KR102284002B1 - 검사 및 계측 시스템을 위한 전기적으로 제어 가능한 애퍼처를 갖춘 센서 - Google Patents

검사 및 계측 시스템을 위한 전기적으로 제어 가능한 애퍼처를 갖춘 센서 Download PDF

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KR102284002B1
KR102284002B1 KR1020177035444A KR20177035444A KR102284002B1 KR 102284002 B1 KR102284002 B1 KR 102284002B1 KR 1020177035444 A KR1020177035444 A KR 1020177035444A KR 20177035444 A KR20177035444 A KR 20177035444A KR 102284002 B1 KR102284002 B1 KR 102284002B1
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light
sample
resistive
pixel
aperture
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KR20170141806A (ko
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영호 알렉스 추앙
존 필든
데이비드 엘 브라운
징징 장
키스 라이언
마크 시 왕
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케이엘에이 코포레이션
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
    • H04N25/70—SSIS architectures; Circuits associated therewith
    • H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
    • H04N25/715—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors using frame interline transfer [FIT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
    • G01N2021/1725—Modulation of properties by light, e.g. photoreflectance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/12—Circuits of general importance; Signal processing

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020177035444A 2015-05-14 2016-05-13 검사 및 계측 시스템을 위한 전기적으로 제어 가능한 애퍼처를 갖춘 센서 Active KR102284002B1 (ko)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201562161450P 2015-05-14 2015-05-14
US62/161,450 2015-05-14
US201562172242P 2015-06-08 2015-06-08
US62/172,242 2015-06-08
US15/153,543 US9860466B2 (en) 2015-05-14 2016-05-12 Sensor with electrically controllable aperture for inspection and metrology systems
US15/153,543 2016-05-12
PCT/US2016/032378 WO2016183451A1 (en) 2015-05-14 2016-05-13 Sensor with electrically controllable aperture for inspection and metrology systems

Publications (2)

Publication Number Publication Date
KR20170141806A KR20170141806A (ko) 2017-12-26
KR102284002B1 true KR102284002B1 (ko) 2021-07-29

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Country Status (7)

Country Link
US (2) US9860466B2 (enExample)
JP (2) JP6682558B2 (enExample)
KR (1) KR102284002B1 (enExample)
CN (2) CN107548554B (enExample)
IL (1) IL255230B (enExample)
TW (1) TWI692628B (enExample)
WO (1) WO2016183451A1 (enExample)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9860466B2 (en) * 2015-05-14 2018-01-02 Kla-Tencor Corporation Sensor with electrically controllable aperture for inspection and metrology systems
JP6279013B2 (ja) * 2016-05-26 2018-02-14 Ckd株式会社 三次元計測装置
US11662646B2 (en) 2017-02-05 2023-05-30 Kla Corporation Inspection and metrology using broadband infrared radiation
CN109425619B (zh) * 2017-08-31 2021-12-28 深圳中科飞测科技股份有限公司 光学测量系统及方法
JP2019191168A (ja) * 2018-04-23 2019-10-31 ブルカー ジェイヴィ イスラエル リミテッドＢｒｕｋｅｒ Ｊｖ Ｉｓｒａｅｌ Ｌｔｄ． 小角ｘ線散乱測定用のｘ線源光学系
KR102139988B1 (ko) * 2018-07-12 2020-07-31 한국표준과학연구원 수직입사 타원계측기 및 이를 이용한 시편의 광물성 측정 방법
US11703464B2 (en) 2018-07-28 2023-07-18 Bruker Technologies Ltd. Small-angle x-ray scatterometry
US10705026B2 (en) * 2018-10-26 2020-07-07 Kla Corporation Scanning differential interference contrast in an imaging system design
KR102833948B1 (ko) 2018-11-22 2025-07-15 삼성전자주식회사 기판 처리 장치, 기판 처리 방법 및 이를 이용한 반도체 소자의 제조 방법
CN109297991B (zh) * 2018-11-26 2019-12-17 深圳市麓邦技术有限公司 一种玻璃表面缺陷检测系统及方法
US10921261B2 (en) * 2019-05-09 2021-02-16 Kla Corporation Strontium tetraborate as optical coating material
JP2020204579A (ja) 2019-06-18 2020-12-24 住友電工デバイス・イノベーション株式会社 ウェハの表面検査方法、表面検査装置、および電子部品の製造方法
CN110632973B (zh) * 2019-09-24 2021-07-09 中国航空工业集团公司沈阳飞机设计研究所 一种电磁辐射控制方法及其装置
CN111229335B (zh) * 2020-01-17 2021-11-30 上海新微技术研发中心有限公司 光波导微流体芯片的制造方法
US12196673B2 (en) 2020-03-31 2025-01-14 Hitachi High-Tech Corporation Defect inspection apparatus and defect inspection method
CN112665514B (zh) * 2021-01-11 2022-09-20 成都工业职业技术学院 一种自动定心、高速检测机械零件孔间距的装置
US11781999B2 (en) 2021-09-05 2023-10-10 Bruker Technologies Ltd. Spot-size control in reflection-based and scatterometry-based X-ray metrology systems
US20240402094A1 (en) * 2021-10-05 2024-12-05 Ehwa Diamond Industrial Company Limited Method for measuring depth of damaged layer and concentration of defects in damaged layer, and system for performing same method
US12249059B2 (en) 2022-03-31 2025-03-11 Bruker Technologies Ltd. Navigation accuracy using camera coupled with detector assembly

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130009069A1 (en) 2011-07-07 2013-01-10 Fujifilm Corporation Radiation detector, radiographic imaging device and radiographic imaging system
US20130176552A1 (en) 2011-09-21 2013-07-11 Kla-Tencor Corporation Interposer based imaging sensor for high-speed image acquisition and inspection systems
US20130336574A1 (en) 2012-06-14 2013-12-19 Kla-Tencor Corporation Apparatus and methods for inspecting extreme ultra violet reticles

Family Cites Families (250)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3870917A (en) 1971-05-10 1975-03-11 Itt Discharge device including channel type electron multiplier having ion adsorptive layer
GB1444951A (en) 1973-06-18 1976-08-04 Mullard Ltd Electronic solid state devices
GB1536412A (en) 1975-05-14 1978-12-20 English Electric Valve Co Ltd Photocathodes
US4210922A (en) 1975-11-28 1980-07-01 U.S. Philips Corporation Charge coupled imaging device having selective wavelength sensitivity
NL7611593A (nl) 1976-10-20 1978-04-24 Optische Ind De Oude Delft Nv Werkwijze voor het in een beeldversterkerbuis aanbrengen van een lichtabsorberende, voor elek- tronen doorlaatbare laag.
