PL2839051T3 - Wysokowydajne narzędzia wykazujące zmniejszone zużycie kraterowe zwłaszcza w operacjach obróbki skrawaniem na sucho - Google Patents

Wysokowydajne narzędzia wykazujące zmniejszone zużycie kraterowe zwłaszcza w operacjach obróbki skrawaniem na sucho

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Publication number
PL2839051T3
PL2839051T3 PL13720781T PL13720781T PL2839051T3 PL 2839051 T3 PL2839051 T3 PL 2839051T3 PL 13720781 T PL13720781 T PL 13720781T PL 13720781 T PL13720781 T PL 13720781T PL 2839051 T3 PL2839051 T3 PL 2839051T3
Authority
PL
Poland
Prior art keywords
high performance
machining operations
exhibiting reduced
crater wear
dry machining
Prior art date
Application number
PL13720781T
Other languages
English (en)
Inventor
Mirjam Arndt
Markus Lechthaler
Sebastian Stein
Anders Olof Eriksson
Original Assignee
Oerlikon Surface Solutions Ag, Pfäffikon
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Surface Solutions Ag, Pfäffikon filed Critical Oerlikon Surface Solutions Ag, Pfäffikon
Publication of PL2839051T3 publication Critical patent/PL2839051T3/pl

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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/021Cleaning or etching treatments
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02Pretreatment of the material to be coated
    • C23C14/024Deposition of sublayers, e.g. to promote adhesion of the coating
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0641Nitrides
    • C23C14/0647Boron nitride
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C14/3485Sputtering using pulsed power to the target
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3492Variation of parameters during sputtering
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00Aeronautics or air transport
    • Y02T50/60Efficient propulsion technologies, e.g. for aircraft
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495Thickness [relative or absolute]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/26Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264Up to 3 mils
    • Y10T428/2651 mil or less

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Laminated Bodies (AREA)
  • Gear Processing (AREA)
PL13720781T 2012-04-16 2013-04-15 Wysokowydajne narzędzia wykazujące zmniejszone zużycie kraterowe zwłaszcza w operacjach obróbki skrawaniem na sucho PL2839051T3 (pl)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261624487P 2012-04-16 2012-04-16
EP13720781.7A EP2839051B1 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations
PCT/EP2013/001098 WO2013156131A1 (en) 2012-04-16 2013-04-15 High performance tools exhibiting reduced crater wear in particular by dry machining operations

Publications (1)

Publication Number Publication Date
PL2839051T3 true PL2839051T3 (pl) 2019-02-28

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PL13720781T PL2839051T3 (pl) 2012-04-16 2013-04-15 Wysokowydajne narzędzia wykazujące zmniejszone zużycie kraterowe zwłaszcza w operacjach obróbki skrawaniem na sucho

Country Status (15)

Country Link
US (1) US9464347B2 (pl)
EP (1) EP2839051B1 (pl)
JP (1) JP6249452B2 (pl)
KR (1) KR102172628B1 (pl)
CN (1) CN104508171B (pl)
ES (1) ES2702247T3 (pl)
HU (1) HUE042494T2 (pl)
IN (1) IN2014DN08669A (pl)
MX (1) MX2014012538A (pl)
MY (1) MY169727A (pl)
PH (1) PH12014502311B1 (pl)
PL (1) PL2839051T3 (pl)
SI (1) SI2839051T1 (pl)
TR (1) TR201819368T4 (pl)
WO (1) WO2013156131A1 (pl)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102013019691A1 (de) 2013-11-26 2015-05-28 Oerlikon Trading Ag, Trübbach Hartstoffschicht zur Reduzierung eines Wärmeeintrags in das beschichtete Substrat
DE102014018915A1 (de) * 2014-12-22 2016-06-23 Oerlikon Surface Solutions Ag, Trübbach AlCrN-basierte Beschichtung zur verbesserten Beständigkeit gegen Kolkverschleiß
EP3290137B1 (en) * 2015-04-27 2021-06-23 Tungaloy Corporation Coated cutting tool
CN106191772B (zh) * 2016-08-09 2018-07-31 上海理工大学 一种含有多相AlCrN纳米插入层的高硬度CrAlN涂层及其制备方法
CN106835036B (zh) * 2016-08-16 2019-02-19 兰州空间技术物理研究所 一种调制高功率脉冲磁控溅射制备AlCrN涂层的方法
CN107299330A (zh) * 2017-04-07 2017-10-27 苏州星蓝纳米技术有限公司 一种低内应力涂层及其制备方法
WO2018215558A1 (en) * 2017-05-23 2018-11-29 Oerlikon Surface Solutions Ag, Pfäffikon Thick TiAlTaN/AlCrN multilayer coating films on turbine components
EP3804891A4 (en) * 2018-05-30 2022-02-23 Moldino Tool Engineering, Ltd. COATED CUTTING TOOL AND MANUFACTURING METHOD THEREOF
CN109097731B (zh) * 2018-07-27 2020-07-21 广东工业大学 一种AlCrN/AlCrYN多元多层涂层及其制备方法和应用
CN108950480B (zh) * 2018-08-22 2020-08-14 中国科学院力学研究所 一种高韧耐磨复合涂层及将其沉积在热作凸模具上的方法
KR102299610B1 (ko) 2019-01-30 2021-09-08 연세대학교 산학협력단 향상된 내마모성 및 유연성을 갖는 투명 나노막 적층 구조체
CN110527957A (zh) * 2019-08-19 2019-12-03 河北宏靶科技有限公司 一种铝铬硼合金靶材及其制备方法
CN111020475A (zh) * 2019-12-16 2020-04-17 苏州星蓝纳米技术有限公司 一种新型at涂层
JP2023554012A (ja) * 2020-12-14 2023-12-26 エリコン・サーフェス・ソリューションズ・アクチェンゲゼルシャフト,プフェフィコーン 少なくとも2つの異なるAlCr系ターゲットから製造された耐摩耗性コーティング
WO2022129644A1 (en) * 2020-12-18 2022-06-23 Oerlikon Surface Solutions Ag, Pfäffikon Hard alcr-based multilayer coating system, coated article and method for manufacturing the same
CN113416926A (zh) * 2021-05-17 2021-09-21 湖南泰嘉新材料科技股份有限公司 一种纳米多层结构过渡金属氮化物涂层及其制备方法和应用
CN113817985B (zh) * 2021-11-24 2022-03-18 武汉中维创发工业研究院有限公司 纳米多层复合涂层及其制备方法和应用
CN115747718A (zh) * 2022-12-26 2023-03-07 常州夸克涂层科技有限公司 一种滚插齿刀涂层工艺

