KR101080189B1 - Loader for test handler and test handler - Google Patents

Abstract

The present invention relates to a test handler. According to the present invention, the carrier board can be stably moved by having a function of fixing the carrier board to prevent partial departure of the carrier board when the loading device provided for moving the carrier board in the chamber is moved. A technique is disclosed.

Electronic component, semiconductor, test, handler, supply chamber, loading device, test chamber

Description

Load handler and test handler for test handlers {LOADER FOR TEST HANDLER AND TEST HANDLER}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a test handler and the like, and more particularly, to a test handler to which a new concept carrier board is suitably applied and related technologies.

In order to test electronic components (especially semiconductor devices), a tester for testing an electrically connected electronic component and a test handler, a device for electrically connecting the electronic component to the tester, are required.

In test handlers, carrier boards are used to transport multiple semiconductors at once to increase processing capacity.

Conventional carrier boards, called test trays, merely serve to circulate a constant circulation path after loading electronic components.

However, in order to increase the processing capacity of test handlers, a new concept of carrier boards (named 'test boards') has begun to be provided with connection terminals electrically connected to electronic components.

Accordingly, there is a need to develop a test handler to which a new concept carrier board can be suitably applied.

Republic of Korea Patent Publication No. 10-2009-0005901 (name of the invention: the carrier board circulation method and the chamber system of the test handler) according to the above-mentioned necessity to the technology of the test handler developed and filed by the applicant of the present invention ( Hereinafter referred to as 'prior art'.

According to the prior art, as shown in the related publication 1, the loading and unloading system is provided, and has a structure provided with a soak chamber, a supply chamber, a desock chamber and a test chamber.

In the structure in which the supply chamber is configured as in the prior art, the carrier board is moved from the soak chamber to the supply chamber and then supplied to the test chamber, and after the testing of the semiconductor device loaded in the test chamber is completed, the carrier board is moved to the supply chamber. It is supplied to a desock chamber. Applicants of the present invention, as in the prior art, in order to more smoothly and faster movement of the carrier board when the supply chamber is provided, the patent application No. 10-2009-0073441 (name of the invention: test of the invention) We have developed a pre- filed technology (hereinafter referred to as 'prior invention') as a carrier board conveying system for handlers and test handlers. The present invention relates to a conveying system for moving a carrier board in left and right and up and down directions in a supply chamber. The present invention includes the present invention as it is, and in particular, the present invention is important in the present invention. Paper is associated with a loading unit configured in the conveying system.

It is an object of the present invention to provide a technology in which a carrier board loaded on a loading apparatus moving in a supply chamber can maintain a stable loading state even during the movement of the loading apparatus.

The stacking device for a test handler according to the present invention for achieving the above object, the stacking frame is provided in the chamber and can be loaded at least one carrier board; A moving frame in which the loading frame is movably installed in a direction perpendicular to the loading surface of the carrier board; And a fixing device for fixing the at least one carrier board loaded on the loading frame. It includes.

The fixing device is installed to be movable within a range of a predetermined interval to the loading frame, the fixing member having at least one fixing pin for fixing the at least one carrier board; An elastic member for elastically pressing the fixing member so that the fixing member fixes the at least one carrier board; And a release device for releasing a fixed state of the carrier board by transmitting an external force to the fixing member to move the compression member while compressing the elastic member to release the fixing of the at least one carrier board. It includes.

The release device receives an external force at one end and the other end is rotatably coupled to the moving frame at a point between the one end and the other end so as to apply a moving force to the fixing member. Release member for applying a moving force in the direction to compress the elastic member to the fixing member while the other end; And a loading frame extending in a moving direction, the hinge coupled to the movable frame through a hinge coupling part protruding to one side to transmit an external force to the one end of the release member while rotating the hinge axis as a rotation axis. Transfer rods; .

It is preferable that the long member is formed in the fixing member in a direction perpendicular to the moving direction of the fixing member, and the release member has a bearing inserted into the long hole at the other end.

The moving frame is configured to move in a direction parallel to the loading surface of the carrier board mounted on the loading frame.

