CN107850506B - 电离压力计和操作电离压力计的方法 - Google Patents

电离压力计和操作电离压力计的方法 Download PDF

Info

Publication number
CN107850506B
CN107850506B CN201680040313.7A CN201680040313A CN107850506B CN 107850506 B CN107850506 B CN 107850506B CN 201680040313 A CN201680040313 A CN 201680040313A CN 107850506 B CN107850506 B CN 107850506B
Authority
CN
China
Prior art keywords
electron emission
cathode
current
emission current
bias voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201680040313.7A
Other languages
English (en)
Chinese (zh)
Other versions
CN107850506A (zh
Inventor
D·C·汉森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MKS Instruments Inc
Original Assignee
MKS Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by MKS Instruments Inc filed Critical MKS Instruments Inc
Publication of CN107850506A publication Critical patent/CN107850506A/zh
Application granted granted Critical
Publication of CN107850506B publication Critical patent/CN107850506B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/32—Vacuum gauges by making use of ionisation effects using electric discharge tubes with thermionic cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
    • G01L1/142—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors
    • G01L1/144—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators using capacitors with associated circuitry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G01L21/34—Vacuum gauges by making use of ionisation effects using electric discharge tubes with cold cathodes

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
CN201680040313.7A 2015-07-09 2016-05-12 电离压力计和操作电离压力计的方法 Active CN107850506B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/795,729 2015-07-09
US14/795,729 US9927317B2 (en) 2015-07-09 2015-07-09 Ionization pressure gauge with bias voltage and emission current control and measurement
PCT/US2016/032070 WO2017007531A1 (en) 2015-07-09 2016-05-12 Ionization pressure gauge with bias voltage and emission current control and measurement

Publications (2)

Publication Number Publication Date
CN107850506A CN107850506A (zh) 2018-03-27
CN107850506B true CN107850506B (zh) 2020-09-11

Family

ID=56084395

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680040313.7A Active CN107850506B (zh) 2015-07-09 2016-05-12 电离压力计和操作电离压力计的方法

Country Status (7)

Country Link
US (1) US9927317B2 (https=)
EP (1) EP3298374B1 (https=)
JP (1) JP6814789B2 (https=)
KR (1) KR102228612B1 (https=)
CN (1) CN107850506B (https=)
DK (1) DK3298374T3 (https=)
WO (1) WO2017007531A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement
JP6826131B2 (ja) * 2016-05-02 2021-02-03 エム ケー エス インストルメンツ インコーポレーテッドＭｋｓ Ｉｎｓｔｒｕｍｅｎｔｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ 複数の陰極を備える冷陰極電離真空計
JP6772391B2 (ja) * 2018-06-18 2020-10-21 株式会社アルバック 電離真空計及び制御装置
CN108918026B (zh) * 2018-09-11 2020-12-25 北京东方计量测试研究所 一种热阴极电离真空计电参数校准装置及方法
CN116362179B (zh) * 2023-03-24 2023-11-17 深圳京鸿源科技有限公司 一种基于动态调节mosfet电路功耗的控制方法