US4106046A (en) 1977-01-26 1978-08-08 Westinghouse Electric Corp. Radiant energy sensor
US4280141A (en) 1978-09-22 1981-07-21 Mccann David H Time delay and integration detectors using charge transfer devices
JPS58146B2 (ja) 1980-10-14 1983-01-05 浜松テレビ株式会社 フレ−ミング管
US4348690A (en) 1981-04-30 1982-09-07 Rca Corporation Semiconductor imagers
US4644221A (en) 1981-05-06 1987-02-17 The United States Of America As Represented By The Secretary Of The Army Variable sensitivity transmission mode negative electron affinity photocathode
US4382267A (en) 1981-09-24 1983-05-03 Rca Corporation Digital control of number of effective rows of two-dimensional charge-transfer imager array
US4580155A (en) 1982-12-21 1986-04-01 Northern Telecom Limited Deep depletion CCD imager
US4555731A (en) 1984-04-30 1985-11-26 Polaroid Corporation Electronic imaging camera with microchannel plate
US4760031A (en) 1986-03-03 1988-07-26 California Institute Of Technology Producing CCD imaging sensor with flashed backside metal film
US4853595A (en) 1987-08-31 1989-08-01 Alfano Robert R Photomultiplier tube having a transmission strip line photocathode and system for use therewith
US5483378A (en) 1988-04-19 1996-01-09 Litton Systems, Inc. Fault tolerant anti-reflective coatings
US4999014A (en) 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
NL8902271A (nl) 1989-09-12 1991-04-02 Philips Nv Werkwijze voor het verbinden van twee lichamen.
US5120949A (en) 1991-01-17 1992-06-09 Burle Technologies, Inc. Semiconductor anode photomultiplier tube
US5144630A (en) 1991-07-29 1992-09-01 Jtt International, Inc. Multiwavelength solid state laser using frequency conversion techniques
US5563702A (en) 1991-08-22 1996-10-08 Kla Instruments Corporation Automated photomask inspection apparatus and method
US5440648A (en) 1991-11-19 1995-08-08 Dalsa, Inc. High speed defect detection apparatus having defect detection circuits mounted in the camera housing
US5181080A (en) 1991-12-23 1993-01-19 Therma-Wave, Inc. Method and apparatus for evaluating the thickness of thin films
US5376810A (en) 1992-06-26 1994-12-27 California Institute Of Technology Growth of delta-doped layers on silicon CCD/S for enhanced ultraviolet response
US5227313A (en) 1992-07-24 1993-07-13 Eastman Kodak Company Process for making backside illuminated image sensors
US5315126A (en) 1992-10-13 1994-05-24 Itt Corporation Highly doped surface layer for negative electron affinity devices
US5428392A (en) 1992-11-20 1995-06-27 Picker International, Inc. Strobing time-delayed and integration video camera system
US5326978A (en) 1992-12-17 1994-07-05 Intevac, Inc. Focused electron-bombarded detector
US5475227A (en) 1992-12-17 1995-12-12 Intevac, Inc. Hybrid photomultiplier tube with ion deflector
US5760809A (en) 1993-03-19 1998-06-02 Xerox Corporation Recording sheets containing phosphonium compounds
FI940740A0 (fi) 1994-02-17 1994-02-17 Arto Salokatve Detektor foer paovisning av fotoner eller partiklar, foerfarande foer framstaellning av detektorn och maetningsfoerfarande
US6271916B1 (en) 1994-03-24 2001-08-07 Kla-Tencor Corporation Process and assembly for non-destructive surface inspections
US5493176A (en) 1994-05-23 1996-02-20 Siemens Medical Systems, Inc. Photomultiplier tube with an avalanche photodiode, a flat input end and conductors which simulate the potential distribution in a photomultiplier tube having a spherical-type input end
WO1996000381A1 (en) 1994-06-27 1996-01-04 The Furukawa Electric Co., Ltd. Apparatus for detecting foreign matter in fluid
US20080315092A1 (en) 1994-07-28 2008-12-25 General Nanotechnology Llc Scanning probe microscopy inspection and modification system
EP0702221A3 (en) 1994-09-14 1997-05-21 Delco Electronics Corp Sensor integrated on a chip
US5608526A (en) 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
JPH08241977A (ja) 1995-03-03 1996-09-17 Hamamatsu Photonics Kk 半導体装置の製造方法
FR2733111B1 (fr) 1995-04-11 1997-05-23 Thomson Csf Procede de detection a cycles d'integration et de lecture repartis pour camera a balayage, et barrette de detection correspondante
