KR102184244B1 - 개별적으로 패턴화된 이방성을 갖는 소자들의 신속 제조 - Google Patents

개별적으로 패턴화된 이방성을 갖는 소자들의 신속 제조 Download PDF

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KR102184244B1
KR102184244B1 KR1020147035478A KR20147035478A KR102184244B1 KR 102184244 B1 KR102184244 B1 KR 102184244B1 KR 1020147035478 A KR1020147035478 A KR 1020147035478A KR 20147035478 A KR20147035478 A KR 20147035478A KR 102184244 B1 KR102184244 B1 KR 102184244B1
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light
slm
substrate
polarization
exposure unit
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KR20150023402A (ko
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클라우스 슈미트
후베르트 자이베를레
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롤리크 아게
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3025—Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00634—Production of filters
    • B29D11/00644—Production of filters polarizing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B42—BOOKBINDING; ALBUMS; FILES; SPECIAL PRINTED MATTER
    • B42D—BOOKS; BOOK COVERS; LOOSE LEAVES; PRINTED MATTER CHARACTERISED BY IDENTIFICATION OR SECURITY FEATURES; PRINTED MATTER OF SPECIAL FORMAT OR STYLE NOT OTHERWISE PROVIDED FOR; DEVICES FOR USE THEREWITH AND NOT OTHERWISE PROVIDED FOR; MOVABLE-STRIP WRITING OR READING APPARATUS
    • B42D25/00—Information-bearing cards or sheet-like structures characterised by identification or security features; Manufacture thereof
    • B42D25/30—Identification or security features, e.g. for preventing forgery
    • B42D25/36—Identification or security features, e.g. for preventing forgery comprising special materials
    • B42D25/364—Liquid crystals
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
    • G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/30—Polarising elements
    • G02B5/3083—Birefringent or phase retarding elements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2203/00—Function characteristic
    • G02F2203/12—Function characteristic spatial light modulator

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nonlinear Science (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polarising Elements (AREA)
  • Credit Cards Or The Like (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR1020147035478A 2012-05-30 2013-05-13 개별적으로 패턴화된 이방성을 갖는 소자들의 신속 제조 Active KR102184244B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12170012 2012-05-30
EP12170012.4 2012-05-30
PCT/EP2013/059779 WO2013178453A1 (en) 2012-05-30 2013-05-13 Fast generation of elements with individually patterned anisotropy

Publications (2)

Publication Number Publication Date
KR20150023402A KR20150023402A (ko) 2015-03-05
KR102184244B1 true KR102184244B1 (ko) 2020-12-01

Family

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KR1020147035478A Active KR102184244B1 (ko) 2012-05-30 2013-05-13 개별적으로 패턴화된 이방성을 갖는 소자들의 신속 제조

Country Status (8)

Country Link
US (1) US9869935B2 (enExample)
EP (1) EP2856223B1 (enExample)
JP (2) JP6552410B2 (enExample)
KR (1) KR102184244B1 (enExample)
CN (1) CN104364682B (enExample)
AU (2) AU2013269942B2 (enExample)
BR (1) BR112014029923A2 (enExample)
WO (1) WO2013178453A1 (enExample)

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KR102240655B1 (ko) * 2014-02-13 2021-04-16 삼성디스플레이 주식회사 노광 장치 및 이를 이용한 노광 방법
CN104460069B (zh) * 2014-12-30 2017-11-14 京东方科技集团股份有限公司 一种对位设备及其对位方法
CN104570538B (zh) * 2015-01-27 2017-11-24 京东方科技集团股份有限公司 一种显示装置
DE102016006390A1 (de) * 2016-05-24 2017-11-30 Audi Ag Beleuchtungseinrichtung für ein Kraftfahrzeug zur Erhöhung der Erkennbarkeit eines Hindernisses
JP2018060001A (ja) * 2016-10-04 2018-04-12 東京エレクトロン株式会社 補助露光装置及び露光量分布取得方法
US10809626B2 (en) * 2017-10-26 2020-10-20 The United States Of America As Represented By The Secretary Of The Air Force Generation of vector partially coherent optical sources using phase-only spatial light modulators
EP3650937B1 (en) * 2018-11-08 2024-05-22 Canon Kabushiki Kaisha Imprint apparatus and product manufacturing method
KR20210130885A (ko) * 2020-04-22 2021-11-02 삼성디스플레이 주식회사 잉크젯 프린팅 장치 및 이를 이용한 쌍극성 소자의 프린팅 방법
TWI792281B (zh) * 2020-05-22 2023-02-11 台灣積體電路製造股份有限公司 半導體光刻技術及/或方法

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Also Published As

Publication number Publication date
BR112014029923A2 (pt) 2017-06-27
JP6552410B2 (ja) 2019-07-31
AU2013269942B2 (en) 2016-11-03
US9869935B2 (en) 2018-01-16
EP2856223A1 (en) 2015-04-08
AU2013269942A1 (en) 2014-11-20
JP2019133183A (ja) 2019-08-08
US20150109597A1 (en) 2015-04-23
JP2015518183A (ja) 2015-06-25
WO2013178453A1 (en) 2013-12-05
CN104364682B (zh) 2018-06-01
AU2017200037B2 (en) 2018-05-31
AU2017200037A1 (en) 2017-02-02
CN104364682A (zh) 2015-02-18
KR20150023402A (ko) 2015-03-05
EP2856223B1 (en) 2020-12-23

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