KR102228612B1 - 바이어스 전압 및 방출 전류 제어 및 측정으로의 이온화 압력 게이지 - Google Patents

바이어스 전압 및 방출 전류 제어 및 측정으로의 이온화 압력 게이지 Download PDF

Info

Publication number
KR102228612B1
KR102228612B1 KR1020187003398A KR20187003398A KR102228612B1 KR 102228612 B1 KR102228612 B1 KR 102228612B1 KR 1020187003398 A KR1020187003398 A KR 1020187003398A KR 20187003398 A KR20187003398 A KR 20187003398A KR 102228612 B1 KR102228612 B1 KR 102228612B1
Authority
KR
South Korea
Prior art keywords
current
cathode
electron emission
bias voltage
emission current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR1020187003398A
Other languages
English (en)
Korean (ko)
Other versions
KR20180027542A (ko
Inventor
더글라스 씨. 한센
Original Assignee
엠케이에스 인스트루먼츠, 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엠케이에스 인스트루먼츠, 인코포레이티드 filed Critical 엠케이에스 인스트루먼츠, 인코포레이티드
Publication of KR20180027542A publication Critical patent/KR20180027542A/ko
Application granted granted Critical
Publication of KR102228612B1 publication Critical patent/KR102228612B1/ko
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
KR1020187003398A 2015-07-09 2016-05-12 바이어스 전압 및 방출 전류 제어 및 측정으로의 이온화 압력 게이지 Expired - Fee Related KR102228612B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/795,729 2015-07-09
US14/795,729 US9927317B2 (en) 2015-07-09 2015-07-09 Ionization pressure gauge with bias voltage and emission current control and measurement
PCT/US2016/032070 WO2017007531A1 (en) 2015-07-09 2016-05-12 Ionization pressure gauge with bias voltage and emission current control and measurement

Publications (2)

Publication Number Publication Date
KR20180027542A KR20180027542A (ko) 2018-03-14
KR102228612B1 true KR102228612B1 (ko) 2021-03-16

Family

ID=56084395

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187003398A Expired - Fee Related KR102228612B1 (ko) 2015-07-09 2016-05-12 바이어스 전압 및 방출 전류 제어 및 측정으로의 이온화 압력 게이지

Country Status (7)

Country Link
US (1) US9927317B2 (https=)
EP (1) EP3298374B1 (https=)
JP (1) JP6814789B2 (https=)
KR (1) KR102228612B1 (https=)
CN (1) CN107850506B (https=)
DK (1) DK3298374T3 (https=)
WO (1) WO2017007531A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
JP6826131B2 (ja) * 2016-05-02 2021-02-03 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 複数の陰極を備える冷陰極電離真空計
JP6772391B2 (ja) * 2018-06-18 2020-10-21 株式会社アルバック 電離真空計及び制御装置
CN108918026B (zh) * 2018-09-11 2020-12-25 北京东方计量测试研究所 一种热阴极电离真空计电参数校准装置及方法
CN116362179B (zh) * 2023-03-24 2023-11-17 深圳京鸿源科技有限公司 一种基于动态调节mosfet电路功耗的控制方法

