KR102245392B1 - Test handler - Google Patents

Abstract

The present invention relates to a test handler that supports testing of a semiconductor device.
The test handler according to the present invention includes a rail device for guiding the movement of the test tray transferred by the transfer device; Including, the rail device, in order to guide the movement of the test tray, the guide rail having an insertion groove into which one end of the test tray can be inserted; And a fixing device for fixing the position of the test tray supported by the guide rail after the movement is completed. Includes.
According to the present invention, since the test tray can be maintained in a correct position even when a moving shock of the test handler or other external shock occurs, malfunction of the test handler does not occur.

Description

Test handler {TEST HANDLER}

The present invention relates to a test handler that supports testing of a semiconductor device by a tester. In particular, the present invention relates to the movement and position fixing of a test tray in which a semiconductor device is loaded.

A test handler is a device that supports semiconductor devices manufactured through a predetermined manufacturing process to be tested by a tester, and classifies semiconductor devices according to test results and loads them in customer trays.

1 is a conceptual diagram of a general test handler 100 viewed from a plane.

1, the test handler 100 includes a loading device 110, a first chamber 120, a test chamber 130, a connecting device 140, a second chamber 150, and an unloading device 160. Includes.

The loading device 110 loads the semiconductor devices to be tested loaded in the customer tray CTn into a horizontal test tray TT in a loading position (LP).

The first chamber 120 is provided for preheating or precooling semiconductor devices loaded in the test tray TT transferred from the loading position LP according to the test environment conditions.

The test chamber 130 is provided to test semiconductor devices loaded in a test tray TT that has been preheated/precooled in the first chamber 120 and then transferred to a test position (TP).

The connection device 140 pushes the test tray (TT) at the test position (TP) in the test chamber 130 toward the interface board (IB) of the tester coupled to the test chamber 130 to electrically connect the semiconductor devices to the tester. Connect with

The second chamber 150 is provided to return the heated or cooled semiconductor elements loaded in the test tray TT transferred from the test chamber 130 to room temperature.

The unloading device 160 sorts the semiconductor devices loaded in the test tray TT on from the second chamber 160 to the unloading position (UP) by test grade, and unloads them into an empty customer tray (CTe). Make it unloading.

And the test tray (TT) in which unloading of the semiconductor device loaded in the unloading position (UP) is completed is transferred to the loading position (LP).

For reference, there are horizontal and vertical test handlers. In the horizontal test handler, the loaded semiconductor device is electrically connected to the tester while the test tray is horizontal. In the vertical test handler, the loaded semiconductor device is electrically connected to the tester while the test tray is vertical. 1 is an example of a vertical test handler.

As described above, the test tray TT is the first chamber 120, the test chamber 130, the second chamber 150 and the unloading position from the loading position LP by a plurality of conveying devices not shown. It circulates along the closed path (C) leading back to the loading position (LP) through (UP). In this way, in order to move the test tray (TT) along the closed path (C), the test handler 100 is a number for moving the test tray (TT) for each _{section (C 1} to C _{7) forming the closed path (C).} It requires a transfer device (171 to 177). And in the case of the vertical test handler, the test tray (TT) in the horizontal state is converted to a vertical state at the point where section _{C 1} ends, and the test tray (TT) in the vertical state is horizontal at the point where the section _{C 5 ends.} The posture is converted into a state. Here, for example, for movement of a test tray (TT) in the range C ₂ and C ₅ sections (indicated by reference numeral 100, hereinafter referred to as "feeding device 1") transfer device shown in the Republic of Korea Patent Publication No. 10-2011-0114281 is Can be applied. And _{for the movement of the test tray (TT) in the C 1} , C ₃ , C ₄ , C ₆ , C ₇ section, for example, the transfer device presented in Korean Patent Laid-Open No. 10-2007-0063903 (indicated as 500, hereinafter ' Transfer device 2') can be applied.

