JP6682558B2 - 検査及び計量システム用の電気可制御アパーチャ付センサ - Google Patents
検査及び計量システム用の電気可制御アパーチャ付センサ Download PDFInfo
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- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N25/00—Circuitry of solid-state image sensors [SSIS]; Control thereof
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- H04N25/71—Charge-coupled device [CCD] sensors; Charge-transfer registers specially adapted for CCD sensors
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1725—Modulation of properties by light, e.g. photoreflectance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
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Description
本願は、2015年5月14日付米国暫定特許出願第62/161,450号及び2015年6月8日付米国暫定特許出願第62/172,242号に基づく優先権を主張する出願であるので、この参照を以てそれらを本願に繰り入れることにする。
Claims (23)
- サンプルを検査する方法であって、
サンプル上へと輻射を差し向け集束させるステップと、
サンプルから受け取った輻射をラインセンサへと差し向けるステップであり、そのラインセンサが基板上に位置する複数個の画素を備え、各画素が、基板の上面に付されていてその画素の連携先感光領域の上方に位置する抵抗性制御ゲートを備え、受け取った輻射を差し向ける一環として上記複数個の画素それぞれの連携先感光領域へと上記差し向けられた光を入射させるステップと、
所定のアパーチャ制御信号を用い各画素の抵抗性制御ゲートを駆動するステップであり、抵抗性制御ゲートによって連携先感光領域内に生成される電界により、各画素の第1感光部分内で光第1部分により生成された第1光電子が各抵抗性制御ゲートの第1端部の隣にある第1電荷蓄積領域内へと追いやられ且つ各画素の第2感光部分内で光第2部分により生成された第2光電子が各抵抗性制御ゲートの第2端部の隣にある第2電荷蓄積領域内へと追いやられるように駆動するステップと、
を有する方法。 - 請求項1に記載の方法であって、更に、所定期間中に第1電荷蓄積領域内に蓄積された第1光電子を計測するステップを有する方法。
- 請求項2に記載の方法であって、輻射を差し向けるステップが、更に、サンプルから各画素の連携先感光領域の第1感光部分内へと差し向けられた共焦点像第1部分と、サンプルから各画素の連携先感光領域の第2感光部分内へと差し向けられた共焦点像第2部分と、を含む共焦点像を生成するステップを含む方法。
- 請求項2に記載の方法であって、輻射を差し向けるステップが、更に、サンプルから見て第1角度域内に位置する輻射第1部分を各画素の連携先感光領域の第1感光部分内へと差し向けるステップと、サンプルから見て第2角度域内に位置する輻射第2部分を各画素の連携先感光領域の第2感光部分内へと差し向けるステップと、を含む方法。
- 請求項1に記載の方法であって、各画素の抵抗性制御ゲートを駆動するステップが、各抵抗性制御ゲートの一方の端部及びその逆側にある端部に接する第1及び第2端部電極上に第1及び第2アパーチャ制御信号を発生させるステップと、各抵抗性制御ゲートの中央部分に接する少なくとも1個の中央電極上に第3アパーチャ制御信号を発生させるステップと、を含む方法。
- 請求項5に記載の方法であって、抵抗性制御ゲートを駆動するステップが、更に、
