CN108369093A - 间隙测量装置以及间隙测量方法 - Google Patents

间隙测量装置以及间隙测量方法 Download PDF

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Publication number
CN108369093A
CN108369093A CN201680069711.1A CN201680069711A CN108369093A CN 108369093 A CN108369093 A CN 108369093A CN 201680069711 A CN201680069711 A CN 201680069711A CN 108369093 A CN108369093 A CN 108369093A
Authority
CN
China
Prior art keywords
gap
sensor
plate
posture
upper plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201680069711.1A
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English (en)
Chinese (zh)
Inventor
佐佐野祐
佐佐野祐一
吉富圭
后藤拓也
窪田隆博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Publication of CN108369093A publication Critical patent/CN108369093A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
    • G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
CN201680069711.1A 2016-01-20 2016-11-24 间隙测量装置以及间隙测量方法 Pending CN108369093A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2016-009096 2016-01-20
JP2016009096A JP6723634B2 (ja) 2016-01-20 2016-01-20 隙間計測装置及び隙間計測方法
PCT/JP2016/084834 WO2017126218A1 (ja) 2016-01-20 2016-11-24 隙間計測装置及び隙間計測方法

Publications (1)

Publication Number Publication Date
CN108369093A true CN108369093A (zh) 2018-08-03

Family

ID=59361586

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680069711.1A Pending CN108369093A (zh) 2016-01-20 2016-11-24 间隙测量装置以及间隙测量方法

Country Status (9)

Country Link
US (1) US11054253B2 (enExample)
EP (1) EP3370035B1 (enExample)
JP (1) JP6723634B2 (enExample)
KR (1) KR102045696B1 (enExample)
CN (1) CN108369093A (enExample)
BR (1) BR112018010979A2 (enExample)
CA (1) CA3006543C (enExample)
ES (1) ES2765744T3 (enExample)
WO (1) WO2017126218A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110631495A (zh) * 2019-10-25 2019-12-31 宁波中车时代传感技术有限公司 磁电式速度传感器曲面间隙检测方法
CN111690802A (zh) * 2020-06-17 2020-09-22 广西先进铝加工创新中心有限责任公司 一种辊底式热处理炉炉辊的安装调试方法
CN114179322A (zh) * 2021-12-08 2022-03-15 博众精工科技股份有限公司 一种模具间隙检测设备

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2951937T3 (es) * 2019-03-13 2023-10-25 Becker Marine Systems Gmbh Remo para embarcaciones con un dispositivo de medición de la holgura de cojinete, procedimiento de medición de la holgura de cojinete en un remo y dispositivo de medición de la holgura de cojinete para un remo
JP7283228B2 (ja) * 2019-05-27 2023-05-30 コニカミノルタ株式会社 測定装置、画像形成装置、および、測定方法
US12266579B2 (en) * 2021-08-30 2025-04-01 Taiwan Semiconductor Manufacturing Co., Ltd. Method and system for adjusting the gap between a wafer and a top plate in a thin-film deposition process

Citations (6)

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Publication number Priority date Publication date Assignee Title
US4165178A (en) * 1978-06-29 1979-08-21 International Business Machines Corporation Gap measurement tool
JPS5784306A (en) * 1980-11-14 1982-05-26 Toshiba Corp Method for providing gap
US4864147A (en) * 1987-06-30 1989-09-05 Matsushita Electric Works, Ltd. Optically scanning displacement sensor with linearity correction means
JP2010101656A (ja) * 2008-10-21 2010-05-06 Toyota Motor Corp 膜厚計測方法および膜厚計測装置
CN103512904A (zh) * 2012-06-29 2014-01-15 鸿富锦精密工业（深圳）有限公司 工件外观测量装置及其操作方法
CN104525722A (zh) * 2014-12-04 2015-04-22 柳州福臻车体实业有限公司 一种拉延模间隙的测量方法