In addition, the test handler according to the present invention for achieving the above object, the loading system for loading an electronic component from the customer tray to the carrier board; A soak chamber provided to accommodate the carrier board which comes to be loaded with the electronic component by the loading system and to change the electronic component loaded on the carrier board to the required temperature condition; A test chamber provided for electrically connecting the electronic component loaded on the carrier board passing through the soak chamber to the tester side; A desock chamber provided to change the electronic component loaded on the carrier board passing through the test chamber close to room temperature; An unloading system for unloading an electronic component into a customer tray from a carrier board coming from the supply chamber; A supply chamber provided to send a carrier board from the soak chamber to the test chamber and to send a carrier board from the test chamber to the supply chamber; The stacking apparatus provided in the supply chamber; A plurality of external force sources for applying an external force for releasing the fixed state of the carrier board loaded on the stacking device; .

Each of the plurality of external force sources may include: a driving source provided outside the supply chamber to provide external force; And a rod that moves forward and backward according to the operation of the driving source, and applies an external force for releasing the fixed state of the carrier board to the loading apparatus when moving forward. It includes.

According to the present invention, since the carrier board can be stably loaded even in the case of any impact occurring while the stacking device or the stacking frame is moved in the supply chamber, the carrier board is loaded in the stacking device in the test chamber or the desock chamber. When moving to, the mobile devices that perform the work can perform the job properly on the carrier board in the fixed position, and there is a fear that the movement of the loading device may be poor due to the departure or partial departure of the carrier board. There will be no.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings, and descriptions of overlapping descriptions or well-known techniques will be omitted or compressed as much as possible for the sake of brevity.

1. Embodiment related to the loading device

1 is a schematic perspective view of a carrier board loading device (hereinafter, abbreviated as "loading device") for a test handler according to an embodiment of the present invention.

As shown in FIG. 1, the stacking device may be loaded with six carrier boards in a horizontal state, and may be reciprocated in a horizontal direction in a linear direction parallel to the stacking surface of the stacked carrier boards. The stacking device 100 is configured to include a moving frame 110, a stacking frame 120 and the fixing device 130.

The moving frame 110 has a rectangular parallelepiped skeletal structure, and is provided to reciprocate in a left and right direction in a linear direction parallel to the stacked surface of the loaded carrier board.

The stacking frame 120 is installed to be movable in the vertical direction, which is a direction perpendicular to the stacking surface of the carrier board CB loaded on the inside of the moving frame 110, and moves six carrier boards CB in the vertical direction. It can be loaded side by side horizontally. For reference, Figure 2 shows a process in which the carrier board (CB) is loaded on the loading frame 120.

The fixing device 130 is provided to fix the carrier board CB loaded on the loading frame 120. The fixing device 130 is configured to include a fixing member 131, a spring 132, a release device 133 and the like, as referred to in the excerpt perspective view of FIG.

The fixing member 131 is installed on the loading frame 120 so as to be movable in a vertical interval within a predetermined interval (it is omitted since the fixing member moves vertically along the LM guide installed in the loading frame because it is a general technical content). In a vertical shape at one side end in the same interval (the same interval as the spacing of the carrier board to be loaded in the loading frame) in a pointed downward shape on the protruding piece (131a) protruding toward the carrier board (CB) side It has six fixing pins (P).

Meanwhile, in order to correspond to the role of the fixing pin P of the fixing member 131, as shown in FIG. 2, a fixing hole h is formed in one side of the carrier board CB in the vertical direction. It is.

In addition, the long member 131b is formed in the fixing member 131 in the longitudinal direction perpendicular to the vertical direction.

The spring 132 is provided as an elastic member for elastically pressing the fixing member 131 downward. As shown in FIG. 4, the fixing pin is fixed to the fixing hole h formed in the loaded carrier board CB. (P) to maintain the inserted state serves to fix the carrier board (CB) loaded on the stacked loading frame 120.

