WO2017126218A1 - 隙間計測装置及び隙間計測方法 - Google Patents
隙間計測装置及び隙間計測方法 Download PDFInfo
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- WO2017126218A1 WO2017126218A1 PCT/JP2016/084834 JP2016084834W WO2017126218A1 WO 2017126218 A1 WO2017126218 A1 WO 2017126218A1 JP 2016084834 W JP2016084834 W JP 2016084834W WO 2017126218 A1 WO2017126218 A1 WO 2017126218A1
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- gap
- upper plate
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B17/00—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations
- G01B17/02—Measuring arrangements characterised by the use of infrasonic, sonic or ultrasonic vibrations for measuring thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
- G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
- G01S17/06—Systems determining position data of a target
- G01S17/08—Systems determining position data of a target for measuring distance only
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
Definitions
- the present invention relates to a clearance measurement device and a clearance measurement method.
- a gap gauge is used to measure a narrow gap which can not be measured by a caliper or a taper gauge or the like.
- a gap gauge is a tool for inserting a thin metal plate called a leaf into a gap and measuring the dimension of the gap.
- the feeler gauge requires that the leaf be inserted horizontally with respect to the gap in order to accurately measure the dimension of the gap.
- Patent Document 1 also describes a method of measuring a gap in which the positions of two triangles formed on both sides of a gap between surfaces are measured by a pattern matching method, and the gap is measured based on the positions of the two triangles. ing.
- the shape of the part forming the gap is a requirement, such as triangles are formed on both sides of the gap. Therefore, it is not possible to measure the gap of the material formed by stacking the plates in the thickness direction.
- This invention is made in view of the above, and when measuring the crevice of the material which piled up and was formed in the direction of a board, the variation by a worker is controlled and the wound on the material which forms a crevice is measured. It is an object of the present invention to provide a clearance measurement apparatus and a clearance measurement method which reduce the application of
- the clearance measurement device of the present invention is a material formed by stacking an upper plate and a lower plate in the thickness direction, wherein the upper plate and the lower plate A thickness measuring sensor for measuring a thickness which is the thickness of the upper plate, and a step which is a distance between the upper surface of the upper plate and the upper surface of the lower plate It is characterized by having a level difference measurement sensor which measures, and a calculation part which calculates a crevice between the upper board and the lower board by deducting the board thickness from the level difference.
- this gap measuring device calculates the gap by subtracting the thickness measured by the thickness measuring sensor from the step measured by the step measuring sensor, the variation due to workers is suppressed and the material forming the gap is damaged. Can be reduced.
- a displacement sensor that measures a first displacement that is a displacement in the thickness direction of a support portion that supports the thickness measurement sensor in the vertical direction, and the plate thickness that faces the upper surface of the upper plate
- a posture determination unit that determines a posture of the measurement sensor, wherein the step measurement sensor is configured to measure a second displacement that is a displacement of the step measurement sensor in the thickness direction and the step measurement facing the upper surface of the upper plate.
- a first attitude angle which is an attitude angle of a sensor, is measured, and the calculation unit is based on the first displacement and the second displacement between the measurement points of the plate thickness measurement sensor and the step measurement sensor.
- the plate thickness measurement sensor, the step measurement sensor, and the displacement sensor are movably held along an arc surface whose radius is a distance from the upper surface of the upper plate.
- the calculating unit calculates a correction value of the posture when it is determined that the posture is unsuitable for measurement of the gap, and the correction value is used as the goniostage.
- the gonio stage corrects the posture according to the correction value received from the calculation unit.
- the displacement sensor further measures the pressure applied to the upper plate by the plate thickness measurement sensor.
- the pressure which is one of the conditions of the measurement of the gap Can be measured.
- the plate thickness measurement sensor generates ultrasonic waves from above the upper plate toward the upper surface of the upper plate, and detects ultrasonic waves reflected on the upper surface and the lower surface of the upper plate, respectively. It is preferable that it is an ultrasonic sensor. As a result, it is possible to measure the plate thickness with high accuracy and only in contact with the upper surface of the upper plate using ultrasonic waves, so it is possible to more reliably reduce the scratching of the material forming the gap. And, the measurement accuracy of the gap can be improved.
- the plate thickness measurement sensor is rotatably supported around an axis along a direction parallel to the material, and has a roller sensor unit that rotates with movement relative to the material. Is preferred.
- each sensor can be moved continuously on the material by rotating the roller sensor unit on the material, so that measurement can be performed continuously at a plurality of clearance measurement points.
- the plate thickness measuring sensor according to the present invention is provided parallel to the roller sensor unit, and supported rotatably around an axis parallel to the axis of the roller sensor unit. It is preferable to further have a roller that rotates with the roller sensor unit as it moves relative to the material. As a result, since the roller sensor unit can be moved continuously and stably on the material, it is possible to more reliably suppress variations due to workers even when continuously measuring at a plurality of gap measurement points. it can.
- the step measurement sensor irradiates a laser from above the upper plate toward a portion where the upper plate and the lower plate are both exposed to the upper side of the material, and It is preferable that it is a laser sensor which detects the laser respectively reflected by the upper surface of a board, and the upper surface of the said lower board.
- the step can be measured with high accuracy and with no contact with the material using a laser, so it is possible to more reliably reduce the damage to the material forming the gap and to improve the measurement accuracy of the gap. It can be done.
- the clearance measurement device of the present invention it is preferable to further include a drive device that holds the plate thickness measurement sensor and the step difference measurement sensor so as to be movable in a three-dimensional direction.
- a drive device that holds the plate thickness measurement sensor and the step difference measurement sensor so as to be movable in a three-dimensional direction.
- the clearance measurement method of the present invention is a measurement method for measuring the clearance between the upper plate and the lower plate, in a material formed by overlapping the upper plate and the lower plate in the thickness direction, Step thickness measurement step of measuring the plate thickness which is the thickness of the upper plate by a measurement sensor, and step difference measurement step of measuring the step difference which is the distance between the upper surface of the upper plate and the upper surface of the lower plate by a step difference measurement sensor And a gap calculating step of calculating a gap between the upper plate and the lower plate by subtracting the plate thickness from the step.
- a first displacement measurement step of measuring a first displacement which is a displacement in the thickness direction of the support portion supporting the thickness measurement sensor in the vertical direction, and the thickness direction of the step measurement sensor A second displacement measuring step of measuring a second displacement which is a displacement at the first position, a first attitude angle measuring step of measuring a first attitude angle which is an attitude angle of the step measuring sensor facing the upper surface of the upper plate; A component of an attitude angle of the plate thickness measurement sensor facing the upper surface of the upper plate based on the first displacement and the second displacement based on the distance between each measurement point of the plate thickness measurement sensor and the step measurement sensor, the first displacement and the second displacement.
