KR102172628B1 - 특히 건식 가공 작업에 의해 감소된 크레이터 마모를 나타내는 고성능 공구 - Google Patents
특히 건식 가공 작업에 의해 감소된 크레이터 마모를 나타내는 고성능 공구 Download PDFInfo
- Publication number
- KR102172628B1 KR102172628B1 KR1020147032145A KR20147032145A KR102172628B1 KR 102172628 B1 KR102172628 B1 KR 102172628B1 KR 1020147032145 A KR1020147032145 A KR 1020147032145A KR 20147032145 A KR20147032145 A KR 20147032145A KR 102172628 B1 KR102172628 B1 KR 102172628B1
- Authority
- KR
- South Korea
- Prior art keywords
- coating system
- nanolayer
- coating
- layer
- deposited
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003754 machining Methods 0.000 title description 7
- 230000001747 exhibiting effect Effects 0.000 title 1
- 238000000576 coating method Methods 0.000 claims abstract description 113
- 239000011248 coating agent Substances 0.000 claims abstract description 102
- 239000002052 molecular layer Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 229910052796 boron Inorganic materials 0.000 claims abstract description 30
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910052582 BN Inorganic materials 0.000 claims abstract description 6
- 239000011651 chromium Substances 0.000 claims description 49
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 32
- 238000000034 method Methods 0.000 claims description 30
- 229910052782 aluminium Inorganic materials 0.000 claims description 22
- 229910052804 chromium Inorganic materials 0.000 claims description 20
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 238000000151 deposition Methods 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 16
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 11
- 239000012298 atmosphere Substances 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 238000007733 ion plating Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 4
- 238000005240 physical vapour deposition Methods 0.000 claims description 4
- 238000009792 diffusion process Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 2
- 238000001020 plasma etching Methods 0.000 claims description 2
- 238000003466 welding Methods 0.000 claims 2
- 239000012300 argon atmosphere Substances 0.000 claims 1
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims 1
- 239000010410 layer Substances 0.000 description 37
- 238000005520 cutting process Methods 0.000 description 33
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 239000002356 single layer Substances 0.000 description 6
- QQHSIRTYSFLSRM-UHFFFAOYSA-N alumanylidynechromium Chemical compound [Al].[Cr] QQHSIRTYSFLSRM-UHFFFAOYSA-N 0.000 description 5
- 229910052786 argon Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 229910018509 Al—N Inorganic materials 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000003467 diminishing effect Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- PXMNMQRDXWABCY-UHFFFAOYSA-N 1-(4-chlorophenyl)-4,4-dimethyl-3-(1H-1,2,4-triazol-1-ylmethyl)pentan-3-ol Chemical compound C1=NC=NN1CC(O)(C(C)(C)C)CCC1=CC=C(Cl)C=C1 PXMNMQRDXWABCY-UHFFFAOYSA-N 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000997 High-speed steel Inorganic materials 0.000 description 1
- 229910004349 Ti-Al Inorganic materials 0.000 description 1
- 229910004692 Ti—Al Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 230000003203 everyday effect Effects 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
- C23C14/0647—Boron nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3435—Applying energy to the substrate during sputtering
- C23C14/345—Applying energy to the substrate during sputtering using substrate bias