DE59611314D1 (de) 1995-05-19 2006-01-26 Heidenhain Gmbh Dr Johannes Strahlungsempfindliches detektorelement
JP3405620B2 (ja) 1995-05-22 2003-05-12 松下電器産業株式会社 固体撮像装置
US6362484B1 (en) 1995-07-14 2002-03-26 Imec Vzw Imager or particle or radiation detector and method of manufacturing the same
US5731584A (en) 1995-07-14 1998-03-24 Imec Vzw Position sensitive particle sensor and manufacturing method therefor
US5754228A (en) * 1995-09-25 1998-05-19 Lockhead Martin Corporation Rapid-sequence full-frame CCD sensor
EP0979398B1 (en) 1996-06-04 2012-01-04 KLA-Tencor Corporation Optical scanning system for surface inspection
US5999310A (en) 1996-07-22 1999-12-07 Shafer; David Ross Ultra-broadband UV microscope imaging system with wide range zoom capability
US5717518A (en) 1996-07-22 1998-02-10 Kla Instruments Corporation Broad spectrum ultraviolet catadioptric imaging system
US5877859A (en) 1996-07-24 1999-03-02 Therma-Wave, Inc. Broadband spectroscopic rotating compensator ellipsometer
US5742626A (en) 1996-08-14 1998-04-21 Aculight Corporation Ultraviolet solid state laser, method of using same and laser surgery apparatus
US5760899A (en) 1996-09-04 1998-06-02 Erim International, Inc. High-sensitivity multispectral sensor
US5940685A (en) 1996-10-28 1999-08-17 The United States Of America As Represented By The Secretary Of The Air Force Fabrication of UV-sensitive back illuminated CCD image sensors
US6064759A (en) 1996-11-08 2000-05-16 Buckley; B. Shawn Computer aided inspection machine
JPH10171965A (ja) 1996-12-05 1998-06-26 Toshiba Corp 積算型エリアセンサの画像入力方法及びその装置
US6542636B2 (en) 1997-02-21 2003-04-01 Board Of Regents Of The University And Community College System Of Nevada Method and system for computerized high rate image processing
DE19714221A1 (de) 1997-04-07 1998-10-08 Zeiss Carl Fa Konfokales Mikroskop mit einem motorischen Scanningtisch
US5965910A (en) 1997-04-29 1999-10-12 Ohmeda Inc. Large cell charge coupled device for spectroscopy
US6278519B1 (en) 1998-01-29 2001-08-21 Therma-Wave, Inc. Apparatus for analyzing multi-layer thin film stacks on semiconductors
US6107619A (en) 1997-07-14 2000-08-22 California Institute Of Technology Delta-doped hybrid advanced detector for low energy particle detection
US6608676B1 (en) 1997-08-01 2003-08-19 Kla-Tencor Corporation System for detecting anomalies and/or features of a surface
US6201601B1 (en) 1997-09-19 2001-03-13 Kla-Tencor Corporation Sample inspection system
US6403963B1 (en) 1997-09-29 2002-06-11 California Institute Of Technology Delta-doped CCD's as low-energy particle detectors and imagers
US6278119B1 (en) 1997-10-21 2001-08-21 California Institute Of Technology Using a delta-doped CCD to determine the energy of a low-energy particle
JPH11153516A (ja) 1997-11-21 1999-06-08 Toppan Printing Co Ltd 画像撮像装置
US6297879B1 (en) 1998-02-27 2001-10-02 Micron Technology, Inc. Inspection method and apparatus for detecting defects on photomasks
JP2882409B1 (ja) 1998-04-24 1999-04-12 株式会社東京精密 外観検査装置
US6162707A (en) 1998-05-18 2000-12-19 The Regents Of The University Of California Low work function, stable thin films
DE19829172A1 (de) 1998-06-30 2000-01-05 Univ Konstanz Verfahren zur Herstellung von Antireflexschichten
US6373869B1 (en) 1998-07-30 2002-04-16 Actinix System and method for generating coherent radiation at ultraviolet wavelengths
US9029793B2 (en) 1998-11-05 2015-05-12 Siemens Aktiengesellschaft Imaging device
US6013399A (en) 1998-12-04 2000-01-11 Advanced Micro Devices, Inc. Reworkable EUV mask materials
US6867406B1 (en) 1999-03-23 2005-03-15 Kla-Tencor Corporation Confocal wafer inspection method and apparatus using fly lens arrangement
US7339568B2 (en) * 1999-04-16 2008-03-04 Samsung Electronics Co., Ltd. Signal transmission film and a liquid crystal display panel having the same
US6535531B1 (en) 2001-11-29 2003-03-18 Cymer, Inc. Gas discharge laser with pulse multiplier
US6307586B1 (en) 1999-07-20 2001-10-23 Intevac, Inc. Electron bombarded active pixel sensor camera incorporating gain control
US6285018B1 (en) 1999-07-20 2001-09-04 Intevac, Inc. Electron bombarded active pixel sensor