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JPS6367908U (enExample) * 1986-10-23 1988-05-07
JPS6474405A (en) * 1987-09-16 1989-03-20 Toyota Motor Corp Method for measuring work gap at the time of arc welding
US5113358A (en) * 1990-03-28 1992-05-12 Barber-Colman Company Web caliper measuring system
US5250897A (en) * 1992-05-07 1993-10-05 Lsi Logic Corporation Solenoid/slug gap measurement tool for semiconductor equipment and method of measurement
JPH06288713A (ja) 1993-03-31 1994-10-18 Hitachi Ltd ギャップ位置計測方法及び画像処理方法
FR2745905B1 (fr) * 1996-03-08 1998-04-24 Lorraine Laminage Appareil de detection acoustique de defauts dans une bande en defilement
JPH09318342A (ja) * 1996-05-31 1997-12-12 Ket Kagaku Kenkyusho:Kk 定圧機構
JP3529744B2 (ja) * 2001-07-05 2004-05-24 日本工業検査株式会社 鋼板厚測定装置
DE102010020116A1 (de) * 2010-05-10 2011-11-10 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und Vorrichtung zur Messung der Dicke dünner Schichten an großflächigen Messoberflächen
EP3035047B1 (de) * 2010-11-12 2019-03-20 EV Group E. Thallner GmbH Messeinrichtung und verfahren zur messung von schichtdicken und fehlstellen eines waferstapels
GB2494170A (en) * 2011-09-01 2013-03-06 Sonar Pipeline Inspection Systems Ltd Acoustic pipeline inspection
DE102014200157A1 (de) * 2013-10-28 2015-05-21 Micro-Epsilon Messtechnik Gmbh & Co. Kg Verfahren zur Dickenmessung an Messobjekten und Vorrichtung zur Anwendung des Verfahrens
DE112017002536B4 (de) * 2016-05-19 2021-12-09 Mitsubishi Power, Ltd. Messlehre, Messvorrichtung und Spaltmessverfahren

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165178A (en) * 1978-06-29 1979-08-21 International Business Machines Corporation Gap measurement tool
JPS5784306A (en) * 1980-11-14 1982-05-26 Toshiba Corp Method for providing gap
US4864147A (en) * 1987-06-30 1989-09-05 Matsushita Electric Works, Ltd. Optically scanning displacement sensor with linearity correction means
JP2010101656A (ja) * 2008-10-21 2010-05-06 Toyota Motor Corp 膜厚計測方法および膜厚計測装置
CN103512904A (zh) * 2012-06-29 2014-01-15 鸿富锦精密工业（深圳）有限公司 工件外观测量装置及其操作方法
CN104525722A (zh) * 2014-12-04 2015-04-22 柳州福臻车体实业有限公司 一种拉延模间隙的测量方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110631495A (zh) * 2019-10-25 2019-12-31 宁波中车时代传感技术有限公司 磁电式速度传感器曲面间隙检测方法
CN110631495B (zh) * 2019-10-25 2024-05-14 宁波中车时代传感技术有限公司 磁电式速度传感器曲面间隙检测方法
CN111690802A (zh) * 2020-06-17 2020-09-22 广西先进铝加工创新中心有限责任公司 一种辊底式热处理炉炉辊的安装调试方法
CN111690802B (zh) * 2020-06-17 2021-11-09 广西先进铝加工创新中心有限责任公司 一种辊底式热处理炉炉辊的安装调试方法
CN114179322A (zh) * 2021-12-08 2022-03-15 博众精工科技股份有限公司 一种模具间隙检测设备

Also Published As

Publication number Publication date
WO2017126218A1 (ja) 2017-07-27
EP3370035B1 (en) 2019-10-23
EP3370035A1 (en) 2018-09-05
CA3006543C (en) 2020-06-02
EP3370035A4 (en) 2018-09-05
JP2017129464A (ja) 2017-07-27
KR102045696B1 (ko) 2019-11-15
JP6723634B2 (ja) 2020-07-15
ES2765744T3 (es) 2020-06-10
CA3006543A1 (en) 2017-07-27
KR20180074768A (ko) 2018-07-03
BR112018010979A2 (pt) 2018-12-04
US11054253B2 (en) 2021-07-06
US20180347973A1 (en) 2018-12-06

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