Release device 130 is provided to release the fixed state of the carrier board (CB) by the fixing member 131 is configured to include a release member 133a and the transfer rod (133b).

The release member 133a is rotatably coupled to the loading frame 120 in an inclined state to form a predetermined angle with a vertical line, and bearings having a role of reducing frictional force at upper and lower ends, respectively. (133a-1, 133a-2)). Here, the bearing 133a-1 provided at the upper end is inserted into the long hole 131b.

The transmission rod 133b is provided to transmit external force (external force related to the external force to be described later) to the lower end of the release member 133a, and hinge coupling protruding to one side from the upper portion and the lower portion. The hinges are rotatably coupled to the moving frame 110 through the parts 133b-1 and 133b-2). The transfer rod 133b is only in contact with the bearing 133a-2 provided at the lower end of the release member 133a and is mechanically separated so that the loading frame 120 does not prevent the lifting of the loading frame 120. . Of course, in the example referred to in Figure 3 is implemented so that the bearing (133a-2) is in contact with the transfer rod (133b) even in the state of releasing the fixing of the carrier board, according to the implementation to release the fixing of the carrier board In the state, but apart from the transmission rod 133b and the bearing 133a-2 at a predetermined distance, while the external force is actuated to transmit the external force to the release member 133a while the transmission rod 133b contacts the bearing 133a-2. It may be.

In addition, since the stacking frame 120 is moved up and down, even if the stacking frame 120 is positioned up or down, external force through the transfer rod 133b is applied to the release member 133a installed in the stacking frame 120. It should work. Therefore, the transfer rod 133b is preferably installed in the vertical direction in the entire section in which the loading frame 120 is elevated.

Subsequently, the operation of the fixing device 130 will be described.

As shown in FIG. 5, when an external force F is applied to the transmission rod 133b by an external force source, the transmission rod 133b rotates in the direction of a arrow with the hinge axis as the rotation axis Z, and the release member 133a. Apply an external force to the lower end of the Then, the release member 133a is rotated in the direction of the b arrow, so that the upper end of the release member 133a has an upward vector portion in the upward direction, so that the upper end of the fixing member 131 is the bearing 133a. -1) the external member (F) coming through the transfer rod (133b) as a sliding force while sliding in the long hole (131b) to the fixing member 131 as a reference to Figure 6 fixed member 131 spring While compressing 132, it rises in the direction of the c arrow. Therefore, the fixing pin P is removed from the fixing hole h of the carrier board CB, and the fixing of the carrier boards CB loaded on the stacking device 100 is released.

Of course, when the external force applied to the transfer rod 133b is removed, the fixing member 131 is lowered to fix the loaded carrier boards CB.

The operation of the fixing device 130 as described above is sufficient if the carrier board (CB) is loaded on the loading device 100, or when the carrier board (CB) is separated from the loading device (100).

2. Example regarding a test handler

7 is a schematic plan view of a test handler 1000 according to an embodiment of the present invention.

In the test handler 1000 according to the present embodiment, the loading apparatus 100 is applied, and as shown in FIG. 7, the loading system 200, the soak chamber 300, the test chamber 400, and the desock. The chamber 500, the unloading system 600, the supply chamber 700, and three external force sources 800A, 800B, and 800C are further included.

The stacking device 100 is provided to be movable in the left and right direction inside the supply chamber 700.

The loading system 200 is provided to load the semiconductor device from the customer tray to the carrier board.

The soak chamber 300 is provided to accommodate the carrier boards coming into the semiconductor device loaded state by the loading system 200 and then change the semiconductor devices loaded on the accommodated carrier boards to the required temperature conditions.

The test chamber 400 is provided to electrically connect the semiconductor device loaded on the carrier board passing through the soak chamber 300 to the tester side.

The desock chamber 500 is provided to change the semiconductor device loaded on the carrier board passing through the test chamber 400 to near room temperature.

The unloading system 600 is provided to unload the semiconductor device from the carrier board coming from the desock chamber 500 to the customer tray.

The supply chamber 700 is provided to send the carrier board coming from the soak chamber 300 to the test chamber 400 and to send the carrier board coming from the test chamber 400 to the supply chamber 700.