- a posture correction value calculation step of calculating a correction value of the posture when it is determined that the posture is unsuitable for the measurement of the clearance, a posture correction value calculation step of calculating a correction value of the posture; It is preferable to further have an attitude correction step of correcting the attitude accordingly.
- the plate thickness measurement step generates ultrasonic waves from above the upper plate toward the upper plate, and detects ultrasonic waves reflected on the upper surface and the lower surface of the upper plate, respectively.
- the plate thickness is measured.
- the step measurement step irradiates a laser from above the upper plate toward a portion where the upper plate and the lower plate are both exposed to the upper side of the material, and It is preferable to measure the said level
- the step can be measured with high accuracy and with no contact with the material using a laser, so it is possible to more reliably reduce the damage to the material forming the gap and to improve the measurement accuracy of the gap. It can be done.
- the clearance measurement method of the present invention it is preferable to further include a measurement location moving step of moving the location where the clearance is to be measured along the horizontal direction of the material.
- the method further includes a pressure application step of applying a pressure to the material along the thickness direction of the material when measuring the clearance, and a pressure measurement step of measuring the pressure.
- a pressure application step of applying a pressure to the material along the thickness direction of the material when measuring the clearance and a pressure measurement step of measuring the pressure.
- the gap formed between the upper plate and the lower plate can be measured even if the upper plate and the lower plate constituting the material are not joined. Therefore, the gap formed in advance before manufacturing the material Can be measured.
- the pressure which is one of the conditions of the measurement of the gap is used. It can be measured.
- a gap measurement device when measuring a gap between materials formed by stacking plates in a thickness direction, a gap measurement device that suppresses variation due to workers and reduces damage to the material forming the gap. And the gap measurement method can be obtained.
- FIG. 1 is a view schematically showing a clearance measurement device according to a first embodiment of the present invention.
- FIG. 2 is one example of a side view showing the configuration of the clearance measurement device according to the first embodiment of the present invention.
- FIG. 3 is an example of the side view which shows the structure of the clearance gap measuring apparatus based on the 1st Embodiment of this invention.
- FIG. 4 is a data flow of the clearance measurement device according to the first embodiment of the present invention.
- FIG. 5 is a diagram for explaining the correlation between the positional relationship between the ultrasonic inspection unit and the upper plate and the path of the ultrasonic waves.
- FIG. 6 is a diagram for explaining the correlation between the positional relationship between the ultrasonic inspection unit and the upper plate and the path of the ultrasonic waves.
- FIG. 5 is a diagram for explaining the correlation between the positional relationship between the ultrasonic inspection unit and the upper plate and the path of the ultrasonic waves.
- FIG. 7 is a flowchart of the clearance measurement method according to the first embodiment of the present invention.
- FIG. 8 is a flowchart related to posture determination in the clearance measurement method according to the first embodiment of the present invention.
- FIG. 9 is a diagram showing a configuration of a clearance measurement device according to a second embodiment of the present invention.
- FIG. 10 is a diagram showing a configuration of a clearance measurement device according to a third embodiment of the present invention.
- FIG. 1 is a view schematically showing a clearance measurement device 20 according to a first embodiment of the present invention.
- FIG. 2 is an example of the side view which shows the structure of the clearance gap measurement apparatus 20 which concerns on the 1st Embodiment of this invention.
- FIG. 2 is a side view seen from the direction orthogonal to the XZ plane described later.
- FIG. 3 is an example of a side view showing the configuration of the clearance measurement device 20 according to the first embodiment of the present invention.
- FIG. 3 is a side view seen from the direction orthogonal to the YZ plane described later.
- FIG. 4 is a data flow of the gap measuring device 20 according to the first embodiment of the present invention.
- FIG. 4 also shows the data flow of the gap measuring device 50 according to the third embodiment described later.
- the gap measuring device 20 will be described using FIGS. 1 to 4.
- the clearance measurement device 20 As shown in FIG. 1, in the material 10 formed by stacking the upper plate 12 and the lower plate 14 in the Z-axis direction, which is the thickness direction, as the clearance measurement device 20, between the upper plate 12 and the lower plate 14. Is used as a measurement device for measuring the gap G (see FIG. 2). Specifically, as shown in FIG. 2, the gap G is a distance between the lower surface 12 b of the upper plate 12 and the upper surface 14 a of the lower plate 14.
- the clearance measurement device 20 can be used manually by a worker, as shown in FIG. 1, the end face of the upper plate 12 extends perpendicularly to the three-dimensional direction, that is, the Z-axis direction by the robot arm 16.
- the gap measuring device 20 is gripped using the robot arm 16
- the present invention is not limited to this, and a gap measuring using a known driving device that is gripped movably in three-dimensional directions
- the device 20 can be gripped.
- the robot arm 16 is controlled by the robot control unit 18, and can automatically move the gripped gap measuring device 20 in a three-dimensional direction.
- the gap measuring device 20 can automatically move each sensor included in the gap measuring device 20 automatically on the material 10 by being held by a drive device exemplified by the robot arm 16, ie, The measurement point by the ultrasonic sensor 22 and the measurement point by the laser sensor 26 can be automatically moved. Therefore, the gap measuring device 20 can automatically move the measurement point of the gap.
- the measurement point by the ultrasonic sensor 22 and the measurement point by the laser sensor 26 can both be processed by the computer 30 communicably connected to the robot control unit 18. Further, the difference in coordinates between the measurement point by the ultrasonic sensor 22 and the measurement point by the laser sensor 26 can be corrected by the computer 30.
- the gap measuring device 20 can suppress the variation in measurement of the gap G by the worker and can reduce the load of the task of measuring the gap G by the worker.
- the material 10 is preferably exemplified as an aviation material such as a wrap portion of an aircraft skin in which the upper plate 12 and the lower plate 14 are both formed of an aluminum alloy plate.
- the upper plate 12 and the lower plate 14 are preferably solid plates and plate members made of a single material, as exemplified in the aluminum alloy plate used in this aviation material.
- the upper plate 12 and the lower plate 14 may be painted with a negligible thickness with respect to the thickness of each plate.
- This material 10 may be after the upper plate 12 and the lower plate 14 are joined by the joining member exemplified by the rivet used in this aviation material, or before being joined by the joining material.
- the gap measuring device 20 can also measure the gap G before bonding the upper plate 12 and the lower plate 14, and can also measure the gap G after bonding the upper plate 12 and the lower plate 14. .
- the gap measuring device 20 preferably measures the gap G while applying pressure from above to the upper surface 12 a of the upper plate 12.
