KR101950987B1 - Slit nozzle for jetting steam - Google Patents

Abstract

The steam injection slit nozzle according to an embodiment of the present invention includes a body for separating an inner space from an outer space, a steam inlet pipe for introducing steam into the body, a slit for linearly spraying the steam to an object to be cleaned, And at least one adjuster coupled to one side of the body to adjust the slit spacing of the slit ejection orifice without penetrating the body.

Description

[0001] SLIT NOZZLE FOR JETTING STEAM [0002]

The present invention relates to a steam injection nozzle, and more particularly, to a steam injection slit nozzle for linearly injecting steam.

As the semiconductor device becomes highly integrated, the circuit pattern to be implemented on the substrate is also becoming finer. Thus, the pattern on the substrate can cause defective semiconductor devices even with very fine contaminants, and the importance of the cleaning process is becoming more and more important.

In this cleaning process, pure water is generally sprayed through an ultrasonic oscillator, or pure water is sprayed using a high-pressure nozzle. However, if the substrate is cleaned by applying such ultrasonic waves or using only high-pressure pure water, contaminants that are simply adhered to the surface of the substrate can be removed, but they are strongly bonded to the surface of the substrate such as a photoresist, In the case of contaminants, it can not be effectively removed in a short time. Thus, contaminants that have not been removed can reduce the uniformity of the film quality in subsequent processes or can lead to substrate defects.

Accordingly, the pressure of the pure water injected has been increased in order to remove contaminants which can not be removed well. However, as the injection pressure increases, the patterns of the fine semiconductor circuits are broken down, which causes a problem that the semiconductor circuit does not operate properly.

Further, even if the injection pressure is increased, since the particle size of the pure water itself is not small enough to be interposed between the patterns of the semiconductor circuit, there is still a problem that there is still a gap between the patterns that can not be cleaned.

In recent years, in order to solve these two problems in a cleaning method of spraying pure water, a cleaning method using steam having a particle size sufficiently small and sufficient thermal energy for cleaning has been carried out.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a steam injection slit nozzle which can be easily managed since the adjusting unit for adjusting the slit interval of the slit injection hole does not penetrate the inside of the body through which the steam passes.

Another object of the present invention is to provide a steam injection slit nozzle in which the adjustment part for adjusting the slit interval of the slit injection hole is prevented from being deformed by steam because it does not directly contact with steam.

It is still another object of the present invention to provide a steam injection slit nozzle in which a bolt included in an adjusting part for adjusting a slit interval of a slit nozzle opening does not pass through the body, which is a path through which steam passes.

According to an aspect of the present invention, there is provided a steam injection slit nozzle comprising: a body separating an inner space from an outer space; a steam inlet pipe for introducing steam into the body; And at least one adjusting unit coupled to one side of the body to adjust a slit interval of the slit nozzle without passing through the inside of the body.

In one embodiment of the present invention, each of the at least one adjustment portion includes a first support portion located on one side of the body outside the slit ejection orifice, a second support portion located on one side of the body outside the first support portion, A bolt passing through the second support portion and having an end supported by the first support portion and a nut abutting the second support portion and engaged with the bolt.

The apparatus may further include a gas inlet pipe for injecting gas into the body, and at least one of the steam and the gas may be injected through the slit injection port.

In an embodiment, the gas may include at least one of clean dry air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam.

In an exemplary embodiment, at least one of the steam and the liquid may be injected through the slit ejection opening, further comprising a liquid inlet pipe for injecting liquid into the body.

In an embodiment, the liquid may comprise at least one of pure water and ozonated water.

In an embodiment, the pure water may include at least one of deionized water (DIW) and ultrapure water (UPW).

In an embodiment, the body may include a spacing protrusion to prevent a slit gap that narrows below a certain length.

In an embodiment, the apparatus may further include a liquid curtain forming unit positioned outside the body and located at a front end and a rear end of the slit ejection opening in a direction of movement of the slit ejection opening to form a liquid curtain.