第1期間中に、第1及び第2アパーチャ制御信号が第3アパーチャ制御信号よりも正になるようそれら第1、第2及び第3制御信号を生成するステップと、
第2期間中に、上記第1制御信号が上記第2及び第3制御信号よりも正になるようそれら第1、第2及び第3制御信号を生成するステップと、
を含む方法。 - 請求項1に記載の方法であって、各画素の抵抗性制御ゲートを駆動するステップが、各抵抗性制御ゲートの対応する端部にそれぞれ接する第1及び第2端部電極上に第1及び第2アパーチャ制御信号を発生させるステップと、各抵抗性制御ゲートの対応する中央部分にそれぞれ接する第1、第2及び第3中央電極上にそれぞれ第3、第4及び第5アパーチャ制御信号を発生させるステップと、を含み、第1、第2及び第4アパーチャ制御信号を第3及び第5アパーチャ制御信号よりも正として各画素の抵抗性制御ゲートにより連携先感光領域内に電界を発生させ、その電界によって、第1光電子を第1電荷蓄積領域内へと追いやり第2光電子を第2電荷蓄積領域内へと追いやると共に、各画素の第3感光部分内で光第3部分により生成された第3光電子を第1電荷蓄積領域・第2電荷蓄積領域間にある第3電荷蓄積領域内へと追いやる方法。
- 請求項7に記載の方法であって、輻射を差し向けるステップが、更に、サンプルから見て第1角度域内に位置する輻射第1部分を各画素の連携先感光領域の第1感光部分内へと差し向けるステップと、サンプルから見て第2角度域内に位置する輻射第2部分を各画素の連携先感光領域の第2感光部分内へと差し向けるステップと、サンプルから見て第3角度域内に位置する輻射第3部分を各画素の連携先感光領域の第3感光部分内へと差し向けるステップと、を含む方法。
- 請求項1に記載の方法であって、
上記ラインセンサが、基板の下面とサンプルとの間に位置する機械的アパーチャ構造を備え、
抵抗性制御ゲートを駆動するステップが、上記電界を調整することでその機械的アパーチャ構造の誤整列を正すステップを含む方法。 - センサであって、
上面及びその逆側にある下面を有する基板と、
基板上に位置する複数個の画素であり、各画素が、上記上面に付されていてその画素の連携先感光領域の上方にある抵抗性制御ゲート、抵抗性制御ゲートの第1端部の隣にある第1転送ゲート、並びに抵抗性制御ゲートの第2端部の隣にある第2転送ゲート、を備える複数個の画素と、
上記複数個の画素の抵抗性制御ゲートを過ぎり平行に延びる複数個の長尺なアパーチャ制御電極であり、各抵抗性制御ゲートの第1端部に接する第1端部電極、各抵抗性制御ゲートの第2端部に接する第2端部電極、並びに各抵抗性制御ゲートに接していて第1端部電極・第2端部電極間にある1個又は複数個の中央電極、を含む複数個のアパーチャ制御電極と、
上記複数個のアパーチャ制御電極を介し上記複数個の画素の抵抗性制御ゲート上にアパーチャ制御信号を同時印加するよう構成された制御回路であり、第1及び第2端部電極に印加される第1及び第2アパーチャ制御信号を少なくとも1個の中央電極に印加される第3アパーチャ制御信号よりも正として各抵抗性制御ゲートにより連携先感光領域内に電界を発生させ、各画素の第1感光部分内で光第1部分により生成された第1光電子をその電界によって各抵抗性制御ゲートの第1端部の隣にある第1電荷蓄積領域内へと追いやると共に、各画素の第2感光部分内で光第2部分により生成された第2光電子をその電界によって各抵抗性制御ゲートの第2端部の隣にある第2電荷蓄積領域内へと追いやる制御回路と、
を備えるセンサ。 - 請求項10に記載のセンサであって、更に、複数個の読み出しレジスタを有し各読み出しレジスタが上記複数個の画素のうち連携先画素の第1転送ゲートに可動作結合されている読み出し回路を備え、
上記制御回路が、更に、上記複数個の画素及び読み出し回路を作動させることで、読み出し動作中に上記複数個の画素の第1転送ゲートを介し第1電荷蓄積領域から上記複数個の読み出しレジスタへと第1光電子を転送させるよう構成されているセンサ。 - 請求項10に記載のセンサであって、
上記1個又は複数個の中央電極が少なくとも3個の中央電極を含み、