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3464—Sputtering using more than one target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3492—Variation of parameters during sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/50—Substrate holders
- C23C14/505—Substrate holders for rotation of the substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
- C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
- Y02T50/00—Aeronautics or air transport
- Y02T50/60—Efficient propulsion technologies, e.g. for aircraft
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
- Y10T428/264—Up to 3 mils
- Y10T428/265—1 mil or less
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Engineering (AREA)
- Physical Vapour Deposition (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Gear Processing (AREA)
- Laminated Bodies (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261624487P | 2012-04-16 | 2012-04-16 | |
| US61/624,487 | 2012-04-16 | ||
| PCT/EP2013/001098 WO2013156131A1 (en) | 2012-04-16 | 2013-04-15 | High performance tools exhibiting reduced crater wear in particular by dry machining operations |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20140146203A KR20140146203A (ko) | 2014-12-24 |
| KR102172628B1 true KR102172628B1 (ko) | 2020-11-03 |
Family
ID=48325567
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020147032145A Active KR102172628B1 (ko) | 2012-04-16 | 2013-04-15 | 특히 건식 가공 작업에 의해 감소된 크레이터 마모를 나타내는 고성능 공구 |
Country Status (15)
| Country | Link |
|---|---|
| US (1) | US9464347B2 (enExample) |
| EP (1) | EP2839051B1 (enExample) |
| JP (1) | JP6249452B2 (enExample) |
| KR (1) | KR102172628B1 (enExample) |
| CN (1) | CN104508171B (enExample) |
| ES (1) | ES2702247T3 (enExample) |
| HU (1) | HUE042494T2 (enExample) |
| IN (1) | IN2014DN08669A (enExample) |
| MX (1) | MX375038B (enExample) |
| MY (1) | MY169727A (enExample) |
| PH (1) | PH12014502311B1 (enExample) |
| PL (1) | PL2839051T3 (enExample) |
| SI (1) | SI2839051T1 (enExample) |
| TR (1) | TR201819368T4 (enExample) |
| WO (1) | WO2013156131A1 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013019691A1 (de) * | 2013-11-26 | 2015-05-28 | Oerlikon Trading Ag, Trübbach | Hartstoffschicht zur Reduzierung eines Wärmeeintrags in das beschichtete Substrat |
| DE102014018915A1 (de) * | 2014-12-22 | 2016-06-23 | Oerlikon Surface Solutions Ag, Trübbach | AlCrN-basierte Beschichtung zur verbesserten Beständigkeit gegen Kolkverschleiß |
| KR102072466B1 (ko) * | 2015-04-27 | 2020-02-03 | 가부시키가이샤 탕가로이 | 피복절삭공구 |
| CN106191772B (zh) * | 2016-08-09 | 2018-07-31 | 上海理工大学 | 一种含有多相AlCrN纳米插入层的高硬度CrAlN涂层及其制备方法 |
| CN106835036B (zh) * | 2016-08-16 | 2019-02-19 | 兰州空间技术物理研究所 | 一种调制高功率脉冲磁控溅射制备AlCrN涂层的方法 |
| CN107299330A (zh) * | 2017-04-07 | 2017-10-27 | 苏州星蓝纳米技术有限公司 | 一种低内应力涂层及其制备方法 |
| WO2018215558A1 (en) * | 2017-05-23 | 2018-11-29 | Oerlikon Surface Solutions Ag, Pfäffikon | Thick TiAlTaN/AlCrN multilayer coating films on turbine components |
| WO2019230166A1 (ja) * | 2018-05-30 | 2019-12-05 | 三菱日立ツール株式会社 | 被覆切削工具及びその製造方法 |
| CN109097731B (zh) * | 2018-07-27 | 2020-07-21 | 广东工业大学 | 一种AlCrN/AlCrYN多元多层涂层及其制备方法和应用 |
| CN108950480B (zh) * | 2018-08-22 | 2020-08-14 | 中国科学院力学研究所 | 一种高韧耐磨复合涂层及将其沉积在热作凸模具上的方法 |
| KR102299610B1 (ko) | 2019-01-30 | 2021-09-08 | 연세대학교 산학협력단 | 향상된 내마모성 및 유연성을 갖는 투명 나노막 적층 구조체 |
| KR102889703B1 (ko) * | 2019-03-07 | 2025-11-21 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 내열성이 향상된 tm-al-o-n 코팅층 |
| CN110527957A (zh) * | 2019-08-19 | 2019-12-03 | 河北宏靶科技有限公司 | 一种铝铬硼合金靶材及其制备方法 |
| CN111020475A (zh) * | 2019-12-16 | 2020-04-17 | 苏州星蓝纳米技术有限公司 | 一种新型at涂层 |
| KR20230121057A (ko) * | 2020-12-14 | 2023-08-17 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 적어도 2개의 상이한 AlCr-기반 타겟으로부터 제조된 내마모성 코팅 |