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4035720A (en) * 1975-12-31 1977-07-12 Harvey Philip C Ion gauge system
US4158794A (en) * 1978-07-14 1979-06-19 P. R. Mallory & Co. Inc. Drive means and method for vacuum fluorescent display systems
JPS5697865A (en) * 1980-01-07 1981-08-06 Hitachi Ltd Ionization detector
GB2105047B (en) 1981-08-28 1986-04-03 British Oxygen Co Ltd Pirani gauges
JPS60157151A (ja) * 1984-01-25 1985-08-17 Hitachi Ltd 真空排気制御装置
CN85200112U (zh) * 1985-04-01 1986-09-24 北京大学 饿流放大式电离真空计发射电流稳定器
JP2672950B2 (ja) * 1987-10-20 1997-11-05 株式会社芝浦製作所 エミッションコントロール装置
DE3930699C2 (de) * 1989-09-14 1994-02-03 Perzl Peter Vorrichtung zur Energieeinkopplung in eine durchströmte elektrische Gasentladung
US5250906A (en) 1991-10-17 1993-10-05 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5608384A (en) 1992-10-23 1997-03-04 Sentech Corporation Method and apparatus for monitoring for the presence of a gas
US5801535A (en) 1996-11-12 1998-09-01 Granville-Phillips Company Ionization gauge and method of using and calibrating same
JP3734913B2 (ja) 1997-01-27 2006-01-11 株式会社アルバック 電離真空計制御装置
US6025723A (en) * 1997-08-27 2000-02-15 Granville-Phillips Company Miniature ionization gauge utilizing multiple ion collectors
JP3324522B2 (ja) 1998-09-16 2002-09-17 日本電気株式会社 可変利得増幅回路及び利得制御方法
JP4339948B2 (ja) 1999-02-25 2009-10-07 キヤノンアネルバ株式会社 熱陰極電離真空計
JP4493139B2 (ja) 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
JP4092246B2 (ja) 2002-05-27 2008-05-28 インフィネオン テクノロジーズ アクチエンゲゼルシャフト パワースイッチデバイス
US6756785B2 (en) 2002-07-25 2004-06-29 Mks Instruments, Inc. Pressure controlled degas system for hot cathode ionization pressure gauges
US7295015B2 (en) 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
CN1965219A (zh) * 2004-03-12 2007-05-16 布鲁克斯自动化有限公司 电离真空计
JP3108712U (ja) 2004-11-11 2005-04-28 アルプス電気株式会社 可変利得増幅回路
EP1698878A1 (en) 2005-03-04 2006-09-06 Inficon GmbH Electrode configuration and pressure measuring apparatus
JP5127042B2 (ja) 2005-05-09 2013-01-23 株式会社アンペール 電離真空計
EP2002623A1 (en) 2006-03-27 2008-12-17 Nxp B.V. A low voltage and low power differential driver with matching output impedances
US7429863B2 (en) 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
WO2008133074A1 (ja) * 2007-04-16 2008-11-06 Ulvac, Inc. 質量分析計の制御方法及び質量分析計
US8686733B2 (en) 2007-12-19 2014-04-01 Brooks Automation, Inc. Ionization gauge having electron multiplier cold emission source
CN101990630B (zh) * 2008-02-21 2013-08-14 布鲁克机械公司 具有设计用于高压操作的操作参数和几何形状的电离计
JP5136892B2 (ja) * 2008-03-03 2013-02-06 株式会社ネットコムセック 電圧制御装置、電源装置、電子管及び高周波回路システム
JP5223497B2 (ja) 2008-06-27 2013-06-26 富士通セミコンダクター株式会社 ピークホールド回路
WO2010033427A1 (en) 2008-09-19 2010-03-25 Brooks Automation, Inc. Ionization gauge with emission current and bias potential control
JP4636461B2 (ja) 2009-01-13 2011-02-23 セイコーインスツル株式会社 電源電圧監視回路、および該電源電圧監視回路を備える電子回路
WO2010106792A1 (ja) 2009-03-18 2010-09-23 株式会社アルバック 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置
JP5716346B2 (ja) 2010-10-13 2015-05-13 株式会社リコー 信号バッファ回路とセンサ制御基板と画像読取装置および画像形成装置
JP2014164577A (ja) 2013-02-26 2014-09-08 Sumitomo Electric Ind Ltd 駆動回路
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement

Also Published As

Publication number Publication date
US9927317B2 (en) 2018-03-27
DK3298374T3 (da) 2019-11-11
JP2018519528A (ja) 2018-07-19
CN107850506B (zh) 2020-09-11
US20170010172A1 (en) 2017-01-12
EP3298374A1 (en) 2018-03-28
WO2017007531A1 (en) 2017-01-12
EP3298374B1 (en) 2019-09-25
CN107850506A (zh) 2018-03-27
JP6814789B2 (ja) 2021-01-20
KR20180027542A (ko) 2018-03-14