- the pressure is, for example, 30 kPa in this embodiment.
- the pressure may be applied by pressing the roller sensor portion 22a of the ultrasonic sensor 22 from above the material 10 onto the upper surface 12a of the upper plate 12, or may be applied using a pressure device or the like provided near the gap measuring device 20. It may be done. In this case, the gap G formed in advance can be measured before the bonding of the material 10.
- the gap measuring device 20 is a displacement in the vertical direction of the ultrasonic sensor 22 functioning as a plate thickness measuring sensor and a support portion supporting the ultrasonic sensor 22, that is, in the Z axis direction. It has displacement sensor 24 which measures the 1st displacement, laser sensor 26 which functions as a level difference measurement sensor, and computer 30.
- the computer 30 is communicably connected to the ultrasonic sensor 22, the displacement sensor 24, and the laser sensor 26, and controls and assists the measurement of each sensor. Further, the computer 30 adds predetermined calculation operations to the information obtained by measurement, and calculates the attitudes of the calculation unit 32 for acquiring new numerical information and the ultrasonic sensor 22 facing the upper surface 12 a of the upper plate 12. And a posture determination unit 34 to determine.
- the ultrasonic sensor 22 has a roller sensor portion 22a, a side member 22b, a shaft support member 22c, and a vertical support member 22d.
- the roller sensor portion 22a has a roller shape, and is rotatably supported around an axis parallel to the material 10, more specifically, an axis directed in a direction along the Y-axis direction.
- the roller sensor unit 22a internally has an ultrasonic inspection unit 22s (see FIGS. 5 and 6) for generating and emitting ultrasonic waves in the circumferential direction and detecting ultrasonic waves incident from the circumferential direction.
- the side members 22b are members provided on both side surfaces of the roller sensor unit 22a.
- the side member 22b has a flat side surface facing the side surface of the roller sensor portion 22a, and the side surface opposite to the side where the roller sensor portion 22a faces is along the axial direction of the roller sensor portion 22a in the central region. It has a cylindrical axial projection.
- the shaft support member 22c is a member provided so as to sandwich the side surface not facing the side surface of the roller sensor portion 22a of the side surface member 22b in a U-shape.
- the shaft support member 22c has a fitting hole into which the protrusion is fitted at a position corresponding to the position of the protrusion of the side member 22b.
- the shaft support member 22c rotatably supports the roller sensor portion 22a and the side members 22b provided on the both side surfaces thereof about an axis.
- the vertical support member 22d is a rod-like member extending in the Z-axis direction, and is fixed at a location straddling the roller sensor portion 22a of the shaft support member 22c and the side surface member 22b, that is, a U-shaped central location. .
- the vertical support member 22d supports the shaft support member 22c from the upper side in the Z-axis direction.
- the ultrasonic sensor 22 has the configuration as described above, and is supported by a common support mechanism with the laser sensor 26 from the upper side in the Z-axis direction.
- the roller sensor portion 22a and the side member 22b function as a movable portion of the roller
- the shaft support member 22c and the vertical support member 22d function as a fixed portion of the roller.
- the ultrasonic sensor 22 rotates as the roller sensor unit 22 a moves along the X-axis direction of the material 10 of the gap measuring device 20. That is, while the ultrasonic sensor 22 is supported from the upper side in the Z-axis direction, the roller sensor portion 22a rotationally moves the upper surface 12a of the upper plate 12 along the X-axis direction.
- the ultrasonic sensor 22 generates the ultrasonic wave US from the ultrasonic emission port 22o located above the upper plate 12 toward the upper surface 12a of the upper plate 12 from the ultrasonic inspection unit 22s inside the roller sensor unit 22a and emits it. .
- the ultrasonic sensor 22 detects the ultrasonic wave US reflected by the upper surface 12 a and the lower surface 12 b of the upper plate 12 by the ultrasonic inspection unit 22 s inside the roller sensor unit 22 a.
- a portion where the ultrasonic wave US is generated and emitted and the reflected ultrasonic wave US is detected is referred to as a measurement portion by the ultrasonic sensor 22.
- the ultrasonic sensor 22 acquires the information of the generated ultrasonic wave US and the detected ultrasonic wave US.
- the ultrasonic sensor 22 measures the thickness T.
- the thickness measuring sensor is the ultrasonic sensor 22 in the present embodiment, but is not limited to this, and it partially transmits the upper plate 12 and reflects it on the upper surface 12 a and the lower surface 12 b of the upper plate 12.
- Well-known measurement sensors that use media can be used.
- the displacement sensor 24 is supported from the upper side in the Z-axis direction.
- the displacement sensor 24 is fixed so that its tip end contacts the top surface of the shaft support member 22c.
- a damper is used as the displacement sensor 24 in the present embodiment, the present invention is not limited to this, and a known displacement sensor can be used.
- the displacement sensor 24 measures a first displacement ⁇ Z1 which is a displacement in the Z-axis direction of the shaft support member 22c and the vertical support member 22d.
- the information on the first displacement ⁇ Z 1 includes information on an attitude angle which is a solid angle of the ultrasonic sensor 22 facing the upper surface 12 a of the upper plate 12.
- the information on the first displacement ⁇ Z1 includes information in which the first attitude angle ⁇ , which is the first component of the attitude angle, and the second attitude angle ⁇ , which is the second component of the attitude angle, are mixed.
- the first posture angle ⁇ is an angle in the rotational direction around the X axis of the laser sensor 26 facing the upper surface 12 a of the upper plate 12 as shown in FIG. 3, and supports the ultrasonic sensor 22 and the laser sensor 26.
- the second posture angle ⁇ is an angle in the rotation direction around the Y axis of the ultrasonic sensor 22 facing the upper surface 12 a of the upper plate 12 as shown in FIG. 2.
- the information of the first displacement ⁇ Z1 includes the information of the pressure applied by the gap measuring device 20 from the upper side to the upper surface 12a of the upper plate 12 by the roller sensor unit 22a of the ultrasonic sensor 22. That is, when measuring the gap G, the displacement sensor 24 can measure the pressure which is one of the conditions of measurement of the gap G.
- the laser sensor 26 is supported above the Z-axis direction by a common support mechanism with the ultrasonic sensor 22.
- the laser sensor 26 is exposed from the laser irradiation port 26o above the upper plate 12 to the vicinity of the end face of the upper plate 12, that is, the upper surface 12a of the upper plate 12 and the upper surface 14a of the lower plate 14 are exposed above the material 10.
- the portion is irradiated with a laser beam LB.
- the laser sensor 26 detects the laser beam LB reflected by the upper surface 12 a of the upper plate 12 and the upper surface 14 a of the lower plate 14. Thereby, the laser sensor 26 acquires information of the irradiated laser beam LB and the detected laser beam LB.