上記制御回路が、各画素の第3感光部分内で光第3部分により生成された第3光電子が上記電界により第1電荷蓄積領域・第2電荷蓄積領域間にある第3電荷蓄積領域内へと追いやられるように、アパーチャ制御信号を生成するよう、構成されているセンサ。 - 請求項10に記載のセンサであって、上記基板がエピタキシャルシリコン層を備えるセンサであり、更に、そのエピタキシャルシリコン層の下面の下方に形成された純ホウ素層を備えるセンサ。
- 請求項10に記載のセンサであって、上記基板がエピタキシャルシリコン層を備えるセンサであり、更に、そのエピタキシャルシリコン層の下面の下方に形成された抗反射層を備えるセンサ。
- サンプルを検査又は計測するシステムであって、
光を生成するよう構成された照明源と、
その光を照明源からサンプルへと差し向け更にそのサンプルからセンサへと差し向けるよう構成された光学系と、
センサと、
を備え、そのセンサが、
上面及びその逆側にある下面を有する基板と、
基板上に位置する複数個の画素であり、各画素が、上記上面に付されていてその画素の連携先感光領域の上方に位置する抵抗性制御ゲートを備える複数個の画素と、
上記複数個の画素それぞれの抵抗性制御ゲートを過ぎり平行に延びその抵抗性制御ゲートに電気的に接続されている少なくとも3個のアパーチャ制御電極であり、各抵抗性制御ゲートの第1端部及びその逆側にある第2端部を過ぎりそれぞれ延びる第1及び第2端部電極、並びに第1端部電極・第2端部電極間に位置する1個又は複数個の中央電極、を含む少なくとも3個のアパーチャ制御電極と、
上記少なくとも3個のアパーチャ制御電極を介し上記複数個の画素の抵抗性制御ゲート上へとアパーチャ制御信号を同時印加することで、各抵抗性制御ゲートにより連携先感光領域内に電界を生成し、その連携先感光領域に入射した光により生成された光電子をその電界により少なくとも2部分に分離させるよう構成された制御回路と、
を備えるシステム。 - 請求項15に記載のシステムであって、上記センサが、上記複数個の画素の一方の側及びそれとは逆の側にそれぞれ位置する第1及び第2読み出し回路を備えるシステム。
- 請求項16に記載のシステムであって、
上記1個又は複数個の中央電極が複数個の中央電極を含み、
上記制御回路が、アパーチャ制御信号の組合せを複数通り生成し、ある組合せから別の組合せへと切り替えることで上記電界を調整可能とするよう構成されているシステム。 - 請求項16に記載のシステムであって、
上記1個又は複数個の中央電極が少なくとも3個の中央電極を含み、
上記制御回路が、光電子が少なくとも三部分に分割されるようにアパーチャ制御信号を生成するよう構成されているシステム。 - 請求項18に記載のシステムであって、
上記光学系が、更に、サンプルからセンサへと第1角度域内で差し向けられた光第1部分を各画素の連携先感光領域の第1感光部分内へと差し向けるよう、且つサンプルからセンサへと第2角度域内で差し向けられた光第2部分を各画素の連携先感光領域の第2感光部分内へと差し向けるよう構成されており、
上記抵抗性制御ゲートによって上記電界が生成され、各画素の第1感光部分内で光第1部分により生成された第1光電子がその電界によって各抵抗性制御ゲートの第1端部の隣にある第1電荷蓄積領域内へと追いやられ、各画素の第2感光部分内で光第2部分により生成された第2光電子がその電界によって各抵抗性制御ゲートの第2端部の隣にある第2電荷蓄積領域内へと付勢されるシステム。 - 請求項15に記載のシステムであって、上記基板が半導体膜を備え、上記センサが、更に、その半導体膜の下面上に位置する純ホウ素層を備えるシステム。
- 請求項15に記載のシステムであって、上記基板が半導体膜を備え、上記センサが、更に、その半導体膜の下面上に位置する抗反射層を備えるシステム。
- 請求項15に記載のシステムであって、サンプルから受光するよう構成された少なくとも2個のセンサを備えるシステム。
- 請求項15に記載のシステムであって、更に、上記基板の下面の隣に位置する機械的アパーチャ構造であり、サンプルからの光の一部分がその機械的アパーチャ構造により阻止される機械的アパーチャ構造を備え、
上記制御回路が、更に、上記センサに対する機械的アパーチャ構造の誤整列を踏まえ上記電界を調整するよう構成されているシステム。
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