In an embodiment, the liquid curtain may comprise at least one of pure water and ozonated water.

In an embodiment, the pure water may include at least one of deionized water (DIW) and ultrapure water (UPW).

The effect of the steam injection slit nozzle according to the present invention will be described as follows.

According to at least one of the embodiments of the present invention, the adjustment unit for adjusting the slit interval of the slit injection hole does not penetrate the inside of the body through which the steam passes, thereby securing the passage through which the steam passes.

Also, according to at least one of the embodiments of the present invention, the adjusting unit for adjusting the slit interval of the slit jetting port can keep the slit interval constant by avoiding direct contact with steam.

In addition, according to at least one of the embodiments of the present invention, the adjusting unit for adjusting the slit interval of the slit jetting port eliminates the bolt passing through the inside of the body, which is the path through which the steam passes, It is possible to prevent leakage to the outside of the body.

1 is a vertical cross-sectional view of a steam injection slit nozzle according to an embodiment of the present invention.
2 is a perspective view of a steam injection slit nozzle according to another embodiment of the present invention.
FIG. 3 is an enlarged view of an adjusting unit for adjusting the slit interval of the slit ejection orifice of the steam injection slit nozzle according to another embodiment of the present invention, and an adjustment unit for the other steam injection slit nozzle. (a) Another steam spray slit nozzle. (b) A steam spray slit nozzle according to the present invention.
4 is a vertical cross-sectional view of a steam injection slit nozzle according to another embodiment of the present invention.
5 is a vertical cross-sectional view of a steam injection slit nozzle according to an embodiment of the present invention.
FIG. 6 is an enlarged view of a steam, a gas, and a liquid mixed region of a steam injection slit nozzle according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals are used to designate identical or similar elements, and redundant description thereof will be omitted. The suffix "module" and " part "for the components used in the following description are given or mixed in consideration of ease of specification, and do not have their own meaning or role. In the following description of the embodiments of the present invention, a detailed description of related arts will be omitted when it is determined that the gist of the embodiments disclosed herein may be blurred. It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are intended to provide further explanation of the invention as claimed. , ≪ / RTI > equivalents, and alternatives.

Terms including ordinals, such as first, second, etc., may be used to describe various elements, but the elements are not limited to these terms. The terms are used only for the purpose of distinguishing one component from another.

It is to be understood that when an element is referred to as being "connected" or "connected" to another element, it may be directly connected or connected to the other element, . On the other hand, when an element is referred to as being "directly connected" or "directly connected" to another element, it should be understood that there are no other elements in between.

The singular expressions include plural expressions unless the context clearly dictates otherwise.

In the present application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a component, But do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or combinations thereof.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. It will be apparent to those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

1 is a vertical cross-sectional view of a steam injection slit nozzle according to an embodiment of the present invention.

Hereinafter, the steam cleaning process through the steam injection slit nozzle will be described in detail.

Referring to FIG. 1, the steam injection slit nozzle includes a body 100 separating an inner space from an outer space, a steam inflow pipe 204 blowing steam into the inside of the body 101, A slit jetting opening 222 for linearly injecting an object to be inspected into the body 100 and at least one or more slit jetting openings 222 which are coupled to one side of the body 100 to control the slit interval of the slit jetting opening 222, And may include an adjustment unit 110. Here, the controller 110 included in the present invention will be described in detail with reference to FIG.

First, the steam 20 can be introduced from the outside of the body 100 to the inside of the body 101 through the steam inlet pipe 204. The steam injection slit nozzle can inject the steam 20 into the object to be cleaned as the jetting fluid 30 through the jetting tube 220 and the slit jetting port 222. [ The injected jetting fluid 30 can provide a cleaning effect that separates and removes contaminants from the object to be cleaned.