US6657178B2 (en) 1999-07-20 2003-12-02 Intevac, Inc. Electron bombarded passive pixel sensor imaging
JP2003505705A (ja) 1999-07-26 2003-02-12 エッジ メディカル デバイシス リミティド Ｘ線画像化用ディジタル検出器
US6429943B1 (en) 2000-03-29 2002-08-06 Therma-Wave, Inc. Critical dimension analysis with simultaneous multiple angle of incidence measurements
US6711283B1 (en) 2000-05-03 2004-03-23 Aperio Technologies, Inc. Fully automatic rapid microscope slide scanner
JP2002033473A (ja) 2000-07-17 2002-01-31 Hamamatsu Photonics Kk 半導体装置
US6879390B1 (en) 2000-08-10 2005-04-12 Kla-Tencor Technologies Corporation Multiple beam inspection apparatus and method
US6507147B1 (en) 2000-08-31 2003-01-14 Intevac, Inc. Unitary vacuum tube incorporating high voltage isolation
US7136159B2 (en) 2000-09-12 2006-11-14 Kla-Tencor Technologies Corporation Excimer laser inspection system
US7046283B1 (en) 2000-10-11 2006-05-16 Dalsa, Inc. Arrangements of clock line drivers
JP2002184302A (ja) 2000-12-18 2002-06-28 Hamamatsu Photonics Kk 半導体光電陰極
KR20020084541A (ko) 2001-05-02 2002-11-09 (주)한비젼 이동형 단말기기에 적용 가능한 초박형 영상모듈의 구현
US7009163B2 (en) 2001-06-22 2006-03-07 Orbotech Ltd. High-sensitivity optical scanning using memory integration
US6545281B1 (en) 2001-07-06 2003-04-08 The United States Of America As Represented By The United States Department Of Energy Pocked surface neutron detector
JP3573725B2 (ja) 2001-08-03 2004-10-06 川崎重工業株式会社 Ｘ線顕微鏡装置
US6900888B2 (en) 2001-09-13 2005-05-31 Hitachi High-Technologies Corporation Method and apparatus for inspecting a pattern formed on a substrate
US7015452B2 (en) 2001-10-09 2006-03-21 Itt Manufacturing Enterprises, Inc. Intensified hybrid solid-state sensor
US6747258B2 (en) 2001-10-09 2004-06-08 Itt Manufacturing Enterprises, Inc. Intensified hybrid solid-state sensor with an insulating layer
US7233350B2 (en) 2002-01-05 2007-06-19 Candela Microsystems, Inc. Image sensor with interleaved image output
WO2003043045A2 (en) 2001-11-13 2003-05-22 Nanosciences Corporation Photocathode
JP4068340B2 (ja) 2001-12-17 2008-03-26 エルピーダメモリ株式会社 半導体集積回路装置
FR2834345B1 (fr) 2001-12-27 2004-03-26 Essilor Int Article d'optique comportant une lame quart d'onde et son procede de fabrication
US7130039B2 (en) 2002-04-18 2006-10-31 Kla-Tencor Technologies Corporation Simultaneous multi-spot inspection and imaging
JP4165129B2 (ja) 2002-06-21 2008-10-15 三菱電機株式会社 裏面入射型固体撮像素子
US7408683B2 (en) 2002-07-15 2008-08-05 Brother Kogyo Kabushiki Kaisha Image sensor for reading image and image reading apparatus including the image sensor
US20040012684A1 (en) 2002-07-16 2004-01-22 Fairchild Imaging Image reconstruction techniques for charge coupled devices
US20040021061A1 (en) 2002-07-30 2004-02-05 Frederik Bijkerk Photodiode, charged-coupled device and method for the production
US7446474B2 (en) 2002-10-10 2008-11-04 Applied Materials, Inc. Hetero-junction electron emitter with Group III nitride and activated alkali halide
US7283166B1 (en) 2002-10-15 2007-10-16 Lockheed Martin Corporation Automatic control method and system for electron bombarded charge coupled device (“EBCCD”) sensor
US7126699B1 (en) 2002-10-18 2006-10-24 Kla-Tencor Technologies Corp. Systems and methods for multi-dimensional metrology and/or inspection of a specimen
US7005637B2 (en) 2003-01-31 2006-02-28 Intevac, Inc. Backside thinning of image array devices
US6990385B1 (en) 2003-02-03 2006-01-24 Kla-Tencor Technologies Corporation Defect detection using multiple sensors and parallel processing
GB2398118B (en) 2003-02-07 2006-03-15 Imp College Innovations Ltd Photon arrival time detection
US7141785B2 (en) 2003-02-13 2006-11-28 Micromass Uk Limited Ion detector
US7957066B2 (en) 2003-02-21 2011-06-07 Kla-Tencor Corporation Split field inspection system using small catadioptric objectives
US7227984B2 (en) 2003-03-03 2007-06-05 Kla-Tencor Technologies Corporation Method and apparatus for identifying defects in a substrate surface by using dithering to reconstruct under-sampled images
JP2005055196A (ja) * 2003-08-05 2005-03-03 Olympus Corp 基板検査方法及びその装置
US7813406B1 (en) 2003-10-15 2010-10-12 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Temporal laser pulse manipulation using multiple optical ring-cavities