- a portion where the laser beam LB is emitted and the reflected laser beam LB is detected is referred to as a measurement portion by the laser sensor 26.
- the information on the laser beam LB irradiated by the laser sensor 26 and the information on the detected laser beam LB include the information on the upper surface 12 a of the upper plate 12 measured by the laser beam LB and the information on the upper surface 14 a of the lower plate 14. Therefore, the information of the laser beam LB irradiated by the laser sensor 26 and the detected laser beam LB is used to measure the step D which is the distance between the upper surface 12 a of the upper plate 12 and the upper surface 14 a of the lower plate 14. That is, the laser sensor 26 measures the step D.
- the information of the laser beam LB irradiated by the laser sensor 26 and the information of the detected laser beam LB are used to measure the distance between the laser irradiation port 26 o and the upper surface 12 a of the upper plate 12, whereby the Z-axis direction of the laser sensor 26.
- the information on the second displacement ⁇ Z2 includes information on the first attitude angle ⁇ . That is, the laser sensor 26 measures the first attitude angle ⁇ .
- the step measurement sensor is the laser sensor 26 in the present embodiment
- the present invention is not limited to this, and a known measurement sensor using a medium that reflects on the upper surface 12 a of the upper plate 12 and the upper surface 14 a of the lower plate 14 may be used. It can be used.
- the calculation unit 32 acquires information on the thickness T from the ultrasonic sensor 22, and acquires information on the step D from the laser sensor 26.
- the calculation unit 32 calculates the gap G by subtracting the plate thickness T from the step D, as shown in Equation 1.
- the calculating unit 32 causes the display unit connected to the computer 30 to display the calculated value of the gap G, or stores the calculated value of the gap G in a storage unit connected to the inside or the outside of the computer 30. It can be recorded.
- Gap G step D-plate thickness T formula 1
- the calculation unit 32 acquires information of the first displacement ⁇ Z1 from the displacement sensor 24 and acquires information of the second displacement ⁇ Z2 from the laser sensor 26. In addition, the calculation unit 32 acquires, from the storage unit connected to the computer 30, information of the distance L of each measurement point between the ultrasonic sensor 22 and the laser sensor 26, which is one of the storage data. The calculation unit 32 calculates the second attitude angle ⁇ based on the distance L, the first displacement ⁇ Z1, and the second displacement ⁇ Z2, as shown in Expression 2. The calculation unit 32 outputs the information on the second posture angle ⁇ to the posture determination unit 34.
- Second posture angle ⁇ sin ⁇ 1 ((first displacement ⁇ Z1 ⁇ second displacement ⁇ Z2) / distance L) Equation 2
- FIG. 5 is a view for explaining the correlation between the positional relationship between the ultrasonic inspection unit 22s and the upper plate 12 and the path of the ultrasonic wave US.
- FIG. 6 is a diagram for explaining the correlation between the positional relationship between the ultrasonic inspection unit 22s and the upper plate 12 and the path of the ultrasonic wave US.
- the posture of the clearance measurement device 20, that is, the posture of the clearance measurement device 20 suitable for measuring the clearance G will be described with reference to FIGS. 5 and 6.
- the ultrasonic sensor 22 is directed in the direction along the Z-axis direction with respect to the upper surface 12 a of the upper plate 12 as shown in FIG.
- the outgoing wave US1 is emitted in the direction along the Z-axis direction to the upper surface 12a of the upper surface 12a, and the outgoing wave US1 is reflected by the lower surface 12b of the upper plate 12 to become a reflected wave US2 advancing in the direction along the Z-axis Since the wave US2 is detected by the ultrasonic inspection unit 22s and the plate thickness T can be measured appropriately, the posture is appropriate for measuring the gap G.
- the ultrasonic sensor 22 is directed from the direction along the Z-axis direction with respect to the upper surface 12 a of the upper plate 12 as shown in FIG.
- the emission wave US3 Emits the emission wave US3 in a direction inclined from the direction along the Z-axis direction with respect to the upper surface 12a of the upper plate 12, the emission wave US3 is reflected by the lower surface 12b of the upper plate 12, and the direction along the Z-axis direction Since the reflected wave US4 is not detected by the ultrasonic inspection unit 22s and the plate thickness T can not be appropriately measured, the posture is not appropriate for the measurement of the gap G. That is, when measuring the gap G, the gap measuring device 20 takes the posture that the ultrasonic sensor 22 is not inclined with respect to the upper surface 12 a of the upper plate 12 from the direction along the Z-axis direction, so that the distance of the gap is accurate. Can be measured.
- the posture determination unit 34 determines the posture of the clearance measurement device 20, that is, determines whether the posture of the clearance measurement device 20 is a posture appropriate for the measurement of the clearance G.
- the posture determination unit 34 acquires information on the second posture angle ⁇ from the calculation unit 32, as shown in FIG.
- the posture determination unit 34 acquires information on the first posture angle ⁇ from the laser sensor 26.
- the posture determination unit 34 determines the posture of the gap measurement device 20 based on the first posture angle ⁇ and the second posture angle ⁇ . Specifically, as shown in Equation 3, the posture determination unit 34 first sets the first posture angle ⁇ within a range defined by the threshold, for example, within a range of not less than ⁇ 0.5 ° and not more than 0.5 °. Determine if there is.
- the posture determination unit 34 determines whether the second posture angle ⁇ is in a range defined by the threshold, for example, in a range of not less than ⁇ 0.5 ° and not more than 0.5 °. Determine When the posture determination unit 34 determines that both the first posture angle ⁇ and the second posture angle ⁇ are within the predetermined range, the posture measuring unit 34 is appropriate, that is, the clearance measurement device 20 is appropriate for measuring the clearance G. In the case where it is determined that the posture is not determined and at least one of the first posture angle ⁇ and the second posture angle ⁇ is not within the predetermined range, the gap measuring device 20 is inappropriate. It is determined that the posture is inappropriate for The posture determination unit 34 outputs the determination result of the posture to the calculation unit 32.
- the calculation unit 32 acquires the determination result of the posture from the posture determination unit 34.
- the calculating unit 32 can display or store the determination result of the posture by the posture determining unit 34 together.
- the calculation unit 32 causes the value of the gap G to be displayed or stored only when the determination result of the posture is appropriate, and the value of the gap G when the determination result of the posture is inappropriate. It is also possible to remeasure the gap G after correcting the attitude of the gap measuring device 20 without displaying or storing.
- FIG. 7 is a flowchart of the clearance measurement method according to the first embodiment of the present invention.