The steam injection slit nozzle further includes a gas inlet pipe 206 for receiving the gas 22 into the inside of the body 101 and a liquid inlet pipe 202 for injecting the liquid 10 into the inside of the body 101 At least one of the steam 20, the base 22 and the liquid 10 can be injected as a jetting fluid 30 through a slit jetting opening 222 to an object to be cleaned.

Here, the gas 22 may include at least one of clean air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam, and the liquid 10 may be pure water or ozone water have. At this time, the pure water may include at least one of deionized water (DIW) not containing ions and ultrapure water (UPW) containing no impurities other than ions and ions.

On the other hand, when at least one of the steam 20, the gas 22, and the liquid 10 is mixed together and injected as the injecting fluid 30, only the steam 20 is injected as the injecting fluid 30 It is possible to perform more effective cleaning in the case of spraying. The details of this are as follows.

When the steam injection slit nozzle cools at least one of the steam 20 and the gas 22 and the liquid 10 together and injects it as the injection fluid 30, the injection fluid 30 Can be increased more than when the steam 20 is injected as the injection fluid 30 only. The jetting fluid 30 including at least one of the steam 20 and the gas 22 and the liquid 10 is discharged at the same time ratio as the jetting fluid 30 containing only the steam 20 , It can be injected at an increased speed. The increased speed can act as an additional pressure to push off the contaminants on the surface of the object to be cleaned, which can be an additional aid in isolating contaminants from the object.

Particularly, when the ozone water is sprayed as the liquid 10, the cleaning can be performed more effectively than when the pure water is sprayed as the liquid 10. A detailed explanation is as follows.

First, when injecting the ozone water as the liquid 10 through the liquid inlet pipe 202, the injected injection fluid 30 may contain the oxygen radical O · and the hydroxy radical OH ·. Here, a radical is a species that is electrically neutral and has a non-covalent electron pair unlike an ion. Therefore, the radical is strong in chemical reactivity because it obtains electrons elsewhere and fills a non-covalent electron pair, or attempts to break the state of a non-covalent electron pair by abandoning the excited electron. In other words, the radicals are strongly chemically reactive and can act as an important factor in the separation of contaminants.

Therefore, when the ozone water is introduced as liquid through the liquid inlet pipe 202, the radicals are combined with contaminants present on the surface of the object to be cleaned, thereby providing a cleaning effect for separating and removing contaminants from the object to be cleaned have.

2 is a perspective view of a steam injection slit nozzle according to another embodiment of the present invention.

Referring to FIG. 2, the slit ejection opening 222 of the steam injection slit nozzle can eject the ejection fluid 30 in a linear shape including an imaginary line perpendicular to the traveling direction of the object to be cleaned. As a result, the injection fluid 30 injected from the slit injection port 222 can be injected in a linear form including an imaginary line perpendicular to the traveling direction of the object, thereby instantaneously cleaning the linear area of the object surface .

As a result, if the steam injection slit nozzle according to the present invention moves at a relative speed with respect to the object to be cleaned in a direction perpendicular to the long axis of the slit ejection opening 222 with the passage of time, It is possible to clean a relatively larger area during the same time period as compared with the steam spray nozzle which is made up of a steam spray nozzle.

FIG. 3 is an enlarged view of an adjusting unit for adjusting the slit interval of the slit ejection orifice of the steam injection slit nozzle according to another embodiment of the present invention, and an adjustment unit for the other steam injection slit nozzle. (a) Another steam spray slit nozzle. (b) A steam spray slit nozzle according to the present invention.

Referring to FIG. 3A, another steam injection slit nozzle may include an adjusting unit 120 for adjusting a slit interval of the slit ejection opening. However, the control unit 120 may pass through the inside of the body, which is the path through which the steam passes, which may be disadvantageous for securing the passage through which the steam passes.

In addition, the regulating unit 120 directly contacts the steam inside the body, and can be significantly affected by the vibration of the water molecules contained in the steam and the heat energy. This can act as an obstacle to maintaining a constant slit spacing.

