KR102145138B1 - 고체 촬상장치 및 전자기기 - Google Patents

고체 촬상장치 및 전자기기 Download PDF

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KR102145138B1
KR102145138B1 KR1020197017296A KR20197017296A KR102145138B1 KR 102145138 B1 KR102145138 B1 KR 102145138B1 KR 1020197017296 A KR1020197017296 A KR 1020197017296A KR 20197017296 A KR20197017296 A KR 20197017296A KR 102145138 B1 KR102145138 B1 KR 102145138B1
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electrode
wiring
photodiode
wiring layer
solid
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KR20190072679A (ko
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타케시 야나기타
케이지 마부치
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소니 주식회사
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    • H01L27/14636—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/811—Interconnections
    • H01L27/14634—
    • H01L27/1464—
    • H01L27/14641—
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/014—Manufacture or treatment of image sensors covered by group H10F39/12 of CMOS image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/018—Manufacture or treatment of image sensors covered by group H10F39/12 of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/18—Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/199—Back-illuminated image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/803—Pixels having integrated switching, control, storage or amplification elements
    • H10F39/8037—Pixels having integrated switching, control, storage or amplification elements the integrated elements comprising a transistor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/807—Pixel isolation structures
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/809—Constructional details of image sensors of hybrid image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/813—Electronic components shared by multiple pixels, e.g. one amplifier shared by two pixels
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00—Package configurations
    • H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/791—Package configurations characterised by the relative positions of pads or connectors relative to package parts of direct-bonded pads
    • H10W90/792—Package configurations characterised by the relative positions of pads or connectors relative to package parts of direct-bonded pads between multiple chips
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

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  • Solid State Image Pick-Up Elements (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
KR1020197017296A 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기 Active KR102145138B1 (ko)

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JP2012159789A JP2014022561A (ja) 2012-07-18 2012-07-18 固体撮像装置、及び、電子機器
JPJP-P-2012-159789 2012-07-18
PCT/JP2013/004216 WO2014013696A1 (en) 2012-07-18 2013-07-08 Solid-state imaging device and electronic apparatus

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KR1020207022807A Division KR102217149B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기
KR1020207016473A Division KR102270955B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기

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KR102145138B1 true KR102145138B1 (ko) 2020-08-14

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KR1020197017296A Active KR102145138B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기
KR1020237033726A Active KR102788584B1 (ko) 2012-07-18 2013-07-08 수광 장치 및 수광 장치의 제조 방법, 전자 기기
KR1020207016473A Active KR102270955B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기
KR1020217002560A Active KR102281407B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 광 검출 장치
KR1020237001153A Active KR102586248B1 (ko) 2012-07-18 2013-07-08 수광 장치 및 수광 장치의 제조 방법, 전자 기기
KR1020217022449A Active KR102489178B1 (ko) 2012-07-18 2013-07-08 수광 장치 및 수광 장치의 제조 방법, 전자 기기
KR1020207022807A Active KR102217149B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기
KR1020157000304A Ceased KR20150037812A (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기

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KR1020207016473A Active KR102270955B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기
KR1020217002560A Active KR102281407B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 광 검출 장치
KR1020237001153A Active KR102586248B1 (ko) 2012-07-18 2013-07-08 수광 장치 및 수광 장치의 제조 방법, 전자 기기
KR1020217022449A Active KR102489178B1 (ko) 2012-07-18 2013-07-08 수광 장치 및 수광 장치의 제조 방법, 전자 기기
KR1020207022807A Active KR102217149B1 (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기
KR1020157000304A Ceased KR20150037812A (ko) 2012-07-18 2013-07-08 고체 촬상장치 및 전자기기

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US (6) US9508770B2 (enExample)
EP (4) EP2859586B1 (enExample)
JP (1) JP2014022561A (enExample)
KR (8) KR102145138B1 (enExample)
CN (8) CN110289275B (enExample)
TW (1) TWI520320B (enExample)
WO (1) WO2014013696A1 (enExample)

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