- FIG. 8 is a flowchart related to posture determination in the clearance measurement method according to the first embodiment of the present invention. A clearance measurement method executed by the clearance measurement device 20 will be described using FIGS. 7 and 8.
- the clearance measurement method includes, as shown in FIG. 7, a thickness measurement step S12, a step measurement step S14, and a clearance calculation step S16.
- the gap measuring device 20 is arranged so that the roller sensor portion 22a of the ultrasonic sensor 22 can be moved along the X axis direction in which the end surface extends on the upper surface 12a of the upper plate 12 near the end surface of the upper plate 12. Ru.
- the laser irradiation port 26 o of the laser sensor 26 is disposed above the vicinity of the end face of the upper surface 12 a of the upper plate 12.
- the ultrasonic inspection unit 22 s In the ultrasonic sensor 22, the ultrasonic inspection unit 22 s generates an ultrasonic wave US from the ultrasonic emission port 22 o toward the upper plate 12.
- the ultrasonic sensor 22 detects the ultrasonic waves US reflected by the upper surface 12 a and the lower surface 12 b of the upper plate 12 by the ultrasonic inspection unit 22 s.
- the ultrasonic sensor 22 measures the thickness T based on the information of the generated ultrasonic wave US and the detected ultrasonic wave US (step S12).
- the laser sensor 26 irradiates the laser beam LB from the laser irradiation port 26 o toward the upper plate 12 and the lower plate 14.
- the laser sensor 26 detects the laser beam LB reflected by the upper surface 12 a of the upper plate 12 and the upper surface 14 a of the lower plate 14.
- the laser sensor 26 measures the step D based on the information of the irradiated laser beam LB and the detected laser beam LB (step S14).
- the plate thickness measuring step S12 and the step difference measuring step S14 may be performed in this order, may be performed simultaneously, or may be performed in the reverse order.
- the calculation unit 32 acquires information on the plate thickness T from the ultrasonic sensor 22 and acquires information on the step difference D from the laser sensor 26.
- the calculation unit 32 calculates the gap G by subtracting the plate thickness T from the step D (step S16).
- the calculation unit 32 can display the calculated value of the gap G on a display unit connected to the computer 30, or can store the calculated value in a storage unit connected to the inside or outside of the computer 30.
- the clearance measurement method by the clearance measurement device 20 according to the first embodiment includes steps S12 to S16 as described above. That is, in the clearance measurement method by the clearance measurement device 20 according to the first embodiment, the clearance G is calculated by subtracting the thickness T measured by the thickness measurement sensor from the step D measured by the step measurement sensor. Therefore, it is possible to suppress variations due to workers and to reduce damage to the material forming the gap.
- the clearance measurement method according to the first embodiment of the present invention further includes a first displacement measurement step S22, a second displacement measurement step S24, and a first attitude angle measurement step S26. It is preferable to have a second attitude angle calculation step S28 and an attitude determination step S30.
- the displacement sensor 24 measures a first displacement ⁇ Z1 which is a displacement in the Z-axis direction of the shaft support member 22c and the vertical support member 22d (step S22).
- the laser sensor 26 measures the second displacement ⁇ Z2 based on the information of the irradiated laser beam LB and the detected laser beam LB (step S24).
- the first displacement measuring step S22 and the second displacement measuring step S24 may be performed in this order, may be performed simultaneously, or may be performed in the reverse order.
- the laser sensor 26 also measures the first posture angle ⁇ based on the information of the second displacement ⁇ Z2 (step S26).
- the calculation unit 32 acquires the information of the first displacement ⁇ Z1 from the displacement sensor 24, and the information of the second displacement ⁇ Z2 from the laser sensor 26. get. In addition, the calculation unit 32 acquires, from the storage unit connected to the computer 30, information on the distance L of each measurement point between the ultrasonic sensor 22 and the laser sensor 26. The calculation unit 32 calculates a second posture angle ⁇ based on the distance L, the first displacement ⁇ Z1 and the second displacement ⁇ Z2 (step S28). The calculation unit 32 outputs the information on the first posture angle ⁇ and the information on the second posture angle ⁇ to the posture determination unit 34.
- first attitude angle measuring step S26 and the second attitude angle calculating step S28 may be performed in this order, may be performed simultaneously, or may be performed in the reverse order.
- the posture determination unit 34 acquires information on the second posture angle ⁇ from the calculation unit 32.
- the posture determination unit 34 acquires information on the first posture angle ⁇ from the laser sensor 26.
- the posture determination unit 34 determines the posture of the gap measurement device 20 based on the first posture angle ⁇ and the second posture angle ⁇ . Specifically, the posture determination unit 34 determines whether or not the first posture angle ⁇ is in a range defined by the threshold value, for example, in a range of not less than ⁇ 0.5 ° and not more than 0.5 °.
- the posture determination unit 34 determines whether or not the second posture angle ⁇ is in a range defined by the threshold value, for example, in a range of not less than ⁇ 0.5 ° and not more than 0.5 °.
- the posture measuring unit 34 determines that both the first posture angle ⁇ and the second posture angle ⁇ are within the predetermined range, the posture measuring unit 34 is appropriate, that is, the clearance measurement device 20 is appropriate for measuring the clearance G. In the case where it is determined that the posture is not determined and at least one of the first posture angle ⁇ and the second posture angle ⁇ is not within the predetermined range, the gap measuring device 20 is inappropriate. It is determined that the posture is inappropriate for the user (step S30). The posture determination unit 34 outputs the determination result of the posture to the calculation unit 32.
- the calculation unit 32 acquires the determination result of the posture from the posture determination unit 34.
- the calculating unit 32 can display or store the determination result of the posture by the posture determining unit 34 together.
- the calculation unit 32 causes the value of the gap G to be displayed or stored only when the determination result of the posture is appropriate, and the value of the gap G when the determination result of the posture is inappropriate. It is also possible to remeasure the gap G after correcting the attitude of the gap measuring device 20 without displaying or storing.
- the clearance measurement method by the clearance measurement apparatus 20 according to the first embodiment further includes steps S22 to S30 as described above. That is, since the clearance measurement method by the clearance measurement device 20 according to the first embodiment can determine whether the postures of the respective sensors of the clearance measurement device 20 are appropriate for the measurement of the clearance, the variation by the worker Can be suppressed more reliably.
- the clearance is measured by moving the measurement point by the ultrasonic sensor 22 and the measurement point by the laser sensor 26 using a drive device such as the robot arm 16 or the like. It is preferable to have a measurement point moving step of moving the point to measure G in the XY plane direction which is a direction along the horizontal direction of the material 10, more specifically, in the direction along the X axis direction.