Further, when the regulating portion 120 includes a bolt passing through the inside of the body, steam may leak out of the body through a gap between the bolt and the fastening portion of the body.

3 (b), the steam injection slit nozzle according to the present invention is connected to one side of the body and does not penetrate the inside of the body, but includes at least one adjustment part 110 for adjusting the slit interval of the slit injection hole, . ≪ / RTI > At this time, the adjustment unit 110 may include bolts 112 and 114 and a nut 116. The bolt may include the head 112 of the bolt and the screw 114 of the bolt.

Accordingly, the control unit 110 according to the present invention can secure a passage through which steam flows. In addition, it is possible to prevent the direct influence of vibration of water molecules and heat energy, which interfere with maintaining the slit interval of the slit ejection openings 222, from being affected. In addition, leakage of steam to the outside of the body through the gap between the bolt and the fastening portion of the body can be eliminated.

A detailed description of the adjustment of the slit interval of the slit nozzle 222 by the adjustment unit 110 included in the present invention is as follows.

Each of the at least one adjustment part 110 includes a first support part 102 positioned adjacent to the slit ejection opening 222 on one side of the outside of the body and a second support part 102 spaced apart from the upper part of the first support part 102 (The head 112 of the bolt and the screw 114 of the bolt), the end of which passes through the second supporting portion 104 and the second supporting portion 104 and is supported by the first supporting portion 102, And may include a nut 116 which abuts against the bolt 104 and is engaged with the bolt.

The distance between the first support portion 102 and the second support portion 104 can be narrowed by relatively rotating the nut 116 and the bolts 112 and 114 abutting on the upper portion of the second support portion 104. When the distance is narrowed, the outer end of the body where the first support part 102 is located is lifted upwards, so that the slit interval of the slit ejection opening 222 can be widened.

In this manner, the slit interval of the slit ejection openings 222 can be narrowed. The nut 116 and the bolts 112 and 114 abutting on the upper portion of the second support portion 104 can be relatively rotated in the direction opposite to the direction in which the slit gap is widened in advance. As a result, the distance between the first support portion 102 and the second support portion 104 can be increased. When the distance is widened, the outer end of the body where the first support part 102 is located is pushed downward, and the slit interval of the slit ejection opening 222 may be narrowed.

At this time, the body may include a gap retaining projection (not shown) to prevent a slit interval narrowing below a certain length. The concrete procedure is as follows. The body may include a spacing protrusion that protrudes toward the inside of the body in the section of the spray tube 220. Accordingly, when the slit interval of the slit ejection openings 222 is adjusted, the slit interval may not become narrower than the protruded length of the interval maintaining protrusions.

4 is a vertical cross-sectional view of a steam injection slit nozzle according to another embodiment of the present invention.

Referring to FIG. 4, the steam injection slit nozzle may further include a liquid curtain forming part 400 positioned outside the body, in the advancing direction of the slit ejection opening, at the front end and the rear end of the slit ejection opening to form a liquid curtain .

The liquid curtain forming portion 400 includes a liquid inflow pipe 402 for filling the liquid 4 to form the liquid curtain 405, a curtain-forming first unit 422 for forming the liquid curtain 405, And a second unit 424. The liquid 4 flows into the space formed by the curtain-forming first unit 422 and the curtain-forming second unit 424 through the liquid inflow pipe 402 and flows between the curtain-forming units 422 and 424 And is injected into a curtain-shaped thin film through a thin gap formed at the bottom. Here, the thin film is referred to as a liquid curtain 405.

The liquid curtain 405 can prevent the steam containing the contaminant from being scattered to the object that has already been cleaned or the object to be cleaned after the cleaning is performed.

In addition, the liquid curtain 405, which has reached the object to be cleaned and has formed a water film, floats the contaminants separated from the object on the water film, and the contaminant is removed together with the water film It is eliminated.