Similar Documents

Publication Publication Date Title
KR102228612B1 (ko) 바이어스 전압 및 방출 전류 제어 및 측정으로의 이온화 압력 게이지
TWI856474B (zh) 用於測量氣體壓力的熱傳導量計和用於測量氣體壓力的方法
US6619131B2 (en) Combination pressure sensor with capacitive and thermal elements
US9677964B2 (en) Apparatus and method for automatic detection of diaphragm coating or surface contamination for capacitance diaphragm gauges
TWI725180B (zh) 具備多個陰極之冷陰極離子化真空計
DuMond et al. Superiority of a Knudsen type vacuum gauge for large metal systems with organic vapor pumps; Its design and operation
US10132707B2 (en) Devices and methods for feedthrough leakage current detection and decontamination in ionization gauges
JPH10213509A (ja) 圧力測定装置
CN120266174A (zh) 针对基于电离室的警报的泄漏电流噪声降低
JP6772391B2 (ja) 電離真空計及び制御装置
JPH11183296A (ja) 熱陰極電離真空計

Legal Events

Date Code Title Description
PA0105 International application

St.27 status event code: A-0-1-A10-A15-nap-PA0105

PG1501 Laying open of application

St.27 status event code: A-1-1-Q10-Q12-nap-PG1501

A201 Request for examination
AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PA0201 Request for examination

St.27 status event code: A-1-2-D10-D11-exm-PA0201

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

St.27 status event code: A-1-2-D10-D21-exm-PE0902

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

E601 Decision to refuse application
PE0601 Decision on rejection of patent

St.27 status event code: N-2-6-B10-B15-exm-PE0601

X091 Application refused [patent]
T11-X000 Administrative time limit extension requested

St.27 status event code: U-3-3-T10-T11-oth-X000

T13-X000 Administrative time limit extension granted

St.27 status event code: U-3-3-T10-T13-oth-X000

AMND Amendment
P11-X000 Amendment of application requested

St.27 status event code: A-2-2-P10-P11-nap-X000

P13-X000 Application amended

St.27 status event code: A-2-2-P10-P13-nap-X000

PX0901 Re-examination

St.27 status event code: A-2-3-E10-E12-rex-PX0901

PX0701 Decision of registration after re-examination

St.27 status event code: A-3-4-F10-F13-rex-PX0701

X701 Decision to grant (after re-examination)
GRNT Written decision to grant
PR0701 Registration of establishment

St.27 status event code: A-2-4-F10-F11-exm-PR0701

PR1002 Payment of registration fee

St.27 status event code: A-2-2-U10-U12-oth-PR1002

Fee payment year number: 1

PG1601 Publication of registration

St.27 status event code: A-4-4-Q10-Q13-nap-PG1601

PR1001 Payment of annual fee

St.27 status event code: A-4-4-U10-U11-oth-PR1001

Fee payment year number: 4

PC1903 Unpaid annual fee

St.27 status event code: A-4-4-U10-U13-oth-PC1903

Not in force date: 20250311

Payment event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

R18 Changes to party contact information recorded

Free format text: ST27 STATUS EVENT CODE: A-5-5-R10-R18-OTH-X000 (AS PROVIDED BY THE NATIONAL OFFICE)

R18-X000 Changes to party contact information recorded

St.27 status event code: A-5-5-R10-R18-oth-X000

H13 Ip right lapsed

Free format text: ST27 STATUS EVENT CODE: N-4-6-H10-H13-OTH-PC1903 (AS PROVIDED BY THE NATIONAL OFFICE); TERMINATION CATEGORY : DEFAULT_OF_REGISTRATION_FEE

Effective date: 20250311

PC1903 Unpaid annual fee

St.27 status event code: N-4-6-H10-H13-oth-PC1903

Ip right cessation event data comment text: Termination Category : DEFAULT_OF_REGISTRATION_FEE

Not in force date: 20250311