KR102045696B1 - 갭 계측 장치 및 갭 계측 방법 - Google Patents

갭 계측 장치 및 갭 계측 방법 Download PDF

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Publication number
KR102045696B1
KR102045696B1 KR1020187014850A KR20187014850A KR102045696B1 KR 102045696 B1 KR102045696 B1 KR 102045696B1 KR 1020187014850 A KR1020187014850 A KR 1020187014850A KR 20187014850 A KR20187014850 A KR 20187014850A KR 102045696 B1 KR102045696 B1 KR 102045696B1
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South Korea
Prior art keywords
gap
plate
sensor
measuring
measurement
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Expired - Fee Related
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KR1020187014850A
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English (en)
Korean (ko)
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KR20180074768A (ko
Inventor
유이치 사사노
게이 요시토미
다쿠야 고토
다카히로 구보타
Original Assignee
미츠비시 쥬고교 가부시키가이샤
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Publication of KR20180074768A publication Critical patent/KR20180074768A/ko
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
KR1020187014850A 2016-01-20 2016-11-24 갭 계측 장치 및 갭 계측 방법 Expired - Fee Related KR102045696B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2016-009096 2016-01-20
JP2016009096A JP6723634B2 (ja) 2016-01-20 2016-01-20 隙間計測装置及び隙間計測方法
PCT/JP2016/084834 WO2017126218A1 (ja) 2016-01-20 2016-11-24 隙間計測装置及び隙間計測方法

Publications (2)

Publication Number Publication Date
KR20180074768A KR20180074768A (ko) 2018-07-03
KR102045696B1 true KR102045696B1 (ko) 2019-11-15

Family

ID=59361586

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020187014850A Expired - Fee Related KR102045696B1 (ko) 2016-01-20 2016-11-24 갭 계측 장치 및 갭 계측 방법

Country Status (9)

Country Link
US (1) US11054253B2 (enExample)
EP (1) EP3370035B1 (enExample)
JP (1) JP6723634B2 (enExample)
KR (1) KR102045696B1 (enExample)
CN (1) CN108369093A (enExample)
BR (1) BR112018010979A2 (enExample)
CA (1) CA3006543C (enExample)
ES (1) ES2765744T3 (enExample)
WO (1) WO2017126218A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
PL3708482T3 (pl) * 2019-03-13 2023-09-11 Becker Marine Systems Gmbh Ster do jednostek pływających z przyrządem do pomiaru luzu łożyskowego, sposób pomiaru luzu łożyskowego w sterze oraz przyrząd do pomiaru luzu łożyskowego steru
JP7283228B2 (ja) * 2019-05-27 2023-05-30 コニカミノルタ株式会社 測定装置、画像形成装置、および、測定方法
CN110631495B (zh) * 2019-10-25 2024-05-14 宁波中车时代传感技术有限公司 磁电式速度传感器曲面间隙检测方法
CN111690802B (zh) * 2020-06-17 2021-11-09 广西先进铝加工创新中心有限责任公司 一种辊底式热处理炉炉辊的安装调试方法
US12266579B2 (en) * 2021-08-30 2025-04-01 Taiwan Semiconductor Manufacturing Co., Ltd. Method and system for adjusting the gap between a wafer and a top plate in a thin-film deposition process
CN114179322B (zh) * 2021-12-08 2024-07-02 苏州博众智能机器人有限公司 一种模具间隙检测设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010101656A (ja) 2008-10-21 2010-05-06 Toyota Motor Corp 膜厚計測方法および膜厚計測装置

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US4165178A (en) * 1978-06-29 1979-08-21 International Business Machines Corporation Gap measurement tool
JPS5784306A (en) * 1980-11-14 1982-05-26 Toshiba Corp Method for providing gap
JPS6367908U (enExample) * 1986-10-23 1988-05-07
GB2206690B (en) 1987-06-30 1991-12-11 Matsushita Electric Works Ltd Optically scanning displacement sensor
JPS6474405A (en) * 1987-09-16 1989-03-20 Toyota Motor Corp Method for measuring work gap at the time of arc welding
US5113358A (en) * 1990-03-28 1992-05-12 Barber-Colman Company Web caliper measuring system
US5250897A (en) * 1992-05-07 1993-10-05 Lsi Logic Corporation Solenoid/slug gap measurement tool for semiconductor equipment and method of measurement
JPH06288713A (ja) 1993-03-31 1994-10-18 Hitachi Ltd ギャップ位置計測方法及び画像処理方法
FR2745905B1 (fr) 1996-03-08 1998-04-24 Lorraine Laminage Appareil de detection acoustique de defauts dans une bande en defilement
JPH09318342A (ja) 1996-05-31 1997-12-12 Ket Kagaku Kenkyusho:Kk 定圧機構
JP3529744B2 (ja) * 2001-07-05 2004-05-24 日本工業検査株式会社 鋼板厚測定装置
DE102010020116A1 (de) * 2010-05-10 2011-11-10 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten an großflächigen Messoberflächen
SG188414A1 (en) * 2010-11-12 2013-04-30 Ev Group E Thallner Gmbh Measurement means and method for measuring layer thicknesses and voids of a wafer stack
GB2494170A (en) * 2011-09-01 2013-03-06 Sonar Pipeline Inspection Systems Ltd Acoustic pipeline inspection
CN103512904A (zh) 2012-06-29 2014-01-15 鸿富锦精密工业（深圳）有限公司 工件外观测量装置及其操作方法
DE102014200157A1 (de) * 2013-10-28 2015-05-21 Micro-Epsilon Messtechnik Gmbh & Co. Kg Verfahren zur Dickenmessung an Messobjekten und Vorrichtung zur Anwendung des Verfahrens
CN104525722B (zh) * 2014-12-04 2016-09-14 柳州福臻车体实业有限公司 一种拉延模间隙的测量方法
WO2017199795A1 (ja) * 2016-05-19 2017-11-23 三菱日立パワーシステムズ株式会社 計測用治具及び計測装置並びに隙間計測方法

Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2010101656A (ja) 2008-10-21 2010-05-06 Toyota Motor Corp 膜厚計測方法および膜厚計測装置

Also Published As

Publication number Publication date
JP2017129464A (ja) 2017-07-27
EP3370035A4 (en) 2018-09-05
EP3370035B1 (en) 2019-10-23
US20180347973A1 (en) 2018-12-06
JP6723634B2 (ja) 2020-07-15
EP3370035A1 (en) 2018-09-05
WO2017126218A1 (ja) 2017-07-27
CA3006543C (en) 2020-06-02
CA3006543A1 (en) 2017-07-27
ES2765744T3 (es) 2020-06-10
US11054253B2 (en) 2021-07-06
CN108369093A (zh) 2018-08-03
BR112018010979A2 (pt) 2018-12-04
KR20180074768A (ko) 2018-07-03

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