 2017-10-17 나노구조화된 물품

Country Status (7)

Country Link
US (1) US10756306B2 (https=)
EP (1) EP3533090A1 (https=)
JP (1) JP7040864B2 (https=)
KR (1) KR102402862B1 (https=)
CN (1) CN110178242B (https=)
TW (1) TW201825385A (https=)
WO (1) WO2018080830A1 (https=)

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KR20200133803A (ko) 2018-04-18 2020-11-30 쓰리엠 이노베이티브 프로퍼티즈 컴파니 색보정 구성요소를 갖는 유기 발광 다이오드 디스플레이 및 이의 제조 방법
CN112585085A (zh) * 2018-08-06 2021-03-30 康宁股份有限公司 聚合水凝胶纳米结构阵列及其用途
KR20210073604A (ko) 2018-11-09 2021-06-18 쓰리엠 이노베이티브 프로퍼티즈 컴파니 나노구조화된 광학 필름 및 중간체
US10993318B2 (en) * 2018-11-24 2021-04-27 Nova Engineering Films, Inc. Flexible polymeric film including reinforcement layer
WO2020208671A1 (ja) * 2019-04-08 2020-10-15 シャープ株式会社 表示デバイス
WO2020212777A1 (en) 2019-04-18 2020-10-22 3M Innovative Properties Company Organic light emitting diode display with color-correction component
CN113966357B (zh) 2019-05-08 2023-12-22 3M创新有限公司 纳米结构化制品
CN114391188A (zh) 2019-09-18 2022-04-22 3M创新有限公司 包括纳米结构化表面和封闭空隙的制品及其制备方法
CN114829986B (zh) 2019-12-02 2025-05-16 3M创新有限公司 光学超表面膜
EP4143619A4 (en) * 2020-04-28 2024-05-29 3M Innovative Properties Company ARTICLES WITH NANOSTRUCTURED SURFACES AND ENCLOSED VOIDS
US12461276B2 (en) 2020-05-01 2025-11-04 3M Innovative Properties Company Reflective optical metasurface films
US12297367B2 (en) 2020-08-27 2025-05-13 Applied Materials, Inc. Encapsulation materials for flat optical devices
FR3122523B1 (fr) * 2021-04-30 2023-06-09 Commissariat Energie Atomique Procede de structuration de surface hybride par gravure plasma
WO2023023207A1 (en) * 2021-08-17 2023-02-23 3Dfortify Inc. Thermally conductive dielectric photopolymer formulations compatible with vat polymerization additive manufacturing
WO2023073495A1 (en) * 2021-10-29 2023-05-04 3M Innovative Properties Company Light control film
KR20230086003A (ko) * 2021-12-07 2023-06-15 삼성디스플레이 주식회사 표시 장치 및 그 제조 방법
KR20230099128A (ko) * 2021-12-27 2023-07-04 엘지디스플레이 주식회사 표시장치
JP7835587B2 (ja) * 2022-03-22 2026-03-25 株式会社Screenホールディングス 基板乾燥方法と基板処理方法
US12055737B2 (en) * 2022-05-18 2024-08-06 GE Precision Healthcare LLC Aligned and stacked high-aspect ratio metallized structures
CN115185026A (zh) * 2022-07-12 2022-10-14 Tcl华星光电技术有限公司 广视角光学膜及其制作方法、液晶显示装置

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Publication number Publication date
KR20190063470A (ko) 2019-06-07
US20190386251A1 (en) 2019-12-19
WO2018080830A1 (en) 2018-05-03
JP2020500329A (ja) 2020-01-09
JP7040864B2 (ja) 2022-03-23
CN110178242B (zh) 2022-01-11
TW201825385A (zh) 2018-07-16
CN110178242A (zh) 2019-08-27
US10756306B2 (en) 2020-08-25
EP3533090A1 (en) 2019-09-04

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