- the clearance measurement method according to the first embodiment of the present invention can suppress the variation in measurement of the clearance G by the worker and reduce the burden of the measurement operation of the clearance G by the worker. .
- the clearance measurement method according to the first embodiment of the present invention preferably further includes a pressure application step of applying pressure in the direction along the thickness direction of the material 10, ie, the direction along the Z-axis direction.
- the pressure may be applied by pressing the roller sensor portion 22a of the ultrasonic sensor 22 from above the material 10 onto the upper surface 12a of the upper plate 12, or may be applied using a pressure device or the like provided near the gap measuring device 20. It is also good.
- the gap G can be measured before the upper plate 12 and the lower plate 14 are joined.
- the clearance measurement method according to the first embodiment of the present invention further includes a pressure measurement step of measuring the pressure.
- the pressure can be measured by the displacement sensor 24.
- FIG. 9 is a view showing the configuration of a clearance measurement device 40 according to a second embodiment of the present invention.
- a clearance measurement device 40 according to the second embodiment is a clearance measurement device 20 according to the first embodiment, in which a roller unit 42 is additionally provided.
- the clearance measurement device 40 according to the second embodiment is a bogie member 44 between the shaft support member 22c and the vertical support member 22d in the clearance measurement device 20 according to the first embodiment.
- the shaft support member 46, the bearing 48a and the shaft member 48b are newly provided.
- the clearance measurement device 20 according to the second embodiment supports the shaft at a position where the tip of the displacement sensor 24 is fixed.
- the clearance measurement apparatus 40 according to the second embodiment uses the same code group as that of the first embodiment for the same configuration as that of the first embodiment, and the detailed description thereof will be omitted.
- the roller unit 42 has substantially the same configuration as that of the ultrasonic sensor 22 from which the ultrasonic inspection unit 22s that generates and detects ultrasonic waves is removed. That is, the roller unit 42 includes a roller 42a, a side member 42b, and a shaft support member 42c.
- the vertical support member 22 d included in the ultrasonic sensor 22 has a configuration common to the ultrasonic sensor 22 and the roller unit 42.
- the roller 42a has a roller shape similar to the roller sensor unit 22a, and an axis around an axis along a direction parallel to the axis of the roller sensor section 22a, more specifically, an axis directed in a direction along the Y-axis direction Is rotatably supported.
- the side member 42 b is a member provided on both sides of the roller 42 a. That is, the side member 42b has a flat side surface facing the side surface of the roller 42a, and the side surface opposite to the side facing the roller 42a has a cylindrical axis along the axial direction of the roller 42a in the central region. It has a projection.
- the shaft support member 42c is a member provided to sandwich the side surface of the side member 42b not facing the side surface of the roller 42a in a U-shape, like the shaft support member 22c in the ultrasonic sensor 22. That is, the shaft support member 42c has a fitting hole into which the protrusion is fitted at a position corresponding to the position of the protrusion of the side member 42b.
- the shaft support member 42c rotatably supports the roller 42a and the side members 42b provided on both side surfaces thereof about the axis. In the roller unit 42, the roller 42a and the side member 42b function as a movable portion of the roller, and the shaft support member 42c functions as a fixed portion of the roller.
- the roller unit 42 rotates with the ultrasonic sensor 22 as the roller 42 a moves along the X-axis direction with respect to the material 10 of the gap measuring device 40. That is, the roller unit 42 rotationally moves the upper surface 12 a of the upper plate 12 along the X-axis direction while being supported from the upper side in the Z-axis direction together with the ultrasonic sensor 22.
- the carriage member 44 is a plate-like member extending in the XY plane direction, and the lower surface of the carriage member 44 extends across the roller sensor portion 22a of the shaft support member 22c and the side member 22b, that is, a U-shaped central surface
- the shaft supporting member 42c is fixed to a portion straddling the roller 42a and the side surface member 42b, that is, to a surface of a U-shaped central portion.
- the carriage member 44 supports the shaft support member 22c and the shaft support member 42c from the upper side in the Z-axis direction, and functions as a fixed portion common to the ultrasonic sensor 22 and the roller unit 42.
- the bogie member 44 is a surface direction along the XY plane above the upper plate 12 as the roller sensor portion 22a of the ultrasonic sensor 22 and the roller 42a of the roller unit 42 rotationally move the upper surface 12a of the upper plate 12 Move to
- the roller unit 42 can stabilize the gap measuring device 40 on the upper surface 12 a of the upper plate 12, and can reduce the inclination of the upper plate 12 of each sensor of the gap measuring device 40 with respect to the upper surface 12 a. That is, the roller unit 42 facilitates the posture of the clearance measurement device 40 to be appropriate for the measurement of the clearance G.
- the gap measuring device 40 preferably has two roller units 42 and preferably forms a triangle with two roller units 42 and the ultrasonic sensor 22. In this case, the ultrasonic sensor 22 and the two roller units 42 As it is supported by 3 points, it stabilizes more.
- the clearance measurement device 40 can suppress the inclination of the clearance measurement device 40 in the ⁇ direction by arranging a plurality of roller units 42 in the direction orthogonal to the traveling direction, that is, the Y-axis direction.
- the roller unit 42 is preferably farther from the laser sensor 26 than the ultrasonic sensor 22. That is, the ultrasonic sensor 22 is preferably closer to the laser sensor 26 than the roller unit 42. In this case, the difference in coordinates between the measurement point of the ultrasonic sensor 22 and the measurement point of the laser sensor 26 can be accurately corrected.
- the shaft support member 46 is fixed to the upper surface of the carriage member 44.
- the shaft support member 46 rotatably supports the shaft member 48b via a bearing 48a about an axis along a direction parallel to the material 10, more specifically, an axis directed in a direction along the Y-axis direction. doing.
- the shaft support member 46 supports the shaft member 48b at a position closer to the upper side in the direction along the Z-axis direction via the bearing 48a and at a central position in the direction along the X-axis direction.
- the shaft member 48 b is a rod-like member extending along a direction parallel to the material 10, more specifically, a rod-like member extending along the Y-axis direction.
- the shaft member 48 b is rotatably supported by the shaft support member 46 via the bearing 48 a about an axis parallel to the material 10, more specifically, an axis directed in a direction along the Y-axis direction. doing.
- the vertical support member 22d is fixed to the shaft member 48b.
- the vertical support member 22d and the shaft member 48b function as fixed parts, and the shaft support member 46 and the carriage member 44 function as movable members.
- a first displacement ⁇ Z1 which is a displacement in the Z-axis direction of the support member 22d is measured.
- the first displacement ⁇ Z1 is a measurement amount including the same information as that of the first embodiment.