JP2005158780A (ja) 2003-11-20 2005-06-16 Hitachi Ltd パターン欠陥検査方法及びその装置
US7023126B2 (en) 2003-12-03 2006-04-04 Itt Manufacturing Enterprises Inc. Surface structures for halo reduction in electron bombarded devices
JP4311181B2 (ja) 2003-12-05 2009-08-12 ソニー株式会社 半導体装置の制御方法および信号処理方法並びに半導体装置および電子機器
US7321468B2 (en) 2003-12-15 2008-01-22 Carl Zeiss Laser Optics Gmbh Method and optical arrangement for beam guiding of a light beam with beam delay
JP2005241290A (ja) 2004-02-24 2005-09-08 Toshiba Corp 画像入力装置及び検査装置
JP4365255B2 (ja) 2004-04-08 2009-11-18 浜松ホトニクス株式会社 発光体と、これを用いた電子線検出器、走査型電子顕微鏡及び質量分析装置
US7301263B2 (en) 2004-05-28 2007-11-27 Applied Materials, Inc. Multiple electron beam system with electron transmission gates
KR100688497B1 (ko) 2004-06-28 2007-03-02 삼성전자주식회사 이미지 센서 및 그 제조방법
US7141791B2 (en) 2004-09-07 2006-11-28 Kla-Tencor Technologies Corporation Apparatus and method for E-beam dark field imaging
JP4500641B2 (ja) 2004-09-29 2010-07-14 株式会社日立ハイテクノロジーズ 欠陥検査方法およびその装置
US7455565B2 (en) 2004-10-13 2008-11-25 The Board Of Trustees Of The Leland Stanford Junior University Fabrication of group III-nitride photocathode having Cs activation layer
JP4185037B2 (ja) 2004-10-14 2008-11-19 株式会社東芝 欠陥検査装置
US7609309B2 (en) 2004-11-18 2009-10-27 Kla-Tencor Technologies Corporation Continuous clocking of TDI sensors
US7952633B2 (en) 2004-11-18 2011-05-31 Kla-Tencor Technologies Corporation Apparatus for continuous clocking of TDI sensors
US7432517B2 (en) 2004-11-19 2008-10-07 Asml Netherlands B.V. Pulse modifier, lithographic apparatus, and device manufacturing method
WO2006076671A2 (en) 2005-01-13 2006-07-20 Whitehead Institute For Biomedical Research Method and apparatus for uv imaging
JP4751617B2 (ja) 2005-01-21 2011-08-17 株式会社日立ハイテクノロジーズ 欠陥検査方法及びその装置
JP4713185B2 (ja) 2005-03-11 2011-06-29 株式会社日立ハイテクノロジーズ 異物欠陥検査方法及びその装置
US7485486B2 (en) 2005-03-18 2009-02-03 Intersil Americas Inc. Photodiode for multiple wavelength operation
EP1716964B1 (en) 2005-04-28 2009-01-21 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing semiconductor device and laser irradiation apparatus
US7531826B2 (en) 2005-06-01 2009-05-12 Intevac, Inc. Photocathode structure and operation
US7345825B2 (en) 2005-06-30 2008-03-18 Kla-Tencor Technologies Corporation Beam delivery system for laser dark-field illumination in a catadioptric optical system
US7655493B2 (en) * 2005-07-14 2010-02-02 Fairchild Imaging, Inc Multi spectral sensor
JP5063875B2 (ja) 2005-07-27 2012-10-31 パナソニック株式会社 光半導体装置の製造方法
JP5403852B2 (ja) 2005-08-12 2014-01-29 株式会社荏原製作所 検出装置及び検査装置
JP4142734B2 (ja) 2005-09-16 2008-09-03 松下電器産業株式会社 回折光学素子
JP4925085B2 (ja) 2005-09-20 2012-04-25 株式会社メガオプト 深紫外レーザー光の発生方法および深紫外レーザー装置
JP5059767B2 (ja) 2005-09-21 2012-10-31 アール・ジェイ・エス・テクノロジー・インコーポレイテッド 高ダイナミックレンジ感度センサ素子またはアレイのためのシステムおよび方法
JP4939033B2 (ja) 2005-10-31 2012-05-23 浜松ホトニクス株式会社 光電陰極
JP2007133102A (ja) 2005-11-09 2007-05-31 Canon Inc 反射防止膜を有する光学素子及びそれを有する露光装置
US7247835B2 (en) 2005-12-20 2007-07-24 Keng Yeam Chang Optical navigation device, and method for manufacturing same
US7528943B2 (en) 2005-12-27 2009-05-05 Kla-Tencor Technologies Corporation Method and apparatus for simultaneous high-speed acquisition of multiple images
JP4888081B2 (ja) 2006-01-23 2012-02-29 セイコーエプソン株式会社 撮像装置、撮像方法、撮像システム及び画像処理装置
KR100768200B1 (ko) 2006-02-01 2007-10-17 삼성에스디아이 주식회사 광학 필터 및 이를 채용한 플라즈마 디스플레이 패널
JP4992446B2 (ja) 2006-02-24 2012-08-08 ソニー株式会社 固体撮像装置及びその製造方法、並びにカメラ
JP2007251463A (ja) 2006-03-15 2007-09-27 Renesas Technology Corp 半導体集積回路装置
WO2007112058A2 (en) 2006-03-24 2007-10-04 Applied Materials, Inc. Carbon precursors for use during silicon epitaxial firm formation
WO2007119626A1 (ja) * 2006-03-31 2007-10-25 National University Corporation Shizuoka University 半導体測距素子及び固体撮像装置
US8472111B2 (en) 2006-06-13 2013-06-25 The Arizona Board Of Regents On Behalf Of The University Of Arizona Apparatus and method for deep ultraviolet optical microscopy
US7457330B2 (en) 2006-06-15 2008-11-25 Pavilion Integration Corporation Low speckle noise monolithic microchip RGB lasers
JP4695552B2 (ja) 2006-06-28 2011-06-08 富士フイルム株式会社 画像処理装置及び方法
