KR102022888B1 - 광학 컴포넌트의 기하 구조 측정 방법 및 장치 - Google Patents

광학 컴포넌트의 기하 구조 측정 방법 및 장치 Download PDF

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KR102022888B1
KR102022888B1 KR1020147024926A KR20147024926A KR102022888B1 KR 102022888 B1 KR102022888 B1 KR 102022888B1 KR 1020147024926 A KR1020147024926 A KR 1020147024926A KR 20147024926 A KR20147024926 A KR 20147024926A KR 102022888 B1 KR102022888 B1 KR 102022888B1
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signal
measurement
face
measuring
deformation
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KR20140132725A (ko
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스테판느 규
니콜라 라비오니에흐
파비앙 뮈하도흐
아스마 라쿠아
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에씰로 앙터나시오날
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
    • G01M11/0264—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
    • G01M11/02—Testing optical properties
    • G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
    • G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods

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  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
KR1020147024926A 2012-03-09 2013-03-08 광학 컴포넌트의 기하 구조 측정 방법 및 장치 Active KR102022888B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12290084.8A EP2637011A1 (fr) 2012-03-09 2012-03-09 Procédé et appareil de mesure de la structure géométrique d'un composant optique
EP12290084.8 2012-03-09
PCT/EP2013/054751 WO2013132072A1 (fr) 2012-03-09 2013-03-08 Procede et appareil de mesure de la structure geometrique d'un composant optique

Publications (2)

Publication Number Publication Date
KR20140132725A KR20140132725A (ko) 2014-11-18
KR102022888B1 true KR102022888B1 (ko) 2019-11-25

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KR1020147024926A Active KR102022888B1 (ko) 2012-03-09 2013-03-08 광학 컴포넌트의 기하 구조 측정 방법 및 장치

Country Status (14)

Country Link
US (1) US9109976B2 (https=)
EP (2) EP2637011A1 (https=)
JP (1) JP6223368B2 (https=)
KR (1) KR102022888B1 (https=)
CN (1) CN104169704B (https=)
AU (1) AU2013229379B2 (https=)
BR (1) BR112014022264B1 (https=)
CA (1) CA2864866C (https=)
IN (1) IN2014DN07627A (https=)
MX (1) MX338853B (https=)
NZ (1) NZ628795A (https=)
RU (1) RU2618746C2 (https=)
WO (1) WO2013132072A1 (https=)
ZA (1) ZA201406182B (https=)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10289895B2 (en) 2014-10-21 2019-05-14 Isra Surface Vision Gmbh Method and device for determining a three-dimensional distortion
DE102014115336A1 (de) * 2014-10-21 2016-04-21 Isra Surface Vision Gmbh Verfahren zur Bestimmung eines lokalen Brechwerts und Vorrichtung hierfür
RU2650857C1 (ru) * 2017-04-06 2018-04-17 Федеральное государственное бюджетное образовательное учреждение высшего образования "Кубанский государственный технологический университет" (ФГБОУ ВО "КубГТУ") Система определения геометрических параметров трехмерных объектов

Citations (2)

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Publication number Priority date Publication date Assignee Title
JP2004507730A (ja) 2000-08-22 2004-03-11 エシロール　アンテルナショナル 光学要素の幾何学構造の伝達測定方法と装置
JP2011123053A (ja) 2009-11-12 2011-06-23 Canon Inc 測定方法及び測定装置