| WO2022129644A1 (en) * | 2020-12-18 | 2022-06-23 | Oerlikon Surface Solutions Ag, Pfäffikon | Hard alcr-based multilayer coating system, coated article and method for manufacturing the same |
| CN113416926A (zh) * | 2021-05-17 | 2021-09-21 | 湖南泰嘉新材料科技股份有限公司 | 一种纳米多层结构过渡金属氮化物涂层及其制备方法和应用 |
| CN113817985B (zh) * | 2021-11-24 | 2022-03-18 | 武汉中维创发工业研究院有限公司 | 纳米多层复合涂层及其制备方法和应用 |
| JP7141555B1 (ja) | 2022-03-02 | 2022-09-22 | 日本電産マシンツール株式会社 | 被膜、工具、および工作機械 |
| CN115747718A (zh) * | 2022-12-26 | 2023-03-07 | 常州夸克涂层科技有限公司 | 一种滚插齿刀涂层工艺 |
| CN121794412A (zh) | 2023-07-28 | 2026-04-03 | 欧瑞康表面处理解决方案股份公司普费菲孔 | 用于广泛工具应用范围中改善性能的AlCrSiN基涂层 |
| CN118407044B (zh) * | 2024-03-14 | 2025-10-17 | 广东工业大学 | 一种含CrAlBYN的复合涂层刀具及制备方法 |
| CN122081857B (zh) * | 2026-04-23 | 2026-07-14 | 赣州澳克泰工具技术有限公司 | 一种多元纳米交替复合涂层刀具及其制备方法 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005153126A (ja) * | 2003-11-28 | 2005-06-16 | Nachi Fujikoshi Corp | プラズマ窒化セラミック硬質膜被覆工具 |
| JP2009056549A (ja) * | 2007-08-31 | 2009-03-19 | Union Tool Co | 切削工具用硬質皮膜 |
| JP2009101490A (ja) * | 2007-10-25 | 2009-05-14 | Mitsubishi Materials Corp | 高速切削加工で硬質被覆層がすぐれた潤滑性と耐摩耗性を発揮する表面被覆切削工具 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3341846B2 (ja) * | 1991-04-04 | 2002-11-05 | 住友電気工業株式会社 | イオン窒化〜セラミックスコーティング連続処理方法 |
| JP4185172B2 (ja) * | 1997-06-19 | 2008-11-26 | 住友電工ハードメタル株式会社 | 被覆硬質工具 |
| US20050112019A1 (en) * | 2003-10-30 | 2005-05-26 | Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.) | Aluminum-alloy reflection film for optical information-recording, optical information-recording medium, and aluminum-alloy sputtering target for formation of the aluminum-alloy reflection film for optical information-recording |
| JP2004256922A (ja) * | 2004-05-19 | 2004-09-16 | Hitachi Tool Engineering Ltd | 硬質皮膜 |
| JP4756445B2 (ja) * | 2005-02-16 | 2011-08-24 | 三菱マテリアル株式会社 | 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具 |
| JP4950499B2 (ja) * | 2006-02-03 | 2012-06-13 | 株式会社神戸製鋼所 | 硬質皮膜およびその成膜方法 |
| JP4844884B2 (ja) * | 2006-07-28 | 2011-12-28 | 三菱マテリアル株式会社 | 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具 |
| WO2008037556A2 (en) | 2006-09-26 | 2008-04-03 | Oerlikon Trading Ag, Truebbach | Workpiece with hard coating |
| US7960016B2 (en) * | 2007-03-23 | 2011-06-14 | Oerlikon Trading Ag, Truebbach | Wear resistant hard coating for a workpiece and method for producing the same |
| AT9748U1 (de) * | 2007-04-02 | 2008-03-15 | Ceratizit Austria Gmbh | Mehrlagige cvd-schicht |
| JP2009012139A (ja) * | 2007-07-06 | 2009-01-22 | Mitsubishi Materials Corp | 高速切削加工で硬質被覆層がすぐれた潤滑性と耐摩耗性を発揮する表面被覆切削工具 |
| WO2009133814A1 (ja) * | 2008-04-30 | 2009-11-05 | 住友電気工業株式会社 | 表面被覆切削工具 |
| KR101699557B1 (ko) * | 2008-07-09 | 2017-01-24 | 오를리콘 서피스 솔루션스 아크티엔게젤샤프트, 페피콘 | 코팅 시스템, 코팅된 워크피스 및 이를 제조하는 방법 |
| WO2011058636A1 (ja) * | 2009-11-12 | 2011-05-19 | オーエスジー株式会社 | 硬質被膜、および硬質被膜被覆工具 |
| RU2560480C2 (ru) | 2010-02-04 | 2015-08-20 | Эрликон Трейдинг Аг, Трюббах | РЕЖУЩИЕ ИНСТРУМЕНТЫ С МНОГОСЛОЙНЫМИ ПОКРЫТИЯМИ Al-Cr-B-N/Ti-Al-N |
-
2013
- 2013-04-15 IN IN8669DEN2014 patent/IN2014DN08669A/en unknown
- 2013-04-15 WO PCT/EP2013/001098 patent/WO2013156131A1/en not_active Ceased
- 2013-04-15 CN CN201380020487.3A patent/CN104508171B/zh active Active
- 2013-04-15 JP JP2015506114A patent/JP6249452B2/ja active Active
- 2013-04-15 HU HUE13720781A patent/HUE042494T2/hu unknown
- 2013-04-15 PL PL13720781T patent/PL2839051T3/pl unknown
- 2013-04-15 TR TR2018/19368T patent/TR201819368T4/tr unknown
- 2013-04-15 US US14/394,483 patent/US9464347B2/en active Active
- 2013-04-15 EP EP13720781.7A patent/EP2839051B1/en active Active
- 2013-04-15 ES ES13720781T patent/ES2702247T3/es active Active
- 2013-04-15 SI SI201331261T patent/SI2839051T1/sl unknown
- 2013-04-15 MX MX2014012538A patent/MX375038B/es active IP Right Grant
- 2013-04-15 KR KR1020147032145A patent/KR102172628B1/ko active Active
- 2013-04-15 MY MYPI2014002921A patent/MY169727A/en unknown
-
2014
- 2014-10-15 PH PH12014502311A patent/PH12014502311B1/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005153126A (ja) * | 2003-11-28 | 2005-06-16 | Nachi Fujikoshi Corp | プラズマ窒化セラミック硬質膜被覆工具 |
| JP2009056549A (ja) * | 2007-08-31 | 2009-03-19 | Union Tool Co | 切削工具用硬質皮膜 |
| JP2009101490A (ja) * | 2007-10-25 | 2009-05-14 | Mitsubishi Materials Corp | 高速切削加工で硬質被覆層がすぐれた潤滑性と耐摩耗性を発揮する表面被覆切削工具 |
Also Published As
| Publication number | Publication date |
|---|---|
| US9464347B2 (en) | 2016-10-11 |
| TR201819368T4 (tr) | 2019-01-21 |
| WO2013156131A1 (en) | 2013-10-24 |
| HUE042494T2 (hu) | 2019-07-29 |
| MX375038B (es) | 2025-03-06 |
| EP2839051B1 (en) | 2018-09-26 |
| CN104508171A (zh) | 2015-04-08 |
| CN104508171B (zh) | 2016-10-19 |
| EP2839051A1 (en) | 2015-02-25 |
| ES2702247T3 (es) | 2019-02-28 |
| JP2015514870A (ja) | 2015-05-21 |
| PL2839051T3 (pl) | 2019-02-28 |
| JP6249452B2 (ja) | 2017-12-20 |
| KR20140146203A (ko) | 2014-12-24 |
| IN2014DN08669A (enExample) | 2015-05-22 |
| US20150056431A1 (en) | 2015-02-26 |
| MY169727A (en) | 2019-05-14 |
| PH12014502311A1 (en) | 2014-12-22 |
| PH12014502311B1 (en) | 2014-12-22 |
| MX2014012538A (es) | 2015-08-14 |
| SI2839051T1 (sl) | 2019-02-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6249452B2 (ja) | 機械加工作業による摩耗の減少を呈する被膜システム及び高性能ツール、並びに、その被膜システムによる被覆方法 | |
| CN104131256B (zh) | 一种多层纳米复合刀具涂层及其制备方法 | |
| KR101822810B1 (ko) | 코팅된 절삭 공구 | |
| TWI676713B (zh) | 提供增強耐凹坑磨耗性之AlCrN系塗層及製造該塗層的方法 | |
| CN111511490A (zh) | 包覆切削工具 | |
| KR20100116682A (ko) | 다층 코팅 절삭 공구 | |
| KR20140059193A (ko) | 크롬 함유 기능성층을 갖는 공구 | |
| KR20140129009A (ko) | 피복 절삭 공구 및 그의 제조 방법 | |
| WO2014156447A1 (ja) | 表面被覆窒化硼素焼結体工具 | |
| CN107190233A (zh) | 一种具有超高硬度的Si掺杂纳米复合涂层的制备工艺 | |
| SE532049C2 (sv) | Oxidbelagt skärverktygsskär för spånavskiljande bearbetning av stål | |
| JP2009034811A (ja) | 突切り、溝切りおよびねじ切りのための超硬合金インサート | |
| JP3394021B2 (ja) | 被覆切削工具 | |
| JP3697221B2 (ja) | 耐高温酸化に優れた高耐摩耗性・高硬度皮膜 | |
| JP7110352B2 (ja) | 硬質被膜および硬質被膜被覆部材 | |
| JP2015157975A (ja) | 硬質皮膜およびその形成方法 | |
| KR20150133813A (ko) | 표면 피복 질화붕소 소결체 공구 | |
| KR100391501B1 (ko) | 공구용 초경합금에 코팅되는 TiAlN계 다층경질 박막 | |
| KR101702255B1 (ko) | 내마모성이 우수한 적층 피막 | |
| Grigoriev et al. | Nanostructured Multilayer Composite Coatings for Cutting Tools | |
| KR101727420B1 (ko) | 내마모성이 우수한 적층 피막 | |
| KR100660479B1 (ko) | 표면 피복용 경질 다층 박막 | |
| JP6311353B2 (ja) | 超硬工具およびその製造方法 | |
| WO2026018875A1 (ja) | 被覆工具、切削工具、および切削加工物の製造方法 | |
| Chang et al. | Influence of bi-layer thickness on the structure and properties of multilayered TiN/CrN coatings by cathodic arc plasma deposition |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20141117 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 20180410 Comment text: Request for Examination of Application |
|
| E902 | Notification of reason for refusal | ||
| PE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event date: 20200213 Patent event code: PE09021S01D |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 20201014 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 20201027 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 20201027 End annual number: 3 Start annual number: 1 |
|
| PG1601 | Publication of registration | ||
| PR1001 | Payment of annual fee |
Payment date: 20231010 Start annual number: 4 End annual number: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 20241008 Start annual number: 5 End annual number: 5 |