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3341846B2 (ja) * 1991-04-04 2002-11-05 住友電気工業株式会社 イオン窒化〜セラミックスコーティング連続処理方法
JP4185172B2 (ja) * 1997-06-19 2008-11-26 住友電工ハードメタル株式会社 被覆硬質工具
US20050112019A1 (en) * 2003-10-30 2005-05-26 Kabushiki Kaisha Kobe Seiko Sho(Kobe Steel, Ltd.) Aluminum-alloy reflection film for optical information-recording, optical information-recording medium, and aluminum-alloy sputtering target for formation of the aluminum-alloy reflection film for optical information-recording
JP2005153126A (ja) * 2003-11-28 2005-06-16 Nachi Fujikoshi Corp プラズマ窒化セラミック硬質膜被覆工具
JP2004256922A (ja) * 2004-05-19 2004-09-16 Hitachi Tool Engineering Ltd 硬質皮膜
JP4756445B2 (ja) * 2005-02-16 2011-08-24 三菱マテリアル株式会社 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐摩耗性を発揮する表面被覆サーメット製切削工具
JP4950499B2 (ja) * 2006-02-03 2012-06-13 株式会社神戸製鋼所 硬質皮膜およびその成膜方法
JP4844884B2 (ja) * 2006-07-28 2011-12-28 三菱マテリアル株式会社 耐熱合金の高速切削加工で硬質被覆層がすぐれた耐チッピング性と耐摩耗性を発揮する表面被覆切削工具
KR101432847B1 (ko) * 2006-09-26 2014-08-26 오를리콘 트레이딩 아크티엔게젤샤프트, 트뤼프바흐 하드 코팅을 가지는 작업편
US7960016B2 (en) * 2007-03-23 2011-06-14 Oerlikon Trading Ag, Truebbach Wear resistant hard coating for a workpiece and method for producing the same
AT9748U1 (de) * 2007-04-02 2008-03-15 Ceratizit Austria Gmbh Mehrlagige cvd-schicht
JP2009012139A (ja) * 2007-07-06 2009-01-22 Mitsubishi Materials Corp 高速切削加工で硬質被覆層がすぐれた潤滑性と耐摩耗性を発揮する表面被覆切削工具
JP4413958B2 (ja) * 2007-08-31 2010-02-10 ユニオンツール株式会社 切削工具用硬質皮膜
JP2009101490A (ja) * 2007-10-25 2009-05-14 Mitsubishi Materials Corp 高速切削加工で硬質被覆層がすぐれた潤滑性と耐摩耗性を発揮する表面被覆切削工具
JP5297388B2 (ja) * 2008-04-30 2013-09-25 住友電気工業株式会社 表面被覆切削工具
WO2010003902A1 (en) * 2008-07-09 2010-01-14 Oerlikon Trading Ag, Truebbach Coating system, coated workpiece and method for manufacturing the same
US8932707B2 (en) * 2009-11-12 2015-01-13 Osg Corporation Hard film and hard film coated tool
MX343044B (es) * 2010-02-04 2016-10-21 Oerlikon Surface Solutions Ag Pfäffikon Herramientas de corte con recubrimientos de multiples capas de al-cr-b-n/ti-al-n.

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