US8482197B2 (en) 2006-07-05 2013-07-09 Hamamatsu Photonics K.K. Photocathode, electron tube, field assist type photocathode, field assist type photocathode array, and field assist type electron tube
US7791170B2 (en) 2006-07-10 2010-09-07 Taiwan Semiconductor Manufacturing Company, Ltd. Method of making a deep junction for electrical crosstalk reduction of an image sensor
US20080068593A1 (en) 2006-09-13 2008-03-20 Hiroyuki Nakano Method and apparatus for detecting defects
JP2008096430A (ja) 2006-09-13 2008-04-24 Hitachi High-Technologies Corp 欠陥検査方法およびその装置
US7800040B2 (en) 2006-09-21 2010-09-21 California Institute Of Technology Method for growing a back surface contact on an imaging detector used in conjunction with back illumination
US7817197B2 (en) 2006-09-21 2010-10-19 Mediatek Singapore Pte Ltd Optical black calibration
US7675561B2 (en) 2006-09-28 2010-03-09 Cypress Semiconductor Corporation Time delayed integration CMOS image sensor with zero desynchronization
KR100826407B1 (ko) 2006-10-12 2008-05-02 삼성전기주식회사 자외선 수광용 포토 다이오드 및 이를 포함하는 이미지센서
KR100874954B1 (ko) 2006-12-04 2008-12-19 삼성전자주식회사 후면 수광 이미지 센서
JP5342769B2 (ja) 2006-12-28 2013-11-13 浜松ホトニクス株式会社 光電陰極、電子管及び光電子増倍管
US20080173903A1 (en) 2006-12-28 2008-07-24 Fujifilm Corporation Solid-state image pickup element
JP4742057B2 (ja) * 2007-02-21 2011-08-10 富士フイルム株式会社 裏面照射型固体撮像素子
JP2008224303A (ja) 2007-03-09 2008-09-25 Toray Eng Co Ltd 自動外観検査装置
US8755417B1 (en) 2007-04-16 2014-06-17 Kla-Tencor Corporation Coherent light generation below about two-hundred nanometers
US20110073982A1 (en) * 2007-05-25 2011-03-31 Armstrong J Joseph Inspection system using back side illuminated linear sensor
US8138485B2 (en) 2007-06-25 2012-03-20 Asml Netherlands B.V. Radiation detector, method of manufacturing a radiation detector, and lithographic apparatus comprising a radiation detector
US7586108B2 (en) 2007-06-25 2009-09-08 Asml Netherlands B.V. Radiation detector, method of manufacturing a radiation detector and lithographic apparatus comprising a radiation detector
DE102007030985B4 (de) 2007-07-04 2009-04-09 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Bildsensor, Verfahren zum Betreiben eines Bildsensors und Computerprogramm
WO2009009081A2 (en) 2007-07-10 2009-01-15 Massachusetts Institute Of Technology Tomographic phase microscopy
US8325337B2 (en) 2007-07-13 2012-12-04 Purdue Research Foundation Time resolved raman spectroscopy
US8126255B2 (en) 2007-09-20 2012-02-28 Kla-Tencor Corp. Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions
JP5039495B2 (ja) 2007-10-04 2012-10-03 ルネサスエレクトロニクス株式会社 マスクブランク検査方法、反射型露光マスクの製造方法、反射型露光方法および半導体集積回路の製造方法
US7525649B1 (en) 2007-10-19 2009-04-28 Kla-Tencor Technologies Corporation Surface inspection system using laser line illumination with two dimensional imaging
US7605376B2 (en) 2007-10-29 2009-10-20 Fairchild Imaging, Inc. CMOS sensor adapted for dental x-ray imaging
JP5132262B2 (ja) 2007-11-02 2013-01-30 三菱電機株式会社 裏面入射型リニアイメージセンサ、その駆動方法、及びその製造方法
US7838833B1 (en) 2007-11-30 2010-11-23 Kla-Tencor Technologies Corporation Apparatus and method for e-beam dark imaging with perspective control
US20090147255A1 (en) * 2007-12-07 2009-06-11 Erington Kent B Method for testing a semiconductor device and a semiconductor device testing system
IL188825A0 (en) 2008-01-16 2008-11-03 Orbotech Ltd Inspection of a substrate using multiple cameras
US7741666B2 (en) 2008-02-08 2010-06-22 Omnivision Technologies, Inc. Backside illuminated imaging sensor with backside P+ doped layer
GB0802478D0 (en) 2008-02-11 2008-03-19 Cmosis Nv Tiem delay integration in imaging device
US7714287B1 (en) 2008-06-05 2010-05-11 Kla-Tencor Corporation Apparatus and method for obtaining topographical dark-field images in a scanning electron microscope
US8471939B2 (en) 2008-08-01 2013-06-25 Omnivision Technologies, Inc. Image sensor having multiple sensing layers
US7723686B2 (en) 2008-08-14 2010-05-25 Hanvision Co., Ltd. Image sensor for detecting wide spectrum and method of manufacturing the same