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4035720A (en) * 1975-12-31 1977-07-12 Harvey Philip C Ion gauge system
US4158794A (en) * 1978-07-14 1979-06-19 P. R. Mallory & Co. Inc. Drive means and method for vacuum fluorescent display systems
JPS5697865A (en) * 1980-01-07 1981-08-06 Hitachi Ltd Ionization detector
GB2105047B (en) 1981-08-28 1986-04-03 British Oxygen Co Ltd Pirani gauges
JPS60157151A (ja) * 1984-01-25 1985-08-17 Hitachi Ltd 真空排気制御装置
CN85200112U (zh) * 1985-04-01 1986-09-24 北京大学 饿流放大式电离真空计发射电流稳定器
JP2672950B2 (ja) * 1987-10-20 1997-11-05 株式会社芝浦製作所 エミッションコントロール装置
DE3930699C2 (de) * 1989-09-14 1994-02-03 Perzl Peter Vorrichtung zur Energieeinkopplung in eine durchströmte elektrische Gasentladung
US5250906A (en) 1991-10-17 1993-10-05 Granville-Phillips Company Ionization gauge and method of using and calibrating same
US5608384A (en) 1992-10-23 1997-03-04 Sentech Corporation Method and apparatus for monitoring for the presence of a gas
US5801535A (en) 1996-11-12 1998-09-01 Granville-Phillips Company Ionization gauge and method of using and calibrating same
JP3734913B2 (ja) 1997-01-27 2006-01-11 株式会社アルバック 電離真空計制御装置
US6025723A (en) * 1997-08-27 2000-02-15 Granville-Phillips Company Miniature ionization gauge utilizing multiple ion collectors
JP3324522B2 (ja) 1998-09-16 2002-09-17 日本電気株式会社 可変利得増幅回路及び利得制御方法
JP4339948B2 (ja) 1999-02-25 2009-10-07 キヤノンアネルバ株式会社 熱陰極電離真空計
JP4493139B2 (ja) 2000-02-02 2010-06-30 キヤノンアネルバ株式会社 電離真空計
JP4092246B2 (ja) 2002-05-27 2008-05-28 インフィネオン テクノロジーズ アクチエンゲゼルシャフト パワースイッチデバイス
US6756785B2 (en) 2002-07-25 2004-06-29 Mks Instruments, Inc. Pressure controlled degas system for hot cathode ionization pressure gauges
US7295015B2 (en) 2004-02-19 2007-11-13 Brooks Automation, Inc. Ionization gauge
CN1965219A (zh) * 2004-03-12 2007-05-16 布鲁克斯自动化有限公司 电离真空计
JP3108712U (ja) 2004-11-11 2005-04-28 アルプス電気株式会社 可変利得増幅回路
EP1698878A1 (en) 2005-03-04 2006-09-06 Inficon GmbH Electrode configuration and pressure measuring apparatus
JP5127042B2 (ja) 2005-05-09 2013-01-23 株式会社アンペール 電離真空計
EP2002623A1 (en) 2006-03-27 2008-12-17 Nxp B.V. A low voltage and low power differential driver with matching output impedances
US7429863B2 (en) 2006-07-18 2008-09-30 Brooks Automation, Inc. Method and apparatus for maintaining emission capabilities of hot cathodes in harsh environments
WO2008133074A1 (ja) * 2007-04-16 2008-11-06 Ulvac, Inc. 質量分析計の制御方法及び質量分析計
US8686733B2 (en) 2007-12-19 2014-04-01 Brooks Automation, Inc. Ionization gauge having electron multiplier cold emission source
CN101990630B (zh) * 2008-02-21 2013-08-14 布鲁克机械公司 具有设计用于高压操作的操作参数和几何形状的电离计
JP5136892B2 (ja) * 2008-03-03 2013-02-06 株式会社ネットコムセック 電圧制御装置、電源装置、電子管及び高周波回路システム
JP5223497B2 (ja) 2008-06-27 2013-06-26 富士通セミコンダクター株式会社 ピークホールド回路
WO2010033427A1 (en) 2008-09-19 2010-03-25 Brooks Automation, Inc. Ionization gauge with emission current and bias potential control
JP4636461B2 (ja) 2009-01-13 2011-02-23 セイコーインスツル株式会社 電源電圧監視回路、および該電源電圧監視回路を備える電子回路
WO2010106792A1 (ja) 2009-03-18 2010-09-23 株式会社アルバック 酸素の検出方法，空気リークの判別方法，ガス成分検出装置，及び真空処理装置
JP5716346B2 (ja) 2010-10-13 2015-05-13 株式会社リコー 信号バッファ回路とセンサ制御基板と画像読取装置および画像形成装置
JP2014164577A (ja) 2013-02-26 2014-09-08 Sumitomo Electric Ind Ltd 駆動回路
US9927317B2 (en) 2015-07-09 2018-03-27 Mks Instruments, Inc. Ionization pressure gauge with bias voltage and emission current control and measurement

Also Published As

Publication number Publication date
US9927317B2 (en) 2018-03-27
DK3298374T3 (da) 2019-11-11
JP2018519528A (ja) 2018-07-19
US20170010172A1 (en) 2017-01-12
EP3298374A1 (en) 2018-03-28
WO2017007531A1 (en) 2017-01-12
EP3298374B1 (en) 2019-09-25
CN107850506A (zh) 2018-03-27
JP6814789B2 (ja) 2021-01-20
KR20180027542A (ko) 2018-03-14
KR102228612B1 (ko) 2021-03-16

Similar Documents

Publication Publication Date Title
CN107850506B (zh) 电离压力计和操作电离压力计的方法
TWI856474B (zh) 用於測量氣體壓力的熱傳導量計和用於測量氣體壓力的方法
EP2737291B1 (en) Cold cathode gauge fast response signal circuit
US9677964B2 (en) Apparatus and method for automatic detection of diaphragm coating or surface contamination for capacitance diaphragm gauges
US20020129657A1 (en) Combination pressure sensor with capactive and thermal elements
TWI725180B (zh) 具備多個陰極之冷陰極離子化真空計
KR100620671B1 (ko) 압력 센서, 압력 측정 장치 및 쳄버내 압력 모니터링 방법
US10132707B2 (en) Devices and methods for feedthrough leakage current detection and decontamination in ionization gauges
DuMond et al. Superiority of a Knudsen type vacuum gauge for large metal systems with organic vapor pumps; Its design and operation
JPH10213509A (ja) 圧力測定装置
CN120266174A (zh) 针对基于电离室的警报的泄漏电流噪声降低
JP6772391B2 (ja) 電離真空計及び制御装置
US2974232A (en) Calibration circuit

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant