KR102161039B1 - 컨트롤러 조정 시스템 및 조정 방법 - Google Patents

컨트롤러 조정 시스템 및 조정 방법 Download PDF

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KR102161039B1
KR102161039B1 KR1020180058203A KR20180058203A KR102161039B1 KR 102161039 B1 KR102161039 B1 KR 102161039B1 KR 1020180058203 A KR1020180058203 A KR 1020180058203A KR 20180058203 A KR20180058203 A KR 20180058203A KR 102161039 B1 KR102161039 B1 KR 102161039B1
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South Korea
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zone
offset
value
controller
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KR1020180058203A
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KR20180129660A (ko
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하야토 모토하시
도루 다카기
후미히로 스가와라
나오토시 다니구치
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아즈빌주식회사
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B11/00—Automatic controllers
    • G05B11/01—Automatic controllers electric
    • G05B11/14—Automatic controllers electric in which the output signal represents a discontinuous function of the deviation from the desired value, i.e. discontinuous controllers
    • G05B11/18—Multi-step controllers
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Health & Medical Sciences (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Medical Informatics (AREA)
  • Software Systems (AREA)
  • Feedback Control In General (AREA)
  • Control Of Temperature (AREA)
KR1020180058203A 2017-05-25 2018-05-23 컨트롤러 조정 시스템 및 조정 방법 KR102161039B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017103410A JP6858077B2 (ja) 2017-05-25 2017-05-25 コントローラ調整システムおよび調整方法
JPJP-P-2017-103410 2017-05-25

Publications (2)

Publication Number Publication Date
KR20180129660A KR20180129660A (ko) 2018-12-05
KR102161039B1 true KR102161039B1 (ko) 2020-09-29

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KR1020180058203A KR102161039B1 (ko) 2017-05-25 2018-05-23 컨트롤러 조정 시스템 및 조정 방법

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JP (1) JP6858077B2 (zh)
KR (1) KR102161039B1 (zh)
CN (1) CN108958213B (zh)
TW (1) TWI677775B (zh)

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JP2002519778A (ja) 1998-05-15 2002-07-02 バース・テック・リミテッド マルチポイントデジタル温度制御装置
JP2007193527A (ja) 2006-01-18 2007-08-02 Omron Corp ヒータ駆動制御方法

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CN103668128B (zh) * 2012-09-04 2016-02-24 中晟光电设备（上海）有限公司 Mocvd设备、温度控制系统及控制方法
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JP2002519778A (ja) 1998-05-15 2002-07-02 バース・テック・リミテッド マルチポイントデジタル温度制御装置
JP2001296902A (ja) 2000-04-14 2001-10-26 Omron Corp 制御装置、温度調節器および熱処理装置
JP2007193527A (ja) 2006-01-18 2007-08-02 Omron Corp ヒータ駆動制御方法

Also Published As

Publication number Publication date
CN108958213B (zh) 2021-03-23
KR20180129660A (ko) 2018-12-05
JP6858077B2 (ja) 2021-04-14
JP2018198032A (ja) 2018-12-13
CN108958213A (zh) 2018-12-07
TW201907258A (zh) 2019-02-16
TWI677775B (zh) 2019-11-21

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