US20120170021A1 (en) 2008-09-02 2012-07-05 Phillip Walsh Method and apparatus for providing multiple wavelength reflectance magnitude and phase for a sample
US7875948B2 (en) 2008-10-21 2011-01-25 Jaroslav Hynecek Backside illuminated image sensor
US7880127B2 (en) 2008-10-27 2011-02-01 Itt Manufacturing Enterprises, Inc. Apparatus and method for aligning an image sensor including a header alignment means
US8017427B2 (en) 2008-12-31 2011-09-13 Omnivision Technologies, Inc. Backside-illuminated (BSI) image sensor with backside diffusion doping
US8581228B2 (en) 2009-01-22 2013-11-12 Bae Systems Information And Electronic Systems Integration Inc. Corner cube enhanced photocathode
US8624971B2 (en) 2009-01-23 2014-01-07 Kla-Tencor Corporation TDI sensor modules with localized driving and signal processing circuitry for high speed inspection
US8175373B2 (en) 2009-02-16 2012-05-08 Kla-Tencor Corporation Use of design information and defect image information in defect classification
US7985658B2 (en) 2009-06-08 2011-07-26 Aptina Imaging Corporation Method of forming substrate for use in imager devices
WO2010148293A2 (en) 2009-06-19 2010-12-23 Kla-Tencor Corporation Euv high throughput inspection system for defect detection on patterned euv masks, mask blanks, and wafers
KR20120039659A (ko) 2009-06-22 2012-04-25 에이에스엠엘 홀딩 엔.브이. 물체 검사 시스템 및 물체 검사 방법
JP5694317B2 (ja) 2009-07-17 2015-04-01 ケーエルエー−テンカー・コーポレーションＫｌａ−Ｔｅｎｃｏｒ Ｃｏｒｐｏｒａｔｉｏｎ 荷電粒子エネルギー分析器装置および方法
US20110019044A1 (en) 2009-07-21 2011-01-27 Weng-Lyang Wang Time Delay Integration Based MOS Photoelectric Pixel Sensing Circuit
US9023152B2 (en) 2009-09-17 2015-05-05 Kla-Tencor Corporation CLBO crystal growth
CN102035085B (zh) 2009-10-08 2014-03-05 群康科技(深圳)有限公司 导电结构及其制造方法
US8629384B1 (en) 2009-10-26 2014-01-14 Kla-Tencor Corporation Photomultiplier tube optimized for surface inspection in the ultraviolet
EP2513670B1 (en) 2009-12-15 2020-02-05 Saint-Gobain Ceramics & Plastics, Inc. Radiation detection system and method of analyzing an electrical pulse output by a radiation detector
EP2346094A1 (en) 2010-01-13 2011-07-20 FEI Company Method of manufacturing a radiation detector
EP2526566B1 (en) 2010-01-21 2018-03-07 Roper Scientific, Inc. Solid state back-illuminated photon sensor and its method of fabrication
RU2556822C2 (ru) 2010-01-22 2015-07-20 Те Борд Оф Трастиз Оф Те Лилэнд Стэнфорд Джуниор Юниверсити Ингибирование axl сигнализации в антиметастатической терапии
JP5304674B2 (ja) 2010-02-02 2013-10-02 富士通株式会社 データ変換装置、データ変換方法及びプログラム
US8558234B2 (en) 2010-02-11 2013-10-15 California Institute Of Technology Low voltage low light imager and photodetector
JP2011171467A (ja) * 2010-02-18 2011-09-01 Seiko Epson Corp 固体撮像素子及びその駆動方法
JP2013524217A (ja) 2010-03-29 2013-06-17 インテヴァック インコーポレイテッド 時間分解フォトルミネッセンス撮像システム及び光電池検査方法
US8451354B2 (en) 2010-05-17 2013-05-28 Commissariat A L'energie Atomique Et Aux Energies Alternatives TDI image sensor in CMOS technology with high video capture rate
US8269223B2 (en) 2010-05-27 2012-09-18 The United States Of America As Represented By The Secretary Of The Army Polarization enhanced avalanche photodetector and method thereof
US8310021B2 (en) 2010-07-13 2012-11-13 Honeywell International Inc. Neutron detector with wafer-to-wafer bonding
US8686331B2 (en) 2010-08-08 2014-04-01 Kla-Tencor Corporation Dynamic wavefront control of a frequency converted laser system
US8669512B2 (en) 2010-12-28 2014-03-11 Technion Research & Development Foundation Limited System and method for analyzing light by three-photon counting
US8513587B2 (en) 2011-01-24 2013-08-20 Taiwan Semiconductor Manufacturing Company, Ltd. Image sensor with anti-reflection layer and method of manufacturing the same
US8455971B2 (en) 2011-02-14 2013-06-04 Taiwan Semiconductor Manufacturing Company, Ltd. Apparatus and method for improving charge transfer in backside illuminated image sensor
JP2012189385A (ja) 2011-03-09 2012-10-04 Fujifilm Corp 放射線画像検出装置の保守方法
US9279774B2 (en) 2011-07-12 2016-03-08 Kla-Tencor Corp. Wafer inspection
ITTO20110649A1 (it) 2011-07-19 2013-01-20 St Microelectronics Srl Dispositivo di fotorivelazione con copertura protettiva e antiriflesso, e relativo metodo di fabbricazione