- the roller sensor portion 22a can be moved continuously and stably on the material 10, so a plurality of gaps can be measured. Even in the case of continuous measurement at points, it is possible to more reliably suppress variations among workers.
- FIG. 10 is a diagram showing a configuration of a clearance measurement device 50 according to a third embodiment of the present invention.
- a clearance measurement apparatus 50 according to the third embodiment is the same as the clearance measurement apparatus 20 according to the first embodiment, including a casing 52 for supporting and storing the ultrasonic sensor 22, the displacement sensor 24, and the laser sensor 26, and a gonioio.
- a stage 54 is additionally provided.
- the clearance measurement apparatus 50 according to the third embodiment uses the same code group as that of the first embodiment for the same configuration as that of the first embodiment, and the detailed description thereof will be omitted.
- the gonio stage 54 has a stage unit 54 a and a stage drive unit 54 b.
- the stage portion 54 a movably holds the casing 52 along a circular arc surface of radius R centered on the ultrasonic emission port 22 o of the ultrasonic sensor 22.
- the radius R is the distance between the central portion of the stage portion 54 a of the gonio stage 54 and the upper surface 12 a of the upper plate 12. That is, the stage portion 54a holds the casing 52 movably in the direction of the first attitude angle ⁇ and the direction of the second attitude angle ⁇ with respect to the upper surface 12a of the upper plate 12 centering on the ultrasonic wave emission port 22o. .
- the stage drive unit 54 b is a drive unit that drives the stage unit 54 a and is communicably connected to the computer 30.
- the calculation unit 32 determines the first posture angle. According to the posture correction value calculated based on the information of ⁇ and the second posture angle ⁇ , the stage portion 54 a can be driven to correct the posture of the gap measuring device 50. Since the gonio stage 54 has the above configuration, it functions as an attitude control device that controls the attitude of the gap measuring device 50.
- the calculation unit 32 and the posture determination unit 34 have more functions than the clearance measurement device 20 according to the first embodiment in the clearance measurement device 50 according to the third embodiment.
- the posture determination unit 34 determines that the posture of the gap measurement device 50 is a posture unsuitable for measuring the gap G
- the posture determination unit 34 outputs information of the determination result to the calculation unit 32.
- the calculation unit 32 acquires, from the posture determination unit 34, information on the determination result that the posture of the gap measuring device 50 is a posture unsuitable for measuring the gap G, the first posture angle ⁇ and the second posture angle are obtained. Based on the information of ⁇ , a posture correction value is calculated, and the calculated posture correction value is transmitted to the stage drive unit 54b of the gonio stage 54.
- the clearance measurement device 50 can further execute a posture correction value calculation step and a posture correction step.
- the posture correction value calculation step when the calculation unit 32 acquires information on the determination result that the posture of the gap measuring device 50 is a posture unsuitable for measuring the gap G from the posture determination unit 34, the first posture This is a step of calculating a posture correction value based on the information of the angle ⁇ and the second posture angle ⁇ .
- the posture correction step is performed after the posture correction value calculation step, and the stage drive unit 54 b drives the stage unit 54 a according to the correction value of the posture received from the calculation unit 32 to set the posture of the gap measuring device 50. It is a step to correct.
- the clearance measurement method by the clearance measurement device 50 according to the third embodiment further includes the posture correction value calculating step and the posture control step as described above. That is, since the clearance measurement method by the clearance measurement device 50 according to the third embodiment can correct the posture of each sensor to a posture suitable for the measurement of the clearance G, the variation due to the worker can be further surely suppressed. can do.
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Abstract
Description
12 上板
12a 上面
12b 下面
14a 上面
14 下板
16 ロボットアーム
18 ロボット制御部
20,40,50 隙間計測装置
22 超音波センサ(板厚計測センサ)
22a ローラセンサ部
22b 側面部材
22c 軸支持部材
22d 鉛直支持部材
22o 超音波射出口
22s 超音波検査部
24 変位センサ
26 レーザセンサ(段差計測センサ)
26o レーザ照射口
30 コンピュータ
32 算出部
34 姿勢判定部
42 ローラユニット
42a ローラ
42b 側面部材
42c 軸支持部材
44 台車部材
46 軸支持部材
48a ベアリング
48b 軸部材
52 ケーシング
54 ゴニオステージ