In addition, the liquid 4 that is introduced through the liquid inlet pipe 402 may include at least one of pure water or ozonated water. The pure water may include at least one of deionized water (DIW) not containing ions or ultrapure water (UPW) containing no impurities other than ions and ions.

Particularly, when ozone water is introduced as liquid through the liquid inlet pipe 402, the injected liquid curtain 405 contains oxygen radicals and hydroxyl radicals, and the radicals chemically react with the contaminants, It is possible to provide a chemical cleaning effect that separates contaminants from the object.

5 is a vertical cross-sectional view of a steam injection slit nozzle according to an embodiment of the present invention.

Hereinafter, the steam cleaning process through the steam injection slit nozzle will be described in detail.

Referring to FIG. 5, the steam injection slit nozzle includes a body 500 having a first space 508 and a second space 509, which are separated from each other and separated from each other, A gas inflow pipe 506 which blows the gas 522 into the first space 508, a steam inflow pipe 504 which receives the steam 520 into the second space 509, A mixed fluid (liquid mixture) in which the liquid inlet pipe 502, the gas 522, the steam 520, and the liquid 510 that mix the liquid 510 into the lower part of the space part 508 and the second space part 509 a mixed region A in which mixed-phase fluid is formed as an injection fluid 530, a slit injection hole 535 for injecting the injection fluid 530 to an object to be cleaned, and an injection fluid 530 are injected into the slit injection hole 535, As shown in FIG.

At this time, the width of the vertical cross section of the mixed region A may include a section that is narrower than the sum of the widths of the vertical sections of the first space 508 and the second space 509.

The gas 522 may include at least one or more of clean air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam 520, It may be ozonated water. At this time, the pure water may include at least one of deionized water (DIW) not containing ions and ultrapure water (UPW) containing no impurities other than ions and ions.

Particularly, when ozone water is introduced as the liquid 510, it is possible to perform cleaning more effectively than when pure water is used as the liquid 510.

The steam injection slit nozzle is configured to inject the gas 522 from the outside of the body 500 into the first space 508 through the gas inlet pipe 506 and the second space 509 through the steam inlet pipe 504, The steam 520 may be introduced. Each of the introduced gas 522 and the steam 520 is supplied to the mixed region of the first and second spaces 508 and 509 through the first and second spaces 508 and 509 A). At the same time, the liquid 510 can be introduced into the lower portion of the first space portion 508 and the second space portion 509 through the liquid inlet pipe 502.

The gas 522 and steam 520 transferred from the first space portion 508 and the second space portion 509 and the liquid 510 taken in from the liquid inlet tube 502 in the mixed region A Mixed fluid may be formed as the injecting fluid 530.

Thereafter, the steam injection slit nozzle can inject the mixed fluid formed in the mixed region A as a jetting fluid 530 through the jetting pipe 525 and the slit jetting port 535 into the object to be cleaned. The injected jetting fluid 530 can provide a cleaning effect that separates and removes contaminants from the object to be cleaned. The cleaning effect will be described in detail with reference to FIG.

FIG. 6 is an enlarged view of a steam, a gas, and a liquid mixed region of a steam injection slit nozzle according to another embodiment of the present invention.

6, a mixed fluid may be formed as the jetting fluid 630 by mixing the liquid 610, the gas 622, and the steam 620 in the mixing section 640 before reaching the jetting tube. At this time, the liquid 610 may be introduced into the mixing section 640 from the liquid inlet 603 through the liquid inlet tube. Here, the liquid inlet 603 may have a passage narrower than the liquid inlet tube.

5, the width of the cross section in the vertical direction of the mixed region A may include a section that is narrower than the sum of the widths of the first and second spatial sections in the vertical direction. In addition, each of the first space portion and the second space portion may include a section where the width becomes narrow in a direction toward the spray tube. As a result, the gas 622 and the steam 620 can be introduced into the mixing section 640 through the lower portion of each of the first space portion and the second space portion which are narrowed in width.

