KR102155098B1 - 회전기구 및 이 회전기구를 구비한 막두께 모니터 - Google Patents

회전기구 및 이 회전기구를 구비한 막두께 모니터 Download PDF

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Publication number
KR102155098B1
KR102155098B1 KR1020187022423A KR20187022423A KR102155098B1 KR 102155098 B1 KR102155098 B1 KR 102155098B1 KR 1020187022423 A KR1020187022423 A KR 1020187022423A KR 20187022423 A KR20187022423 A KR 20187022423A KR 102155098 B1 KR102155098 B1 KR 102155098B1
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KR
South Korea
Prior art keywords
output shaft
motor
rotating mechanism
rolling bearing
rotating
Prior art date
Application number
KR1020187022423A
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English (en)
Korean (ko)
Other versions
KR20180091946A (ko
Inventor
마나부 코타카
하루쿠니 푸루세
아키히로 마에다
Original Assignee
가부시키가이샤 알박
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Application filed by 가부시키가이샤 알박 filed Critical 가부시키가이샤 알박
Publication of KR20180091946A publication Critical patent/KR20180091946A/ko
Application granted granted Critical
Publication of KR102155098B1 publication Critical patent/KR102155098B1/ko

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C35/00—Rigid support of bearing units; Housings, e.g. caps, covers
    • F16C35/04—Rigid support of bearing units; Housings, e.g. caps, covers in the case of ball or roller bearings
    • F16C35/06—Mounting or dismounting of ball or roller bearings; Fixing them onto shaft or in housing
    • F16C35/067—Fixing them in a housing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physical Vapour Deposition (AREA)
  • Mounting Of Bearings Or Others (AREA)
  • Rolling Contact Bearings (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
KR1020187022423A 2014-07-02 2015-05-15 회전기구 및 이 회전기구를 구비한 막두께 모니터 KR102155098B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014137033 2014-07-02
JPJP-P-2014-137033 2014-07-02
PCT/JP2015/002463 WO2016002122A1 (ja) 2014-07-02 2015-05-15 回転機構及びこの回転機構を備えた膜厚モニター

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020177001909A Division KR20170021327A (ko) 2014-07-02 2015-05-15 회전기구 및 이 회전기구를 구비한 막두께 모니터

Publications (2)

Publication Number Publication Date
KR20180091946A KR20180091946A (ko) 2018-08-16
KR102155098B1 true KR102155098B1 (ko) 2020-09-11

Family

ID=55018706

Family Applications (2)

Application Number Title Priority Date Filing Date
KR1020187022423A KR102155098B1 (ko) 2014-07-02 2015-05-15 회전기구 및 이 회전기구를 구비한 막두께 모니터
KR1020177001909A KR20170021327A (ko) 2014-07-02 2015-05-15 회전기구 및 이 회전기구를 구비한 막두께 모니터

Family Applications After (1)

Application Number Title Priority Date Filing Date
KR1020177001909A KR20170021327A (ko) 2014-07-02 2015-05-15 회전기구 및 이 회전기구를 구비한 막두께 모니터

Country Status (4)

Country Link
JP (2) JP6471159B2 (ja)
KR (2) KR102155098B1 (ja)
CN (1) CN106662155B (ja)
WO (1) WO2016002122A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6471159B2 (ja) * 2014-07-02 2019-02-13 株式会社アルバック 回転機構及びこの回転機構を備えた膜厚モニター
CN108728810A (zh) * 2018-08-16 2018-11-02 广东振华科技股份有限公司 一种真空低温磁控溅射镀膜机

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004011801A (ja) * 2002-06-07 2004-01-15 Nsk Ltd 深溝玉軸受及びファンカップリング装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR970062372A (ko) * 1996-02-01 1997-09-12 배계환 고속회전체용 베어링장치
JPH11222670A (ja) 1998-02-06 1999-08-17 Ulvac Corp 膜厚モニター及びこれを用いた成膜装置
CN1313637C (zh) * 2002-05-13 2007-05-02 哨船头薄膜科技有限公司 动态薄膜厚度监控系统及方法
CN2833515Y (zh) * 2004-11-19 2006-11-01 华南理工大学 一种实时光学薄膜厚度监控设备
JP2006316804A (ja) * 2005-05-10 2006-11-24 Ntn Corp 車輪用軸受装置
US20110062641A1 (en) * 2008-06-03 2011-03-17 Seiichi Sato Stage equipped with alignment function, processing apparatus having the stage equipped with alignment function, and method of aligning substrate
JP2013167346A (ja) * 2012-02-17 2013-08-29 Nsk Ltd 転がり軸受
JP6471159B2 (ja) * 2014-07-02 2019-02-13 株式会社アルバック 回転機構及びこの回転機構を備えた膜厚モニター

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004011801A (ja) * 2002-06-07 2004-01-15 Nsk Ltd 深溝玉軸受及びファンカップリング装置

Also Published As

Publication number Publication date
CN106662155B (zh) 2019-08-02
JP6471159B2 (ja) 2019-02-13
CN106662155A (zh) 2017-05-10
JPWO2016002122A1 (ja) 2017-04-27
WO2016002122A1 (ja) 2016-01-07
JP2018040493A (ja) 2018-03-15
KR20180091946A (ko) 2018-08-16
KR20170021327A (ko) 2017-02-27

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