KR102187839B1 - 테스트핸들러 - Google Patents

테스트핸들러 Download PDF

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Publication number
KR102187839B1
KR102187839B1 KR1020140168691A KR20140168691A KR102187839B1 KR 102187839 B1 KR102187839 B1 KR 102187839B1 KR 1020140168691 A KR1020140168691 A KR 1020140168691A KR 20140168691 A KR20140168691 A KR 20140168691A KR 102187839 B1 KR102187839 B1 KR 102187839B1
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KR
South Korea
Prior art keywords
plate
match plate
rail
pin
pressure plate
Prior art date
Application number
KR1020140168691A
Other languages
English (en)
Korean (ko)
Other versions
KR20160064722A (ko
Inventor
나윤성
노종기
Original Assignee
(주)테크윙
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)테크윙 filed Critical (주)테크윙
Priority to KR1020140168691A priority Critical patent/KR102187839B1/ko
Priority to CN202010190958.7A priority patent/CN111375570B/zh
Priority to PCT/KR2015/012565 priority patent/WO2016085206A1/fr
Priority to CN201580060399.5A priority patent/CN107003350B/zh
Priority to TW104139313A priority patent/TWI589896B/zh
Publication of KR20160064722A publication Critical patent/KR20160064722A/ko
Application granted granted Critical
Publication of KR102187839B1 publication Critical patent/KR102187839B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/44—Modifications of instruments for temperature compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
KR1020140168691A 2014-11-28 2014-11-28 테스트핸들러 KR102187839B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020140168691A KR102187839B1 (ko) 2014-11-28 2014-11-28 테스트핸들러
CN202010190958.7A CN111375570B (zh) 2014-11-28 2015-11-20 测试分选机
PCT/KR2015/012565 WO2016085206A1 (fr) 2014-11-28 2015-11-20 Gestionnaire de test
CN201580060399.5A CN107003350B (zh) 2014-11-28 2015-11-20 测试分选机
TW104139313A TWI589896B (zh) 2014-11-28 2015-11-26 Test sorter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140168691A KR102187839B1 (ko) 2014-11-28 2014-11-28 테스트핸들러

Publications (2)

Publication Number Publication Date
KR20160064722A KR20160064722A (ko) 2016-06-08
KR102187839B1 true KR102187839B1 (ko) 2020-12-08

Family

ID=56074673

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140168691A KR102187839B1 (ko) 2014-11-28 2014-11-28 테스트핸들러

Country Status (4)

Country Link
KR (1) KR102187839B1 (fr)
CN (2) CN107003350B (fr)
TW (1) TWI589896B (fr)
WO (1) WO2016085206A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180082754A (ko) * 2017-01-11 2018-07-19 (주)테크윙 테스트핸들러용 가압장치
KR102461321B1 (ko) * 2017-08-18 2022-11-02 (주)테크윙 전자부품 테스트용 핸들러
CN115808605B (zh) * 2022-12-09 2023-07-04 苏师大半导体材料与设备研究院(邳州)有限公司 一种半导体材料制备用质量检测装置
CN115792309B (zh) * 2023-01-10 2023-04-11 法特迪精密科技（苏州）有限公司 便于两种封装芯片切换测试的高温老化测试插座上盖结构

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100434790B1 (ko) 1997-05-20 2004-06-07 동경 엘렉트론 주식회사 처리 장치
KR100709114B1 (ko) * 2006-01-23 2007-04-18 (주)테크윙 테스트핸들러
CN104001680A (zh) 2013-06-18 2014-08-27 泰克元有限公司 测试分选机

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR940003390Y1 (ko) * 1991-12-06 1994-05-23 삼성전관 주식회사 마스크프레임 지지체
KR100243049B1 (ko) * 1997-04-04 2000-03-02 윤종용 반도체 디바이스 테스트용 핸들러 시스템의 픽 앤 플레이스 및 이를 사용하여 반도체 디바이스를 프리사이징하는 방법
EP0997741A3 (fr) * 1998-10-31 2001-04-04 Mirae Corporation Dispositif de support pour un manipulateur de modules de circuits intégrés
KR100392229B1 (ko) * 2001-01-09 2003-07-22 미래산업 주식회사 반도체 소자 테스트 핸들러의 인덱스헤드
KR100771474B1 (ko) * 2006-02-24 2007-10-30 (주)테크윙 테스트핸들러용 테스트트레이
CN2899976Y (zh) * 2006-05-15 2007-05-16 常州市天宁天达电子设备有限公司 薄膜电容器测试分选机的电刷升降装置
KR101104413B1 (ko) * 2009-09-25 2012-01-16 세크론 주식회사 반도체 소자 테스트용 접속 장치 및 이를 포함하는 테스트 핸들러
KR101559419B1 (ko) * 2011-12-27 2015-10-13 (주)테크윙 테스트핸들러
KR101658078B1 (ko) * 2012-01-03 2016-09-21 (주)테크윙 테스트핸들러
KR101811646B1 (ko) * 2012-05-17 2017-12-26 (주)테크윙 테스트핸들러용 픽앤플레이스장치
KR102037925B1 (ko) * 2013-05-02 2019-10-29 세메스 주식회사 테스트 핸들러의 접속 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100434790B1 (ko) 1997-05-20 2004-06-07 동경 엘렉트론 주식회사 처리 장치
KR100709114B1 (ko) * 2006-01-23 2007-04-18 (주)테크윙 테스트핸들러
CN104001680A (zh) 2013-06-18 2014-08-27 泰克元有限公司 测试分选机

Also Published As

Publication number Publication date
CN111375570B (zh) 2022-05-24
WO2016085206A1 (fr) 2016-06-02
KR20160064722A (ko) 2016-06-08
TWI589896B (zh) 2017-07-01
CN111375570A (zh) 2020-07-07
CN107003350B (zh) 2020-04-10
CN107003350A (zh) 2017-08-01
TW201619624A (zh) 2016-06-01

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