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AU642768B2 (en) * 1990-10-02 1993-10-28 Ciba-Geigy Ag A method of surface-cleaning and/or sterilising optical components, especially contact lenses
ES2101465T3 (es) * 1993-09-17 1997-07-01 Essilor Int Procedimiento de medicion absoluta de la estructura geometrica u optica de un componente optico y dispositivo para su puesta en practica.
US6072570A (en) * 1997-07-24 2000-06-06 Innotech Image quality mapper for progressive eyeglasses
FR2783938B1 (fr) * 1998-09-28 2000-11-17 Essilor Int Lentilles ophtalmiques toriques
US6256098B1 (en) * 1998-11-23 2001-07-03 Inray Ltd. Method for determining and designing optical elements
JP2001227908A (ja) * 2000-02-18 2001-08-24 Canon Inc 光学測定装置
US7034949B2 (en) * 2001-12-10 2006-04-25 Ophthonix, Inc. Systems and methods for wavefront measurement
JP2003269952A (ja) * 2002-03-13 2003-09-25 Canon Inc ３次元形状測定装置および方法
AU2002307854A1 (en) * 2002-05-31 2003-12-19 Crossbows Optical Limited Progressive addition power lens
DE10337894A1 (de) * 2003-08-18 2005-03-17 Robert Bosch Gmbh Optisches Messsystem zum Erfassen von Geometriedaten von Oberflächen
DE102004047531B4 (de) * 2004-09-30 2006-07-13 Kemper, Björn, Dr.rer.nat. Interferometrisches Verfahren und interferometrische Vorrichtung zum Ermitteln einer Topographie und einer Brechungsindexverteilung eines Objekts
US7616330B2 (en) * 2006-04-07 2009-11-10 AMO Wavefront Sciences, LLP Geometric measurement system and method of measuring a geometric characteristic of an object
US7573643B2 (en) * 2006-08-16 2009-08-11 Technion Research & Development Foundation Ltd. Method and apparatus for designing transmissive optical surfaces
CN101652626B (zh) * 2007-04-05 2011-07-13 株式会社尼康 形状测定装置及形状测定方法
JP2010085335A (ja) * 2008-10-01 2010-04-15 Fujinon Corp 光波干渉測定装置
FR2938934B1 (fr) * 2008-11-25 2017-07-07 Essilor Int - Cie Generale D'optique Verre de lunettes procurant une vision ophtalmique et une vision supplementaire
JP2010237189A (ja) * 2009-03-11 2010-10-21 Fujifilm Corp ３次元形状測定方法および装置
JP4968966B2 (ja) * 2009-12-07 2012-07-04 キヤノン株式会社 屈折率分布の計測方法および計測装置
EP2594896B1 (en) * 2010-07-15 2016-02-10 Canon Kabushiki Kaisha Method and apparatus for measuring shape of surface to be inspected, and method for manufacturing optical element
JP5618727B2 (ja) * 2010-09-21 2014-11-05 キヤノン株式会社 形状測定法及び形状計測装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004507730A (ja) 2000-08-22 2004-03-11 エシロール　アンテルナショナル 光学要素の幾何学構造の伝達測定方法と装置
JP2011123053A (ja) 2009-11-12 2011-06-23 Canon Inc 測定方法及び測定装置

Also Published As

Publication number Publication date
AU2013229379B2 (en) 2016-11-24
MX338853B (es) 2016-05-02
BR112014022264A8 (pt) 2018-08-14
CN104169704B (zh) 2018-04-24
WO2013132072A1 (fr) 2013-09-12
AU2013229379A1 (en) 2014-09-04
KR20140132725A (ko) 2014-11-18
IN2014DN07627A (https=) 2015-05-15
EP2823279A1 (fr) 2015-01-14
RU2618746C2 (ru) 2017-05-11
MX2014010784A (es) 2015-04-17
NZ628795A (en) 2016-11-25
CA2864866C (fr) 2020-07-07
US9109976B2 (en) 2015-08-18
CN104169704A (zh) 2014-11-26
BR112014022264A2 (https=) 2017-06-20
RU2014140808A (ru) 2016-05-10
ZA201406182B (en) 2016-02-24
JP6223368B2 (ja) 2017-11-01
EP2637011A1 (fr) 2013-09-11
US20150055126A1 (en) 2015-02-26
EP2823279B1 (fr) 2019-12-25
CA2864866A1 (fr) 2013-09-12
JP2015509599A (ja) 2015-03-30
BR112014022264B1 (pt) 2020-11-10

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