US8873596B2 (en) 2011-07-22 2014-10-28 Kla-Tencor Corporation Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal
US8871557B2 (en) 2011-09-02 2014-10-28 Electronics And Telecommunications Research Institute Photomultiplier and manufacturing method thereof
WO2013036576A1 (en) 2011-09-07 2013-03-14 Kla-Tencor Corporation Transmissive-reflective photocathode
US20130077086A1 (en) 2011-09-23 2013-03-28 Kla-Tencor Corporation Solid-State Laser And Inspection System Using 193nm Laser
US8872159B2 (en) 2011-09-29 2014-10-28 The United States Of America, As Represented By The Secretary Of The Navy Graphene on semiconductor detector
US9250178B2 (en) 2011-10-07 2016-02-02 Kla-Tencor Corporation Passivation of nonlinear optical crystals
US9228943B2 (en) 2011-10-27 2016-01-05 Kla-Tencor Corporation Dynamically adjustable semiconductor metrology system
US10197501B2 (en) 2011-12-12 2019-02-05 Kla-Tencor Corporation Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors
US9389166B2 (en) 2011-12-16 2016-07-12 Kla-Tencor Corporation Enhanced high-speed logarithmic photo-detector for spot scanning system
US8754972B2 (en) 2012-02-01 2014-06-17 Kla-Tencor Corporation Integrated multi-channel analog front end and digitizer for high speed imaging applications
JP2013175951A (ja) * 2012-02-27 2013-09-05 Honda Motor Co Ltd 画素駆動装置及び画素駆動方法
JP6127128B2 (ja) * 2012-03-20 2017-05-10 ヘプタゴン・マイクロ・オプティクス・ピーティーイー・エルティーディーＨｅｐｔａｇｏｎ Ｍｉｃｒｏ Ｏｐｔｉｃｓ Ｐｔｅ．Ｌｔｄ． ｐｎ構造ゲートを備える復調ピクセル
US9496425B2 (en) 2012-04-10 2016-11-15 Kla-Tencor Corporation Back-illuminated sensor with boron layer
US10079257B2 (en) 2012-04-13 2018-09-18 Taiwan Semiconductor Manufacturing Co., Ltd. Anti-reflective layer for backside illuminated CMOS image sensors
US20130313440A1 (en) 2012-05-22 2013-11-28 Kla-Tencor Corporation Solid-State Laser And Inspection System Using 193nm Laser
KR101914231B1 (ko) 2012-05-30 2018-11-02 삼성디스플레이 주식회사 주사 전자 현미경을 이용한 검사 시스템
US8658973B2 (en) 2012-06-12 2014-02-25 Kla-Tencor Corporation Auger elemental identification algorithm
NL2011568A (en) 2012-10-31 2014-05-06 Asml Netherlands Bv Sensor and lithographic apparatus.
US8921782B2 (en) 2012-11-30 2014-12-30 Kla-Tencor Corporation Tilt-imaging scanning electron microscope
US9426400B2 (en) 2012-12-10 2016-08-23 Kla-Tencor Corporation Method and apparatus for high speed acquisition of moving images using pulsed illumination
US8929406B2 (en) 2013-01-24 2015-01-06 Kla-Tencor Corporation 193NM laser and inspection system
US8912615B2 (en) 2013-01-24 2014-12-16 Osi Optoelectronics, Inc. Shallow junction photodiode for detecting short wavelength light
US9529182B2 (en) 2013-02-13 2016-12-27 KLA—Tencor Corporation 193nm laser and inspection system
US9608399B2 (en) 2013-03-18 2017-03-28 Kla-Tencor Corporation 193 nm laser and an inspection system using a 193 nm laser
US9478402B2 (en) 2013-04-01 2016-10-25 Kla-Tencor Corporation Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor
US11180866B2 (en) 2013-04-10 2021-11-23 Kla Corporation Passivation of nonlinear optical crystals
US9350921B2 (en) 2013-06-06 2016-05-24 Mitutoyo Corporation Structured illumination projection with enhanced exposure control
JP6348272B2 (ja) * 2013-11-05 2018-06-27 浜松ホトニクス株式会社 電荷結合素子及びその製造方法、並びに固体撮像装置
US9927371B2 (en) 2014-04-22 2018-03-27 Kla-Tencor Corporation Confocal line inspection optical system
US9748729B2 (en) 2014-10-03 2017-08-29 Kla-Tencor Corporation 183NM laser and inspection system
US9860466B2 (en) * 2015-05-14 2018-01-02 Kla-Tencor Corporation Sensor with electrically controllable aperture for inspection and metrology systems

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130009069A1 (en) 2011-07-07 2013-01-10 Fujifilm Corporation Radiation detector, radiographic imaging device and radiographic imaging system
US20130176552A1 (en) 2011-09-21 2013-07-11 Kla-Tencor Corporation Interposer based imaging sensor for high-speed image acquisition and inspection systems
US20130336574A1 (en) 2012-06-14 2013-12-19 Kla-Tencor Corporation Apparatus and methods for inspecting extreme ultra violet reticles

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