Each of the three external force sources 800A, 800B, and 800C is for applying an external force to the transmission rod 133b configured in the loading apparatus 100, and includes a cylinder 810 and a rod 820.

The cylinder 810 is provided as a driving source for giving a driving force (external force) for operating the release device 130, and is provided outside the supply chamber 700 to ensure operation reliability. Therefore, the cylinder 810 may not be affected by the temperature environment (high or low temperature) of the supply chamber 700, and thus its life or operating reliability may be ensured.

The rod 820 is advanced or retracted toward the loading device 100 in accordance with the operation of the cylinder 810, and when moving forward can release the fixed state of the carrier board to the loading device (100, more specifically, the transfer rod). To exert external force. At the end of the rod 820, as shown in FIG. 8, a roller 821 for reducing friction with the transfer rod 133b is provided.

In the test handler 1000 according to the present embodiment, the loading apparatus 100 is a rear point A of the soak chamber 300, a front point B of the test chamber 400, and a rear point of the desock chamber 500. When the carrier board is located at (C), the carrier board is loaded into the loading apparatus 100 or the carrier board loaded on the loading apparatus 100 leaves the loading frame 120 to the test chamber 400 or the desock chamber 500. Will be supplied.

Therefore, the first external force source 800A is applied to the external force when the carrier board coming from the soak chamber 300 to the supply chamber 700 is loaded into the loading apparatus 100 at the rear point A of the soak chamber 300. And a second external force source 800B sends the carrier board loaded in the loading apparatus 100 at the front point B of the test chamber 400 to the test chamber 400 or the test chamber 400. When the carrier board coming from is loaded on the stacking device 100 at the front point (B) of the test chamber 400, it operates to apply an external force, the third external force source (800C) is the desock chamber (500) When the carrier board loaded in the loading device 100 at the rear point (C) of the send to the desock chamber 500 is operated to apply an external force.

Accordingly, the carrier board is fixed to the stacking frame 120 when the external force sources 800A, 800B, and 800C do not operate. That is, when the stacking device 100 moves to the left or right, or the stacking frame 120 moves up and down, the release device 133 is free from external force sources 800A, 800B, and 800C, and the carrier board is loaded into the stacking frame 120. Will be fixed to).

3. First application example regarding test handler

9 is a schematic plan view of a test handler 1100 adapted to have two test chambers 400L and 400R side by side.

In the test handler 1100 according to FIG. 9, the stacking apparatus 100 includes the rear point R of the soak chamber 320, the front point S of the first test chamber 400L, and the second test chamber 400R. When located at the front point (T) and the front point (U) of the desock chamber (520), the carrier board is loaded into or out of the stacking device (100).

Therefore, four external force sources 800 are required.

4. Second Application Example for Test Handler

FIG. 10 is a schematic plan view of a test handler 1200 having two supply apparatuses 100L and 100R in a supply chamber 720 and two test chambers 400L and 400R arranged side by side. .

Among the two loading apparatuses 100L and 100R, the first loading apparatus 100L is provided to send the carrier board from the soak chamber 320 to the first test chamber 400L or the second test chamber 400R. The second loading device 100R is provided for sending the carrier board from the first or second test chambers 400L and 400R to the desock chamber 520.

In the test handler 1200 according to such an application, the stacking apparatuses 100L and 100R are located at the rear point R of the soak chamber 320, the front point S of the first test chamber 400L, and the second test chamber Since the carrier board is loaded or detached from the loading apparatus 100L / 100R when positioned at the front point T of the 400R and the front point U of the desock chamber 520, the test handler 1100 of FIG. As in the external power source 800 is also sufficient if four are provided.

As described above, the detailed description of the present invention has been made through the embodiments with reference to the accompanying drawings. However, since the above-described embodiments have only been described with reference to preferred examples of the present invention, the present invention is limited to the above embodiments. It should not be understood that the scope of the present invention is to be understood by the claims and equivalent concepts described below.

