CN110178242B - 纳米结构化制品 - Google Patents

纳米结构化制品 Download PDF

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Publication number
CN110178242B
CN110178242B CN201780066875.3A CN201780066875A CN110178242B CN 110178242 B CN110178242 B CN 110178242B CN 201780066875 A CN201780066875 A CN 201780066875A CN 110178242 B CN110178242 B CN 110178242B
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China
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layer
nanostructured
psd
index
wavenumber
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Chinese (zh)
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CN110178242A (zh
Inventor
尼古拉斯·C·埃里克森
摩西·M·戴维
孙晓光
马诺耶·尼马尔
黑恩·希科劳
罗慧
赛缪尔·J·卡彭特
吉利安·M·纳尔森
贾斯廷·P·迈尔
钱之华
戴维·J·罗韦
罗伯特·L·布劳特
戴维·G·弗赖尔
海厄森斯·L·莱丘加
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3M Innovative Properties Co
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3M Innovative Properties Co
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Publication of CN110178242A publication Critical patent/CN110178242A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00031—Regular or irregular arrays of nanoscale structures, e.g. etch mask layer
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/875—Arrangements for extracting light from the devices
    • H10K59/879—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
    • B82B1/00—Nanostructures formed by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
    • B82B1/001—Devices without movable or flexible elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/80—Constructional details
    • H10K50/85—Arrangements for extracting light from the devices
    • H10K50/858—Arrangements for extracting light from the devices comprising refractive means, e.g. lenses
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0147—Film patterning
    • B81C2201/0149—Forming nanoscale microstructures using auto-arranging or self-assembling material
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/87—Passivation; Containers; Encapsulations
    • H10K59/873—Encapsulations
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H10K71/233—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers by photolithographic etching

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Manufacturing & Machinery (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Laminated Bodies (AREA)
  • Electroluminescent Light Sources (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
CN201780066875.3A 2016-10-28 2017-10-17 纳米结构化制品 Active CN110178242B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201662414127P 2016-10-28 2016-10-28
US62/414,127 2016-10-28
PCT/US2017/056846 WO2018080830A1 (en) 2016-10-28 2017-10-17 Nanostructured article

Publications (2)

Publication Number Publication Date
CN110178242A CN110178242A (zh) 2019-08-27
CN110178242B true CN110178242B (zh) 2022-01-11

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201780066875.3A Active CN110178242B (zh) 2016-10-28 2017-10-17 纳米结构化制品

Country Status (7)

Country Link
US (1) US10756306B2 (https=)
EP (1) EP3533090A1 (https=)
JP (1) JP7040864B2 (https=)
KR (1) KR102402862B1 (https=)
CN (1) CN110178242B (https=)
TW (1) TW201825385A (https=)
WO (1) WO2018080830A1 (https=)

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KR20210073604A (ko) 2018-11-09 2021-06-18 쓰리엠 이노베이티브 프로퍼티즈 컴파니 나노구조화된 광학 필름 및 중간체
US10993318B2 (en) * 2018-11-24 2021-04-27 Nova Engineering Films, Inc. Flexible polymeric film including reinforcement layer
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CN113966357B (zh) 2019-05-08 2023-12-22 3M创新有限公司 纳米结构化制品
CN114391188A (zh) 2019-09-18 2022-04-22 3M创新有限公司 包括纳米结构化表面和封闭空隙的制品及其制备方法
CN114829986B (zh) 2019-12-02 2025-05-16 3M创新有限公司 光学超表面膜
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WO2023023207A1 (en) * 2021-08-17 2023-02-23 3Dfortify Inc. Thermally conductive dielectric photopolymer formulations compatible with vat polymerization additive manufacturing
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KR20230099128A (ko) * 2021-12-27 2023-07-04 엘지디스플레이 주식회사 표시장치
JP7835587B2 (ja) * 2022-03-22 2026-03-25 株式会社Ｓｃｒｅｅｎホールディングス 基板乾燥方法と基板処理方法
US12055737B2 (en) * 2022-05-18 2024-08-06 GE Precision Healthcare LLC Aligned and stacked high-aspect ratio metallized structures
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Also Published As

Publication number Publication date
KR20190063470A (ko) 2019-06-07
KR102402862B1 (ko) 2022-05-27
US20190386251A1 (en) 2019-12-19
WO2018080830A1 (en) 2018-05-03
JP2020500329A (ja) 2020-01-09
JP7040864B2 (ja) 2022-03-23
TW201825385A (zh) 2018-07-16
CN110178242A (zh) 2019-08-27
US10756306B2 (en) 2020-08-25
EP3533090A1 (en) 2019-09-04

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