In the case of the transfer device 1 above, since the test tray (TT) is moved while holding the test tray (TT) stably as a whole, a separate guide device is not required to guide the movement of the test tray (TT). . However, in the case of transfer device 2, since the test tray (TT) is moved while holding only one side of the test tray (TT), a guide rail is required as a separate guide device to guide the movement of the test tray (TT). .

On the other hand, when the transfer device 2 releases the grip of the test tray (TT) for the next operation, the test tray (TT) is often supported by the guide rail due to the impact of the operation of the test handler 100 or other external force. ) Position change occurs. In this case, a defect may occur in the next moving operation of the test tray TT, or a defect may occur in an electrical connection operation between the tester and the semiconductor device loaded in the test tray TT at the test position TP. And this ultimately lowers the operation rate of the test handler and the reliability of the product.

It is an object of the present invention to provide a technology capable of stably maintaining the test tray in its correct position even when an impact is applied to the test tray in a state in which the gripping device by the transfer device is released.

A test handler according to the present invention for achieving the above object includes: a loading device for loading a semiconductor device to be tested into a test tray at a loading position; A connection device for electrically connecting the semiconductor devices loaded in the test tray in the test position to the tester when the test tray in which the loading of the semiconductor device is completed is moved to the test position by the loading device; An unloading device for unloading the semiconductor device from the test tray turned on to the unloading position after the test of the semiconductor device electrically connected to the tester by the connection device is completed; A transfer device for transferring the test tray in at least a partial section of a circulation path leading to the loading position through the loading position, the test position and the unloading position; And a rail device guiding the movement of the test tray transferred by the transfer device. Including, the rail device, in order to guide the movement of the test tray, the guide rail having an insertion groove into which one end of the test tray can be inserted; And a fixture for fixing the position of the test tray supported by the guide rail. Includes.

The fixing device includes: a fixing pad for fixing a position of the test tray; And an elastic member for applying an elastic pressing force to the test tray through a portion of the fixing pad by applying an elastic pressing force to a portion of the fixing pad in a direction toward the test tray. Includes.

The elastic pressing force applied to the test tray by the elastic member acts in a direction perpendicular to the moving direction of the test tray.

One side of the fixing pad is fixed to the guide rail, and the other side of the fixing pad is movable in a moving direction of the test tray.

It is preferable that the fixing pad is formed of a flexible material so that the bending point is bent by the elastic force of the elastic member to apply a pressing force to the test tray.

According to the present invention as described above, since the test tray can be maintained in a correct position even when an operating shock of the test handler or other external shock occurs, a malfunction of the test handler is prevented. Therefore, the operation rate and reliability of the test handler are improved.

1 is a conceptual plan view of a general test handler.
2 and 3 are conceptual plan views of a test handler according to the present invention.
4 is a schematic partially exploded perspective view of a rail device applied to the test handler of FIG. 2.
5 to 7 are operational state diagrams for explaining the operation of the rail device of FIG. 4.

Hereinafter, preferred embodiments of the present invention as described above will be described with reference to the accompanying drawings, but redundant descriptions will be omitted or compressed as far as possible for the sake of brevity.

2 and 3 are conceptual diagrams viewed from a plan view of a test handler 200 according to an embodiment of the present invention. 2 is referenced for a description of the basic configuration of the test handler 200 according to the present embodiment, and FIG. 3 is referred to for a description of the characteristic configuration of the test handler 200 according to the present embodiment.

The test handler 200 according to the present embodiment includes a loading device 210, a first chamber 220, a test chamber 230, a connection device 240, a second chamber 250, an unloading device 260, and It includes a plurality of conveying devices 271 to 277 and rail devices 281, 283, 284, 285, 287, 288 (see Fig. 3), and the like.

Among the above configurations, the loading device 110, the first chamber 120, the test chamber 130, the connection device 140, the second chamber 150, the unloading device 160, and a plurality of transfer devices 271 To 277, respectively, the loading device 110, the first chamber 120, the test chamber 130, the connection device 140, the second chamber 150, the unloading device 160, and a plurality of transfers of FIG. 1 Since the functions and operations are the same as those of the devices 171 to 177, a description thereof will be omitted.