As a result, the liquid 610, the gas 622, and the steam 620, respectively, are increased in speed due to the venturi effect than the speed of movement in each of the liquid inlet pipe, the first space portion and the second space portion And into the mixing section 640 at a wide spray angle. Due to this, each of the liquid 610, the gas 622, and the steam 620 may be evenly scattered in the mixing section 640. Further, the liquid 610 can be misted by the collision of the gas 612 and the steam 620 with the gas 612 at an increased speed. As a result, the size of the particles contained in the liquid is generally reduced, and the surface area of the liquid can be increased. For each of the above reasons, each of the liquid 610, the gas 622, and the steam 620 may be mixed more effectively to form a mixed fluid as the jetting fluid 630.

The cleaning effect of the steam jet slit nozzle to remove and remove contaminants is as follows. Specifically, there may be a chemical cleaning effect and a physical cleaning effect.

Hereinafter, the chemical cleaning effect will be described in detail.

First, as described above, the liquid 610, the gas 622, and the steam 620 may be introduced into the mixing section 640, spread and scatter, respectively, and form a mixed fluid as the jetting fluid 630 . In this process, the molecules of the liquid 610, the molecules of the gas 622, and the molecules of the steam 620 actively heat-exchange and phase change and emit latent heat whereby the sonic, Vibration may occur. The water molecules (H ₂ O) of the steam 620 and the liquid 610 can receive energy from the sonic vibration and dissociate into hydrogen ions (H ⁺ ) and hydroxide atom ions (OH ^- ).

Next, an injection fluid 630 containing hydrogen ions and hydroxide atom ions may be injected into the object to be cleaned through the injection pipe and the slit injection port. Hydrogen ions and hydroxide atomic ions contained in the mixed fluid as the injected jetting fluid 630 are combined with contaminants present on the surface of the object to be cleaned, and contaminants can be separated from the object.

Thereafter, the separated contaminants can be removed from the target by the pressure of the jetting fluid 630 injected from the slit jetting port.

Hereinafter, the physical cleaning process will be described in detail.

First, as in the chemical cleaning effect, the steam 620 and the water molecule (H ₂ O) of the liquid can receive energy from the sonic vibration and dissociate into hydrogen ions (H ⁺ ) and hydroxyl atom ions (OH ^- ). The process up to this point is the same as the above description and is omitted because it is duplicated. The dissociated ions then release energy to the environment and can recombine back into water molecules.

Next, the mixed fluid for releasing energy to the periphery may be injected as a jetting fluid 630 through a jetting tube and a slit jetting opening into an object to be cleaned. Then, the energy emitted from the sprayed fluid 630 is absorbed by the contaminants existing on the surface of the object to be cleaned, and the contaminants can be separated from the object.

Thereafter, the separated contaminants can be removed from the target by the pressure of the jetting fluid 630 injected from the slit jetting port.

The steam injection slit nozzle according to the present invention has three advantages when compared to other steam injection slit nozzles.

According to at least one of the embodiments of the present invention, the adjustment unit for adjusting the slit interval of the slit injection hole does not penetrate the inside of the body through which the steam passes, thereby facilitating post-maintenance and ensuring a flow path for steam.

In addition, according to at least one embodiment of the present invention, the adjusting unit for adjusting the slit interval of the slit jetting port avoids direct contact with steam, thereby eliminating the influence of vibration and heat energy of water molecules contained in steam , Whereby the slit interval can be kept constant by preventing deformation by steam.

In addition, according to at least one of the embodiments of the present invention, the adjusting unit for adjusting the slit interval of the slit jetting port eliminates the bolt passing through the inside of the body, which is the path through which the steam passes, It is possible to prevent leakage to the outside of the body.

In addition, according to at least one of the embodiments of the present invention, the adjusting part adjusts the slit interval at the slit jetting opening, which is the final stage of the jetting tube, thereby securing the oil working margin of the jetting fluid.