54a ステージ部
54b ステージ駆動部
Claims (16)
- 上板と下板とが厚み方向に重ねられて形成された材料において、前記上板と前記下板との間の隙間を計測する計測装置であって、
前記上板の厚みである板厚を計測する板厚計測センサと、
前記上板の上面と前記下板の上面との間の距離である段差を計測する段差計測センサと、
前記段差から前記板厚を差し引くことで、前記上板と前記下板との間の隙間を算出する算出部と、
を有することを特徴とする隙間計測装置。 - 前記板厚計測センサを鉛直方向に支持する支持部の前記厚み方向における変位である第1変位を計測する変位センサと、
前記上板の上面に対向する前記板厚計測センサの姿勢を判定する姿勢判定部と、をさらに有し、
前記段差計測センサは、前記段差計測センサの前記厚み方向における変位である第2変位及び前記上板の上面に対向する前記段差計測センサの姿勢角である第1姿勢角を計測し、
前記算出部は、前記板厚計測センサと前記段差計測センサとの各計測点の間の距離、前記第1変位及び前記第2変位に基づいて、前記上板の上面に対向する前記板厚計測センサの姿勢角の成分である第2姿勢角を算出し、
前記姿勢判定部は、前記第1姿勢角及び前記第2姿勢角に基づいて、前記姿勢を判定することを特徴とする請求項1に記載の隙間計測装置。 - 前記板厚計測センサ、前記段差計測センサ及び前記変位センサを、前記上板の上面との距離を半径とする円弧面に沿って移動可能に把持するゴニオステージと、をさらに有し、
前記算出部は、前記姿勢が前記隙間の計測に不適切であると判定された場合、前記姿勢の修正値を算出し、前記修正値を前記ゴニオステージに送信し、
前記ゴニオステージは、前記算出部から受信した前記修正値に応じて前記姿勢を修正することを特徴とする請求項2に記載の隙間計測装置。 - 前記変位センサは、さらに、板厚計測センサが前記上板に対してかけている圧力を計測することを特徴とする請求項2または請求項3に記載の隙間計測装置。
- 前記板厚計測センサは、前記上板の上方から前記上板の上面に向けて超音波を発生させ、前記上板の上面及び下面でそれぞれ反射した超音波を検出する超音波センサであることを特徴とする請求項1から請求項4のいずれか1項に記載の隙間計測装置。
- 前記板厚計測センサは、前記材料に平行な軸周りに回動可能に支持されており、前記材料に対する移動に伴って回転するローラセンサ部を有することを特徴とする請求項1から請求項5のいずれか1項に記載の隙間計測装置。
- 前記ローラセンサ部に対して平行に設けられ、前記ローラセンサ部の軸に平行な方向に沿った軸周りに回動可能に支持されており、前記材料に対する移動に伴って前記ローラセンサ部と共に回転するローラと、
をさらに有することを特徴とする請求項6に記載の隙間計測装置。 - 前記段差計測センサは、前記上板の上方から前記上板と前記下板とが共に前記材料の上側に露出している箇所に向けてレーザを照射し、前記上板の上面及び前記下板の上面でそれぞれ反射したレーザを検出するレーザセンサであることを特徴とする請求項1から請求項7のいずれか1項に記載の隙間計測装置。
- 前記板厚計測センサ及び前記段差計測センサを3次元方向に移動可能に把持する駆動装置と、
をさらに有することを特徴とする請求項1から請求項8のいずれか1項に記載の隙間計測装置。 - 上板と下板とが厚み方向に重ねられて形成された材料において、前記上板と前記下板との間の隙間を計測する計測方法であって、
板厚計測センサで前記上板の厚みである板厚を計測する板厚計測ステップと、
段差計測センサで前記上板の上面と前記下板の上面との間の距離である段差を計測する段差計測ステップと、
前記段差から前記板厚を差し引くことで、前記上板と前記下板との間の隙間を算出する隙間算出ステップと、
を有することを特徴とする隙間計測方法。 - 前記板厚計測センサを鉛直方向に支持する支持部の前記厚み方向における変位である第1変位を計測する第1変位計測ステップと、
前記段差計測センサの前記厚み方向における変位である第2変位を計測する第2変位計測ステップと、
前記上板の上面に対向する前記段差計測センサの姿勢角である第1姿勢角を計測する第1姿勢角計測ステップと、
前記板厚計測センサと前記段差計測センサとの各計測点の間の距離、前記第1変位及び前記第2変位に基づいて、前記上板の上面に対向する前記板厚計測センサの姿勢角の成分である第2姿勢角を算出する第2姿勢角算出ステップと、
前記第1姿勢角及び前記第2姿勢角に基づいて、前記姿勢を判定する姿勢判定ステップと、
をさらに有することを特徴とする請求項10に記載の隙間計測方法。 - 前記姿勢が前記隙間の計測に不適切であると判定された場合、前記姿勢の修正値を算出する姿勢修正値算出ステップと、
前記修正値に応じて前記姿勢を修正する姿勢修正ステップと、
をさらに有することを特徴とする請求項11に記載の隙間計測方法。 - 前記板厚計測ステップは、前記上板の上方から前記上板に向けて超音波を発生させ、前記上板の上面及び下面でそれぞれ反射した超音波を検出することで、前記板厚を計測することを特徴とする請求項10から請求項12のいずれか1項に記載の隙間計測方法。
- 前記段差計測ステップは、前記上板の上方から前記上板と前記下板とが共に前記材料の上側に露出している箇所に向けてレーザを照射し、前記上板の上面及び前記下板の上面でそれぞれ反射したレーザを検出することで、前記段差を計測することを特徴とする請求項10から請求項13のいずれか1項に記載の隙間計測方法。
- 前記隙間を計測する箇所を前記材料の水平方向に沿って移動させる計測箇所移動ステップと、
をさらに有することを特徴とする請求項10から請求項14のいずれか1項に記載の隙間計測方法。 - 前記隙間を計測する際に、前記材料に前記材料の厚み方向に沿って圧力をかける圧力付加ステップと、
前記圧力を計測する圧力計測ステップと、
をさらに有することを特徴とする請求項10から請求項15のいずれか1項に記載の隙間計測方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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CA3006543A CA3006543C (en) | 2016-01-20 | 2016-11-24 | Gap measurement device and gap measurement method |
ES16886457T ES2765744T3 (es) | 2016-01-20 | 2016-11-24 | Dispositivo de medición de huecos y método de medición de huecos |
US15/778,633 US11054253B2 (en) | 2016-01-20 | 2016-11-24 | Gap measurement device and gap measurement method |
EP16886457.7A EP3370035B1 (en) | 2016-01-20 | 2016-11-24 | Gap measurement device and gap measurement method |
CN201680069711.1A CN108369093A (zh) | 2016-01-20 | 2016-11-24 | 间隙测量装置以及间隙测量方法 |
BR112018010979-7A BR112018010979A2 (ja) | 2016-01-20 | 2016-11-24 | A crevice measuring device and a crevice instrumentation method |
KR1020187014850A KR102045696B1 (ko) | 2016-01-20 | 2016-11-24 | 갭 계측 장치 및 갭 계측 방법 |
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EP (1) | EP3370035B1 (ja) |
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EP3708482B1 (de) * | 2019-03-13 | 2023-06-07 | Becker Marine Systems GmbH | Ruder für wasserfahrzeuge mit einer lagerspielmessvorrichtung, verfahren zur messung eines lagerspiels in einem ruder und lagerspielmessvorrichtung für ein ruder |
JP7283228B2 (ja) * | 2019-05-27 | 2023-05-30 | コニカミノルタ株式会社 | 測定装置、画像形成装置、および、測定方法 |
CN110631495B (zh) * | 2019-10-25 | 2024-05-14 | 宁波中车时代传感技术有限公司 | 磁电式速度传感器曲面间隙检测方法 |
CN111690802B (zh) * | 2020-06-17 | 2021-11-09 | 广西先进铝加工创新中心有限责任公司 | 一种辊底式热处理炉炉辊的安装调试方法 |
US20230069081A1 (en) * | 2021-08-30 | 2023-03-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for adjusting the gap between a wafer and a top plate in a thin-film deposition process |
CN114179322B (zh) * | 2021-12-08 | 2024-07-02 | 苏州博众智能机器人有限公司 | 一种模具间隙检测设备 |
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EP3370035A1 (en) | 2018-09-05 |
US20180347973A1 (en) | 2018-12-06 |
JP6723634B2 (ja) | 2020-07-15 |
CA3006543C (en) | 2020-06-02 |
BR112018010979A2 (ja) | 2018-12-04 |
US11054253B2 (en) | 2021-07-06 |
EP3370035A4 (en) | 2018-09-05 |
KR20180074768A (ko) | 2018-07-03 |
JP2017129464A (ja) | 2017-07-27 |
CN108369093A (zh) | 2018-08-03 |
ES2765744T3 (es) | 2020-06-10 |
CA3006543A1 (en) | 2017-07-27 |
EP3370035B1 (en) | 2019-10-23 |
KR102045696B1 (ko) | 2019-11-15 |
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