Among the rail devices 281, 283, 284, 285, 287, 288, rail devices 281, 287, 288 guide the movement of the test tray TT in a horizontal state, and rail devices 283, 284 and 285 Guides the movement of the test tray (TT) in a vertical state. However, since the basic configuration and operation are all the same, the description of the rail device of reference numeral 284 is replaced with the description of the rail device of the remaining reference numerals 281, 283, 285, 287, and 288.

The rail device 284 has a pair of guide rails 284a and 284b as shown in FIG. 4. In addition, the rail device 284 is a roller 284c installed in a plurality of upper guide rails 284a and lower guide rails 284b, respectively, and a fixing device ( 284d).

The upper guide rail 284a and the lower guide rail 284b facing each other in the vertical direction have insertion grooves (IST, ISB) into which the upper and lower ends of the test tray TT can be inserted. Therefore, the test tray (TT) can be guided or supported in a state in which the upper and lower ends are inserted into the insertion grooves (IST, ISB).

The rollers 284c support the upper and lower ends of the test tray TT inserted into the insertion grooves IST and ISB. These rollers 284c also have a function of reducing frictional force applied to the upper and lower ends of the test tray TT when the test tray TT is moved. Therefore, omission may be considered if the benefit of friction reduction is not considered.

The fixing device 284d fixes the position of the test tray TT supported by the roller 284c in a stopped state after the movement by the transfer device 283 is completed. Two of these fasteners 284d are installed on the upper guide rail 284a. Of course, depending on the implementation, the number of fixing devices 284d may be increased or decreased. The fixing device 284d includes a fixing pad (SP), a spring (SR), a first installation pin (IP1), and a second installation pin (IP2).

The fixing pad (SP) contacts the test tray (TT) to fix the position of the test tray (TT). One side (OP) of the fixed pad (SP) is fixed to the guide rail (284a), and the other side (AP) of the fixed pad (SP) is the moving direction of the test tray (TT) or the moving direction of the test tray (TT). It is installed on the guide rail (284a) so as to be able to move in the opposite direction. To this end, a long hole LH is formed in the other side of the fixing pad SP in the moving direction of the test tray TT. In addition, the fixing pad (SP) is bent by the elastic force of the spring (SR), so that the point (PP) protruding toward the test tray (TT) contacts the test tray (TT) to apply a pressing force to the test tray (TT). It is preferable to be provided with a flexible material such as rubber to be able to.

The spring SR applies an elastic pressing force to a portion of the fixing pad SP in the direction of the test tray TT (in the downward direction in this embodiment), and ultimately, the test tray ( It is provided as an elastic member applying an elastic pressing force to TT). In this embodiment, the elastic pressing force applied by the spring SR is implemented so that it is applied from the top to the bottom, but depending on the implementation, the connecting device 240 is elastic in the same direction as the direction in which the test tray TT is pushed. It is possible to implement any number of pressures. That is, it is sufficient if the elastic pressing force applied to the test tray by the spring acts in a direction perpendicular to the moving direction of the test tray.

The first installation pin IP1 is provided for fixing and installing one side of the fixing pad SP to the guide rail 284b.

The second installation pin (IP2) is provided in the form of being inserted into the long hole (LH) of the fixing pad (SP), and provided to fix and install the other side of the fixing pad (SP) to the guide rail (284b) so that movement is possible. do.

Subsequently, the operation of the characteristic part of the test handler 200 according to the present invention will be described with reference to FIGS. 5 to 7.