In addition, according to at least one embodiment of the present invention, since adjustment of only the bolt and the nut is required in adjusting the slit interval at the slit nozzle, accessibility is easy and the field response can be smooth.

The foregoing detailed description should not be construed in any way as being restrictive and should be considered illustrative. The scope of the present invention should be determined by rational interpretation of the appended claims, and all changes within the scope of equivalents of the present invention are included in the scope of the present invention.

4, 10, 510, 610: liquid
20, 520, 620: Steam
22, 522, 622:
30, 530, 630: injection fluid
101: inside of the body
102: protruding portion
110:
112: head of bolt
114: Screws of bolts
116: Nuts
120:
202, 502: liquid inlet pipe
204, 504: steam inlet pipe
206, 506: gas inlet pipe
220, 525:
222, 535: Slit nozzle
400: liquid curtain forming portion
405: Liquid curtain
402: liquid inlet pipe
422: curtain forming first unit
424: Curtain forming second unit
500: Body
508:
509:
603: liquid inlet
640: Mixed section
A: Mixed area

Claims (11)

A body separating the inner space from the outer space;
A steam inlet pipe for introducing steam into the body;
A slit jetting port for spraying the steam linearly onto a target to be cleaned;
At least one adjuster coupled to one side of the body to adjust the slit spacing of the slit ejection orifice without passing through the body;
A gas inflow pipe for blowing gas into the body; And
And a liquid inlet pipe for injecting liquid into the body,
The body,
A first space part and a second space part which are spaces separated from an upper end of the body to a predetermined area of a lower end; And
And a mixed region which is a region provided below the set region at the lower end,
Wherein the gas inlet pipe is connected to the side surface of the first space portion, the steam inlet pipe is connected to the second space floating edge, the liquid inlet pipe is connected to the side of the mixing region,
Wherein the mixed region comprises:
The gas introduced through the first space portion, the steam introduced through the second space portion, and the liquid introduced through the mixed region,
The width of the cross section in the vertical direction of the mixed region,
The width of the first space portion and the width of the vertical direction section of the second space portion,
Wherein each of the first space portion and the second space portion includes:
And a section where the width is narrowed in a direction toward the slit spray tube.
The method according to claim 1,
Wherein each of the at least one adjuster comprises:
A first support positioned adjacent to the slit nozzle at one side of the outside of the body;
A second support portion disposed on one side of the outside of the body and spaced apart from an upper portion of the first support portion;
A bolt passing through the second support portion and having an end supported by the first support portion; And
And a nut coupled to the bolt, the nut abutting the second support portion.
The method according to claim 1,
Further comprising a gas inlet pipe for injecting gas into the body, wherein at least one of the steam and the gas is injected through the slit injection port.
The method of claim 3,
The gas,
Wherein the steam injection slit nozzle comprises at least one of clean air (CDA), nitrogen (N ₂ ), oxygen (O ₂ ), and steam.
The method according to claim 1,
Further comprising a liquid inlet pipe for injecting liquid into the body, wherein at least one of the steam and the liquid is injected through the slit injection port.
6. The method of claim 5,
The liquid,
And at least one of pure water and ozonated water.
The method according to claim 6,
The pure water,
Wherein at least one of deionized water (DIW) and ultrapure water (UPW) is contained in the steam injection slit nozzle.
The method according to claim 1,
The body,
And a spacing-maintaining protrusion for preventing a slit interval narrowing below a certain length.
The method according to claim 1,
Further comprising a liquid curtain forming part located outside the body and located at a front end and a rear end of the slit ejection opening in the advancing direction of the slit ejection opening to form a liquid curtain.
10. The method of claim 9,
The liquid curtain,
And at least one of pure water and ozonated water.
11. The method of claim 10,
The pure water,
Wherein at least one of deionized water (DIW) and ultrapure water (UPW) is contained in the steam injection slit nozzle.

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