1 is a schematic perspective view of a loading apparatus for a test handler according to an embodiment of the present invention.

FIG. 2 is a schematic perspective view of a stacking frame constructed in the stacking apparatus of FIG. 1. FIG.

3 is a perspective view of a fixing device of the stacking device of FIG.

4 to 6 are reference diagrams for reference in describing an operating state of the fixing device of FIG. 3.

7 is a schematic plan view of a test handler according to an embodiment of the present invention.

FIG. 8 is a schematic perspective view of an external force source configured in the test handler of FIG.

9 is a schematic plan view of a test handler according to a first application of the present invention.

10 is a schematic plan view of a test handler according to a second application of the present invention.

* Description of the code for the main parts of the drawings *

1000, 1100, 1200: test handler

100: loading device

110: moving frame

120: loading frame

130: fixing device

131: fixing member

P: fixed pin

132: spring

133: release device

133a: release member

133a-1, 133a-2: bearing

133b: transfer rod

200: loading system

300: soak chamber

400: test chamber

500: Desock Chamber

600: unloading system

700: supply chamber

800A, 800B, 800C: External power source

810: cylinder 820: rod

Claims (7)

A loading frame provided inside the chamber; A moving frame in which the loading frame is movably installed in a direction perpendicular to the loading surface of the carrier board; And A fixing device for fixing the at least one carrier board loaded on the loading frame; Including; At least one carrier board may be loaded in the stacking frame. Loading device for test handler. The method of claim 1, The fixing device, A fixing member installed on the loading frame so as to be movable within a predetermined interval and having at least one fixing pin for fixing the at least one carrier board; An elastic member for elastically pressing the fixing member so that the fixing member fixes the at least one carrier board; And A release device for releasing the fixed state of the carrier board by transmitting an external force to the fixing member to move the compression member while compressing the elastic member to release the fixing of the at least one carrier board; Characterized in that it comprises Carrier board loading device for test handler. 3. The method of claim 2, The release device is One side end receives an external force and the other end is rotatably coupled to the movable frame at a point between the one end and the other end so as to apply a moving force to the fixing member while rotating by the external force. However, the release member for applying a moving force in the direction to compress the elastic member to the fixing member; And The loading frame is elongated in a moving direction, and is coupled to the movable frame by a hinge rotatably connected to the movable frame through a hinge coupling part protruding to one side, thereby transmitting an external force to the one end of the release member while rotating the hinge axis as a rotation axis. Rods; Characterized in that it comprises Carrier board loading device for test handler. The method of claim 3, The long member is formed in the fixing member in a direction perpendicular to the moving direction of the fixing member, The release member has a bearing that is inserted into the long hole at the other end Carrier board loading device for test handler. The method of claim 1, The moving frame is characterized in that to move in a direction parallel to the loading surface of the carrier board loaded on the loading frame Carrier board loading device for test handler. A loading system for loading electronic components from a customer tray into a carrier board; A soak chamber provided to accommodate the carrier board which comes to be loaded with the electronic component by the loading system and to change the electronic component loaded on the carrier board to the required temperature condition; A test chamber provided for electrically connecting the electronic component loaded on the carrier board passing through the soak chamber to the tester side; A desock chamber provided to change the electronic component loaded on the carrier board passing through the test chamber to near room temperature; An unloading system for unloading an electronic component into a customer tray from a carrier board coming from the desock chamber; A supply chamber provided to send a carrier board from the soak chamber to the test chamber and to send a carrier board from the test chamber to the desock chamber; At least one stacking device according to any one of claims 1 to 5 provided in the supply chamber; And A plurality of external force sources for applying an external force to release the fixed state of the carrier board loaded on the at least one stacking device; Characterized in that it comprises Test handler. The method of claim 6, Each of the plurality of external force sources, A drive source provided outside of the supply chamber to provide an external force; And A rod that moves forward and backward according to the operation of the driving source, and applies an external force for releasing the fixed state of the carrier board to the loading device when the drive source moves forward; Characterized in that it comprises Test handler

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