The state of FIG. 5 is a state in which a part of the test tray TT has been moved to the rail device 284 by the current transfer device 273. In the state of Fig. 5, a part of the fixing pad SP is completely protruded by the elastic force of the spring SR. In the state of Fig. 5, when the transfer device of 273 continues to operate and the test tray (TT) is further transferred, the front end of the test tray (TT) is fixed based on the moving direction (left to right) of the test tray (TT). It comes into contact with the protruding point PP of the pad SP. And when the test tray (TT) is further moved to the right by the continuous operation of the transfer device of 273, the test tray applies a pressing force toward the spring (SP) to the protruding point (PP) of the fixed pad (SP). Will move. Accordingly, as shown in Fig. 6, the spring (SP) is compressed, the protruding point (PP) of the fixing pad (SP) is unfolded, and the other side (AP) of the fixing pad (SP) is the moving direction of the test tray (TT). Moves naturally. For this reason, the fixed pad (SP) does not act as an element that obstructs the movement of the test tray (TT). 7 is a state in which the movement of the test tray TT by the transfer device of 273 is completed. In the state as shown in FIG. 7, the spring SR applies a strong pressing force to the test tray TT by placing the fixing pad SP in a compressed state. Therefore, in the state of FIG. 7, even if an operating shock or an external shock occurs, the test tray TT can maintain its correct position. Of course, when the test tray TT is moved to the rail device 285 referenced in FIG. 3 by the transfer device 274 referenced in FIG. 7 in the state of FIG. 7, the fixing pad is caused by the elastic force of the spring SR. While a part of (SP) protrudes in the state of FIG. 5, the other side of the fixing pad (SP) moves in a direction opposite to the moving direction of the test tray (TT).

For reference, the present invention can be more preferably applied in the case of applying the roller (284c) to achieve smooth movement of the test tray by reducing the moving friction force of the test tray (TT).

As described above, a detailed description of the present invention has been made by an embodiment with reference to the accompanying drawings, but since the above-described embodiment has been only described with reference to a preferred example of the present invention, the present invention is limited to the above embodiment. It should not be understood as being, and the scope of the present invention should be understood in terms of the claims and their equivalent concepts to be described later.

200: test handler
210: loading device
240: connection device
260: unloading device
271 to 277: transfer device
281, 283, 284, 285, 287, 288: Rail device
284a: upper guide rail
284b: lower guide rail
284c: roller
284d: fixture
IST, ISB: insertion groove
SP: Fixed pad
SR: spring

Claims (5)

A loading device for loading a semiconductor device to be tested into a test tray at a loading position;
A connection device for electrically connecting the semiconductor devices loaded in the test tray in the test position to the tester when the test tray in which the loading of the semiconductor device is completed is moved to the test position by the loading device;
An unloading device for unloading the semiconductor device from the test tray turned on to the unloading position after the test of the semiconductor device electrically connected to the tester by the connection device is completed;
A transfer device for transferring the test tray in at least a partial section of a circulation path leading to the loading position through the loading position, the test position and the unloading position; And
A rail device guiding the movement of the test tray transferred by the transfer device; Including,
The rail device,
A guide rail having an insertion groove into which one end of the test tray can be inserted to guide the movement of the test tray; And
A fixture for fixing the position of the test tray supported by the guide rail; Including,
The fixing unit,
A fixing pad for fixing the position of the test tray;
An elastic member for applying an elastic pressing force to the test tray via a portion of the fixing pad by applying an elastic pressing force to a portion of the fixing pad in a direction toward the test tray; And
A first installation pin provided to fix and install one side of the fixing pad to the guide rail, and a first installation pin provided in the form of being inserted into a long hole formed in the other side of the fixing pad, and provided to be fixedly installed on the guide rail. 2 mounting pins; Including,
One side of the fixing pad is fixed to the guide rail, and the other side of the fixing pad is movable in the moving direction of the test tray,
The fixing pad is formed of a flexible material so that a portion of the fixing pad is bent by the elastic force of the elastic member to apply a pressing force to the test tray.
Test handler. The method of claim 1,
The elastic pressing force applied to the test tray by the elastic member is characterized in that it acts in a direction perpendicular to the moving direction of the test tray.
Test handler.













delete delete delete

Images